Keithley S540 Administrative Manual
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Keithley S540 Administrative Manual

Keithley S540 Administrative Manual

Power semiconductor test system
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S540 Power Semiconductor Test System
Administrative Guide
S540-924-01 Rev. D / January 2019
*PS540-924-01D*
S540-924-01D

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  • Page 1 S540 Power Semiconductor Test System Administrative Guide S540-924-01 Rev. D / January 2019 *PS540-924-01D* S540-924-01D...
  • Page 2 S540 Power Semiconductor Test System Administrative Guide...
  • Page 3 All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments, LLC, is strictly prohibited. These are the original instructions in English. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
  • Page 4 Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 5 (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

  • Page 6: Table Of Contents

    Introduction .......................... 1-1 Systems documentation ....................... 1-1 System description ....................... 1-1 Optional accessories ......................1-3 S540 site preparation and installation ..............2-1 Site preparation checklist ..................... 2-1 Unpacking the S540 system ....................2-2 Unpacking system components ....................2-3 Unpacking the S540 system accessories ................2-12 Keithley field service engineer installation tasks ..............
  • Page 7 Recovering from an emergency shutdown ................3-7 Safety interlocks ........................3-7 Additional probe card adapter safety interlock cable ..............3-9 9140A-PCA interlock connections for S540 systems .............. 3-10 LO patch panel ........................3-11 Prober safety ........................3-11 Network information ......................3-12 Maintenance ......................
  • Page 8 S540 Power Semiconductor Test System Administrative Guide Table of contents S540 high-voltage, low-current system using an RSA306B spectrum analyzer ......5-7 S540 KTE communications ....................5-8 S540 ACS communications diagrams ................. 5-9...

  • Page 9: S540 System

    There are two different S540 systems available: S540 3000 V high-voltage parametric test system with a 3-kV switching matrix (12 pins) S540 3000 V high-voltage, low-current parametric test system with a 3-kV switching matrix...
  • Page 10 Section 1: S540 system S540 Power Semiconductor Test System Administrative Guide The S540 systems have flexible hardware configurations that allow you to customize them to your specific needs. See the following table for a description of the main system configuration options, and see the following figure for an example of a typical system configuration.

  • Page 11: Optional Accessories

    Optional accessories Optional items and accessories that may accompany the S540 system: Cables to connect to the test fixture or the probe card adapter 9140A-PCA probe card adapter (12 3-kV pins to 36 200-V pins) or Celadon Systems...

  • Page 12: S540 Site Preparation And Installation

    Are elevators needed to move the system? Can they support the size and weight of the system? Are the doorways wide enough for the system? If you are using a Keithley probe card adapter, you must supply a vacuum connection (50.80 cm Hg / 20 in.). Floor plan Item...

  • Page 13: Unpacking The S540 System

    Did you prepare power outlets for service, testing, or maintenance? Unpacking the S540 system The Keithley field service engineer (FSE) is responsible for unpacking the S540 system cabinet and the accessories. However, we recommend that you move the crate and the accessories box to the area where the system is going to be used.

  • Page 14: Unpacking System Components

    The following information will help the FSE unpack the system. Series 500 systems are shipped in a wooden crate (see the following figure). Figure 1: S540 system cabinet in shipping crate Unpacking system components Inspect the shock sensor on the outside of the shipping crate (see the following figure). If the shock sensor indicates a shock condition, do a thorough inspection of all components in the system cabinet.
  • Page 15 Report any damage to the shipping agent immediately. Please reuse or recycle packaging materials in accordance with your local requirements. You need at least two people to unpack and move the S540 system cabinet. S540-924-01 Rev. D / January 2019...
  • Page 16 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation To unpack the system components: 1. Remove the crate clamps from the crate using a standard screwdriver. Figure 4: Removing the crate clamps 2. Open the front of the crate. The front is identified by the wooden ramp support attached across the panel (see the following figure).
  • Page 17 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Figure 5: Opening the front of the crate 4. Attach the ramp using the two bolts that are attached to the bottom front of the crate.
  • Page 18 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation 5. Remove the padding from the front of the S540 system cabinet. Figure 7: Removing the padding 6. Remove the crate clamps and slide the outer box cover off the crate.
  • Page 19 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide 7. Make sure that you retract the leveling feet on the bottom of the system (next to the casters) to put weight on the casters and prepare the system to be rolled down the ramp.
  • Page 20 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation 8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S540 system cabinet using a 19 mm socket head on a socket wrench.
  • Page 21 9. Save the hardware (the four bolts and washers) that you remove from the bottom of the crate. Figure 12: System crate hardware 10. Unlock the two casters that are on the front of the S540 system cabinet by moving the locks up. Figure 13: System caster brakes S540-924-01 Rev.
  • Page 22 11. With two people, slide the S540 system cabinet down the ramp. Figure 14: Rolling the system down the ramp 12. Remove the tape from the packing material using scissors, taking care not to scratch the S540 system cabinet. Figure 15: Cutting the wrap off the system 13.

