Summary of Contents for Leybold vacuum PhoeniXL300
- Page 1 technical handbook GA10.218_1.02 PhoeniXL Leak detector catalog-number PhoeniXL 250000, 251000 PhoeniXL dry 250001, 251001 PhoeniXL Modul 250002...
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Page 2: Table Of Contents
1.3.2 Technical Data ....................11 1.3.2.1Physical Data PhoeniXL300 ..............11 1.3.2.2Electrical Data ..................11 1.3.2.3Other Data ....................12 1.3.2.4Ambient Conditions ................12 1.3.2.5Physical Data PhoeniXL300 dry ..............12 1.3.2.6Electrical Data ..................13 1.3.2.7Other Data ....................13 1.3.2.8Ambient Conditions ................13 1.3.2.9Physical Data PhoeniXL300 Modul ............14 1.3.2.10Electrical Data ..................14 1.3.2.11Other Data ....................14... - Page 3 Verification ......................29 Description and Working Principle ..............31 Introduction ...................... 31 4.1.1 Vacuum System PhoeniXL300 ................. 31 4.1.1.1Vacuum System PhoeniXL300 dry ............32 4.1.1.2Vacuum System PhoeniXL300 Modul ............ 33 4.1.2 Control Panel ....................35 4.1.2.1LC Display ..................... 35 4.1.2.2START Button ..................35 4.1.2.3STOP Button ..................
- Page 4 Content The Screen in Measurement Mode ..............46 5.4.1 Call for Calibration .................... 46 5.4.2 Speaker Volume ....................46 5.4.3 Status Line in the Display ................. 47 5.4.4 Numerical Display Mode ................... 47 5.4.5 Trend Mode ..................... 47 Description of the Menu ................49 Main Menu .......................
- Page 5 Content 6.6.1.4Sniffer factor ..................66 6.6.1.5Machine factor ..................66 6.6.1.6Leak rate internal test leak ..............67 6.6.2 Filter and background ..................67 6.6.2.1Calculate inlet area background ............. 68 6.6.2.2Background suppression ............... 68 6.6.2.3Leak rate filter ..................68 6.6.3 Mass ........................ 69 6.6.4 Interfaces ......................
- Page 6 Content 7.2.2 External Calibration ..................83 Factor of Calibration - Range of Values ............. 85 Error And Warning Messages ..............87 Hints ........................ 87 List of Errors & Warnings .................. 87 Maintenance ....................93 LEYBOLD Service .................... 93 9.1.1 Maintenance Plan ..................... 93 9.1.2 Opening the Phoenix ..................
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Page 7: General Information
General Information General Information We recommend that you carefully read this technical handbook to ensure optimum operating conditions right from the start. This technical handbook contains important informations on the functions, installation, start-up and operation of the PhoeniX. All the informations in this handbook are based for the PhoeniXL leak detector. -
Page 8: Definiton Of Terms
General Information 1.1.4 Definiton of Terms The range of the preamplifier and the vacuum ranges are selected auto- Autoranging matically. The autoranging feature of the PhoeniX covers the entire range or leak rates depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are used for control purposes. -
Page 9: Support From Leybold Service
General Information Support from LEYBOLD Ser- vice Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- tion. -
Page 10: Introduction
General Information Introduction 1.3.1 Purpose The PhoeniX is a helium leak detector. This instrument may be used to detect the location and the size of leaks on objects under test in two diffe- rent ways: • when the test sample has been evacuated first and is sprayed with helium on the outside. -
