Newport S-2000 Stabilizer Installation Manual
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Newport S-2000 Stabilizer Installation Manual

Vibration isolators and optical table
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Vibration Control System
TM
S-2000 Stabilizer
Vibration Isolators
and Optical Table Installation Manual
User's Manual

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Summary of Contents for Newport S-2000 Stabilizer

  • Page 1 Vibration Control System S-2000 Stabilizer Vibration Isolators and Optical Table Installation Manual User’s Manual...

  • Page 3: Warranty

    INDIRECT, SPECIAL, OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS. First printing 2009 © 2009 by Newport Corporation, Irvine, CA. All rights reserved. No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation.

  • Page 4: Table Of Contents

    Table of Contents Warranty....................iii   Table of Contents .................. iv   List of Figures ..................vi   General Information       Introduction ...................1     Getting Started................1     Unpacking and Inspecting .............1       Safety Considerations..............2  ...
  • Page 5   Table Top Oscillates..............21     System Leaks Air Constantly ............21     Oil Leak From Isolator ..............21     Adding Damping Oil ..............21   Factory Service    ...

  • Page 6: List Of Figures

    List of Figures Figure 1   — Isolator Position ................. 5   Figure 2   — Isolator Clamps and Mounting Holes ........6   Figure 3   — Isolator Leveling Wrench ............7   Figure 4   — Level Adjustment of Isolators............ 7  ...

  • Page 7: General Information

    It is possible to tailor the system to a wide variety of applications using the entire range of sizes and working surfaces. A typical Newport Vibration Control System consists of an optical table and vibration isolators.

  • Page 8: Safety Considerations

    The S-2000 Stabilizer™ isolator must be mounted so that its axis is not more than 0.5 degrees from vertical. This is necessary for the isolator to function properly in the horizontal mode.

  • Page 9: Air Supply Requirements

    Note that the maximum operating pressure for the system is 95 psig (6.7 kg/cm The Newport Model ACGP air compressor is an extremely quiet source of clean, pressure regulated air. If another compressor or plant air is used, the Newport model ARF Air Regulator Filter should be used to ensure maintenance free operation.

  • Page 10: Warranty Information

    Warranty information may be found on the page preceding the Table of Contents in this manual. Should it become necessary to exercise the warranty, contact your Newport representative to determine the proper course of action. Newport Corporation maintains offices throughout the United...

  • Page 11: Assembly

    Assembling the System 2.1.1 Table Installation Assistance Optical tables are heavy. Even a small table top weighs over 500 pounds (227 Kg). Contact Newport or your local sales representative for help in preparing your facility. 2.1.2 Positioning the Isolators Figure 1 shows the correct isolator positions for standard table sizes. Table 1 shows the correct dimensions (A, B, &...

  • Page 12: Installing Table Top

    2.1.3 Installing Table Top If your table is equipped with a Doubler Interface be sure to follow the instructions in Section 2.4 for assembling the table sections prior to installing them on the isolators. WARNING Table tops are heavy! Use a forklift or other appropriate equipment.

  • Page 13: Leveling The Table

    CAUTION When lowering the table on to the supports, do not allow the table to shift sideways. Doing so could damage the isolators and cause degradation in performance. Leveling the Table Use the following procedure to level the table. The special wrench (Figure 3) is for all adjustments.

  • Page 14: Isolating The Table Top

    4. When the table is completely level, ensure by eye that every isolator support plate is snug against the table bottom and that each centering disk is centered in its guide (Figure 4). 5. Use the level to confirm that the table top is still level and equally supported by all isolator support plates.

  • Page 15: Figure 5 - Ipv Leveling Valve

    Table height sensor Control arm Isolator pressure gauge Table height adjustment screw Air supply Mounting screw holes Metering needle valve Air line to isolator Over-pressure relief valve Figure 5 — IPV Leveling Valve Table height adjustment screw   Figure 6 — Valves attaching to isolator The valves should be attached to the isolators as shown in Figure 6 after installing the table top.

  • Page 16: Connecting Air Lines

    Position the valve at the bottom of the bracket slots until after the table is installed and leveled. 3. Rotate the control arm on valves “A” in Figure 7 so that they point towards the nearest corner of the table. 4.

  • Page 17: Figure 8 - Air Line Routing

    3 Isolator Schematic Leveling Valves 3 Reqd 2 Reqd Table Width Less 12” Regulator Typ All Tables Filter Air Supply 4 Isolator Schematic Leveling Valves 3 Reqd Regulator Filter 3 Reqd Air Supply 6 Isolator Schematic Leveling Valves 3 Reqd Regulator Filter 5 Reqd...

