Jandel RM3000 Instructions Manual
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Jandel RM3000 Instructions Manual

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Rm3000 Test Unit Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Page 1
Rm3000 Test Unit Software Instructions . . . . . . . . . . . . . . . . . . . . . Page 11
Rm3000 Usb/Rs232 Command Reference Sheet . . . . . . . . . . . . . . . Page 17
Rm3000 Status Output Word . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Page 18
RM3000 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Page 19
Rm3000 Test Din Plug . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Page 22

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Summary of Contents for Jandel RM3000

  • Page 1 RM3000 USB/RS232 Command Reference Sheet ....Page 17 RM3000 Status Output Word ....... Page 18 RM3000 Calibration .

  • Page 2: Rm3000 Test Unit Instructions

    1) A Jandel RM3000 Test Unit 2) A power lead 3) A 100 ohm test resistor 4) A green case key which can be used to open the RM3000 cabinet (not recommended) 5) A copy of the RM3000 software for computer control and exporting...
  • Page 3 There are also a number of buttons, the names used throughout this manual are listed here: To the left on the front of the unit you will find: Numeric Keypad Current level buttons Ohm button To the right of these there are four more buttons: Forward button Standby / Auto...
  • Page 4 High button Low button Store button Mode / Test Button Operation of the RM3000 Selecting a current The keypad is used to input the desired current. It is used in combination with the current level buttons. The current level buttons are...
  • Page 5 resistivity information on probe spacing or wafer thickness may be required from the user which is discussed later in the manual. If the unit is switched off then next time it is switched on it will be on the default setting of toggling between mV and ohms/square.
  • Page 6 System Test The RM3000 is supplied with a 100 ohm test resistor. When this resistor is plugged into the rear of the unit and the Mode/Test button is pressed the RM3000 will perform a self test against an internal reference (this process takes several minutes).
  • Page 7 4. Time. Here the correct time can be entered for time stamping readings taken by the RM3000. The time is set by entering the correct time using the keypad by entering hours, minutes and seconds separated by a period in the format HH.MM.SS and then pressing ‘store’.
  • Page 8 ‘FWD’ key. This will cause an error and the message “Contact Limit” will be displayed. By removing the resistor the RM3000 can’t drive the current – you can therefore equate this to a four PAGE 7...
  • Page 9 RM3000 having a problem driving the current. This could be because the sample is too insulating, because the current needles are not in proper contact with the sample, or simply that a lead is disconnected! Using a lower current will sometimes prevent a ‘Contact Limit’...
  • Page 10 ‘Out of Range’ is displayed it is possible to measure the voltage using an external voltmeter plugged into the rear of the RM3000 (this is where the voltage exceeds 1.2V). Error Messages During attempting a reading several error messages are possible instead of a reading.
  • Page 11 1966 (revised 1968) Haldor Topsoe book, "Geometric Factors in Four Point Resistivity Measurement", with each page available as an individual PDF file. Software The next section of the manual deals with the use of the software supplied with the RM3000. PAGE 10...

  • Page 12: Rm3000 Test Unit Software Instructions

    Note that the LED’s are also represented. In figure 1 the unit is in ‘standby’ and so the LED next to the standby button is illuminated. The RM3000 can be controlled via the software by clicking on the display buttons as if pressing the unit’s buttons. Please refer to the RM3000 instruction manual for how to use the unit.
  • Page 13 FIGURE 2 There are a number of options and these can be used as follows: Connect – if the computer and RM3000 have ceased communicating after a period of inactivity then clicking this will reconnect them Save Readings – if you want to save the readings that are showing in the ‘Stored Readings’...
  • Page 14 About – this gives software version and copywrite information RM3000 State – this gives the pop-up shown in Figure 4 FIGURE 4 This represents the state of the RM3000 in its basic form and can be used for diagnostics in case of suspected errors. PAGE 13...
  • Page 15 Settings – this enters the menu for selecting auto-detect or manual port select for the RM3000, and to give the location of the default spreadsheet program Enter Menu (MODE button) – this enters the menu as if pressing and holding the ‘MODE’ button on the RM3000 to adjust probe spacing, time, date etc.
  • Page 16 (The next two options require user input for the calculation) FIGURE 6 Bulk Resistivity for Wafers – this can be used where the bulk resistivity of a thin material is required. It outputs the current setting and voltage measurement, along with the calculated Bulk Resistivity. For this type of measurement it is necessary to input the sample thickness in centimetres (on the left in Figure 6) I.e.
  • Page 17 Keyboard operation With the software running, or through interface software such as HyperTerminal, it is possible to control the RM3000 using the computer keyboard. The remote control commands simply mimic the operation of the keypad.

