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Sigma SQM-242 User Manual

Quartz crystal card analog input card co-deposition control software
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SQM-242
Quartz Crystal Card
SAM-242
Analog Input Card
SQM-242 CoDep
Co-Deposition Control Software
User's Guide
Version 2.03
© Copyright Sigma Instruments, Inc. 1999 - 2004
Σ Σ Σ Σ
Sigma
instruments

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Summary of Contents for Sigma SQM-242

  • Page 1 SQM-242 Quartz Crystal Card SAM-242 Analog Input Card SQM-242 CoDep Co-Deposition Control Software User’s Guide Version 2.03 © Copyright Sigma Instruments, Inc. 1999 - 2004 Σ Σ Σ Σ Sigma instruments...
  • Page 2 Read this manual before installing, operating, or servicing equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols...
  • Page 3 Sigma Instruments grants to you, the Licensee, a non-exclusive license to use this software on any computer, as long as only one copy is used at a time. Sigma Instruments retains ownership of the software. Licensee may transfer the software to another party, so long as the party agrees to accept the terms of this agreement.

  • Page 4: Table Of Contents

    Table of Contents Chapter 1: Installation Chapter 3: Monitor Program 1.0 Introduction........1-1 3.0 Introduction........3-1 1.1 SQM-242 Card Installation ..1-2 1.2 SQM-242 Driver Installation..1-3 Chapter 4: Multi Program 1.3 CoDep Software Installation ..1-3 4.0 Introduction........4-1 1.4 SQM-242 Card Connections..1-4 4.1 Operation........4-1 1.5 SAM-242 Card Connections ..1-6...

  • Page 5: Chapter 1 Installation

    Chapter 1 Installation 1.0 Introduction The SQM-242 Card is a powerful Thin Film Deposition Controller on a PCI card. Significant features include: • Measure four 1MHz to 10MHz quartz crystal sensors simultaneously. • Controls two deposition source supplies simultaneously (co-deposition).

  • Page 6: Sqm-242 Card Installation

    Chapter 1 Installation 1.1 SQM-242 Card Installation Jumper each SQM-242 card before installation as shown below: Card 1 Card 2 Card 3 Card 4 Card 5 Card 6 If you are installing a SAM-242 Analog piggyback card, it must be connected to Card 1.

  • Page 7: Sqm-242 Driver Installation

    1. Turn on the computer and start Windows. Windows should find New Hardware and prompt to Install Device Drivers. 2. If you are prompted for the location of the Device Drivers, insert the Sigma CD-ROM and direct Windows to D:\SQM242 Card\Drivers (assuming D is your CD drive).

  • Page 8: Sqm-242 Card Connections

    Chapter 1 Installation 1.4 SQM-242 Card Connections The control output and sensor input connectors to the SQM-242 card are shown below. Refer to this drawing in the subsequent hookup instructions. S e n so r 9 3 2-0 0 0...
  • Page 9 SQM-242 card. The SQM-242 output is 0 to ±10 VDC. See section 3 of this manual for instructions on setting the SQM-242 output Full Scale level to match your power supply. If your equipment needs a 4-20 mA control signal, you must obtain a voltage-to-current converter.

  • Page 10: Sam-242 Card Connections

    Failure to observe this constraint can result in damage to your equipment and/or the SAM-242 card, Output Connection The SAM-242 outputs are identical to the SQM-242. See the previous section for hookup instructions. 1.6 Digital I/O The SQM-242 card and SQM-242 CoDep software do not support the digital I/O required to automatically open and close shutters, rotate source pockets, etc.

  • Page 11: Introduction

    2.1 Main Screen With no cards installed (or with two SQM-242 cards and an SAM-242 card installed) you will see the display below. The number of “output frames” shown on the display will change depending on the number of cards installed in your system. For example, with only one SQM-242 card installed, the main display shows only two output frames.
  • Page 12 <Tab> key or your mouse. Each time you move to another field, the setting is updated. Below the thickness displays are the Rate Reading and Rate Setpoint displays (in A/sec). In Auto mode, the SQM-242 control loop continuously adjusts the output power to maintain the deposition Rate Reading at the desired Rate Setpoint.

