ibss Group, Inc. GV10 Downstream Asher Series Operation And Safety Manual
  1. Manuals
  2. Brands
  3. ibss Group, Inc. Manuals
  4. Controller
  5. GV10 Downstream Asher Series
  6. Operation and safety manual

ibss Group, Inc. GV10 Downstream Asher Series Operation And Safety Manual

Hide thumbs
Table of Contents

Advertisement

Quick Links

GV10x Downstream Asher
Operation and Safety Manual
ibss Group, Inc.
© 2015

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the GV10 Downstream Asher Series and is the answer not in the manual?

Questions and answers

Summary of Contents for ibss Group, Inc. GV10 Downstream Asher Series

  • Page 1 GV10x Downstream Asher Operation and Safety Manual ibss Group, Inc. © 2015...
  • Page 2 ibss Group, Inc. 1559B Sloat Blvd. 270 San Francisco, CA 94132 1.415.566.5774 1.415.566.9779 Fax www.ibssgroup.com Rev 2015-03-02...
  • Page 3 GV10x OPERATION AND SAFETY MANUAL ibss Group Warnings The GV10x Controller and Source contain warning labels where appropriate to identify potentially hazardous areas. Operation, installation and maintenance should be performed by qualified personnel. High voltage is present. SHOCK To avoid possible shock or fire hazards, connection of this product should be performed in compliance with the ANSI electrical code.
  • Page 4 GV10x OPERATION AND SAFETY MANUAL ibss Group Warranty Statement ibss Group, Inc. products are warranted to the original purchaser against defective materials or workmanship for a period of 3 (three) years from the ibss Group, Inc. date of delivery. will, at its own option, repair or replace all defective material returned [freight prepaid] during the warranty period, provided the unit is properly repackaged and returned without damage from abuse or mishandling.

  • Page 5: Table Of Contents

    GV10x OPERATION AND SAFETY MANUAL ibss Group TABLE OF CONTENTS Sections Introduction ..........................7 About the GV10x ......................... 7 GV10x System Models......................... 8 1.3. GV10x Controller Models ......................9 GV10x Source Models ......................... 9 Unpacking the GV10x ......................11 2.1. Unpacking and Inspection ......................
  • Page 6 GV10x OPERATION AND SAFETY MANUAL ibss Group A.2. GV10x RF Controller (BT and 2U models) .................. 27 Appendix B: Safety Considerations ..................28 B.1. Hazards Inherent in Equipment ....................28 B.2. Hazard Alerts: Location on Equipment and Meaning ..............28 B.3.

  • Page 7: Introduction

    GV10x OPERATION AND SAFETY MANUAL ibss Group Introduction About the GV10x The GV10x Downstream Asher is intended to be used on any analytical high vacuum tool where hydrocarbon or carbon contamination prevents satisfactory quantitative and qualitative analysis. When used with an oxygen containing gas such as room air, the GV10x Downstream Asher oxidizes hydrocarbon [HC] contamination in these analytical chambers.

  • Page 8: Gv10X System Models

    GV10x OPERATION AND SAFETY MANUAL ibss Group surfaces. With Downstream Ashing, surfaces and specimens are quickly cleaned and remain free of spurious artifacts frequently seen with typical “plasma cleaning”. Oxygen [O] radicals are the active species produced using ambient air or oxygen gas mixtures as the plasma gas.

  • Page 9: Gv10X Controller Models

    GV10x OPERATION AND SAFETY MANUAL ibss Group 1.3. GV10x Controller Models MODEL DESCRIPTION DIFFERENCES Benchtop unit to control Source Original model operation; generates RF energy at Operable via built-in control panel or via requested power level for given time PC-based remote control software period and sends to Source.
  • Page 10 GV10x OPERATION AND SAFETY MANUAL ibss Group Note: The Source models P3, P4, and P5 each can be configured with one of two types of vacuum flanges to enable mounting the Source to an ashing chamber (for specimens / samples) or directly to laboratory equipment. The P3 and P4 both can accept KF40 and CF (ConFlat) flanges, whereas the P5 accepts KF25 and KF40 flanges.

  • Page 11: Unpacking The Gv10X

    GV10x OPERATION AND SAFETY MANUAL ibss Group Unpacking the GV10x 2.1. Unpacking and Inspection Before removing the GV10x Controller and Source from the original shipping carton, perform a visual inspection. Report any apparent damage to ibss Group if the shipping carton is punctured or broken.

  • Page 12: Installing

    GV10x OPERATION AND SAFETY MANUAL ibss Group Installing 3.1. Facilities Requirements See Appendix A: Technical Specifications. 3.2. Connect GV10x Source to Vacuum Chamber 3.2.1. Vent host vacuum chamber to be cleaned. 3.2.2. If applicable, attach the Spooler shipped with the GV10x onto the appropriate chamber port.

  • Page 13: Connect Gv10X Source To Controller

    GV10x OPERATION AND SAFETY MANUAL ibss Group 3.3. Connect GV10x Source to Controller The following hazardous energies are associated with the GV10x Source: electrical power, RF, and UV/IR. Proper care and caution should be observed before supplying power and during use. 3.3.1.

