MKS BGS50CC User Manual
MKS BGS50CC User Manual

MKS BGS50CC User Manual

Bg series goniometric cradles

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BG Series
Goniometric
Cradles
U
'
M
SER
S
ANUAL

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Summary of Contents for MKS BGS50CC

  • Page 1 BG Series Goniometric Cradles ’ ANUAL...
  • Page 2: Warranty

    BG Series Goniometric Cradles Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
  • Page 3: Table Of Contents

    BG Series Goniometric Cradles Table of Contents Warranty .........................ii EC Declaration of Conformity................v Definitions and Symbols..................vi Warnings .......................vii Caution .........................viii — Introduction .................1 — Description ...................2 2.1 Design Details ....................2 — Characteristics ................3 3.1 Definitions ....................3 3.2 Mechanical Specifications ...............4 3.3 Load Specification Definitions..............4 3.4 Load Characteristics and Stiffness ............4 3.5 Goniometric Cradle Weights ..............5...
  • Page 4 BG Series Goniometric Cradles — BGM Goniometric Cradles Assembly Pattern ..15 7.1 BGM120 Interfaces ..................15 7.2 BGM160 Interfaces ..................16 7.3 BGM200 Interfaces ..................16 — Dimensions .................17 8.1 BGS50 Models ..................17 8.2 BGS80 Models ..................17 8.3 BGM Models.....................18 — Maintenance ................19 9.1 Maintenance ....................19 9.2 Repair .......................19 9.3 Calibration ....................19...
  • Page 5: Ec Declaration Of Conformity

    Model N mbe ber(s) : BGS50/80/-CC/-PP; M-/BGM120/160/200/-CC/-BP PP/-PE/-PEBV6 MKS co f f ir irms that, w h r respect to he e products liste above bove, it believes it is s in confo o rmity with the selected European Union...
  • Page 6: Definitions And Symbols

    BG Series Goniometric Cradles Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document.
  • Page 7: Warnings

    BG Series Goniometric Cradles Warnings WARNING The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved. WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any...
  • Page 8: Caution

    BG Series Goniometric Cradles Caution CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment. Only the BGM-PEBV6 stages are compatible and can be used in a vacuum environment up to 10 hPa.
  • Page 9: Introduction

    Vacuum compatible goniometric cradles to 10 hPa. In this case, max. speed and load capacity have to be divided by two. BGS50CC, BGS80PP and BGM120BPP goniometric cradles. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using the BG goniometric cradle.
  • Page 10: Description

    BGM160 and BGM200 : 3:1 Feedback BGS50CC: Motor mounted rotary encoder, 2,048 cts/rev BGS50PP and BGS80PP: none BGS80CC: Worm mounted rotary encoder with index pulse, 4,000 cts/rev BGM120 to BGM200: Worm mounted rotary encoder with index pulse, 2000 cts/rev Limit Switches Mechanical, at ±45°...
  • Page 11: Characteristics

    BG Series Goniometric Cradles —Characteristics Definitions Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”. This standard gives the definition of position uncertainty which depends on the 3 following parameters: Absolute Accuracy Difference between ideal position and real position.
  • Page 12: Mechanical Specifications

    Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com Mechanical Specifications BGS50CC BGS50PP BGS80CC BGS80PP BGM120, BGM160, BGM200 Travel Range (°)
  • Page 13: Goniometric Cradle Weights

    BG Series Goniometric Cradles Goniometric Cradle Weights Weights indicated into the below table are average values for goniometric cradles with a typical drive unit installed, without any cable. Weight [lb (kg)] BGS50 1.76 (0.8) BGS80 4.63 (2.1) 3-meter MSCABLE-3 Cable for BGS80 models 0.66 (0.3) (M-)BGM120 18.7 (8.5)
  • Page 14: Dc-Servo Drive Versions

    DC motor-driven stages use 3 different motors and encoders depending on the size of the cradle: • The BGS50CC uses a miniature DC servo motor with a motor mounted rotary encoder, a reduction gear and a belt drive in order to fold the motor.
  • Page 15: Sensor Position

    Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer (°) (°/s) Voltage (V) Current (A) Current (A) (Ω) (mH) Const. (V/krpm) BGS50CC 0.0000698 0.15 0.21 54.6 1.19 – BGS80CC 0.001 2.52 0.51 – BGM120 to 200CC 0.001 7 (±10%) Command Signals for the DC-Motors...
  • Page 16: Feedback Signal Position

    BG Series Goniometric Cradles Feedback Signal Position Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Direction – MOTION Direction + Direction + Direction + The incremental sensor consists of an optical scale and an encoder head. When the carriage moves, the encoder head generates square signals in quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25 connector or pins #6, #7, #13 and #14 of the SUB-D15 connector.
  • Page 17: Bgs Pinouts