  • Page 13: Edit: Auto/Manual Mode

    (Auto/Manual/Off), or as a Recorder output. See the next section for information on recorder outputs. These controls are common to most dialog boxes in the program: Saves the settings in the dialog box, sends them to the SQM-242 card, and closes the dialog box. Cancel Closes the dialog box without saving the settings or sending them to the SQM-242 card.
  • Page 14 In that case, output power is fixed at Note: The sensor or analog input selected does not have to be on the same SQM-242 or SAM-242 card as the control output.

  • Page 15: Edit: Recorder Mode

    Chapter 2 SQM-242 CoDep 2.3 Edit: Recorder Mode When Recorder mode is selected for an output, the output is not controlled by the PID loop. Instead, the output supplies a voltage that is proportional to an input value. Input: Selects the sensor, analog input, or control output that is being measured. Only one input can be selected.

  • Page 16: File Menu

    Multiple setups can be saved as different files. This is convenient for storing different configurations, materials, rates, etc. Exit: Exits the SQM-242 program. Before closing the program, you are prompted to save changes. Select Yes to overwrite the current setup (.DAT) file, no to abandon any changes, or Cancel to return to the program.

  • Page 17: View Menu: Input Setup

    SQM-242 CoDep 2.6 View Menu: Input Setup The Input Setup screen configures each input on the SQM-242 and SAM-242 cards. Inputs are numbered consecutively, starting with Card 1 (Sensors 1 to 4), then Card 2 (Sensors 5 to 8), etc. The SAM-242 analog input card is shown as Analog 1 to 4.
  • Page 18 Chapter 2 SQM-242 CoDep Tooling: Adjusts for measured deposition rates that differ from the actual substrate deposition rate. If the sensor sees only 50% of the substrate rate, set the value to 200. This multiplies the sensor reading by 2.
  • Page 19 You want to control temperature to 200°F (it’s an example!). Set the analog input Gain to 18, Offset to 32, and Units to Deg F (F = 9/5C + 32). The SQM-242 will display setpoints and measurements associated with the analog input in degrees F.

  • Page 20: View Menu: Card Setup

    Chapter 2 SQM-242 CoDep 2.7 View Menu: Card Setup This dialog controls the most basic functions of the SQM-242 card. It also provides useful installation and troubleshooting information. Simulate: Normally the SQM-242 card uses the quartz crystals as inputs for controlling the source outputs.

  • Page 21: Introduction

    SQM-242 Monitor 3.0 Introduction The SQM-242 Monitor program is a version of SQM-242 CoDep that has been streamlined for monitor-only applications. With SQM-242 Monitor you enter sensor Density, Tooling, and Z factor parameters, then click Start to begin taking readings.

  • Page 22: Introduction

    4.0 Introduction The SQM-242 Multi program extends the capabilities of the SQM-242 CoDep program to include up to six SQM-242 cards. With the SQM-242 Multi program, you can monitor up to twenty four sensors and control up to 12 source outputs.
  • Page 23 When the card is stopped, all outputs are set to zero. Mode: Alternates between reading sensors and simulating sensor readings. Simulate mode is useful for training purposes, since no sensors (or even an SQM-242 card!) need to be installed.

  • Page 24: Chapter 5 Labview Demo

    \SQM242 Card\LabView Source. LabView 6 or higher is required. Note: Before using the LabView demo, it’s best to familiarize yourself with operation of the SQM-242 CoDep program. To run the demo, click “Load DLL”, “Use Card”, and then set the Sensor and Output parameters as desired.

