Related Manuals for CCR 400
Summary of Contents for CCR 400
- Page 1 CCR Model 400 4-Channel MFC Power Supply/Controller Manual 200 Terrence Matthews Crescent Kanata, Ontario, K2M2C6 Canada Tel: 613-723-3386 Fax: 613-723-9160 Process Products 5/08...
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Page 2: Table Of Contents
TABLE OF CONTENTS PRODUCT DESCRIPTION ------------------------------------------------------------------------------ SPECIFICATIONS ----------------------------------------------------------------------------------------- FRONT PANEL --------------------------------------------------------------------------------------------- REAR PANEL ----------------------------------------------------------------------------------------------- CONNECTOR PIN DESIGNATIONS Transducer Connector (J1, J2, J3, J4) --------------------------------------------------- Analog Output (J5) ---------------------------------------------------------------------------- Alarms (J8) -------------------------------------------------------------------------------------- RS232 (J6) -------------------------------------------------------------------------------------- RS485 (J7, J9) --------------------------------------------------------------------------------- STARTUP ---------------------------------------------------------------------------------------------------- MANUAL SETUP Selecting Display (Flow or Total) ---------------------------------------------------------- Selecting Valve Override (Open, Close or Run) ---------------------------------------... -
Page 3: Product Description
+15Vdc and -15Vdc power supply @ 250mA each for each of the (4) MFC's. The CCR 400 accepts, user selectable 0-5Vdc, 0-10Vdc or 4-20mA input signals. It also supplies 0-5Vdc, 0-10Vdc or 4-20mA setpoint signals, for each channel, for flow control. -
Page 4: Specifications
SPECIFICATIONS Signal Input Number of Channels ------------------------ Signal Type ------------------------------------ 0-5Vdc, 0-10Vdc, 4-20mA , user selectable Input Resistance Voltage --------------------------------- >10 Megohm Current --------------------------------- 120 ohms Setpoint Output (Control Signal) Signal Type ------------------------------------- 0-5Vdc, 0-10Vdc, 4-20mA (user selectable) Accuracy (typ) --------------------------------- +/-0.05% FS (Voltage), +/-0.1% FS (Current) Analog-to-Digital Converter Inputs --------------------------------------------... -
Page 5: Front Panel
CH 3 CLOSE 115.00 SCCM C02 CH 4 ENTER Model 400 ANNUNCIATORS: Displays OVERRIDE signal status of each channel. If annunciators are not illuminated, the Setpoint (Control) voltage is active. DISPLAY AREA Column 1: Reserved for displaying (*) Active Channel, (M) Master Channel, (S) Slave Channel or (T) Totalizer. -
Page 6: Rear Panel
REAR PANEL ANALOG OUT RS485 ALARMS T250 1A CHANNEL 1 CHANNEL 2 RS485 CHANNEL 3 CHANNEL 4 RS232 POWER INLET WITH FUSE (1 amp TIME DELAY or SLO BLO) POWER SELECTOR SWITCH RS232 SERIAL PORT (J6) TRANSDUCER CONNECTORS (J1, J2, J3, J4) ANALOG OUTPUT (J5) ALARMS (J8) RS-485 SERIAL PORT (J7, J9) -
Page 7: Connector Pin Designations
CONNECTOR PIN DESIGNATIONS TRANSDUCER CONNECTORS (J1, J2, J3, J4) 1 SIGNAL COMMON 2 SIGNAL INPUT 3 GROUND 4 VALVE OPEN 5 SETPOINT COMMON 6 -15Vdc 7 NC 8 SETPOINT SIGNAL 9 GROUND Transducer Connector (Female) 10 GROUND Rear Panel View 11 NC 12 VALVE OFF 13 +15Vdc... -
Page 8: Alarms (J8)
CONNECTOR PIN DESIGNATIONS ALARMS (J8) 1 CH1 HIGH ALARM 2 CH 1 LO W ALARM 3 CH1 ALARM COMMON 4 CH2 HIGH ALARM 5 CH2 LOW ALARM 6 CH2 ALARM COMMON 7 NC 8 NC 9 NC 10 NC 11 NC 12 NC 13 NC 14 NC... -
Page 9: Startup
START-UP The CCR 400 has a 100 Vac, 115 Vac or 230 Vac, 50/60 Hz power selector switch located at the rear of the instrument. Please refer to page 4 to locate this switch. Verify the power selector switch is in the proper position prior to connecting the power cable to the unit. - Page 10 MANUAL SETUP, Selecting Valve Override (Open, Close or Run) on page 9. The default at power-up is Valve Close. 16. If the Units of Measure are in flow units, the CCR 400 automatically calculates TOTAL flow using a Riemann Sum Integration method. To display TOTAL or to reset the TOTAL display, refer to MANUAL/SETUP, Selecting Display (Flow or Total) on page 9.
