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Versum Materials SCHUMACHER VaporGuard Series Installation, Operation & Maintenance Manual

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Installation / Operation / Maintenance
Absolute Control System
 
 
Manual
VaporGuard®
Manual Part Number: 163315
Edition:
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Versum Materials Confidential 
 
 
 
 
Rev-3
 

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  • Page 1 Installation / Operation / Maintenance Manual           VaporGuard® Absolute Control System Manual Part Number: 163315 Edition: Rev-3 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data   Versum Materials Confidential ...
  • Page 2 Versum Materials, Inc. The information and data should be available only to those with a need to know. Versum Materials, Inc. makes no representation that the information and data is appropriate for the recipient, and each recipient needs to independently evaluate the appropriateness of the information and data for its use.
  • Page 3 Versum Materials product. This warranty shall not apply to, and Versum Materials shall not be responsible for, any loss arising in connection with the purchase or use of any Versum Materials product which...
  • Page 4 Chapter 9 – POCl Safe Handling and PPE Matrix Rev-0 MNL000427.doc  Initial Release _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page C - 4...

  • Page 5: Table Of Contents

    Chapter 4 System Safety Hazardous Location Safe Operation Requirements Safety Labels Alarm Interlocks 4-12 _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page C - 5...
  • Page 6 5.5.3 Temperature Set Point Adjustment 5-17 5.5.4 Level Check – Quartz Bubbler 5-17 _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page C - 6...
  • Page 7 5-32 5.7.9 PID Settings 5-32 5.7.10 Relay Manual Control 5-33 Alarm Definitions 5-34 _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page C - 7...
  • Page 8 Equipment Required for Calibration of VaporGuard® Circuit 7.2.2 Temperature Calibration of RTD Circuit _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page C - 8...
  • Page 9 Safe Handling and PPE Matrix       Chemical Handling Matrix Definitions Secondary Containment _______________________________________________________________________________________________________________ MNL000417.doc Revision 3 04/16/201904/16/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Versum Materials Confidential  Page C - 9...

  • Page 10: Introduction To The Manual

    VaporGuard® Stainless Steel Source Configuration Chapter 9 POCL3 Safe Handling and PPE Matrix Appendix A VaporGuard® Troubleshooting Guide MNL000418.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1  ...

  • Page 11: Emergency Response - 24 Hour Service

    There are three (3) types of notes used in this manual. They are CAUTION, WARNING, and NOTE. For purposes of this manual, they are defined as: MNL000418.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2  ...
  • Page 12 Introduction             CAUTION        VORSICHT: Dieses CAUTION: This is an example ATTENTION: Voici un VORSICHTS-Gebot dient als of a CAUTION. A CAUTION exemple d’un ATTENTION à Beispiel. Ein VORSICHTS- suivre. Un ATTENTION avertit Gebot weist den Leser darauf notifies the reader that a le lecteur qu’un procédé...

  • Page 13: Abbreviations

    Introduction     NOTE    This is an example of a NOTE. A NOTE notifies the reader of an item th at warrants special attention.       I.3.2 Abbreviations    Amperes Alternating Current Ampere Interrupt Capacity Cubic Feet per Minute Error Direct Current Direct Digital Controller (Tool IO Interface)
  • Page 14 Introduction   Part Number POCl3 Phosphorus Oxychloride Personal Protective Equipment Psia pounds per square inch, absolute Psig pounds per square inch, gauge  ...

  • Page 15: Approved Chemicals

    Note: For additional chemical use please consult with your local Versum Materials, Inc. representative. _______________________________________________________________________________________________________________ MNL000418.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...

  • Page 16: Delivery, Unpacking, And Inspection

    Versum Materials, Inc..               _______________________________________________________________________________________________________________ MNL000419.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...

  • Page 17: Inspection

                                _______________________________________________________________________________________________________________ MNL000419.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...

  • Page 18: System Components And Specifications

                              MNL000420.doc Revision 1 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1   Versum Materials Confidential ...