  • Page 18: Rm3000 Usb/Rs232 Command Reference Sheet

    RM3000 USB/RS232 COMMAND REFERENCE SHEET ASCII HEX Description Key(s) Download – Must be followed by a memory entry number 0-49 as ASCII N/A 61-64 Selects pre-set A-D A,B,C,D 30-39 Represents a digit for current entry Reverse Mode Forward Mode Force the remote probe to enter position based on the status of STBY...

  • Page 19: Rm3000 Status Output Word

    RM3000 Status Output Word These 32 bits of status information are outputted when using the g command. It is in Hexadecimal Word Format Byte Description FWD Mode, Also represents the FWD LED REV Mode, Also represents the REV LED Not used...

  • Page 20: Rm3000 Calibration

                                  Required Equipment    o Bench top DVM with 5 decimal places resolution  o 1M, 1K and 100R Test Resistors in plugs 0.1% accuracy (refer to separate  document : JL21070602.pdf for test plug details)  o A PC with USB, RM3000 Drivers and a Serial Terminal Emulator (such as  HyperTerminal)        Procedure    1. Connect the USB and power on the RM3000. Connect the Serial Terminal  Emulator with setting 9600,n,8,1. Check communications by sending a ‘g’ –  the unit should respond with an LCD dump. Now send the unit a ‘*’ to put it  into factory mode.        PAGE 19...
  • Page 21 Jandel  RM3000 Calibration       2. Remove the lid using green OKW key. Ensure to push on the relevant slot  positions as shown in the images below.                            3. Enter at the Terminal: 999.99uflz After a short delay, the unit will change to  current 999.99uAmps, FWD mode, LOW mode and has zeroed itself.      4. Connect VR2 to rear 4mm sockets and connect a 1K resistor plug. Locate  potentiometer VR2. Adjust pot until the external DVM reads 1V +/‐ 500uV.  Send an ‘x’. The unit replies with the following:      Calibration Set 1.000V  Factor 3372.57 Success  Select FWD Change to HI and check ZERO  Then Press x    This message could also display ‘failed’ if the calculated factor is out of range  ( the 1v ref was out )    5. The unit now changes its range to 100uA (although the LCD is not updated). ...
  • Page 22 Jandel  RM3000 Calibration     8. Remove the external DVM connections as the loading impedance can cause  the readings to change.     9. Type 100uhz The LCD will change to a reading of 100mV and go into HI mode.  Adjust VR4 until the LCD reads 100.00mV.    10. Type 999.99uflz the unit will now go back to 999.99uA, LOW mode. Re‐adjust  VR2 until the LCD reads 999.99mV. Note that 9) and 10) are interactive in  terms of the adjustments and will both need to be repeated until both  readings are correct. The allowed error is 999.8  1000.2 in low mode and  99.97  100.03mV in HI mode.    11. The unit is now calibrated to the required accuracy. However, the current  source can be out of spec at the extreme ends of its range (10nA, 100nA and  10mA ranges) and adjustments are necessary for these ranges using the  software adjustments. Fit the 100R test resistor plug.    12. Send ‘10mflz’. After a short delay, the unit will change to 10mA, LOW mode  and zero itself.    13. Send ‘@’ The unit will ask for a value of between ‐127 and +128. This  arbitrary value will cause a small adjustment in the current output and the  result can be seen on the LCD/voltage reading. The adjustment is non‐ accumulative so keep sending ‘@’ followed by a value until the display reads  1000mV. The acceptable error is 999.81000.2    14. Send ‘z’, ensure the reading is still in the acceptable error range after a zero.  If not, repeat 13).    15. Remove the 100R test plug and replace with 1M test plug. Send ‘10nfhz’. ...
  • Page 23 106400006 104311101 190000001 27/10/08 NEW PART NUMBERS PAGE 22 ASSYRM3ARTP...

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