  • Page 18: Figure 9 - Detail Of Valve Connections, Single Isolator

    Metering needle valve Figure 9 — Detail of Valve Connections, Single Isolator 2. Close the metering needle valve (Figure 9) on each valve and then open ⁄ turn for each isolator that is connected to it. For example, if the valve controls two isolators, the needle valve is opened 1 full turn.

  • Page 19: Adjusting Leveling Valve Sensors

    the control arms further down. Confirm that the needle valves are open ⁄ turn per isolator supplied. NOTE: If the table oscillates after it floats, decrease the air pressure or close the needle valves slightly. 6. In clean room applications the “EXH” (exhaust) port on the valves may be connected to the clean room vacuum system to capture the valve exhaust.

  • Page 20: Installing Tables With The Doubler Interface

    Above alignment tabs Even with alignment tabs Below alignment tabs Too high Correct height Too low No gap Notice Incorrect centering Correct centering Figure 11 — Floating Height Adjustment and centering Installing tables with the Doubler Interface The following instructions are applicable only to those tables equipped with the Doubler Interface.
  • Page 21 NOTE: It may be necessary to use jack stands to support the first table section if fewer than four isolators are located under the section. Position the second table section on three jack stands mounted on dollies. Adjust the position of the table so that it is at the same height as, and adjacent to, the first table section.

  • Page 22: Figure 13 - Double Bolt Tightening Sequence

    Figure 13 — Double Bolt Tightening Sequence...

  • Page 23: Operation

    Operation Principles of Operation The S-2000 Stabilizer™ Isolators provide one of the best methods of vibration isolation for critical applications. The system operates on the principle of air pistons, which are equivalent of soft springs. The main advantage of the Newport system over other designs are low vertical resonant...

  • Page 24: Maintenance

    Maintenance 3.3.1 Cleaning Newport optical table tops are made of 400 series stainless steel. This material is relatively corrosion resistant. It may be cleaned by applying non- abrasive liquid household cleaner to a rag and wiping the table top. Avoid abrasive cleaners as they will foul the mounting holes.

  • Page 25: Air Quality

    Air Quality Oil, water, or debris in the air supply may contaminate the leveling valves or isolator damping system and degrade performance. Use of the Newport model ARF Air Regulator and Filter in the air supply will prevent this occurrence. The filter does require occasional cleaning.

  • Page 26: Troubleshooting

    Troubleshooting Table Top Does Not Float Use the following procedure if the table top does not float, or lift up, when pressure is applied to the isolators. Ensure that the supply pressure is 5–10 psig (0.4–0.7kg/cm ) above the pressure reading of any of the leveling valves. If the load is increased, the pressure should be increased to maintain the difference between supply and valve pressure.
  • Page 27 Table Top Oscillates If the table top oscillates or “hunts”, you may have a set up with a high center of mass. Refer to the information in Section 3.2 or consult your Newport representative or Newport Corporation for further assistance.
  • Page 28 5. Use a clean, small diameter rod to check the level. When checking the level, be sure the rod sits on the bottom of the piston and not on the narrow ledge at the bottom of the support shaft. Reverse Steps 2 and 3 to re-assemble the isolator. Return the support plate to the position noted in Step 2.
  • Page 29 2. Purchase order number. 3. Complete description of the problem. If components are to be returned to Newport Corporation, you will be given a Return Number, which you should reference in your shipping documents. Please fill out the service form located on the next page, and have the information ready when contacting Newport Corporation.
  • Page 30 RoHS (Restriction of Hazardous Substances) Certificate of Compliance MKS Instruments, Inc. hereby certifies that the products listed in the table below are compliant with the European Union’s RoHS directive 2011/65/EU (effective 22 July 2017) regarding the restriction of the use of certain hazardous substances in electrical and electronic equipment. The products listed below are compliant to RoHS requirements for concentration limitations, by weight of homogeneous material, of the following six substances: Lead...
  • Page 31 MKS RoHS2 PRODUCT EXEMPTION LISTING MKS Product MKS Product Annex III Annex III Number Description Exemption # Exemption Description MKS Instruments, Inc. Page 2 of 2 Document Number: MKS-CD-1138 MKS CONFIDENTIAL Revision: B...
  • Page 32 Vibration Control System NSTRUCTION ANUAL...
  • Page 33 This warranty is in lieu of all other warranties, expressed or implies, including any implied warranty of merchantability or fitness for a particu- lar use. Newport Corporation shall not be liable for any indirect, special, or consequential damages. ©1991, Newport Corporation Irvine, California, U.S.A.
  • Page 34 Table of Contents Warranty ....................... ii List of Figures ..................... iv Specifications ....................... v Section 1 — General Information ..............1 Introduction ....................1 Getting Started ..................1 Unpacking and Inspection ..............1 Safety Considerations ................1 Table Placement ..................3 Air Supply Requirements ..............3 Warranty Information ................4 Options and Accessories ...............5 Section 2 —...