  • Page 23: Unpacking The S540 System Accessories

    Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Unpacking the S540 system accessories The accessories are shipped in a separate box or in multiple boxes, depending on how many accessories are ordered. Figure 16: S540 system accessories The accessories box contains a computer monitor, keyboard, and mouse.
  • Page 24 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation Figure 17: Typical system accessories Figure 18: Monitor arm accessory S540-924-01 Rev. D / January 2019 2-13...
  • Page 25 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Figure 19: Keyboard tray and arm accessory Figure 20: Cable support arm accessory S540-924-01 Rev. D / January 2019 2-14...

  • Page 26: Keithley Field Service Engineer Installation Tasks

    A set of chuck cables is included with the optional 9140A-PCA probe card adapter. Model numbers of cables vary based on the prober you are using. For example, the Keithley Field Service Engineer (FSE) will install the cables shown in the following table for Tel P8 probers.

  • Page 27: Example Series 500 System Installation Form

    Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Example Series 500 System Installation Form Figure 21: Example Series 500 System Installation Form page 1 S540-924-01 Rev. D / January 2019 2-16...
  • Page 28 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation Figure 22: Example Series 500 System Installation Form page 2 S540-924-01 Rev. D / January 2019 2-17...
  • Page 29 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Figure 23: Example Series 500 System Installation Form page 3 S540-924-01 Rev. D / January 2019 2-18...

  • Page 30: Power And Operating Conditions

    The following topics contain information about power and operating environment conditions. Supplied power cords Keithley Instruments provides power cords that match the power requirements of the system. The following figure and table describe these cords. Figure 24: Supplied power cables...

  • Page 31: System Power Dissipation

    S540 systems that are configured to operate between 100 VAC and 120 VAC must use a 20 A circuit; systems that are configured to operate between 200 VAC and 240 VAC must use a 15 A circuit.

  • Page 32: Triaxial Connector Handling And Avoiding Contamination

    2 × 10 G (2 × 10 Avoid locating the S540 next to plasma etchers, large motors, magnets, RF transmitters, equipment with flash lamps, and other potential sources of interference Position equipment to avoid routing signal and power cables near sources of electrical noise...
  • Page 33 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Severe personal injury or death due to electric shock or electrocution may result if power is not removed before working inside the cabinet. Always perform the lockout and tagout procedure before opening the system cabinet.

  • Page 34: Installation And Connections

    Physically securing the system (on page 2-27)). System securement is required for safety of the S540 system and for personnel. You must bolt the legs adjacent to the four casters to the floor. See Physically securing the system page 2-27) for details.

  • Page 35: Cable Harness Routing

    S540 Power Semiconductor Test System Administrative Guide Cable harness routing The S540 has a dual-door rear portal for output leads. Cables can be routed from the cable harness at the rear portal to either the right or left of the cabinet.
  • Page 36 The system cabinet requires a floor space of approximately 1.2 m × 2.1 m (4 ft × 7 ft), plus additional room for service personnel access from the front and back of the cabinet. The following figures show a top view of the floor plan and the typical S540 system cabinet weight distribution and center of gravity.

  • Page 37: System Cabinet Size And Weight

    Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide Figure 29: S540 weight distribution and center of gravity System cabinet size and weight The size and weight specifications for the system cabinet are listed in the following table. See...