  • Page 19: Equipment And Features

    Actual maximum temperature is molecule and application dependent. In most cases, 80- 90C is appropriate.   MNL000420.doc Revision 1 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2   Versum Materials Confidential ...
  • Page 20   MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3   Versum Materials Confidential ...

  • Page 21: Features

    Latched alarms on front display for easy troubleshooting/diagnostics.    Audible alarm (92 dBA max.) with configurable mute time. MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4   Versum Materials Confidential ...
  • Page 22    A liquid level viewing window with backlight in Source Cup Assembly. MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5   Versum Materials Confidential ...
  • Page 23 Power Supply Module to a separate AC to DC power supply sub-assembly. MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6   Versum Materials Confidential ...

  • Page 24: Physical Description

    Set point +10 °C to 115 °C, depending upon model     NOTE: The Space Requirements are described in Chapter 6. MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7   Versum Materials Confidential ...
  • Page 25 Chapter - 2     Figure 2‐1  VaporGuard® System (Model VG600)                  MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8   Versum Materials Confidential ...

  • Page 26: Source Cup Assembly

    The front panel controls consist of a Start/Stop switch and a keypad/LCD interface. The front panel controls are further described in Chapter 5. MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9   Versum Materials Confidential ...

  • Page 27: Power Supply Module

          Figure 2‐2  VaporGuard® Power Supply Module    Power Supply Module, VG300   _______________________________________________________________________________________________________________ MNL000420.doc Revision 11 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Versum Materials Confidential  Confidential and Proprietary Data Page - 10...
  • Page 28                         _______________________________________________________________________________________________________________ MNL000420.doc Revision 1 1 04/08/2019 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Versum Materials Confidential  Page - 11...

  • Page 29: Vaporguard® Absolute Control System For Use With Trans-Lc

    The LED on-time is adjustable via the user interface in increments of seconds up to MNL000421.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1  ...
  • Page 30 Trans-LC™.             WARNING      MNL000421.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2  ...
  • Page 31 Anlage unter Strom equipment is energized. débranchés quand l'équipement steht. est sous tension. MNL000421.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3  ...
  • Page 32 If you require additional assistance, please call Versum Materials, Inc. Equipment Technical Services at 1-866-624-767 _______________________________________________________________________________________________________________ MNL000421.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...

  • Page 33: System Safety

    D; Hazardous Locations and Non-Hazardous Locations only.                   MNL000422.doc Revision 1 Page 4 - 1 09/06/2017 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...
  • Page 34 The area must be known to be non-hazardous before servicing/replacing the VaporGuard® and before installing or removing I/O wiring. MNL000422.doc Revision 1 Page 4 - 2 09/06/2017 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data...

  • Page 35: Safety Labels

    “Caution” describes a potentially hazardous situation which if not avoided could result in minor or moderate injury to personnel or equipment.   NOTE:  Do not block or cover any safety labels from view.    MNL000422.doc Revision 1 09/06/2017Page 4 -3 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 36   Figure 4-1 This label in Fig. 4‐1 informs the user of the hazards associated with the use of this equipment using  Trans‐LC™, and the consequences of not adhering to the warning. Trans‐LC™ is a flammable, corrosive  and toxic chemical and should only be handled by trained personnel. The user is instructed to review the  manual prior to working with this equipment.    MNL000422.doc Revision 1 09/06/2017Page 4 -4 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 37       MNL000422.doc Revision 1 09/06/2017Page 4 -5 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 38 If the unit needs repair or maintenance, the user should contact the factory for service/repair.     Figure 4‐3      MNL000422.doc Revision 1 09/06/2017Page 4 -6 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 39 If the VaporGuard® needs repair or maintenance, the user should contact the factory for service/repair.     Figure 4‐4    MNL000422.doc Revision 1 09/06/2017Page 4 -7 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 40 Models VG600NHT and VG600WHT use Figure 4-6 with the T4 rating.   Figure 4‐5    Figure 4‐6 MNL000422.doc Revision 1 09/06/2017Page 4 -8 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 41 The Hot Surface Label in figure 4-8 is displayed on the top side of the Source Cup Assembly for high temp models.     Figure 4‐8        MNL000422.doc Revision 1 Page 4 - 9 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 42 Cup Assembly and on the lid side of the Power Supply Module for RoHS VaporGuard® models.     Figure 4‐9  MNL000422.doc Revision 1 Page 4 - 10 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 43 VG600WHT use Figure 4-11 with the T4 rating.         Figure 4‐10      Figure 4‐11    MNL000422.doc Revision 1 Page 4 - 11 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...

