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entegris InVue CR288 User Manual

Concentration monitor
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ADVANCED MATERIALS HANDLING
|
MANUAL
InVue
CR288
®
Concentration
Monitor
User guide

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Summary of Contents for entegris InVue CR288

  • Page 1 ADVANCED MATERIALS HANDLING MANUAL InVue CR288 ® Concentration Monitor User guide...
  • Page 2 Installation and Use Manual | Entegris, Inc.

  • Page 3: Table Of Contents

    Calculate the TCC ............11 Terms and Conditions of Sale ........32 Implement the Calculated TCC ........ 11 Option: Run or Continue Calibration ...... 11 Calibrate Sensor to a Chemical ........ 12 Basic Procedure ............12 Installation and Use Manual | Entegris, Inc.

  • Page 4: Safety

    SAFE DISPOSAL When disposing of any component of the CR288 concentration monitor, observe the local and national requirements for the disposal of electrical and electronic equipment. Additional technical information is posted on www.entegris.com. Installation and Use Manual | Entegris, Inc.

  • Page 5: User-Supplied Tools And Equipment

    0  –   5 .5 bar (0  –   8 0 psig) Site-specific Location relative to Upstream of pump/bellows installation tools, pump/bellows mounts Location relative to Downstream of pressure- pressure-regulating regulating device device Installation and Use Manual | Entegris, Inc.

  • Page 6: Other Flow Considerations

    Figure 3. Alternate orientation for minimum bubble rejection. The system will always be powered on when connected to a power source. Mounting an external power switch to control the DDU’s power supply is recommended. Installation and Use Manual | Entegris, Inc.

  • Page 7: Connect Cr288 Sensor(S) To Ddu

    1. Wire 24 volts according to the terminal block. See Terminal Block Pinout. Digital alarm 2 2. Optional: If using 4-20 mA outputs, wire according Figure 6. Terminal block pinout. to the Terminal Block Pinout. 3. Connect terminal block to DDU. Installation and Use Manual | Entegris, Inc.

  • Page 8: Install Drivers And Set Port Bps Rate

    This file is used to restore the sensor to INSTALL AND LAUNCH 288-CONNECT SOFTWARE factory settings. 1. Download and run the Entegris 288- connect installation program from the entegris.com website. NOTE: You will need to complete a user profile.

  • Page 9: Check Factory Initialization

    NOTE: If the TIR curve is not flat: a. Reconfirm that the CR288 window is clean and dry. b. Perform a re-zero. See Re-zero for instructions. If the problem persists, contact Technical Support. Figure 12. Setting initial parameters. Installation and Use Manual | Entegris, Inc.

  • Page 10: Re-Zero

    The compensation is determined by a calculation (TCC). 1. Select port. NOTE: Entegris Technical Support assists customers with 2. Run DI water through loop and ensure thermal setting the TCC. Contact Technical Support. steady-state stability (<0.1°C) on the Data Graph tab.

  • Page 11: Calculate The Tcc Using Excel

    Chemical The slope value from y = mx + b is the new TCC. NOTE: TCC is always negative and generally ranges between -4 × 10 and 1.5 × 10 Installation and Use Manual | Entegris, Inc.

  • Page 12: Calibrate Sensor To A Chemical

    Figure 17. Chemical calibration tab. 1. Choose a COM port number from the dropdown box. 2. Press Close COM Port. A warning box appears. 3. Click ok. The message box displays “Status: closed.” Installation and Use Manual | Entegris, Inc.

  • Page 13: Data Graph Tab

    Press About for information about Jetalon Solutions, temperature over time. The temperature is measured Inc. or to access Expert Mode functions. by a thermistor in the sensor. NOTE: The Expert Mode password is Advanced288. Installation and Use Manual | Entegris, Inc.
  • Page 14 Sensor numbers and comments made before the update do not change. Zoom Press the right mouse button and draw a box around the data. Press AutoScale to reset. Installation and Use Manual | Entegris, Inc.

  • Page 15: Data Logging Tab

    This confirms that the b. All data: data is being logged. • Concentration • IoR@20 • Fluid temperature – Sensor temperature* – Pixel position – Index of refraction (IoR) *Expert mode only. Installation and Use Manual | Entegris, Inc.