  • Page 35: List Of Figures

    List of Figures Figure Title Page Vibration Control System Assembly .............2 Isolator Position ..................6 Isolator Clamps and Mounting Holes ............7 Isolator Leveling Wrench ................8 Level Adjustment of Isolators ..............8 IPV Leveling Valve ................... 9 Leveling Valve Mounting ..............10 Orientation of Control Arm ..............11 Air Line Routing ..................

  • Page 36: Specifications

    Settling Time: (after 5-lb. weight removal) <1.5 sec. Typical Air Pressure Range: 10 to 85 psi (0.7 to 6.0 kg/cm * Flatness value provided for a typical 4' × 8' × 12" table. Request Newport “Table Quality Specification” for complete specifications.
  • Page 37 Isolation System Transmissibility 0.01 0.001 FREQUENCY (Hz) Vertical Transmissibility ( at maximum recommended load 0.01 FREQUENCY (Hz) Horizontal Transmissibility...
  • Page 38 Valve: Model IPV ±0.010 in (.25 mm) standard** Leveling Accuracy: Materials: Glass fiber reinforced polycarbonate brass Available in non-magnetic version Exhaust may be captured by clean room vacuum system ** Higher accuracies are available by special order. Table Height Sensor Control Arm Exhaust Port Over-pressure...
  • Page 39 viii...

  • Page 40: Section 1 - General Information

    Section 1 General Information Introduction The Newport Vibration Control System provides an ideal working platform for vibration sensitive devices such as interferometers, microscopes, and balances. The table surface is isolated from floor motion using the Stabilizer™ pneumatic suspension system. The versatile Newport Vibration Control System is available in a variety of sizes, working surfaces, and options.
  • Page 41 Stabilizer™ Isolator Leveling Valve (3 per system) Clamp (3 per Isolator) Wrench Holes Level Adjustment Screw Leveling Valve (3 per system) Figure 1.1 — Vibration Control System Assembly...

  • Page 42: Air Supply Requirements

    4 25 9 Note that the maximum operating pressure for the system is 100 psig (7.0 kg/cm The Newport Model ACMP air compressor is an extremely quiet source of clean, pressure regulated air. If another compressor or plant air is used,...

  • Page 43: Warranty Information

    Newport model ARF Air Regulator/Filter should be used to ensure maintenance free operation. These filters prevent water and dirt from getting into the leveling valves and causing the valves to fail due to clogging. The supply should include a valve so that the air may be shut off during maintenance or extensive setup when the load is changed drastically.

  • Page 44: Options And Accessories

    Options and Your Vibration Control System may include one or more of the following Accessories options. Options Model No. Air Compressor ................ACMP Retractable Casters ..............XLC Tie Bar & Caster Set ..............XLTC-XXX Doubler Interface ................RSD, RSW Laser Access Hole .................AH Clean Room Valve Exhaust System ..........

  • Page 45: Section 2 - Assembly

    2.1.1 Table Installation Assistance the System Optical tables are heavy. Even a small table top weighs over 500 pounds (227 Kg). Contact Newport or your local sales representative for help in preparing your facility. 2.1.2 Positioning the Isolators Figure 2.1 shows the correct isolator positions for standard table sizes.

  • Page 46: Installing Table Top

    2.1.3 Installing Table Top If your table is equipped with the Doubler Interface be sure to follow the instructions in Section 2.4 for assembling the table sections prior to installing them on the isolators. Warning Table tops are heavy! As described in Section 2.1.1, use a forklift or other appropriate equipment.

  • Page 47: Leveling The Table

    Leveling the Table Use the following procedure to level the table. The special wrench (Figure 2.3) is for all adjustments. Support Clamp Bolts Level Adjustment Hex Nut Support Plate Spanner Wrench Figure 2.3 — Isolator Leveling Wrench A. Refer to Figure 2.4. As shown, use one of the special wrenches to hold the hex nut stationary.

  • Page 48: Isolating The Table Top

    Isolating the 2.3.1 Installing Leveling Valves Table Top The IPV leveling valve is shown in Figure 2.5. Three valves are used in all systems, regardless of the number of isolators, as only three points are required to determine a plane. The leveling valve locations are selected such that they form the largest triangle possible under the table.
  • Page 49 Valve Mounting Bracket Nut & Washer Control Arm Nut Plate Mounting Screws (2) Washers (2) Leveling Valve Figure 2.6 — Leveling Valve Mounting 10-32 Screws (2) The valves should be attached to the isolators as shown in Figure 2.6 after installing the table top.