  • Page 44: Alarm Interlocks

    Alarm interlocked Temp Low1 Alarm enabled 2ºC interlocked Temp Low2 Alarm enabled 5ºC interlocked MNL000422.doc Revision 1 Page 4 - 12 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 45   Note:  For RTD Open condition; *yes is with software version 1.33  or  **no is with  software version 1.32 or prior.                      MNL000422.doc Revision 1 Page 4 - 13 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 46 Heater/cooler circuit is installed at the bottom disabled. of the Source Cup. MNL000422.doc Revision 1 Page 4 - 14 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...

  • Page 47: Hazardous Location Installation Requirements

    The VaporGuard® offers an input to remotely shut off the high energy components to the Source Cup Assembly.   MNL000422.doc Revision 1 Page 4 - 15 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...
  • Page 48       Figure 4.12  Power Supply Module, J5 DDC Cable Connector      MNL000422.doc Revision 1 Page 4 - 16 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data  ...

  • Page 49: Chemical Spill Cleanup

    VaporGuard® proceed to section 4.7 for decontamination.     _______________________________________________________________________________________________________________ MNL000422.doc Revision 1 09/06/2017 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 4 - 17...

  • Page 50: Decontamination Procedure

    However, it is recommended to perform an operational check (ref. section 5.5) on the system. _______________________________________________________________________________________________________________ MNL000422.doc Revision 1 09/06/2017 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page 4 - 18...

  • Page 51: System Operation

    The system is designed in two separate components, the Power Supply Module and the Source Cup Assembly. The heart of each module is their respective microprocessors. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1    ...
  • Page 52           Source Cup Assembly   Power Supply   Module MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2    ...

  • Page 53: Power Supply Module Overview

    Interface to Remote Display Module    Monitors DC power quality    Remote LCD/keypad interface   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 54                               MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...

  • Page 55: Source Cup Assembly Overview

       Enabling of Remote Display Module    Enabling remote analog set point control MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...

  • Page 56: Source Cup Assembly, Detailed Description

        VG600W Front View VG600N Front View       VAPORGUARD® CONTROLLER   **SCHUMACHER** MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...

  • Page 57: Backlight For Sight Glass

                                  MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 58 Figure 5‐3  START / STOP Power Switch (Model VG600)    MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...

  • Page 59: Liquid Level Alarm - Quartz Bubbler

    5-4C to monitor the presence of liquid inside the bubbler.                           MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 60 Figure 5‐4A  Source Cup Assembly with Level Detect PCAs    MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 61                               MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 62 Figure 5-4C Level Line of Sight Transmit PCA Line of sight Receiver PCA MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...
  • Page 63 The percent (%) readout based on bubbler chemical levels are shown on Table 5.1 and illustrated in figure 5.4B. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...

  • Page 64: Liquid Level Alarm - Stainless Steel Source Container

    Refer to Chapter 8, VaporGuard® Stainless Steel Source Configuration for detailed description of this configuration.   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...

  • Page 65: No Liquid Level

      NOTE: Required when using Versum Materials, Inc. S.S. containers with quartz optical level sensors. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...

  • Page 66: Temperature Probe

    UL certification (UL991) for use as safety interlocks.                   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 67 Figure 5‐5  Temperature Probe Circuit    MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...