Page 11: Technical Data
General Information 1.3.2 Technical Data 1.3.2.1 Physical Data PhoeniXL300 Max. inlet pressure 15 mbar Minimum detectable Helium leak rates ≤5×10 • in vacuum mode mbar l/s • in sniffer mode <1×10 mbar l/s Maximum Helium leak rate which can be displayed 0.1 mbar l/s... -
Page 12: 3Other Data
80% (up to 31°C) linear decreasing to 50% at 40°C Max. permissible height above sea level 2000 m (during operation) 1.3.2.5 Physical Data PhoeniXL300 dry Max. inlet pressure 15 mbar Minimum detectable Helium leak rates ≤2×10 • in vacuum mode mbar l/s •... -
Page 13: 6Electrical Data
General Information 1.3.2.6 Electrical Data Power supply 230 V, 50 HZ 115 V, 60 Hz Power consumption 350 VA Type of protection IP40 Power cords (EU, USA, UK) 2.5 m 1.3.2.7 Other Data Valves solenoid Dimensions (L × W × H) in mm 490 x 430 x 315 Weight in kg 35.5... -
Page 14: 9Physical Data Phoenixl300 Modul
General Information 1.3.2.9 Physical Data PhoeniXL300 Modul Max. inlet pressure 15 mbar Minimum detectable Helium leak rates • in vacuum mode – with Scroll pump ≤8×10 mbar l/s ≤5×10 – with oil sealed pump mbar l/s • in sniffer mode <1×10... -
Page 15: 12Ambient Conditions
General Information 1.3.2.12 Ambient Conditions For use within buildings Permissible ambient temperature (during operation)+10 °C … +40 °C Permissible storage temperature 0 °C … +60 °C Max. rel. humidity 80% (up to 31°C) linear decreasing to 50% at 40°C Max. permissible height above sea level 2000 m (during operation) ⏐... -
Page 16: Unpacking
General Information Unpacking Unpack the PhoeniX immediately after delivery, even if it will be installed later on. Examine the shipping container for any external damage. Completely remove the packaging materials. Check the PhoeniX is complete (See Chapter 1.4.1 Supplied Equipment) and carefully examine the PhoeniX visually. -
Page 17: 2Hand Set
General Information Installation: The sniffer line is to be adapted to the KF 25 of the Phoenix with the small flange. Then the plug of the sniffer line is to be connected to the input „Options“ of the Phoenix. Function: The green LED is on when - the Phoenix is ready for use and - the selected trigger level is not exceeded The red LED is on when... - Page 18 General Information ⏐ GA10.218_1.01 - 11/2004...
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Page 19: Installation
Installation Installation Working Location The PhoeniX must not be operated while standing in water or Caution when exposed to drip water. The same applies to all other kinds of liquids. Avoid contact with bases, acids or solvents as well as exposure Attention to extreme climatic conditions. -
Page 20: Connections For The Data Acquisition Systems
Installation 1. Vent 2. Exhaust 3. Gasballast 4. On / Off 5. Serial 6. Control 2 7. Record 8. Control 9. Option 10. Remote Fig. 2 2.2.2 Connections for the Data Acquisition Systems 2.2.2.1 Option (Accessories) The sniffer line SL300 or the partial flow system may be connected to the option port (Please refer to Chapter Fig. -
Page 21: 2Digital Out
Installation 2.2.2.2 Digital Out The following relay outputs are available for further signal processing. The maximum rating for the relay contacts is 60V AC/1A. The contacts are numbered from bottom to top. Assignment PLC in free selectable PLC in free selectable PLC in free selectable 5 to 7 Digital out free selectable, 5 center contact, 6 normally open... -
Page 22: 3Digital In
Installation Open Always open. Close Always close Recorder Strobe Closed in case recorder output is invalid. Only used when record output is set on „leak rate“. 2.2.2.3 Digital In These inputs can be used to control the PhoeniX with a programmable logic control (PLC). -