  • Page 25: Chapter 6: Interfacing To The Card

    Chapter 6 Interfacing to the Card 6.0 Introduction The diagram below illustrates basic concepts for interfacing to the SQM-242 card. 2 Control Outputs (per card) SQM242a DLL SQM242 PCI Card 4 Sensor Inputs Function (up to six) Calls (per card)

  • Page 26: Dll Functions

    Sif142Simulate (long Mode) Sets the operating mode. Normal mode requires SQM-242 card(s), sensors, and a deposition power supply for proper operation. In simulate mode, no SQM-242 card is needed. The DLL simulates the frequency readings and power output required for PID loop control.
  • Page 27 Chapter 6 Interfacing to the Card Sif142StartMeas () Starts the card measuring frequency and zeros the sensor thickness reading. Sif142ZeroSensor (long SensorNum) Sets a sensor (0 to 23) thickness reading to zero. Sif142Zero2 (long OutputNum) Sets a control output (0 to 13) thickness reading to zero by setting each assigned sensor thickness to zero.
  • Page 28 Chapter 6 Interfacing to the Card Sif142FullScale (long Output, double FullScaleVolts, double MaxPwr, double SlewRate) Sets the source output operating parameters. Output: The output these parameters are for, 0 to 13. FullScaleVolts: Maximum voltage the output is scaled to. This is the output at 100% power.
  • Page 29 Chapter 6 Interfacing to the Card Sif142MapSensors (long SensLoop(0 to 23)) An array that associates each sensor (0 to 23) with an output (0 to 13) for PID control. An output value of -1 for a sensor causes the sensor to continue to monitor deposition, but have no effect on output control.
  • Page 30 Appendix A Material Properties Material Density ZFactor Material Density ZFactor Aluminum 2.73 1.08 Magnesium Fluoride Aluminum Oxide 3.97 Manganese 0.377 Antimony 6.62 0.768 Manganese Sulfide 3.99 0.94 Arsenic 5.73 0.966 Mercury 13.46 0.74 Barium Molybdenum 10.2 0.257 Beryllium 1.85 0.543 Neodymium Fluoride 6.506 Bismuth...
  • Page 31 Appendix A Material Properties The equation governing all quartz crystal thin film monitors and controllers is: . π F N q D q . Z tan atan . π D m F c Z where the constant terms for the quartz crystal are: AT crystal constant: 1.668 10 Density of Quartz:...

  • Page 32: Specifications

    Appendix B Specifications SQM-242 Inputs Number of Sensors 4 (Active Oscillator) Connectors Sensor Frequency Range 1.0 MHz to 10.0 MHz Reference Frequency Accuracy .002% Reference Frequency Stability +/- 2ppm (total, 0 to 50°C) Frequency Resolution .06Hz @ 6MHz Thickness Resolution* .027 Å...
  • Page 33 Appendix B Specifications General Specifications SQM-242 Card Type PCI (32 bit, 5V, 33MHz) SQM-242 Max. Cards per Computer SAM-242 Card Type Slave to SQM-242 (ribbon cable) SAM-242 Max. Cards per Computer Power Consumption 5 W max. Operating System Windows 98/ME/NT/2000/XP...

  • Page 34: Troubleshooting

    Disconnect the deposition source supply. This eliminates the possibility that a noisy source or poor loop tuning is causing an unstable PID loop. In the SQM-242 CoDep program, select View Readings. Since a QCM is basically a frequency counter, we will use the measured frequency for troubleshooting.
  • Page 35 Appendix C Troubleshooting failure. Depending on the material, crystals may fail well before their typical value. If you find that crystals consistently fail early, you may want to set Min. Frequency to a higher value. If the frequency reading is zero or unstable, check the InVac cable from the feedthrough to the sensor.
  • Page 36 .64 A/s .32 A/s .055 .028 .018 .014 .005 Increasing the Filter value only increases displayed resolution. Technical Support Contact Sigma Instruments at: Sigma Instruments Phone: 970-416-9660 120 Commerce Drive, Unit 1 Fax: 970-416-9330 Fort Collins, CO 80524 USA EMAIL: support@sig-inst.com...

This manual is also suitable for:

Sam-242