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Page 11: Manual Setup
MANUAL SETUP Selecting Display (Flow or Total) -------------------------------------------- 500.0 SCCM Ar MENU FLOW: 1=Chnl 1 MENU: 1=DISPLAY DISPLAY: 1=FLOW 1000 SCCM H2 2=Chnl 2 2=SETUP 2=TOTAL 50.00 SCCM CF4 3=Chnl 3 3=CAL/RANGE 950.0 SCCM CH4 4=COMM 4=Chnl 4 ---- TOTAL: 1=Chnl 1 RESET TOTAL? 500.0 SCCM Ar 2=Chnl 2... -
Page 12: Selecting Setpoint (Control Voltage)
MANUAL SETUP Selecting Setpoint (Control Voltage) CH SEL * 575.0 SCCM Ar CH SEL 500.0 SCCM Ar 500.0 SCCM Ar 1000 SCCM H2 *1250.0 SCCM H2 *1575.0 SCCM H2 50.00 SCCM CF4 50.00 SCCM CF4 50.00 SCCM CF4 950.0 SCCM CH4 950.0 SCCM CH4 950.0 SCCM CH4 The example above shows how the setpoint for Channel 2 is changed. -
Page 13: Selecting Filter
MANUAL SETUP Selecting Filter (-3db A/D Converter Filter Frequency) MENU -- MENU: 1=DISPLAY -- SETUP: -- FILTER: -- FILTER: 1=Chnl 1 1=4Hz 500.0 SCCM N2 1=BRIGHTNESS 2=Chnl 2 2=15Hz 2=SETUP 1000 SCCM H2 2=UNITS/GASID 3=CAL/RANGE 3=Chnl 3 CHANNEL 1 3=30Hz 50.00 SCCM CF4 4=COMM 3=FILTER... -
Page 14: Selecting Alarms (High And Low With Hysteresis)
MANUAL SETUP Selecting Alarms (High and Low with Hysteresis) -- SETUP: -- ALARM: ------- MENU MENU: 1=DISPLAY 1=Chnl 1 1=BRIGHTNESS 2=Chnl 2 2=SETUP 2=UNITS/GASID 3=Chnl 3 3=CAL/RANGE 3=FILTER 4=COMM 4=Chnl 4 4=INPUT 5=ALARM 6=RATIO ---------------------------------------------------------------------------------------------------- -------------------- ----- ---- ALARMS: 1=HIGH LIMIT ALARM: ---- --------------... -
Page 15: Selecting Ratio (Master/Slave Operation)
MANUAL SETUP Selecting Ratio (Master/Slave Operation) -- SETUP: -- RATIO: ------ ------- MENU MENU: 1=DISPLAY 500.0 SCCM C3H60 1=BRIGHTNESS 1=DISABLE MASTER 1000 SCCM H2 2=SETUP ----- 2=UNITS/GASID 2=ENABLE MASTER 50.00 SCCM CF4 3=CAL/RANGE 3=FILTER 4=COMM 3=EXIT 950.0 SCCM CH4 4=INPUT 5=ALARM 6=RATIO --------------------------------------------------------------------------------------------------------... -
Page 16: Manual Cal/Range
MANUAL CAL/RANGE Calibrate (Zero only) SCREEN 2 SCREEN 3 SCREEN 1 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 1=CALIBRATE 2=Chnl2 2=SETUP 2=RANGE 3=Chnl3 3=CAL/RANGE 4=COMM 4=Chnl4 ------------------------------------------------------------------------------------------------------- SCREEN 5 SCREEN 6 SCREEN 4 ---- -- ZERO: SCCM C3H60 CALIBRATE: ---- CHANNEL 1 1000 SCCM H2... -
Page 17: Calibrate (Zero & Range)
MANUAL CAL/RANGE Calibrate (Zero & Range) SCREEN 2 SCREEN 1 SCREEN 3 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 1=CALIBRATE 2=SETUP 2=Chnl2 2=RANGE 3=CAL/RANGE 3=Chnl3 4=COMM 4=Chnl4 ------------------------------------------------------------------------------------------------------- SCREEN 4 SCREEN 5 SCREEN 6 ---- -- ZERO: CALIBRATE: RANGE VALUE: 1=ZERO ONLY CHANNEL 1 CHANNEL 1... -
Page 18: Calibrate (Multiplier)
MANUAL CAL/RANGE Calibrate (Multiplier) SCREEN 2 SCREEN 1 SCREEN 3 -- CAL/RANGE -- CALIBRATE: 1=Chnl1 MENU MENU: 1=DISPLAY 1=CALIBRATE 2=SETUP 2=Chnl2 2=RANGE 3=CAL/RANGE 3=Chnl3 4=COMM 4=Chnl4 ------------------------------------------------------------------------------------------------------- SCREEN 4 SCREEN 5 SCREEN 6 ---- -- MULTIPLIER CALIBRATE: 105.00 SCCM C3H60 1=ZERO ONLY CHANNEL 1 1000... -
Page 19: Rs232/485 Hookup