  • Page 14: Operating

    GV10x OPERATION AND SAFETY MANUAL ibss Group Operating The GV10x Downstream Asher can be operated from 1) GV10x-BT (benchtop) Controller Front Panel as described in section 4.1.2 or 2) remotely via the RS232 COM port (for either GV10x-BT or GV10x-2U Controllers) as described in section 4.1.3. Remote operation is supported with the published application programming interface (API) in Appendix C.
  • Page 15 GV10x OPERATION AND SAFETY MANUAL ibss Group 4.1.2.2. After Self -Test screens are flashed, the first 4 lines of the Information and Setup Screen (Figure 4-3a) will appear briefly and then the Operating Parameters Screen (Figure 4-4) will be shown. To review or modify Setup Parameters in Figures 4-3a, 4-3b, and 4-3c, press esc from the Operating Parameters Screen.
  • Page 16 GV10x OPERATION AND SAFETY MANUAL ibss Group adjusted up to Watt_Max or 70, whichever is lower. When the GV10x is mounted onto a Gentle Asher Chamber or if samples are to be cleaned in the SEM, ignition at elevated power may not be desirable. 4.1.2.3.
  • Page 17 GV10x OPERATION AND SAFETY MANUAL ibss Group 4.1.3. Setting Parameters with Remote Control Software 4.1.3.1. Establish physical connection between PC and GV10x (BT or 2U) Controller: To communicate with the GV10x remotely, connect a 9-pin Serial connector from the Controller back panel to a PC using the proper cable. A standard USB serial converter cable can be used with laptops that do not have exposed serial ports.
  • Page 18 GV10x OPERATION AND SAFETY MANUAL ibss Group 4.1.3.3. Setting Parameters from GV10x-RC15 to Control GV10x BT and 2U Controllers 4.1.3.3.1. Control Tab The primary parameters for GV10x operation are watts, hours, minutes, and seconds, shown as W, HH, MM, and SS in the circled portion of Figure 4-5b. Note: When the GV10x-RC15 software is not connected to the GV10x (as is the case below) or when the GV10x is connected and running, only watts may be changed.

  • Page 19: How To Run The Gv10X Downstream Asher

    GV10x OPERATION AND SAFETY MANUAL ibss Group 4.2. How to Run the GV10x Downstream Asher 4.2.1. Steps for GV10x Downstream Asher Operation 4.2.1.1. After completing installation as described in Section 3 and any time the Source is re-mounted onto the host chamber (see 3.2), pump down to insure that the host chamber reaches usual operating pressure.
  • Page 20 GV10x OPERATION AND SAFETY MANUAL ibss Group After a Pressure Trigger has started the plasma, the GV10x can be stopped (and started again if desired) from the GV10x-BT front panel or the GV10x-RC (“GUI”.) Pressure Trigger values can be any integer value from 10 thru 60 (in increments of 1.) The 2-digit trigger value equates to pressure readings in the 1E-5 to 1E-0 Torr range.
  • Page 21 GV10x OPERATION AND SAFETY MANUAL ibss Group NOTES ON ASHER OPERATION  Choosing the most effective run time and power level depends on the degree of chamber contamination, chamber size and the origin of HC contamination. The optimum operating parameters can only be determined after observing the results from different run times and power level settings.

  • Page 22: How To Tune The Gv10X Source

    GV10x OPERATION AND SAFETY MANUAL ibss Group 4.3. How to Tune the GV10x Source The GV10x Downstream Asher includes a matching network, which can be adjusted, or tuned, to minimize the reflected power (Wr) and maximize the power delivered to the plasma.

  • Page 23: Changing The Gv10X Asher Operating Pressure

    GV10x OPERATION AND SAFETY MANUAL ibss Group 4.3.5. After plasma ignition, slowly rotate C2 to reduce Wr to 0. A value of Wr < 15% of the Actual Power is acceptable. About Auto and Manual Ignition If the plasma ignites soon after RF Power is turned on without adjustment of C2, then it is auto-igniting.
  • Page 24 GV10x OPERATION AND SAFETY MANUAL ibss Group Table 4-2, Variable Constriction Turns vs. Pressure, shows operating pressure range while adjusting the 15-turn Precision Needle Valve for TMP and Scroll pump. Variable 60 l/m Scroll Plasma 71 l/s TMP Plasma Constriction Pressure Pressure Turns Open...

  • Page 25: Shutting Down / Locking Out

    GV10x OPERATION AND SAFETY MANUAL ibss Group Shutting Down / Locking Out The shutdown procedure should be followed at normal end of GV10x operation. The lockout procedure should be followed during part replacements and/or repairs. The release procedure should be followed to return the GV10x to normal service after previous lockout. 5.1.

  • Page 26: Release Procedure

    GV10x OPERATION AND SAFETY MANUAL ibss Group 5.3. Release Procedure When the GV10x is ready to return to service, properly release it from the isolated state. 5.3.1. Notify personnel who are affected by the lockout/tagout that the GV10x is in the process of being re-energized.