  • Page 38: Physically Securing The System

    Section 2: S540 site preparation and installation Physically securing the system You must bolt the S540 system cabinet to the floor for safety purposes and to ensure the cabinet will not tip over. The following figure shows the restraint brackets and bolt installation dimensions for the system cabinet.
  • Page 39 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide The following figure shows how a floor-mounting bracket is installed. Keithley part numbers are included for the required hardware. Figure 31: S540 system cabinet floor mount S540-924-01 Rev.

  • Page 40: Optional Advanced Seismic Securement

    Figure 32: S540 tip-over hazard warning label on keyboard tray Optional advanced seismic securement The S540 system can be ordered with an advanced seismic fastening option that has been tested and certified to the standards stated in IEC 61587-2 Ed. 2.0 Mechanical structures for electronic equipment —...
  • Page 41 Section 2: S540 site preparation and installation S540 Power Semiconductor Test System Administrative Guide 1. Position the cabinet where needed on a smooth, level floor. 2. Place the floor mounting brackets at the corners and make sure you have enough room for proper placement.
  • Page 42 S540 Power Semiconductor Test System Administrative Guide Section 2: S540 site preparation and installation Anchors should have a minimum pullout rating of 450 kg (1000 lb) each. Install 16 anchors for maximum protection. 8. Return the cabinet to marked locations on the floor and use the leveling legs to lift the cabinet to the proper height.

  • Page 43: Equipment Startup

    Section 3 Equipment startup In this section: Introduction ................3-1 Initial equipment startup ............3-1 System startup ................. 3-2 Before starting system software ..........3-3 Start the KTE software ............. 3-4 Start the ACS software ............. 3-5 Shut down using ACS .............. 3-5 Shut down using KTE ...............

  • Page 44: System Startup

    Section 3: Equipment startup S540 Power Semiconductor Test System Administrative Guide Figure 35: S540 power distribution unit (PDU) circuit breaker 2. Press the power/standby button on the computer and monitor. 3. Set the power button on the front door of the system cabinet to the ON position.

  • Page 45: Before Starting System Software

    Release Notes document (part number PA-1036). Using Telnet Telnet is not enabled by default on the S540 system; you must to enable it to use it. To enable Telnet: 1. From the command prompt (as root user), type su and the root password.

  • Page 46: Start The Kte Software

    Section 3: Equipment startup S540 Power Semiconductor Test System Administrative Guide 4. Save and close the file. 5. At the command prompt (as root user), type the following: service xinetd start chk config telnet on chk config xinetd on Start the KTE software To start the KTE software, first start the instrument controller (IC) process.

  • Page 47: Start The Acs Software

    2. In the dialog box that opens, click Yes that you want to shut down the S540 tester. The message in the following figure opens after you click Yes to shut down the S540. You must wait until the 4200A-SCS and the system computer shut down before you press the power button on the system cabinet.

  • Page 48: Shut Down Using Kte

    Section 3: Equipment startup S540 Power Semiconductor Test System Administrative Guide Shut down using KTE To shut down using the Keithley Test Environment (KTE) software: 1. Close all KTE programs. ® 2. In the LINUX terminal, type the following command: sudo $KIBIN/shutdown_s530.pl...

  • Page 49: Recovering From An Emergency Shutdown

    For operator safety, the S540 has interlocks on both the front and back cabinet doors and at the DUT. Also, the optional probe card adapter (PCA) has interlocks that provide protection for connections to a prober.
  • Page 50 An indicator on the front door of the S540 cabinet illuminates, and the KTE software immediately notifies you of the interlock activation. Figure 41: Interlock indicator Once the interlock has been activated, you must clear the cause of the interlock activation.

  • Page 51: Additional Probe Card Adapter Safety Interlock Cable

    The Model 174-7047-XX Safety Interlock Cable provides additional protection from electric shock at the Keithley probe card adapter (PCA). The cable attaches to the prober top plate and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA, the interlock is tripped.

  • Page 52: 9140A-Pca Interlock Connections For S540 Systems

    Figure 44: 9140A-PCA interlock block diagram for S540 systems For additional information about the 9140A-PCA, see the 9140A-PCA Probe Card Adapter Instruction Manual (part number 9140A-901-01). This manual is available for download at tek.com/keithley. S540-924-01 Rev. D / January 2019...

