MKS Spectra 138A Instruction Manual
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MKS Spectra 138A Instruction Manual

MKS Spectra 138A Instruction Manual

Portable analytical system
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Instruction Manual
MKS Spectra Type 138A
Portable Analytical System
LP101017 Rev 1.02
April 2002

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  • Page 1 Instruction Manual MKS Spectra Type 138A Portable Analytical System LP101017 Rev 1.02 April 2002...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments Spectra Products.
  • Page 3 EC DECLARATION OF CONFORMITY Spectra SensorTech Ltd. Cowley Way Crewe Cheshire CW1 6AG United Kingdom DECLARES THAT THE FOLLOWING PRODUCTS: LM62, LM10 VACSCAN 100 LM63, LM10, LM4 VACSCAN PLUS 100, 200 LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300 LM56 MICROVISION LM70, LM76 MICROVISION PLUS LM77 VISION 1000P LM79 VISION 1000I...
  • Page 4 Additional Installation Maintenance and Operating Instructions In order to comply with European regulations, the following procedures must be followed :- INSTALLATION The installation procedures given in the operating and technical manuals must be followed, in addition to these instructions. The mains power cable must conform to local regulations and must have a protective earth (PE) conductor securely connected to the power plug protective earth contact.
  • Page 5 For the period commencing with the date of shipment of this equipment and ending one year later, MKS Spectra will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
  • Page 6 Document Control Revision 1.00 Date 20 Feb 2001 Change New document based on MKS Instruments UK document 1380004D...

  • Page 7: Table Of Contents

    Contents Errata and addenda ...............i Safety Section 1............3 1.1. Symbols used in this manual ..............3 1.2. Warning symbols..................4 1.2.1. General..................4 1.2.2. Other symbols ................4 1.3. Safety procedures and precautions ............5 Overview Section 2..........10 Installation Section 3.
  • Page 8 4.7. Inlet System...................22 4.8. Operation via flexible connection ............22 4.9. Operation with remote mounted analyser..........23 4.10. Operation with atmospheric inlet ............24 Troubleshooting Section 5......27 Troubleshooting Section 6......31 6.1. General ....................31 6.2. Primary Pump..................31 6.3. Turbo Pump...................31 6.4. Cold Cathode Gauge ................31 6.5.

  • Page 9: Errata And Addenda

    Errata and addenda This page is deliberately left blank. PAS Trolley Manual Page i LP101017 Rev 1.02...
  • Page 10 This page is deliberately left blank. PAS Trolley Manual Page ii LP101017 Rev 1.02...

  • Page 11: Safety

    Section 1. Safety Please read this section of the WARNING manual. It contains important safety information. 1.1. Symbols used in this manual Definitions of WARNING, CAUTION and NOTE messages used in this manual. WARNING The WARNING sign denotes a hazard to personnel. WARNING boxes are used where failure to observe the instructions could result in personal injury or...

  • Page 12: Warning Symbols

    CAUTION and WARNING instructions MUST be observed. MKS Spectra accepts no liability for any injury or damage resulting from a failure to observe CAUTION or WARNING instructions. 1.2. Warning symbols 1.2.1.General Various warning labels and symbols may be attached to the instrument their general use is explained below.

  • Page 13: Safety Procedures And Precautions

    MKS Instruments assumes no liability for the customer’s failure to comply with these requirements. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not attempt component replacement and internal adjustments.
  • Page 14 Upon loss of the protective-ground connection, all accessible conductive parts (including knobs and controls that may appear to be insulating) can render an electrical shock. GROUND AND USE PROPER ELECTRICAL FITTINGS Dangerous voltages are contained within this instrument. All electrical fittings and cables must be of the type specified, and in good condition.
  • Page 15 DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the instrument.
  • Page 16 Do not use this, or any other gauge with a hot filament, with explosive gas mixtures or with flammable gases, which could form explosive gas mixtures in air. If the filament or control circuit fails the filament could ignite the mixture. With some gas mixtures, an exothermic catalytic reaction could occur at the filament, causing ignition of the gas.
  • Page 17 This page is deliberately left blank. PAS Trolley Manual Page 9 LP101017 Rev 1.02...

  • Page 18: Overview

    Overview This document concerns the Portable Analytical System (MKS Type 138A) as supplied by MKS Instruments (UK) Ltd. It is intended to be used in conjunction with the Spectra RGA manual ‘Vac Check Manual ’ (LP101010 Rev 2.0 Aug 98).
  • Page 19 PAS Trolley Manual Page 11 LP101017 Rev 1.02...
  • Page 20 This page is deliberately left blank. PAS Trolley Manual Page 12 LP101017 Rev 1.02...
  • Page 21 PAS Trolley Manual Page 13 LP101017 Rev 1.02...

  • Page 23: Installation

    Section 3. Installation Caution Initial installation and setup should only be carried out by MKS engineers. 3.1. Environmental Requirements The following guidelines are intended to assist with the installation and use of the Type 138A Portable Analytical System. 1. Only use the instrument in a situation where the normal operating temperature of between 15°C and 30°C will always be maintained.