  • Page 16: Sensor Calibration Tab

    NOTE: If comments are edited, a red text box appears in the lower left corner of the displayed screen indicating a change. AO Range Adjust the concentration and temperature ranges of the analog outputs. Installation and Use Manual | Entegris, Inc.

  • Page 17: Chemical Calibration Tab

    See Setting Alarms. Pixel for Light Adjustment Edit to adjust the left and right-most pixel position used for the TIR curve on the Diagnostics Tab. It also adjusts the light intensity for proper sensor operation. Installation and Use Manual | Entegris, Inc.
  • Page 18 6. Observe the Data Graph to verify that the concen- tration is now the same as the value entered. Factory Calibration Tab Entegris Technical Support uses the Factory Calibra- Figure 23. Chemical calibration tab. tion Tab to calibrate and customize the sensor.

  • Page 19: Digital I/O Tab

    3. Input the refractive index value of a known fluid, one similar to the typical system fluid, into the Expected IoR@20 field. 4. Expose the sensor to the second fluid. 5. Press the Calc New Slope button. Installation and Use Manual | Entegris, Inc.

  • Page 20: Diagnostics Tab

    This is periodically transmitted as analog to a specified pin on the DDU. light levels from the sensor and is digitized by the DDU into discrete 12-bit values. NOTE: Requires appropriate DDU jumper pin modification. Contact Technical Support. Installation and Use Manual | Entegris, Inc.

  • Page 21: First Derivative Tab

    TIR Curve. FIRST DERIVATIVE TAB Displays the rate of change in the TIR curve across a selected region of interest. It is used to calculate the IoR and concentration. Figure 28. TIR curve tab. Installation and Use Manual | Entegris, Inc.

  • Page 22: Maintenance

    Cleaning the Sensor Window. Re-Titration Offset 1. Take an offline lab measurement. Mounting bracket 2. Go to the Sensor Calibration/Chemical Calibration tab. 3. Enter a value to offset chemical calibration. Figure 33. Disassembled sensor. Installation and Use Manual | Entegris, Inc.

  • Page 23: Cleaning The Sensor Window

    Go to the Chemical Calibration tab and select Factory Calibration tab Figure 35. Healthy TIR curve. c. Press the Initialize Sensor button (the software will take about 10 seconds to complete) Installation and Use Manual | Entegris, Inc.
  • Page 24 Clean window with a DIW flush and Re-zero. Cable issue/sensor malfunction Inspect the TIR curve on the Diagnostics tab. If it’s non-linear or not appearing, swap cables. If there is still a problem, replace sensor. Installation and Use Manual | Entegris, Inc.
  • Page 25 Bad cable Replace cable “Auto: No E-box found” Loose cable Check cable connections Insufficient admin rights on the computer Restart 288-connect Use a different serial port on the computer or use serial-to-USB converter Installation and Use Manual | Entegris, Inc.
  • Page 26 Red LED comes on Error signal from sensor Contact Technical support. Old sensor information Sensor and DDU not synchronized. Press Update Info on the Data Graph tab. displayed on Data Graph tab See Data Graph Tab. Installation and Use Manual | Entegris, Inc.

  • Page 27: Appendix A: Advanced Features

    1. Select the Data Graph tab. 2. Let the sensor run for the period of time and the range of temperatures representative of a typical process cycle. Keep the chemical concentration constant. Installation and Use Manual | Entegris, Inc.

  • Page 28: Information For 4-20 Ma Applications

    Fluid Temp Compensation Coeff added to the Sensor Info table. 12. Press Exit Without Saving to exit the wizard and not apply the temperature compensated index of refraction to the data graph display. Installation and Use Manual | Entegris, Inc.

  • Page 29: Appendix B: Theory Of Operations

    Optical window Liquid chemical Figure 38. SRSensor operation. Installation and Use Manual | Entegris, Inc.

  • Page 30: Appendix C: Performance Data

    20°C ± 0.1°C (68°F ± 0.18°F) ± 0.025 wt% Concentration repeatability Concentration resolution Chemical-dependent, 0.01 wt% or better Response time 1.2 sec standard, no rolling average enabled, rolling averaging is user-configurable Installation and Use Manual | Entegris, Inc.
  • Page 31 INVUE CR288 CONCENTRATION MONITOR Installation and Use Manual | Entegris, Inc.

  • Page 32: Limited Warranty

    LIMITED WARRANTY Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components.

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