Page 23: 4Recorder
Installation CAL extern: The Machine starts an external calibration independent from the mode the machine is running in. Signals at these inputs are only accepted if the location of control is set to „PLC“ or „Local and PLC“. Refer to Chapter 6.6.4.1 2.2.2.4 Recorder... -
Page 24: 5Rs232
Installation 2.2.2.5 RS232 This RS232 interface Fig. 2/5 is wired as data communication equipment (DCE) and permits the connection of a personal computer (PC) for moni- toring and data logging. The connection is made through a 9 pin sub-D socket. For more information refer to the Interface Description. Assignment 24 V switchable, default setting 0 GND 24V... -
Page 25: Exhaust
Installation 2.3.2 Exhaust The exhaust Fig. 2/2 flange is located on the side of the PhoeniX. There is a filter mounted in the exhaust that absorbs the oil steams occu- ring during the use of the rotary vane pump. The exhaust filter has to be cleaned when doing the maintenance. -
Page 26: Default Settings
1E-7 mbar l/s Leak rate external test leak (vacuum): 1E-7 mbar l/s Leak rate external test leak (sniffer): 1E-5 mbar l/s Vent delay: 2 seconds Automatic purge (PhoeniXL300 and Modul only) Pressure: mbar Minimum volume: Beep: Maximum evacuation time: 30 minutes... -
Page 27: First Operation Check
• A blind flange 25 KF (if not preassembled at the inlet port). • A helium test leak with a DN 25 KF adapter (optional). • A forevacuum pump (dry or wet version) for use with the PhoeniXL300 Module Description of the Initial Ope-... - Page 28 Operation Check Fig. 3 View PhoeniX Caution Don’t switch the PhoeniX on when ambient temperature is below 10°C. After power on a welcoming picture appears on the screen of the control panel Fig. 4/1, the status information on the speed of the turbo pump, the foreline pressure, the emission and the active filament are given.
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Page 29: Internal Calibration
First Check Pos. Description Pos. Description LC Display Soft Key no. 7 Soft Key no. 1 Soft Key no. 8 Soft Key no. 2 START Button Soft Key no. 3 ZERO Button Soft Key no. 4 STOP Button Soft Key no. 5 MENU Button Soft Key no. - Page 30 Operation Check ⏐ GA10.218_1.01 - 11/2004...
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Page 31: Description And Working Principle
Another operating mode of the Phoenix is the Sniffer mode which can only be used when a sniffer line (See Chapter 1.4.2) is hooked up. 4.1.1 Vacuum System PhoeniXL300 The vacuum diagram below shows the major components inside the Phoenix: Fig. -
Page 32: 1Vacuum System Phoenixl300 Dry
Working Principle Pos. Description Inlet Port Pirani gauge P1 Pirani gauge P2 The mass spectrometer is mainly composed of the ion source, the magnetic separator and the ion collector. Gas molecules getting into the mass spectrometer are ionized by the ion source. -
Page 33: 2Vacuum System Phoenixl300 Modul
4.1.1.2 Vacuum System PhoeniXL300 Modul The PhoeniXL300 Modul has no roughing pump integrated as the other models. Therefore it can be used with an external pump only. This pump can be oil sealed or a dry version with a roughing capacity between 2,5 and 65 m ⏐... - Page 34 Working Principle external pump Fig. 7 vacuum system PhoeniXL Modul Pos. Description MS: Mass Spectrometer, Helium sensor (180° magnetic field mass spectrometer) Turbomolecular Pump (TMP, provides high vacumm conditions in the MS) V1a … V7: Electromagnetic Valves to control the gas flows Fore pressure pump (provides the foreline pressure for the TMP und pumps down the parts under test) Inlet Port...