  • Page 24: Electrical Connections

    3.3. Testing The customer should not connect or use the instrument until it has been checked and tested at the customers site by an MKS engineer. PAS Trolley Manual Page 16 LP101017 Rev 1.02...
  • Page 25 PAS Trolley Manual Page 17 LP101017 Rev 1.02...

  • Page 27: Section 4. Setup And Operation

    Section 4. Setup and operation 4.1. Setup Provided the Portable Analytical System has been installed correctly it should operate without adjustment or setup. The equipment contains no user adjustable parts apart from: Sampling inlet system (see section ‘Inlet System’). Cold Cathode gauge set points (see section ‘Cold Cathode Gauge’) Bakeout heater temperature set point (see section ‘Bakeout Heater’) 4.2.

  • Page 28: Switching On

    The Cold Cathode gauge normally requires no setup. However the pressure setpoint is used to protect the RGA, and this may need to be adjusted depending upon the application. Refer to MKS before adjusting them. The normal setting is 5x10...

  • Page 29: Switching Off

    4.5. Switching Off To switch off the instrument first turn the PUMPS switch to off. Then turn off the MAIN POWER switch to off (‘0’). It is advisable not to move the instrument for several minutes to allow the turbo pump to stop. The instrument can now be disconnected from the main electrical supply.

  • Page 30: Inlet System

    4.7. Inlet System The RGA analyser can be connected to the vacuum system to be tested in several ways: • Via a flexible vacuum connection from the analyser (Conflat flange) with the analyser mounted in the case. • With the analyser mounted directly on the vacuum system under test (remotely from the base unit or ‘cart’).

  • Page 31: Operation With Remote Mounted Analyser

    RGA is operating at its optimum pressure and that all interlocks are satisfied. For process pressures between 1x10 and 10 mbar, the high conductance valve should be closed and the needle isolation valve opened which allows the needle valve itself to be adjusted to attain the required operating pressure as described above.

  • Page 32: Operation With Atmospheric Inlet

    The operation of the inlet valves is as described above. Caution Follow the Switching off procedure before removing the analyser from the cart. Caution When mounting the analyser unit on any remote process chamber or vacuum system ensure that it is adequately supported.
  • Page 33 Warning Under no circumstances must the analyser unit be removed from or replaced into the instrument with it still connected to the main electrical supply. PAS Trolley Manual Page 25 LP101017 Rev 1.02...

  • Page 35: Troubleshooting

    5. Turbo starts - ‘at speed’ indicator does not light. Poor vacuum due to leak - check all vacuum connections. Poor vacuum due to primary pump performance - refer to MKS Problem with turbo controller/turbo pump - refer to MKS.
  • Page 36 Poor vacuum due to primary pump performance - refer to MKS Turbo pump overheating. Check turbo cooling fan. Problem with turbo controller/turbo pump - refer to MKS. 7. Cold Cathode gauge does not switch on. Turbo pump not at speed.
  • Page 37 14. Heater controller indicates, heater does not get hot. Check fuse FS2. PAS Trolley Manual Page 29 LP101017 Rev 1.02...

  • Page 39: Troubleshooting

    Certain components do have specific requirements and these are outlined below. In all cases it is recommended that the unit be returned to MKS for service. 6.2. Primary Pump This item requires periodic maintenance to ensure full performance.

  • Page 40: Rga Head

    The RGA head contains no user serviceable parts other than the filament. Refer to the RGA Operation Manual for more information. 6.6. Service/Repair Contact MKS Instruments UK Ltd should any problems be experienced with the instrument. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
  • Page 41 PAS Trolley Manual Page 33 LP101017 Rev 1.02...

  • Page 43: Appendix 1. Related Documents

    Sensor operation manual (if fitted). 8. CAL - 3200 Temperature Controller instruction manual (if fitted). Note; all thwe MKS Spectra manuals will be found with this manual in the Spectra A5 size white ring binder. PAS Trolley Manual Page 35...
  • Page 44 This page is deliberately left blank. PAS Trolley Manual Page 36 LP101017 Rev 1.02...

  • Page 45: Appendix 2. Returns Form

    Appendix 2. Returns form The returns form provides MKS Spectra with vital Health and Safety clearance This form must be used when returning analysers and other equipment for service. A completed copy of this form should be faxed or sent by post to ensure that we have this information before we receive the equipment.
  • Page 46 RETURNS FORM 1. Please complete the form and fax or send by first class post to the appropriate Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
  • Page 47 City Zip/Postal Code User’s Name: Phone No.: Equipment Shipped Item 1: Serial No.: Item 2: Serial No.: Item 3: Serial No.: PAS Trolley Manual Page 39 LP101017 Rev 1.02...
  • Page 48 Please describe the system fault in detail: Details of all substances pumped or coming into contact with the returned equipment. Chemical names: Precautions to be taken in handling these substances: Action to be taken in the event of human contact or spillage: I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named above, that the information given is correct and that the following actions have been taken:...

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