Related Manuals for GRIPPING POWER EPS200
Summary of Contents for GRIPPING POWER EPS200
- Page 1 EPS200 Electrostatic Chuck DC Power Supply Users Manual http://www.GrippingPower.com G r i p p i n g P o w e r , I n c. 11930 44th St. North, Suite B Clearwater, FL 33762 (727) 572-4100...
- Page 2 No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in any form or by any means without prior written permission of Gripping Power, Inc. The information contained herein is subject to change without notice.
-
Page 3: Table Of Contents
4.3. Status Information Commands 4.4. T1, T2 and T3 Timer Commands 4.5. Digital Output Control 5. PROGRAMMING 5.1. Introduction 5.2. Program Specific Commands 5.3. Special Program Commands 5.4. Program Control Commands 5.5. Entering Program Commands Gripping Power, Inc EPS200 User s Manual... -
Page 4: Introduction
6.5. Component Replacement APPENDIX A - Programming Examples APPENDIX B - Technical Specifications APPENDIX C - RS-232 Connector Specification APPENDIX D - Remote Control Interface Specifications APPENDIX E - Ordering and Service Information Gripping Power, Inc EPS200 User s Manual... -
Page 5: Introduction
All ten of the EPS200 programs are stored in nonvolatile RAM and can be downloaded to a host computer. The EPS200 programming command set provides the user optimum flexibility for developing sophisticated chucking algorithms for multiple process conditions. -
Page 6: Installation
2. INSTALLATION 2.1. Installation. The EPS200 is designed for installation in a standard 9.5 inch equipment half-rack or it can be use as a desktop instrument. Figure 2.1 - EPS200 Rear Panel 2.2. AC Power Requirements. Power is supplied to the unit via the IEC 320 receptacle, located on the real panel. -
Page 7: Load Connections
2.6. Load Connections. For proper operation and continued reliability, the high voltage outputs of the EPS200 must be electrically isolated from extremely high DC bias voltages, high power RF fields or other sources of potential damage. It is highly recommended that only accessories manufactured, or specifically authorized, by Gripping Power, Inc. -
Page 8: Operation
Figure 3.1 - EPS200 Front Panel 3.2. The Front Panel. The EPS200 front panel user interface is simple to operate. The operation of the various switches is explained in the following sections. The four line, backlit LCD panel provides program and status information. -
Page 9: Local Operating Mode
EPS200 via the RS-232 serial port. Refer to Appendix C for RS-232 interface specifications. A versatile command protocol has been developed for the EPS200 with the intent to make it a flexible production or development instrument designed to fit any need. Refer to sections four... -
Page 10: Rs-232 Command Lockout
> a [sp] cc [sp] dddd [cr] All messages sent to the EPS200 must start with an ASCII '>' (hex 3E) or the following fields will be ignored. The following one byte code [a] is the unique address of the target unit. This code is a hex-ASCII value ranging from 0-9 and A-F. -
Page 11: Devicenet Mode
Even when the EPS200 is in local mode, the host computer can still poll the unit via RS-232 to determine why the unit is not responding to configuration changes by decoding the status byte (RS command). The host computer can prompt a user to toggle the front panel mode switch to the remote position, so that processing can continue. -
Page 12: Program And Control Commands
4. PROGRAM AND CONTROL COMMANDS 4.1. Introduction. The command set of the EPS200 has been designed to provide the user with outstanding process flexibility. In addition to basic on and off commands, there are a wide range of reporting, configuration, and control commands. All EPS200 commands, except SO, WF and WT can be used in immediate mode, as shown in the examples. - Page 13 Receive: >0 SI 500 [CR] 4.2.9. (RM) Report maximum voltage. The RM command is used to indicate the maximum full scale range of the EPS200. All units have a 0 to 1000 VDC or 0 to 2500 VDC range. Send: >0 RM [CR]...