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Page 35: Control Panel
Working Principle 4.1.2 Control Panel Control Panel Fig. 8 contains a liquid chrystal display (LC Display), the START, STOP, ZERO and MENU buttons and eight Soft Keys for the diffe- rent menus and inputs selections. Fig. 8 Control Panel Pos. Description Pos. -
Page 36: 4Zero Button
Working Principle 4.1.2.4 ZERO Button Pushing the ZERO Button Fig. 8/11 enables the zero mode. When pressing ZERO the currently measured leak rate is taken as a back- ground signal and is subtracted from all further measurements. As a result the displayed leak rate then is in GROSS •... -
Page 37: 5Menu Button
Working Principle Fig. 10 Undo ZERO When you want to see the measurement signal (including underground) please press the ZERO button about 3 seconds. The saved value will be reset to zero. The underground signal will not be suppressed anymore. Please don’t start the ZERO fuction until the leak rate signal is stable. -
Page 38: 7Numerical Entries
Working Principle 4.1.2.7 Numerical Entries If you have opened a menu page where a number can be changed please proceed in the following way: • If you don’t want to change anything, press Soft Key no. 1 Cancel. • The digit that can be changed is displayed inverted. With the arrows → (Soft Key no. -
Page 39: Vacuum Method
In the partial flow mode the test sample is additionally evacuated by an auxiliary pump. Using the optional partial flow pump set offers to the user the following advantages ( not possible for PhoeniXL300 dry): • faster response • entry into the measure mode already at an inlet pressure of 1000 mbar •... -
Page 40: Sniffer Mode
Working Principle Alternatively to a partial flow pump set an external auxiliary pump may also only be connected via a teepeace, however, in such a case the PhoeniX will not be able to make measurements already at an inlet pressure of 1000 mbar. - Page 41 Working Principle ZERO button Scale for the pressure in STOP / VENT button the testsample START button Exponent LED Bargraph display MANUAL LED Underflow display LOCK LED (under range) Acoustic signal quiter Leak rate scale Acoustic signal louder Overflow display (over range) An overview of the controls on the hand unit is given in Fig 5.
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Page 42: Displays On The Hand Unit
Working Principle A constant leak rate reading may be suppressed by pressing the ZERO- ZERO-button button, i.e. a constant helium background within a test sample. This but- ton is only active in the measurement mode. In AUTO mode and ZERO activated the indication limit is set to the high- est sensitivity range, for. - Page 43 Working Principle flow, the upper arrow at the bargraph on the hand unit comes on and in the case of range underflow, the lower arrow at the bargraph on the hand unit comes on. The corresponding exponent is indicated at the tip to the right of the bar- graph display.
- Page 44 Working Principle ⏐ GA10.218_1.01 - 11/2004...
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Page 45: Operation Of The Phoenix
Operation Operation of the Phoenix The Phoenix is switched on by pushing the mains switch (Please refer to Chapter 3.2.1). After about 2 minutes the run-up procedure is finished; the unit is in Stand-by-mode and ready to measure. Please connect the part to be tested to the inlet port and press START. The Phoenix starts to evacuate the part. -
Page 46: Gas Ballast
Operation 5.3.1 Gas Ballast In stand-by mode the gas ballast of the fore pump can be switched on/off manually or via softkey 7. The gas ballast is for abolishing a too huge helium background. Additionally a condensation of water vapour in the pump will be avoided. -
Page 47: Status Line In The Display
Operation Refer to Chapter 6.4.5 Volume for information on loudness, alarms, and sound tracks. 5.4.3 Status Line in the Display The status line at the top of the display informs about (reading from left to right): Symbol of display Meaning Explanation Volume level Please refer to Chapter... - Page 48 Operation refer to Chapter 6.2.1 Scale linear/logarithmic). Fig. 15 Display, Trend Mode ⏐ GA10.218_1.01 - 11/2004...
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Page 49: Description Of The Menu
Menu Description of the Menu By pressing the MENU push button Fig. 16 the main menu will be dis- played regardless of the current working mode. Fig. 16 The Main Menu The main menu Fig. 16 leads the operator to several submenus described in the following chapters. - Page 50 Menu 1. Level 2. Level 3. Level View Scale linear/logarithmic Display-range auto/manual Time axis Contrast Background in Stand-by Lower display limit Mode Sniff/Vacuum Trigger & Alarms Trigger Level 1 Trigger Level 2 Trigger Level 3 Units Volume Alarm delay Audio alarm type Calibration internal external...