  • Page 53: Lo Patch Panel

    S540 Power Semiconductor Test System Administrative Guide Section 3: Equipment startup LO patch panel The S540 must have a single, direct connection between instrument lows and protective earth (safety ground). The S500-LOPATCH-3KV panel provides this common LO connection and protective earth (safety ground) reference.

  • Page 54: Network Information

    One 10Base-T patch cable (connects to your network) IP address is specified by you When setting up the computer for the S540 system, do not change the computer name. Software licenses are tied to the computer name. If you change the computer name, the Keithley Interactive Test Tool (KITT), Keithley Test Execution Engine (KTXE), and other Keithley Test Environment (KTE) tools will not work.

  • Page 55: Maintenance

    Data hub license ..............4-13 Editing the icconfig_<QMO>.ini file ........4-13 Using NPLCs to adjust speed and accuracy ......4-14 Decommissioning an S540 test system ......... 4-16 Hardware replacement The information in this section is intended only for qualified service personnel, as described Safety precautions (on page 1-1).

  • Page 56: Handling And Cleaning Precautions

    Section 4: Maintenance S540 Power Semiconductor Test System Administrative Guide Handling and cleaning precautions Always grasp cards by the side edges and shields to avoid contamination that will degrade the performance of the components. Do not touch the connectors, the board surfaces, or components.

  • Page 57: Special Handling Of Static-Sensitive Devices

    Electrical hazard tasks Definitions of electrical hazard tasks (as defined in the SEMI S2-0715a standard) are listed in this section. For S540 systems, Type 2 electrical hazard tasks are typically performed. For additional information about diagnostics, troubleshooting, or maintenance of specific Keithley instruments, refer to the documentation for that instrument for details before attempting to repair it.

  • Page 58: Types Of Electrical Hazard Tasks

    SEMI S2, Appendix 3, Table A3-1. Repair and replacement Keithley Instruments offers a fee-based service agreement with all S540 systems. Under this agreement, a field service engineer will either repair or replace equipment. For more information about this service agreement, contact Keithley Instruments at 1-800-935-5595.

  • Page 59: Heavy Instrument Removal And Installation

    4. Place the main circuit breaker on the power distribution unit (PDU) on the back of the cabinet in the OFF position. 5. Disconnect the source power to the S540 system (power cord on back of the PDU). 6. Place a lock and tag on the main circuit breaker of the PDU.

  • Page 60: General Replacement Procedure

    You will also need to allow for additional space outside of the cabinet for the lifting device. Refer to the lifting device operating manual for proper usage. Instruments in the S540 system that require a mechanical lifting device include: 4200A-SCS Parameter Analyzer with multiple options installed 707B Switch Matrix Mainframe with cards installed...

  • Page 61: Adjustment

    1. Remove the lock and tag placed on the main circuit breaker of the power distribution unit (PDU). 2. Connect the source power to the S540 system (power cord on the back of the PDU). 3. Place the main circuit breaker on the PDU in the ON position.

  • Page 62: Fuses

    Section 4: Maintenance S540 Power Semiconductor Test System Administrative Guide 7. Place the system cabinet POWER switch (on the front-panel door) in the ON position. 8. Make sure the computer is turned on. 9. Start the computer and the system software.

  • Page 63: Power Distribution And Emergency Off

    S540 Power Semiconductor Test System Administrative Guide Section 4: Maintenance Power distribution and emergency off The following figure contains a simplified example layout of various components in the S540 system. Figure 46: S540 system cabinet rear view S540-924-01 Rev. D / January 2019...

  • Page 64: Power Distribution Unit Connections And Power Distribution Basics

    Section 4: Maintenance S540 Power Semiconductor Test System Administrative Guide Power distribution unit connections and power distribution basics The 42000-PDU consists of: 24 VDC output to emergency off (EMO) circuits and cabinet fans with power 24 VDC output through banana jacks...
  • Page 65 S540 Power Semiconductor Test System Administrative Guide Section 4: Maintenance The following table provides a detailed description of the available connections in the 42000-PDU. Information about the EMO circuit connections and operation is also in the table. 42000-PDU connection descriptions...