RXD(+) ----------------------------- TXD(+) RXD(-) ----------------------------- TXD(-) CH3<>sddd.dd<>eeeee<>xxxxx<>z IC-485 CH4<>sddd.dd<>eeeee<>xxxxx<>z" IC-485 RS485 Query: *aaC1 Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z Note: nn=32 maximum (drivers and receivers) *aaC5 Response: "CH1<>sddd.dd<>eeeee<>xxxxx<>z CH2<>sddd.dd<>eeeee<>xxxxx<>z CH3<>sddd.dd<>eeeee<>xxxxx<>z CH4<>sddd.dd<>eeeee<>xxxxx<>z" where: aa= CCR 400 address Reference: Checking/Changing RS485 Address on pg 19. PAGE 17... -
Page 20: Rs232/485 Commands
*00X Response: "MULTIDROP ADDRESS: 01" *00x<aa> Set CCR 400 Address to aa Note: All CCR 400's will respond to * 0 0 X. To prevent bus Example: Send * 0 0 x 2 2 contention, connect only 1 CCR 400 to the RS485 port CCR 400 will respond with a "spade"... -
Page 21: Setting/Reading Alarm Hysteresis, Units Of Measure & Gas Id
*aaUM3<dd> Set CH3 Unit of Measure at Address 02 to selection dd *aaUM4<dd> Set CH2 Unit of Measure at Address 02 to selection dd Example: Send *03UM366 CCR 400 with Address 02 will have CH3 Unit of Measure set to PSI Setting Gas Idenfifier Reading Gas Identifier RS232 Command: RS232 Query: GS1<ddd>... -
Page 22: Setting/Reading Signal Input & Filter
*aaIN4<ddd> Set CH4 Signal Input at Address aa to selection d *aaIN4 Response: IN4<>d<>zzzzz Example: Send *01IN31 Example: Send *10IN2 Response: IN2 1 0-5V CCR 400 with Address 01 will have CH3 Signal Input set for 0-5V. Reading Filter Setting Filter RS232 Query:... -
Page 23: Setting/Reading Multiplier
*aaIN3<d.dddd> Set CH3 Multiplier at Address aa to d.dddd *aaML4 Response: ML4<><>d.dddd *aaIN4<d.dddd> Set CH4 Multiplier at Address aa to d.dddd Example: Send *05ML31.0000 CCR 400 with Address 05 will have CH3 Multiplier set to 1.0000. Reading Display (Selection) Setting/Blanking Display (Flow or Total) -
Page 24: Resetting Total
Reset CH3 Total at Address aa to zero *aaIT4R Reset CH4 Total at Address aa to zero Example: Send *01T1R Model 400 with Address 01 CH1 Total reset to zero Reading Range Value Setting Range Value RS232 Query: RS232 Command: Response: SN1d.dddd... -
Page 25: Units Of Measure Table
UNITS OF MEASURE TABLE # Descr iption Abbrev Total 1 Standard Cubic Centimeters per Minute SCCM 2 Standard Liters per Minute 3 Percent 4 Volts 5 Millivolts 6 Counts 7 Normal Liters per Minute 8 Standard Liters per Second 9 Normal Liters per Second 10 Standard Liters per Hour 11 Normal Liters per Hour 12 Standard Milliliters per Minute... -
Page 26: Gas Identification Table
GAS IDENTIFICATION TABLE # GAS GAS ID DISPLAY 1 Acetic Acid C2H4F2 2 Acetic Acid, Anhydride C4H603 3 Acetone C3H60 C3H60 4 Acetonitryl C2H3N C2H3N 5 Acetylene C2H2 C2H2 6 Air 7 Allene C3H4 C3H4 8 Ammonia 9 Argon 10 Arsine AsH3 AsH3 11 Benzene... -
Page 27: Gas #67 Thru 130
GAS IDENTIFICATION TABLE # GAS GAS ID DISPLAY 67 Ethyleneimine C2H4N C2H4N 68 Ethylidene Dichloride C2H4Cl2 69 Ethyl Mercaptan C2H6S C2H6S 70 Fluorine 71 Formaldehyde CH2O CH2O 72 Freon 11 CCl3F CCl3F 73 Freon 12 CCl2F2 74 Freon 13 CClF3 CClF3 75 Freon 14 76 Freon 22... -
Page 28: Gas #131 Thru 180
GAS IDENTIFICATION TABLE # GAS GAS ID DISPLAY 131 Octane C8H18 C8H18 132 Oxygen 133 Oxygen Difluor 134 Ozone 135 Pentaborane B5H9 B5H9 136 Pentane C5H12 C5H12 137 Perchloryl Fluoride ClFO3 CLFO3 138 Perfluorocyclobutane C4F8 C4F8 139 R116 C2F6 C2F6 140 Perfluoropropane C3F8 C3F8... -
Page 29: Jumper Locations For Gnd And +15V Purge Signals
Display Assembly FRONT Install only 1 jumper per channel Installing Jumper 3 applies +15V to CH1 PURGE pin when selected Installing Jumper 4 applies GND to Installing Jumper 5 applies +15V to CH1 PURGE pin when selected CH2 PURGE pin when selected Installing Jumper 6 applies GND to Installing Jumper 7 applies +15V to CH2 PURGE pin when selected...