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Page 51: Main Menu
Menu Main Menu The main menu shows 7 sub-menus. In these sub-menus groups of tech- nical features are put together logically. From here the next levels of the menu tree can be reached. Tipp All following chapters show the path to get to the described menu line right underneath the headline. -
Page 52: Scale Linear/Logarithmic
Menu Key No. Name Description Back Return to the main menu. Scale linear/logarithmic Settings for bargraph and trend mode. Please refer to Chapter 6.2.1. Display-range auto/ Manual or automatic scaling. Please manual refer to Chapter 6.2.2 Time axis Time axis in trend. Please refer to Chapter 6.2.3 Contrast... -
Page 53: Display-Range Auto/Manual
Menu 6.2.2 Display-range auto/manual • Main Menu > View > Display-range auto/manual The upper limit of the displayed leak rate range can be set manually or automatically. These settings apply to the bargraph ( = bar underneath the digital figures in the measurement mode and y-axis in the trend mode). With the upper limit defined here the lower limit is set to a value based on the number of decades (See Chapter 6.2.1 Scale... -
Page 54: Contrast
Menu 6.2.4 Contrast • Main Menu > View > Contrast The contrast of the display can be changed. The recommended value under regular conditions is about 50. If by accident the display has been set too bright or too dark so that it can not be read off, this may be changed as follows: Switch off the PhoeniX and turn it on again. -
Page 55: Lower Display Limit
Softkey 3, 7: Changing of the lower detection limit between 1 x 10 1 x 10 The limit for the PhoeniXL300 dry ranges between 1 x 10 and 1 x 10 mbarl/s. Softkey 5:... -
Page 56: Trigger & Alarms
Menu Trigger & Alarms • Main Menu > Trigger & Alarms The trigger levels, the volume of the loudspeaker and the units of leak rates and pressures can be set in this menu Fig. Fig. 20 The Trigger & Alarms Menu Key No. -
Page 57: Trigger Level 2
Menu 6.4.2 Trigger Level 2 • Main Menu > Trigger & Alarms > Trigger Level 2 The value of the second trigger level can be set. Please refer to Chapter 4.1.2.7 Numerical Entries for the description of the entry. If Trigger 2 is exceeded the corrensponding relay will switch. This is also indicated at the display (see above). -
Page 58: Alarm Delay
Menu Softkey 2: Arrow down Decrease the minimum loudness. The minimum value is 0. Softkey 3: Arrow down Decrease the actual volume. The minimum value is limited by the mini- mum volume. Softkey 4: Beep off / Beep on Softkey 5: Help function Softkey 6: Arrow up... -
Page 59: Audio Alarm Type
Menu 6.4.7 Audio alarm type • Main Menu > Trigger & Alarms > Audio alarm type The trigger of the audio alarm can be switched on or off. Softkey 2: Pinpoint Softkey 3: Leak rate prop. The sound will be proportional to the leak rate signal. Softkey 5: Help function Softkey 6:... -
Page 60: 3Setpoint
Menu 6.4.7.3 Setpoint The tone is off as long as the leak rate is below the Trigger level 1. Above Trigger 1 the tone varies proportional to the leak rate Fig. 3000 Hz - 375 Hz - no tone 1000 • TR.1 Tr. -
Page 61: Settings
Menu Settings • Main Menu > Settings This menu Fig. 24 allows to observe and to change the adjustment of the internal machine settings. Fig. 24 The Settings Menu Key No. Name Description Back Return to the main menu. Vacuum settings Settings of vacuum system related functions. -
Page 62: Vacuum Settings
Refer to chapter 6.6.1.5 Softkey 8: Leak rate internal test leak Refer to chapter 6.6.1.6 The menu for the PhoeniXL300 dry version allows the following vacuum settings which varies to the PhoeniXL300: Softkey 2: Automatic purge Refer to chapter 6.6.1.1... -
Page 63: 1Vent Delay
Menu The menu for the PhoeniXL300 Modul version allows the following vacuum settings which varies to the PhoeniXL300: Softkey 2: Automatic purge Refer to chapter Softkey 3: Vent delay Refer to chapter 6.6.1.1 Softkey 4: Vacuum ranges Refer to chapter 6.6.1.2... -
Page 64: 2Vacuum Ranges
