Vacom BARION atm II Manual

Combination vacuum meter for measurements from atmosphere to uhv

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atm II
BARION
®
Manual
Combination vacuum meter
for measurements from atmosphere to UHV
www.vacom-vacuum.com

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Summary of Contents for Vacom BARION atm II

  • Page 1 II BARION ® Manual Combination vacuum meter for measurements from atmosphere to UHV www.vacom-vacuum.com...
  • Page 2 Inhaltsverzeichnis BARION atm II Manual 10 / 2016 ®...
  • Page 3 VACOM combination vacuum meter ® for measurements from atmosphere to UHV BARION atm II ® Contact: support@vacom.de 07 / 2016 BARION atm II Manual ® 01 / 2014-1 COLDION Bedienungsanleitung ®...
  • Page 4: Table Of Contents

    Contents Table of contents ................4 General information ..............6 Product description ..................6 Storage ......................6 General regulations and warranty ..............6 CE-derclaration of conformity ................6 Safety .................... 7 Observance of the operating instructions ............7 Basic safety information ................... 7 Signs and symbols ...................
  • Page 5 Calculation of the input values for specifying the setpoint ....... 19 A.3.6 Meaning of the status bit ................20 A.3.7 Meaning of the control bit ................21 Legally binding Declaration of Contamination ..........21 VACOM Protocol (quick introduction) ............22 ® A. 5.1 Setups ......................22 A. 5.2 Entering instructions ..................
  • Page 6: General Information

    General information Product description The wide-range vacuum gauge BARION atm II allows a pressure measurement from 5 x 10 ®  mbar to atmosphere. This is made possible by the combination of a heat loss vacuum gauge, also known as Pirani, and a Bayard-Alpert vacuum meter. Storage The sensor and the control electronics must be stored in a dry and dust-free environment.
  • Page 7: Safety

    With regard to installation, maintenance and repair measures, observe the specified protection provisions. Voltages exceeding 30 V AC or 60 V AC are considered to be hazardous live accor- ding to EN 61010. Replacing the damaged component must be performed at VACOM. Unauthorised interference will void any warranty claims.
  • Page 8: Getting Started

    3.1.1 Check for damage Before unpacking the product, check the package for visual damage. If the package and thus also the operating device is damaged, contact us at support@vacom.de. 3.1.2 Scope of delivery The scope of delivery includes one BARION atm II, consisting of control electronics and sen- ®...
  • Page 9: Acclimatisation

    Degas active Yellow, lighting Internal reboot Do not cancel in this state! If this state lasts longer than one minute, please contact your customer adviser at VACOM. green/red, flashing Defective filaments Defective Pirani or control electronics red, flashing d (setpoint)
  • Page 10: Connection And Installation

    Connection and installation The sensor is conventionally assembled to a KF25 flange. In order to guarantee a clean vacuum and thus an optimum pressure measurement, we recommend the use of gloves. If the sensor is connected, it can be connected to a PC via a RS232 cable. The BAA adapter cable (not included in the scope of delivery, see Annex A.2) can be used for the connection to a VMG read or an MVC3-A.
  • Page 11: General Information

    Operation Any operation is realised via a connection to the PC or to the display (a VMG read or an MVC3-A). The communication takes place regularly via the VACOM protocol; however, the ATMION ® protocol is supported as well. A more detailed description of these two protocols can be found in the Annex.
  • Page 12: Operation

    Operation Control by the way of +24 V Steuersignalen Elementary control signals can be transmitted to BARION atm II by wiring of the inputs Control ® 1 (RxD) and Control 2 (TxD) with +24 V. Control 1 (0 V) Control 2 (0 V) Normal operation Control 1 (+24 V) Control 2 (0 V)
  • Page 13: Maintenance

    ® current firmware versions and a programme for installing the firmware can be downloaded from our website at http://www.vacom.de/downloads/software. In case of special requests, such as older or special firmware versions, please contact your customer adviser or inform us. Regarding the update procedure, proceed as follows: 1.
  • Page 14: Troubleshooting

    Reset sensor again to too low or a heavily varying factory-set sensitivity values incorrectly set pressure is displayed In case of doubts or other occurring problems, please contact our support at support@vacom.de. BARION atm II Manual 10 / 2016 ®...
  • Page 15: Return / Disposal

    In case of returning the sensor to the VACOM Vakuum Komponenten & Messtechnik GmbH, a legally binding declaration on the contamination of the product must be completed and signed by a competent person.
  • Page 16: A Annex

    Annex Technical data The BARION atm II is a wide-range vacuum meter consisting of a hot cathode and a heat loss ® vacuum meter according to the Pirani principle. With this device, a failure-free process control from atmosphere up to the UHV regime is possible. By a high variety of interfaces, an easy system integration is guaranteed.
  • Page 17: Accessories

    Please refer to the corresponding manuals for information on the VACOM protocol and the fieldbus systems; here, details of the ATMION protocol are presented. A.3.1 ATMION protocol As an alternative to the VACOM protocol, the ATMION protocol can also be used for interac- ting with the BARION  atm. (VACOM Protocol see chapter 5.4) ®...
  • Page 18: Port Settings