    BG Series Goniometric Cradles BGS Pinouts The pinout diagrams for BGS stage SUB-D connectors are shown below: BGS50PP BGS80PP BGS50CC BGS80CC + Phase 1 + Phase 1 N.C. N.C. N.C. + Phase 2 N.C. + Motor – Phase 1 Mechanical Zero N.C.
  • Page 18: Bgm Pinouts

    BG Series Goniometric Cradles BGM Pinouts The pinout diagrams for BGM stage SUB-D25 connectors are shown below: BGM-BPP & -PE BGM-CC + Phase 1 + Tachometer + Phase 1 + Tachometer – Phase 1 – Tachometer – Phase 1 – Tachometer + Phase 2 + Motor + Phase 2...
  • Page 19: Connection To Newport Controllers

    BG Series Goniometric Cradles —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.
  • Page 20: Connection

    BG Series Goniometric Cradles Connection There is a label on every stage indicating its part and serial numbers. WARNING Always turn the controller's power OFF before connecting to a stage. NOTE These stages are ESP compatible. Enhanced System Performance is Newport's exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters.
  • Page 21: Mcab-3 Cable

    BG Series Goniometric Cradles REMARK The cross section of the MSCAB-10 cable is different from the one of the MSCABLE-3 cable to allow a longer length. The MSCAB-10 cable has the same mechanical properties as the MCAB-10 cable. These cables are specially shielded and terminated with Newport’s standard SUB-D15 and SUB-D25 connectors.
  • Page 22: Connection To Non Newport Electronics

    BG Series Goniometric Cradles —Connection to Non-Newport Electronics Connections WARNING Newport is not responsible for malfunction or damage of BG goniometric cradles when used with non-Newport controllers. WARNING “ ” Newport guarantees compliance of BG goniometric cradles only if used with Newport cables and controllers. It is the customer's responsibility to modify the cable and take care of sensor signal connections, when using the stage with non-Newport controllers.
  • Page 23: Bgm Goniometric Cradles Assembly Pattern

    BG Series Goniometric Cradles —BGM Goniometric Cradles Assembly Pattern Stacking BG goniometric cradles either together or with other Newport stage is easily accomplished. Below are example schematics of the assembly patterns used. For BGM stages, these interfaces are accessed by unscrewing and removing the upper and/or lower plates of the stages (see dimension drawings).
  • Page 24: Bgm160 Interfaces

    BG Series ø Goniometric Cradles BGM160 Interfaces BGM160 STAGE INTERFACES AFTER REMOVING THE BASE PLATE 4 HOLES M5 THD 4 HOLES M6 THD ON SQR 3.62 (92), DEPTH: .31 (8) ON 6.14 3.62 (156 92), DEPTH: .31 (8) BGM160 CARRIAGE INTERFACE AFTER REMOVING THE TOP PLATE DIMENSIONS IN INCHES (AND MILLIMETERS) 4 HOLES C’BORED...
  • Page 25: Dimensions

    BG Series Goniometric Cradles —Dimensions BGS50 Models CABLE LENTH 9.8 FT (3 M) AND SUB-D25M CONNECTOR +.0005 ø.197 4 HOLES M3 THD ON SQR .79 (20), DEPTH: .20 (5) 1.97 (50) (20) 2.26 (57.5) 2.95 2.32 (75) (4.5) (59) 3.96 (100.5) +.0005 ø.197...
  • Page 26: Bgm Models

    BG Series Goniometric Cradles BGM Models “Z” HOLES 1/4”-20 (M6) THD, 4 HOLES, ø.27 (6.8) ON “E” 1.0 (25) SPACING TOP VIEW: (M-)BGM160CC 2.40 (61) (M-)BGM-PE: 5.10 (129.5) (M-)BGM-CC: 7.62 (193.5) 4 HOLES, ø.27 (6.8) ON “F” NOTE: CONNECTOR ORIENTATION VARIES 45°...
  • Page 27: Maintenance

    BG Series Goniometric Cradles —Maintenance RECOMMENDATION Please contact Technical Sales Support team for recommendations on application specific maintenance. Maintenance The BG goniometric cradle requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution. PRECAUTIONS The BG goniometric cradle must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.
  • Page 28 BG Series Goniometric Cradles EDH0387En1020 — 09/18...
  • Page 29: Service Form

    Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): EDH0387En1020 —...
  • Page 30 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com e-mail: france@newport.com Technical Support...

This manual is also suitable for:

Bgs50ppBgs80ccBgs80ppBgm120Bgm160Bgm200

Table of Contents