Softkey No. 7: Normal (default settings) This is the default setting. The activity runs as explained in Chapter 4.1.3. The PhoeniXL300 dry allows the vacuum ranges as follows: Softkey No. 2: GROSS only In this mode the PhoeniX remains at the inlet flange after falling below 15 mbar. -
Page 65: 3Partial Flow Setup
This setting is not possible for the PhoeniXL300 dry version. The PhoeniXL300 Modul allows additionally the settings for the forepump ( oil sealed or dry) and selectable pumping speed for the forepump. Softkey 2:... -
Page 66: 4Sniffer Factor
The minimum pumping speed is 4m Softkey 3: Fore pump type The PhoeniXL300 Modul can be operated with a dry (for ex. Scroll pump) fore pump or a wet (oil sealed) pump. This key is for choosing a dry (Sroll, piston) fore vacuum pump. -
Page 67: 6Leak Rate Internal Test Leak
Menu Since the effective pumping rates are usually not known due to tje con- ductances of the vacuum connections, we recommend the following indi- rect measurement: 1. Set up the Phoenix for operation 2. First an internal calibration must be performed with machine factor = 1 (Refer to chapter 7) 3. -
Page 68: 1Calculate Inlet Area Background
Menu 6.6.2.1 Calculate inlet area background • Main menu > Settings > Filter and background > Calculate inlet area background This function calculates the background of the inlet area. The PhoeniX has to be in the following conditions: 1. Mode vacuum 2. -
Page 69: Mass
Menu 6.6.3 Mass • Main Menu > Settings > Mass The requested mass of the measured gas can be selected. The Phoenix must be in Stand-by for changing to another mass. Softkey 2: H (2 amu) Hydrogen with the mass of 2 amu will be measured. Softkey 3: He (3 amu) Isotop of helium with the mass of 3 amu will be measured. -
Page 70: 2Define Recorder Output
Menu Softkey 7: Local The PhoeniX is controlled via the START, STOP and ZERO buttons at the control panel or remote control. 6.6.4.2 Define recorder output • Main Menu > Settings > Interfaces > Define Define recorder outputr The signals to be recorded can be selected in this submenu. With the left keys the pin can be selected, with the right keys a function is assigned to the selected pin. -
Page 71: 3Rs232 Protocoll
Menu 6.6.4.3 RS232 Protocoll • Main Menu > Settings > Interfaces > RS232 Protocoll Softkey 2: Baudrate and end sign Settings for the baudrate selectable between 1200 and 19200, as well as endsign between CR+LF, CR or LF. Softkey 3: Data, Parity, Stop bits The settings for Data ( 7 or 8 ), Parity ( Even, Odd, None ) and Stop bits ( 1 or 2 ) can be selected... -
Page 72: 5Define Plc Inputs
Menu Zero active: Is closed in case Zero function is running. Ready: Is closed in case machine is ready for measurement (Emission on, no error). CAL active Closed when machine is in calibrating routine. CAL Request Is opend in case of calibration request. During external calibration a open output indicates that the external calibrated leak has to be closed. -
Page 73: 6Scaling Recorder Output
Menu Clear: Change from low to high: confirm error message CAL: Change from low to high: When machine is in stand-by mode: start internal calibration. In case machine is measurement mode: start external calibration. (Premise: exter- nal calibration test leak has to be open and leak rate signal is stable) Change from high to low: External calibration: approve that external test leak is closed and leak rate signal is stable. -
Page 74: Miscellaneous
Menu 6.6.5 Miscellaneous • Main Menu > Settings > Miscellaneous The actual date and time, the prefered language and the mains frequency can be set in this submenu. Softkey 2: Time&Date Softkey 3: Language Softkey 4: Calibration request Softkey 5 Service interval fore pump Softkey 7: Service interval oil filter... -
Page 75: 4Service Interval Fore Pump
Service interval oil filter Here you can enter the service intervall of the oil filter. This setting is only possible for the PhoeniXL300. This setting depends on the use and appli- cation of your leak detector and there are no recommendations. -
Page 76: Parameter Save / Load