  • Page 66: System Emergency Off Circuit

    Section 4: Maintenance S540 Power Semiconductor Test System Administrative Guide System emergency off circuit The following figure shows a simplified schematic of the 42000-PDU power distribution unit (PDU) emergency off (EMO) circuit. Figure 48: 42000-PDU simplified schematic S540-924-01 Rev. D / January 2019...

  • Page 67: Data Hub License

    Section 4: Maintenance Data hub license The data hub license allows the Keithley Test Environment (KTE) software to communicate with a prober. This license is installed on all systems when they are shipped. If you upgrade or reinstall the KTE software, you may need to reinstall the data hub license.

  • Page 68: Using Nplcs To Adjust Speed And Accuracy

    Setting the number of power line cycles The default number of power line cycles (NPLCs) for measurements using the S540 can be set in several ways: Specify in the icconfig_<QMO>.ini file; your field service engineer (FSE) can change this from...

  • Page 69: Setting A Custom System Speed

    (FSE) to specify custom speed settings in the icconfig_<QMO>.ini file. Systems upgraded from an older Keithley Test Environment (KTE) version may not have a [SYSTEM SPEED MODE] section in their icconfig_<QMO>.ini file. This can be added, but is not necessary unless you want to change the settings.

  • Page 70: Decommissioning An S540 Test System

    Any cleaning solutions used during the life of the system (such as isopropyl alcohol (IPA)) should be disposed of separately and properly. The S540 system may be used with other equipment such as automatic probers and third-party probe card adapters. Tektronix is not in control of these products and the original equipment manufacturer should always be contacted for proper recycling procedures.

  • Page 71: Instrument Specifications And Documentation

    S540 ACS communications diagrams ........5-9 Introduction This section contains an overview of the instruments used in S540 test systems and examples of typical connection schemes. For more specific information about instruments used in the S540 Power Semiconductor Test System,...

  • Page 72: Switching

    Model 7531 Low-Current, High-Speed Matrix Card The 7531 matrix card is an 8 × 12 low-current, high-speed Kelvin matrix with high-voltage protection up to 3 kV. The S540 3000 V high-voltage, low-current systems include one 707B System Switch Mainframe populated with 7531 matrix cards.

  • Page 73: Sourcing And Measuring

    Model 2657A High-Power System SourceMeter Instrument The Model 2657A is a high-voltage, high-power, low-current source measure unit (SMU) instrument. You can have up to two 2657A SMUs in the S540. Figure 53: 2657A High-Power System SourceMeter Instrument S540-924-01 Rev. D / January 2019...

  • Page 74: Optional Instrumentation

    The cards and columns of each instrument connection shown in the following diagrams may differ from your actual system. The flexibility of the S540 configuration allows for various numbers and combinations of instruments. Attempting to show examples of every possible scenario would be prohibitive.

  • Page 75: S540 3000 V High-Voltage System

    S540 Power Semiconductor Test System Administrative Guide Section 5: Instrument specifications and documentation S540 3000 V high-voltage system Figure 54: S540 3000 V high-voltage system S540-924-01 Rev. D / January 2019...

  • Page 76: S540 3000 V High-Voltage, Low-Current System

    Section 5: Instrument specifications and documentation S540 Power Semiconductor Test System Administrative Guide S540 3000 V high-voltage, low-current system Figure 55: Matrix connections for the 3000 V high-voltage, low-current system S540-924-01 Rev. D / January 2019...
  • Page 77 S540 Power Semiconductor Test System Administrative Guide Section 5: Instrument specifications and documentation S540 high-voltage, low-current system using an RSA306B spectrum analyzer Figure 56: S540 connections with an RSA306B spectrum analyzer S540-924-01 Rev. D / January 2019...

  • Page 78: S540 Kte Communications

    S540 Power Semiconductor Test System Administrative Guide S540 KTE communications The S540 KTE system uses both ethernet and GPIB to communicate with and control the instruments. The following diagrams show how the instruments are connected to each other and what type of communications are used.

  • Page 79: S540 Acs Communications Diagrams

    S540 Power Semiconductor Test System Administrative Guide Section 5: Instrument specifications and documentation S540 ACS communications diagrams The following figure shows multiple 2636B source-measure units. However, the system only requires one 2636B. Figure 58: S540 ACS communications diagrams S540-924-01 Rev. D / January 2019...
  • Page 80 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 12/17...

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