    Annex A.3.2 Port settings The following settings are provided for the RS232 communication: 19200 Baud rate Data bits Stop bit None Parity Protocol None A.3.3 Command set The general format of the commands is as follows: <Command><Command parameter><CR> Command Function Reading the current pressure value.
  • Page 19: Pressure Output Via Rv

    Annex A.3.4 Pressure output via RV As shown in the table, the current pressure value can be read out via ”RV<CR>”. The response string has the following form: <Mode>_<Pressure> The pressure has thereby the form ”0.00E+/-00”. The different modes are explained in the fol- lowing table: Mode Description...
  • Page 20: Meaning Of The Status Bit

    Annex A.3.6 Meaning of the status bits Status bits can be read out via the command ”RS<CR>”. The response is a four-digit hexade- cimal number and stands for 16 bits. The individual bits stand for various status information. The 16 bits are divided into four sections, which can, in each case, be described by a hexade- cimal number.
  • Page 21: Meaning Of The Control Bit

    It is obvious that the command ”SC 0049<CR>” starts a degas process with automatically selected filaments and automatically selected measuring mode. Legally binding Declaration of Contamination The legally binding Declaration of Contamination is provided for download at www.vacom.de. 07 / 2016 BARION atm II Manual ®...
  • Page 22: Vacom ® Protocol (Quick Introduction)

    A.5.1 Setups The VACOM device is always the client. It will only reply, when it is asked by the master (as a rule the PC). The connection between client and master takes place by means of serial interfaces (RS232, RS422 oder RS485).
  • Page 23: 5.2 Entering Instructions

    Annex A.5.2 Entering commands (for 1:1 connections 1 master & 1 client) Important and often used functions of the VACOM devices can be outputted directly as a com- mand via serial interface. Example A5 50 00 00 01 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00...
  • Page 24: 5.2.1 For All Devices Valide Commands

    Annex A.5.2.1 Valide commands for all devices (for 1:1 connections 1 master & 1 client)) 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 A5 50 00 00 01 00 69 EF Fixed value request serial no transferred parameters Checksum...
  • Page 25: 5.2.2 Instructions For Device Class Of Pressure Gauges

    Annex A.5.2.2 Commands for the device class of pressure gauges (for 1:1 connections 1 master & 1 client) 05 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 A5 50 00 00 20 10 57 3D Fixed value request actual...
  • Page 26: 5.2.3 Instructions For Device Class Of Ion Getter Pumps (Igp)

    Annex A.5.2.3 Commands for the device class of the ion getter pumps (IGP) (for 1:1 connections 1 master & 1 client) 12 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 A5 50 00 00 20 30 AB 7B Fixed value...
  • Page 27 Annex transferred Fixed value Command and subcommand Checksum parameters request setpoint threshold Number of the Set point No.: 1 Antwort: lower and upper 22 04 setpoint 11 30 switching threshold in A (float (8 bit value) Set point No.: 2 values), number of the set- 51 C1 point (8 bit value)
  • Page 28: 5.2.4 Special Instructions For Gapas

    Annex A.5.2.4 Special commands for GAPAS ® (for 1:1 connections 1 master & 1 client) 0E 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 A5 50 00 00 40 08 2E 61 Fixed value request 60-min-history (mbar) field number 14: Checksum...
  • Page 29: 5.2.5 Special Instructions For Barion ® Atm Ii

    Annex A.5.2.5 Special commands for BARION atm II ® (for 1:1 connections 1 master & 1 client) 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 A5 50 00 00 40 08 7C 3B Fixed value request 60-min-history (mbar) field number 14:...
  • Page 30 Annex transferred Fixed value Command and subcommand Checksum parameters reset to factory values Answer: --- A5 50 00 00 40 F0 69 F4 note: values like lifetimes etc. will not be reset Pirani gauge adjust atmosphere value Answer: --- 41 00 set the current value of 7C 3B the Pirani gauge as the value...
  • Page 31 Annex transferred Fixed value Command and subcommand Checksum parameters hot cathode start degas Answer: --- note: start of a degas pro- cess, if the hot cathode is still 42 01 DD EF running and the maximum pressure for starting the de- gas is falling below get filament selection Answer: information which...
  • Page 32: 5.2.6 Control By The Way Of +24 V Control Signals

    Annex transferred Fixed value Command and subcommand Checksum parameters set sensitivity filament 2 Sensitivity of fila- Answer: actuating value 42 23 ment 2 in 1 / mbar (float value) (float value) get factory set sensitivity filament 1 42 28 Answer: adjusted sensitivity of 12 77 filament 1 in 1 / mbar (float value)
  • Page 33: Notes

    Annex 07 / 2016 BARION atm II Manual ®...
  • Page 34 Annex BARION atm II Manual 10 / 2016 ®...
  • Page 35 Annex 07 / 2016 BARION atm II Manual ®...
  • Page 36 VACOM Vakuum Komponenten & Messtechnik GmbH Gabelsbergerstraße 9 07749 Jena Germany „ „ Tel. +49 3641 4275-0 Fax +49 3641 4275-82 info@vacom.de „ „ www.vacom.de www.vacom-shop.de „...

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