Menu 6.6.6 Parameter save / load • Main Menu > Settings > Parameter save / load > Load Enables to save and load individual settings or reload the default settings. Softkey 2 to 4: The names of the current values can be saved under a free choosable name. -
Page 77: 2Pressure Limits For Sniff Mode
Menu Softkey No. 2: Decrease change over threshold EVAC-GROSS Chosable between15-0,2 mbar (Default value 15 mbar) Softkey No. 3: Decrease change over threshold GROSS-FINE Chosable between 0,2-0,0,5 mbar (Default value0, 2 mbar). Softkey No. 4 Adjustment for ARGON Press again the softkey for default values for air. Softkey No. -
Page 78: Information
Menu reaction time for the gross leak message, and secondly on the volume of the test sample and the effective pumping speed. Caution: If the evacuation time was set to endless, the oil level of the mechanical pump should be checked more often. Softkey No. -
Page 79: Service
Menu Softkey 2: View settings The current settings will be displayed on 5 pages, e.g. trigger levels, test leak mass, date and time. Softkey 3: View internal data Information on measured internal data is provided on 10 screens. Softkey 4: Vacuum diagram The vacuum diagram of the PhoeniX is shown. -
Page 80: Access Control
Menu Access Control • Main Menu > Access Control With this menu you can deny or allow access to specific functions of the PhoeniX. Fig. 28 The Access Control Menu Softkey 3 Access to Zero function Softkey 4: Access to CAL function Softkey 8: Change Menu-PIN 6.8.1... -
Page 81: Zero
Menu 6.8.3 Zero • Main Menu > Access Control > Zero This setting enables (respectively disables) the ZERO button at the control panel. With „Zero at FINE“ (See Chapter 6.3), the ZERO functions execu- tes automatically as soon as the measuring range FINE is reached for the first time after START. - Page 82 Menu ⏐ GA10.218_1.01 - 11/2004...
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Page 83: Calibration
Calibration Calibration Introduction The Phoenix can be calibrated in two different ways: • Internal calibration by means of a built-in leak standard. • External calibration by means of an additional leak standard which then is attached to the inlet port or the component under test. During the calibration procedure the mass spectrometer is tuned to the maximum helium signal and this signal is referred to the known leak rate of the internal or external leak standard. - Page 84 Calibration messages are displayed and the described actions are required: • Make sure that the test leak is connected and opened. • Check the leak rate printed on the test leak and compare it with the leak rate at the display. If the leak rates are not identical press Edit leak rate (Soft Key no.
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Page 85: Factor Of Calibration - Range Of Values
Calibration • The bargraph display shows a signal which must not decrease any more. There might be a small fluctuation which is okay. If so please press OK (Soft Key no. 8). Fig. 33 External Calibration, Step 5 • When signal is stable affirm with o.k. - Page 86 Calibration ⏐ GA10.218_1.01 - 11/2004...
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Page 87: Error And Warning Messages
Warning Messages Error And Warning Messages he PhoeniX is equipped with a comprehensive self-diagnostic facilities. If an error or warning condition is detected it is indicated via the LC display to the operator. An audio signal is generated when an error or warning occurs. The fre- quency changes every 400 ms from 500 Hz to 1200 Hz and vice versa so that the signal stands out well from ambient noises normally encountered. - Page 88 Warning Messages Displayed Message Description and possible solutions W15 Leakrae is too high! Machine The survey function „contamination“ is activated. A leak rate higher switched into stand-by to pre- than the adjusted value was detected. vent contamination. • Gross leak •...
- Page 89 Warning Messages Displayed Message Description and possible solutions E36 Anode-cathode voltage is too • Anode-cathode voltage is < 30 V. low. • MSV board is faulty. E37 Suppressor voltage reference Signal MFSZH on MSV board is active. Suppressor signal command value too high! variable is too high.