  • Page 50: Connecting Air Lines

    E. Gently tighten the clamping screw on the control arm pivot. (Figure 2.5) F. For systems with more than four isolators, use the same basic setup just described: Two valves control the height of the two end corners (A & A) while the third valve (B) controls the height of the opposite end.
  • Page 51 Leveling Valves 3 Isolator Schematic 3 Reqd Table Width 2 Reqd Less 12" Regulator Typ All Tables Filter Air Supply 4 Isolator Schematic Leveling Valves 3 Reqd Regulator Filter 3 Reqd Air Supply 6 Isolator Schematic Leveling Valves 3 Reqd Regulator Filter 5 Reqd...
  • Page 52 2. Connect a length of grey tubing (supplied with the valves for use on the valve barb fitting) between the hose barb on the valve and the inlet connector on the isolator (Figure 2.9). If more than one isolator is supplied by a valve, use “Tee” connectors as required (Figure 2.10). Connect the grey tube from the valve to the “Tee”...

  • Page 53: Adjusting Leveling Valve Sensors

    F. In clean room applications the “EXH” (exhaust) port on the valves may be connected to the clean room vacuum system to capture the valve exhaust. Order Newport kit #CE-1. NOTE: Exhaust must be routed to a vacuum system. Backpressure in the tubing will cause the exhaust air to leak from the valve.

  • Page 54: Installing Tables With The Doubler Interface

    Installing Tables with The following instructions are applicable only to those tables equipped with the Doubler Interface the Doubler Interface. Figure 2.12 shows a typical Doubler Interface System. A. Use the procedures in Section 2.1.2 and 2.3.1 to assemble the isolators for both table sections.
  • Page 55 H. Tighten all of the bolts until they are finger-tight or until they just begin to move the table sections together. Do not force or over- tighten the bolts. I. Repeat steps G and H until the two table sections are completely drawn together.

  • Page 56: Section 3 - Operation

    (Q) and a Pendulum horizontal decoupling system for effective isolation from low amplitude vibration. Newport optical tables provide a working surface that is statically rigid with high internal tuned damping for high dynamic rigidity and minimal response to environmental disturbances.

  • Page 57: Maintenance

    3.3.1 Cleaning Newport optical table tops are made of 400 series stainless steel. This material is relatively corrosion resistant. It may be cleaned by applying non-abrasive liquid household cleaner to a rag and wiping the table top.

  • Page 58: Spare Parts

    3.3.3 Spare Parts The following spare parts may be ordered for replacement on your Newport Vibration Control System. Part Name Part No. Support Plate Assy Leveling Valves ..............IPV Leveling Valve Control Arm Assy (page 6) ....18635 Cowling Air Regulator/Filter ............ARF Translucent Tubing ..........

  • Page 59: Section 4 - Troubleshooting

    D. Air currents or pressure fluctuations may be disturbing components on the table. This is easily corrected by using one of the Newport Table Enclosures. Refer to Section 1.8 for sizes and part numbers.

  • Page 60: Oil Leaking From Isolator

    If more than ⁄ cup (30ml) of oil is lost, add additional oil (available from Newport Corporation) as directed in Section 4.6. Losses of less than ⁄ cup will not affect the isolator performance. Total volume of damping oil per isolator is approximately ⁄...

  • Page 61: Section 5 - Factory Service

    2. Purchase order number. 3. Complete description of the problem. If components are to be returned to Newport Corporation, you will be given a Return Number, which you should reference in your shipping documents. Please fill out the service form located on the next page, and have the information ready when contacting Newport Corporation.

  • Page 62: Service Form

    Service Form Vibration Control Products Newport Corporation U.S.A. Office: 714/863-3144 FAX: 714/253-1800 Name RETURN AUTHORIZATION # ________________________________________________________________________ _________________________________ Company (Please obtain prior to return of item) __________________________________________________________________ Address _____________________________________________________________________ Country Date ____________________________________________________________________ _____________________________________________________________________ P.O. Number Phone Number _______________________________________________________________ _____________________________________________________ Item(s) Being Returned:...
  • Page 65 1791 Deere Avenue Irvine, CA 92606 (In U.S.): 800-222-6440 Tel: 949-863-3144 Fax: 949-253-1680 Internet: sales@newport.com Visit Newport Online at: www.newport.com P/N 18615-01 Rev. H Newport Corporation, Irvine, California, has IN-04913 (08-00) been certified compliant with ISO 9001 by Printed in the USA...

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