  • Page 68: Sidewall Heater

    Source Cup Assembly and an alarm will be generated. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 69   Figure 5‐6  Power Supply Module (Internal View)                      MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 70       Programming Port Interconnect Cable Connector   DDC Cable Connector Remote Display Connector MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...

  • Page 71: Ddc Inputs/Outputs - Temperature/Level And Any Alarm

    10°C. Likewise, an analog input greater than 1.1 VDC for the TransLC™ version will only result in a 22°C set point.         MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...

  • Page 72: Remote Temperature Output

    (J3).                       MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...

  • Page 73: Alarms

    The LCD display provides the capability to interlock the high current power to “ANY” alarm. It was implemented to cover a variety of applications where the user may MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...

  • Page 74: Alarm Enable

      MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 75 être au-dessous de 80% Chemicalie liegen. de la température d'allumage spontané du produit chimique utilisé. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...

  • Page 76: Operating Instructions

    Listen for a short beep to indicate that the probe is installed correctly. Rotate MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...
  • Page 77 MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...

  • Page 78: Calibration Check

    Source Cup Assembly once the set point setting has been changed, otherwise the until will not reach the set point temperature.   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...

  • Page 79: Level Check - Quartz Bubbler

    5 seconds before the display will update to the new level because of the discriminator function block. For the template, reference figure 5.9. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 80 This section describes the keypad operation and navigation through the menus on Liquid Crystal Display (LCD).   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...

  • Page 81: Basic Keypad Features

    Remote Display Module Boot Screen               E M O U M A MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...

  • Page 82: Main Screen

    When the Power Supply Module is applying power to the heater/cooler circuits, the display will read “PWR ON”.   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...

  • Page 83: Alarm Screen

                        M U T     MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...

  • Page 84: Password Screen

    Once the password has been entered, press the green “√” key to validate the correct password. The display will return to the main menu. The password is “1969”. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...
  • Page 85           O G O U   √ C U T MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...

  • Page 86: History Alarm

    √ C U T     5.6.7 Display Screens        √ C U T MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...

  • Page 87: Software Version Screen

    C U T       C O P G H T       MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...

  • Page 88: Date And Time

            √ C U T         C H 4 MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...

  • Page 89: Digital Inputs

      G H I M N O P             MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...

  • Page 90: Fan And Ambient Temperature

          5.6.13 Bar Light          U R N   √   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 40...

  • Page 91: Save Change

                    C H A N G E   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...
  • Page 92           > R M T       N G E MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 93 The remote LCD, when enabled on the local LCD, has a limited control level compared to the local display physically mounted to the Source Cup Assembly.   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...

  • Page 94: Lid Heater (Not Available)

      5.6.18 Level Mode Selection      M O D E   √ C U T   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...

  • Page 95: Product Selection

    Interlocking an individual alarm will result in the removal of power to the heater/cooler circuit. When an alarm is interlocked, it will automatically be enabled in the Alarm MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...

  • Page 96: Alarm Interlock

                √     MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...

  • Page 97: Parameters And Limits

     LCD backlight and contrast control    Change date/time           MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...

  • Page 98: Alarm Mute/Light Bar Time

    Pressing the “√” key will move the cursor to the HIGH2 alarm limit value. Pressing it again will return the cursor back to the HIGH1 alarm limit value. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...

  • Page 99: Level Limit Alarms

    “ANY” ALARM.   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...

  • Page 100: Lcd Display Controls

        N O W       C H A         MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...

  • Page 101: Change Clock

              U R E   √           MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 102 If the Default Setup is executed, all parameters must be reselected again accordingly. Contact Versum Materials, Inc. Technical Service for assistance. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 52...

  • Page 103: Set Up Screens

    Where:   = scale factor for proportional and is shown in text as “Heat Proport” MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 53...
  • Page 104 The integral reset time is in minutes and the range is from 0 to 999.       O O L O R T MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 54...