- Page 90 Warning Messages Displayed Message Description and possible solutions E52 TMP frequency is too low! • TMP frequency is too low! • Frequency converter is faulty. • Turbomolecular pump is faulty. W53 Temperature at electronic unit • Ambient temperature too high. is too high (>55°C) •...
- Page 91 Warning Messages Displayed Message Description and possible solutions E67 TMP error:Short circuit in TMP-motor or connecting cable E68 TMP error: temperature con- verter too high (>75°C) E69 TMP error: Runup timeout E70 TMP error: TMP motor tempe- rature too high (>90°C) E71 TMP error: TMP could not be TMP not connected indentified...
- Page 92 Warning Messages Displayed Message Description and possible solutions W82 CAL Factor too high The calculated factor is out of the valid range (>10). The old factor is retained. Possible fault cause: • The conditions for calibration have not been maintained. •...
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Page 93: Maintenance
Maintenance Maintenance LEYBOLD Service If equipment is returned to LEYBOLD, indicate wether the equipment is free of substances damaging on health or wether it is contaminated. If it is contaminated also indicate the nature of the hazard. For this you must use a Declaration of Contamination form Fig. -
Page 94: Exchanging The Filter Mats
Maintenance 1. Switch the Phoenix off. 2. Pull the mains cord on the Phoenix. Caution You can get an electric shock! 3. Remove the cover for the mechanical section. 4. Separate the Phoenix from other vacuum components at the test port. 5. -
Page 95: Exchanging The Oil
Maintenance tools. (Cat. no. 20099025) Filter mat c) This filtermat is fixed before the fan with a plastic bracket. Take of the bracket and remove the filter, put on the bracket and fix it pro- perly. ( cat. no. 200001366) Under certain circumstances a dirty mat may be cleaned by shaking the dust out or by using a vacuum cleaner so that the filter mat be reused. - Page 96 Maintenance downwards. 5. In any cases two fuses of the same rating must be inserted. The requi- red mains fuses are: T 10A slow blow (20x5mm dia.) for 100V...230V. 6. After having exchanged the fuse(s) press the lid of the mains socket firmly back on.
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Page 97: Oil Filter
Maintenance STE board TMP-converter I/O board Fig. 37 assembly fuse 9.1.7 Oil filter After using the machine for a longer time there can be oil accumulated from the pump. In this case please do the following: 1. Switch off the Phoenix. 2. - Page 98 Maintenance ⏐ GA10.218_1.01 - 11/2004...
- Page 99 Standard Appendix 2-24 Inlet Port 1-11 1-12 1-14 Inlet port 2-20 Accessories – 1-11 1-12 1-14 Inlet pressure 6-58 alarm – 2-19 Installation 1-12 1-13 1-15 Ambient temperature – 1-11 1-12 1-14 Ion source 1-12 1-14 Audio alarm – – 4-32 ion source 7-83...
- Page 100 Standard 5-45 run-up mode 1-11 1-12 1-14 Run-up time – Safety Symbols 6-59 Setpoint 4-31 sniffer line 1-11 1-12 1-14 Sniffer mode – 3-28 START Button 3-27 Startup 3-29 Stop Button 1-12 1-13 1-15 Storage temperature – Temperature 1-12 1-13 1-15 •...
- Page 102 Fax: +46-31-68 39 39 leybold_gz@ Fon: +65-66652910 leybold.com.cn Fax: +65-65668202 Great-Britain / Switzerland/ vacuum@leybold- Ireland: Liechtenstein: Leybold Vacuum vac.com.sg Leybold Vacuum UK Ltd. Leybold Vacuum (Tianjin) Waterside Way, Schweiz AG Taiwan: International Trade Co., Plough Lane Leutschenbachstrasse Ltd. Leybold Vacuum London SW17 0HB Shanghai Branch: Taiwan Ltd.
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