-
Page 14: Status Information Commands
CLAMP IS DOWN bit is on CLAMP IS UP bit is on Table 4.1 - 16 bit Status Data Bit Description The EPS200 operating mode can be determined by decoding bits 6 and 7. Gripping Power, Inc EPS200 User s Manual... - Page 15 >0 -250 [CR] 4.3.5. (MV) Measure volts at terminals. The MV command returns the measured value of the voltage at the EPS200 output terminals. The voltage value is expressed in volts. The sign will be positive (+) or negative (-).
-
Page 16: T1, T2 And T3 Timer Commands
>0 900 [CR] 4.4. T1, T2 and T3 timer commands. The timer commands allow the user to reset, load, start and display the timer data. The EPS200 has three process timers: one general purpose and two high-voltage activity monitors. Timer 1 (T1) is a user programmable timer that can be used as a countdown timer, when used in conjunction with the WT command. - Page 17 The user must set the bits to the preferred state throughout a program. If an abort (AB) command is received, or a fault is cleared, the EPS200 will automatically reset the bits to the default state of clamp is up set and clamp is down cleared.
-
Page 18: Digital Output Control
The clamp is up output is an open-collector output and will be driven low, to digital common, when the bit is in the on condition. Send: >0 SU [CR] Receive: >0 SU [CR] Gripping Power, Inc EPS200 User s Manual... -
Page 19: Programming
In local mode, once a program has been started by pressing the high voltage switch and a WF is encountered, the EPS200 will wait for the switch to be set to the off position. In digital or analog remote mode, once a program has been started by setting the high voltage go on bit and a WF is encountered, the EPS200 will wait for the high voltage go on bit to be reset. -
Page 20: Program Control Commands
Receive: >0 CP [CR] 5.4.3. (CA) Clears all programs. The CA command clears all ten of the EPS200 stored programs. The user is prompted for a Y(es) or N(o) response to confirm that erasure of all of the stored programs is desired. -
Page 21: Entering Program Commands
> a [sp] nn [sp] cc [sp] dddd [cr] All program instructions sent to the EPS200 must start with an ASCII '>' (hex 3E) or the following fields will be ignored. The following one byte code [a] is the unique address of the target unit. - Page 22 Return compliance value (V) Return overcurrent trip point (I) Report maximum voltage Return program number/step/run-stop Return hardware status Return voltage setpoint (V) Help command Table 5.1 - Instructions that may not be used in a program Gripping Power, Inc EPS200 User s Manual...
- Page 23 REMOTE/LOCAL switch. 6.4. No Output. If the EPS200 does not produce a high voltage output, verify that the unit is properly powered and that the LCD display indicates a ready state. If the unit could not achieve voltage compliance, or a overload condition exists, an 'Overload' message will be displayed.
- Page 24 09 OF ; turn off the high voltage This program better illustrates the flexibility of the EPS200. An oscillating voltage can be produced by the EPS200 to discharge the chuck, and more effectively release the substrate. Digital output bit commands are included as well.
- Page 25 Number of user defined programs Number of steps per program Testing Agency Approvals The internal line-powered, low-voltage DC switching power supply and the IEC power entry module meet UL, CSA, TUV and CE requirements. Gripping Power, Inc EPS200 User s Manual...
- Page 26 No parity and one stop bit is required. Modem control lines, such as RTS and CTS, are not provided. No handshaking protocol (such as XON and XOFF) is supported. The host system must delay data transmission to avoid overflowing the EPS200 serial buffer. Gripping Power, Inc...
- Page 27 I/O should be referenced to pin 5. An external common connection between pins 5 and 10 will not alter the performance of the EPS200. Pins 1 and 3 are optically isolated from DC power and DC common. A simple remote control interface can be accomplished by connecting pins 3 and 4 together and connecting pin 1 to DC common, via a switch, to set the high voltage go on active via the digital interface.
- Page 28 Before returning defective materials for repair or replacement, contact the manufacture and obtain an RMA number. All items returned for repair must be packaged properly before shipment or the warranty will be void. Ship to: Gripping Power, Inc. 11930 44th Street North, Suite B Clearwater, Florida 33762 http://www.GrippingPower.com...
Need help?
Do you have a question about the EPS200 and is the answer not in the manual?
Questions and answers