  • Page 105: Relay Manual Control

    Moving the cursor to the desired replay output, and pressing “√” key will toggle the relay.         MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 55...

  • Page 106: Alarm Definitions

    >199.9°C Ambient T Fail Source Cup Assembly The alarm will trip if the internal Source MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 56...

  • Page 107: Thermal Cutout Configuration

    Source Cup Assembly has a 4-bit dip switch that is configured for 4 different thermal cutouts and enable/disable probe interlock feature.             MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 57...
  • Page 108 ON position by default. This will enable the “Probe Not Installed” hardware interlock alarm circuitry. MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 58...
  • Page 109   MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 59...
  • Page 110   This Page Intentionally Left Blank _______________________________________________________________________________________________________________ MNL000423.doc Revision 01 09/18/2018 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 60  ...

  • Page 111: System Installation

    The VaporGuard® should be securely bolted to a shelf to provide protection during a seismic disturbance.     MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 112       NOTE: The user must consider appropriate ventilation for the specific application. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 113   Figure 6‐1  Source Cup Seismic Mounting Holes Dimensions, inches [mm]    MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 114 There are no provisions for mounting the unit with the cover facing up or down. The MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 115                               MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 116 6.1 above. The screw should not penetrate more than ¼” (0.634 cm) into the assembly.       MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...
  • Page 117 Assembly once its shelf mounted. They’re not intended for carrying the Source Cup Assembly with a filled source container. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 118 Also, allow spacing (approx. 6” x 6”) for hand access to the control panel side of the unit. Figures 6-4 and 6-5 show the approximate height of the inlet and outlet valves when the Versum Materials, Inc. quartz bubbler and S.S. container is used.
  • Page 119   Figure 6‐5  Space Requirements, Stainless Steel Source Container, inches [mm]                  MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 120   Figure 6‐6  Source Cup Assembly, wide version, inches [mm]     MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 121 Figure 6‐7  Source Cup Assembly, narrow version, inches [mm]       MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...
  • Page 122 Figure 6‐8  Power Supply Module, inches [mm]           MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 123 Figure 6‐9  Power Supply Module, 300watt, inches [mm]    MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 124   Figure 6‐10  Remote Display Module, inches [mm]  MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...

  • Page 125: Installation

    Neutralleitern in beiden Polaritäten zulassen, empfiehlt die Fa. Versum Materials, Inc. die Installation eines Sicherheitserdungsschalters           MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 12...

  • Page 126: Grounding Requirements

    Continue to perform this until the first ½ inch of the MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 13...

  • Page 127: Vaporguard® Fan Clearance

    Geräterückwand angegeben l’étiquette de panneau arrière ist.       MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 14...

  • Page 128: Cable Installation Procedure

    Install the Interconnect Cable to J9 on Source Cup Assembly and to J4 on Power Supply Module.   Connect DDC Cable to J5 on Power Supply Module. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 15...

  • Page 129: Tool Interface Connection

    6-12 and the Spare Parts List in chapter 7.       Figure 6‐11  Model 600 Power Supply Module Connecter Designations      MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 16...
  • Page 130   Figure 6‐12  Optional Interconnect Split Cable, PN 184466        MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 17...
  • Page 131 JTAG PORT2 Comm port pin JTAG PORT3 Comm port pin JTAG PORT4 Comm port pin MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 18...
  • Page 132                               MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 19...
  • Page 133 Processor reset pin (inverted logic)     *Currently J8, (MFC feature) is not implemented into the VaporGuard® design MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 20...
  • Page 134 * are downward compatible with the legacy ATCS15 temp controller.                         MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 21...
  • Page 135 Figure 6‐13  ATCS15 DDC Interface Shielded Cable Assembly and pin out    MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 22...