  • Page 27: Appendix A: Technical Specifications

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix A: Technical Specifications A.1. GV10x Plasma Source (P3, P4, P5 models) Plasma Source Patented IC Tube Air or O Operating Power Range 10 to 99 watts (limit of 70 watts is recommended) Operating Pressure Range 2.0 Torr to <5 mTorr Tuning...

  • Page 28: Appendix B: Safety Considerations

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix B: Safety Considerations B.1. Hazards Inherent in Equipment LOCATION RECOMMENDED SAFETY PROCEDURES Contained within Hazards are present only when equipment is energized and are not Controller enclosure exposed when covers remain in place. Contained within RF Hazards are present only when equipment is energized and are not Source enclosure...

  • Page 29: Inspection Of System Equipment (Gv10X Source And Controller)

    GV10x OPERATION AND SAFETY MANUAL ibss Group B.3. Inspection of System Equipment (GV10x Source and Controller) WHEN DESCRIPTION Daily, before Not required. start Daily, end-of-day Not required. Periodic If Source is left mounted to a vacuum chamber, observe that system base pressure is reached.

  • Page 30: Training Requirements

    GV10x OPERATION AND SAFETY MANUAL ibss Group B.5. Training Requirements The GV10x should be operated by a person already experienced with high vacuum analytical instrumentation where carbon and hydrocarbon contamination adversely affects quantitative results . No GV10x training is needed beyond familiarity with Operation and Safety Manual, and the proper adherence to instructions therein.

  • Page 31: Appendix C: Gv10X Remote Control Specifications

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix C: GV10x Remote Control Specification COM port settings are 9600,8,N,1,N. Transmission characters to the GV10x are case sensitive and spaces are not permitted. Commands begin with non-numeric characters. All messages IN & OUT end with a ‘carriage return’ ‘linefeed’ pair (0x0D 0x0A). This specification applies to PLC program version GVP101217.1210.2.ezc and later.
  • Page 32 GV10x OPERATION AND SAFETY MANUAL ibss Group TABLE C-2 Additional API Commands for GV10x Controllers Manufactured After Jan 15, 2015 New commands supported by PLC program ver. GVP141230.0000.4.ezc (12/30/2014) and later: Commands to GV10x Responses from GV10x Setting Parameters [mn ([ for Minimum Watts, mn=05-20) [mn ([ for Minimum Watts, mn=05-20) ]mn (] for Maximum Watts, mn=49-99) ]mn (] for Maximum Watts, mn=49-99)

  • Page 33: Appendix D: Gv10X Remote Control Test Report

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix D: GV10x Remote Control Test Report Cables The GV10x has been tested with the following USB serial converter cables: Jameco Electronics USB to DB9 Serial Adapter (387954) www.jameco.com JDI Technologies GoldX USB to DB9 Serial Converter (GXMU-1200) www.goldxproducts.com Operating Systems The GV10x Remote Control Software has been tested and verified on personal computers...

  • Page 34: Appendix E: Gv10X Asher Source Patents

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix E: GV10x Asher Source Patents US 7,015,415,B2 US 6,263,831, B1 US 6,112,696 Japan patent pending JP2006-554082 European patent pending EP1723663 Rev 2015-03-02...

  • Page 35: Appendix F: Tables And Figures

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix F: Tables and Figures Table 4-1. Range of Allowed Parameter Settings ................. 14 Table 4-2. Variable Constriction Turns vs. Pressure ..............24 Table C-1. API for GV10x Controllers Manufactured Prior to Jan 15, 2015 Table C-2.

  • Page 36: Appendix G: Revision History

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix G: Revision History April 28, 2014  All references to Run Hours Maximum Value changed from 49 to 99.  All references to GV10x Controller Power Requirement changed from 115-235VAC to 100-240VAC. ...
  • Page 37 GV10x OPERATION AND SAFETY MANUAL ibss Group  Section 4.2.1.4 (4.2. How to Run the GV10x Downstream Asher): Added explanation of use of Pressure Trigger.  Section 4.2.1.4 renumbered to 4.2.1.5  Section 4.2.1.5 renumbered to 4.2.1.6  Appendix H: Updated CB Test Certificate for testing completed February 2015 ...

  • Page 38: Appendix H: Cb Test Certificate (Copy)

    GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix H: CB Test Certificate (copy) Rev 2015-03-02...
  • Page 39 GV10x OPERATION AND SAFETY MANUAL ibss Group Appendix I: CE Declaration of Conformity (copy) Rev 2015-03-02...
  • Page 40 GV10x OPERATION AND SAFETY MANUAL ibss Group Rev 2015-03-02...
  • Page 42 ibss Group, Inc. 1559B Sloat Blvd. 270 San Francisco, CA 94132 1.415.566.5774 1.415.566.9779 Fax www.ibssgroup.com email: sales@ibssgroup.com GV10x OSM Rev 2015-03-02...

Table of Contents