  • Page 136: Description Of Vaporguard® Alarms

    (0-5 VDC equals 0 -100%).   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 23...
  • Page 137 *PIN 10: ANALOG GROUND -This is the signal ground for the analog input and outputs. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 24...
  • Page 138 VaporGuard®. The contact is closed when no alarm condition exists and will open when any alarm occurs.   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 25...
  • Page 139 The contact is closed when no alarm condition exists and will open when Temp High 1 or Temp Low 1 alarm occurs.         MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 26...

  • Page 140: Digital Inputs

    G H I M N O P                 MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 27...
  • Page 141   K - Bar Light – Turns bar light in Source Cup Assembly On/Off   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 28...
  • Page 142 N - Digital Output 1 – N/A O - Digital Output 2 – N/A P - Digital Output 3 – N/A MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 29...
  • Page 143   VG600W Top View  LCD Display Side                                                                                                                                                                                      Magnet      MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 30...
  • Page 144         Magne   VG600N Top View  MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 31...
  • Page 145 RTD Feedback output for sensing circuit GNDD Signal ground Thermistor Overtemp interlock uses thermistor to detect temp MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 32...
  • Page 146 No connection Chassis gnd Earth ground     *Used only in VG600 for SS applications MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 33...
  • Page 147 Source Cup Assembly. Damage to the internal electronics in either condition may result.             MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 34...

  • Page 148: Ac Power Connections

      The circuit into which the VaporGuard® is connected should be designed for EMO shutdown. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 35...

  • Page 149: De-Energizing Procedure

    Model 600 Power Supply Module AC Power Connection   AC Power Supply Connection P1             MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 36...
  • Page 150 Fa. Versum l’installation d’une prise de Materials, Inc. die terre de sécurité. Installation eines Sicherheitserdungsschalters. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 37...

  • Page 151: 6.6    Bubbler Installation

    CV and maximum inlet pressure setting to the regulators.       MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 38...
  • Page 152 Power Supply Module turned off prior to installing a bubbler. Care must be taken that the Bubbler is kept in a vertical position. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 39...
  • Page 153     Before installing the Bubbler, fill the thermowell with 1/2 in. of Versum Materials, Inc. Thermowell Oil, P/N 1600-0001. Versum Materials, Inc. recommends and supplies thermowell oil. Failure to use proper oil may result in unstable temperature control and possible alarm conditions.
  • Page 154 Flüssigkeiten führt zu entraînera l'endommagement nicht wieder gutzumachenden irréparable de la sonde de Schäden am température. Temperaturfühler. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 41...

  • Page 155: Installing Bubbler Into Source Cup Assembly

    Überdruckregel- spécifique à l'application et Einrichtungen erwägen de relève de l'excès de pression MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 42...
  • Page 156       Turn on power to the VaporGuard® SW1 on Power Supply Module.   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 43...
  • Page 157 In addition, the alarm still active will display on the second row of the LCD interface.       MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 44...
  • Page 158                             Magnet MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 45...

  • Page 159: Removing Bubbler From Source Cup Assembly

    This document is intended for the safe installation and removal of Versum Materials, Inc. quartz bubblers   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 46...

  • Page 160: Decommissioning Procedure

    Source Cup Assembly.   Disconnect all cables and AC power cord from the Power Supply Module.   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 47...

  • Page 161: Vaporguard® Programming

    A steady red light would indicate that the download had failed.   Turn OFF VaporGuard® and remove programmer.   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 48...
  • Page 162 **Note, programmers do not come with software installed. Must specify at time of order which version of software required. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 49...
  • Page 163     G –REM_TEMP_ ALM_ Gray (Red/Blk) Temp High 2/Low 2 Alarm Not available   MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 50...
  • Page 164 >25% LEL. And the Start rocker switch is depressed on the front panel.   ***Note, cable wire color matches DDC cable drawing sw004673. MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 51...
  • Page 165       This Page Intentionally Left Blank     VaporGuard® Installation and Operation Manual, 163315 E 6-39...
  • Page 166 Figure 6‐19  System Schematics     VaporGuard® Installation and Operation Manual, 163315 E 6-39...
  • Page 167                             _______________________________________________________________________________________________________________ MNL000424.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 54...

  • Page 168: Calibration

    Any tampering with the calibration potentiometers will void the calibration of the RTD circuit. MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...

  • Page 169: Temperature Calibration Procedure

    Measure all connectors at pins 6 &7 to insure the PCA is within calibration. Once verified, you may begin testing the equipment.   MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 170   NOTE: The Temperature Calibrator PCA may require validation once a year. This MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 171 The display will prompt the user to press the green “√” to save the settings.   Reinstall probe. MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...

  • Page 172: Analog Output Calibration Procedure

    The value for percent can be adjusted to verify the output voltage measurement. Likewise, the value next to the “T” can be adjusted to verify the MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 173 Adjust the display to read 0º. Verify that the output reading is 0.0 VDC ±0.05. Adjust the offset parameter “OS” as required.   MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...

  • Page 174: Verification Without Calibration

    Check Table 7-1 for corresponding output values for each level.   NOTE: The software has a discrimination routine that keeps the level stable during MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...

  • Page 175: Safety Test

    You will need a digital thermometer with a thermocouple.   MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...

  • Page 176: Maintenance Schedule

    Level Sense Control Check 12 Months Section 5.5.4   (Quartz Bubbler) Safety Test 12 Months Section 7.3 MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...

  • Page 177: Spare Parts List

    Interconnect Cable, 5 meters (optional) 177656 Interconnect Cable, 10 meters (optional) 177657 Interconnect/Split Cable, 3 meters (optional) 184466 _______________________________________________________________________________________________________________ MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...
  • Page 178                             _______________________________________________________________________________________________________________ MNL000425.doc Revision 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 11...

  • Page 179: Chapter 8 Vaporguard® Stainless Steel Source Configuration

    Ultrasonic Level Probe installed. The Ultrasonic Level probe is connect to the VaporGuard® level sense circuit for the S.S. container, refer to figure 8-1. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...
  • Page 180   Figure 8‐1  VaporGuard® with Stainless Steel Source Container Installed      (VG600W Front View)               MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 181     Figure 8-2 Ultrasonic Level Probe (part of S.S. Container)   MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...
  • Page 182 *At 5% Low Chem alarm is displayed on the front panel and the Low Chem output signal is activated to the DDC. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 4...
  • Page 183 The value shown are the analog output 0-5VDC signal (ref J5 Connector) from the VaporGuard® which represent the output of the Ultrasonic Probe. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 5...
  • Page 184   Figure 8‐3  S.S. Source Container with Ultrasonic Level Probe        MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 6...

  • Page 185: Stainless Steel Source Container Installation

    VaporGuard® place dans l’Unité de Source. nicht fallen- oder umkippen Source Cup Assembly. lassen. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 7...
  • Page 186 Remove the cap or plug on the inlet and outlet valve VCR connectors. Use the proper wrench to remove. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 8...
  • Page 187 Dichtung beschädigt chemical. mettre l’intégrité du produit und die Unversehrtheit der chimique. Chemikalie gefährdet wird. MNL000426.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 9...
  • Page 188 S.S. containers.                         _______________________________________________________________________________________________________________ MNL000426.doc Revision 0 0 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 10...

  • Page 189: Chapter 9 Pocl 3 Safe Handling And Ppe Matrix

    PPE is properly maintained and donned correctly.    Emergency Contact, call Versum Materials, Inc. at 610‐481‐4911          _______________________________________________________________________________________________________________ MNL000427.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 1...

  • Page 190: Matrix Definitions

    The qualified materials for secondary containment used for POCl are: _______________________________________________________________________________________________________________ MNL000427.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 2...
  • Page 191 Chapter - _______________________________________________________________________________________________________________ MNL000427.doc Revision 00 08/26/2016 © Versum Materials, Inc. as of the revision and date shown. All rights reserved. Confidential and Proprietary Data Page - 3...

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