Summary of Contents for Wyko NT3300
- Page 1 OPERATING INSTRUCTIONS Wyko NT3300 Optical 3D Profiling System UCLA Nanoelectronics Research Facility 420 Westwood Plaza 14-131A Engineering IV Building Los Angeles, CA 90095 Rev. 01/28/05...
- Page 2 Extension: I. Introduction: The automated Wyko NT3300 is a system intended for measuring a wide variety of surfaces and samples, from optical-quality glass to microactuators. The Wyko is a relatively safe and simple machine that can provide measurements for all types of samples in great detail. In this procedure you will find all the instructions necessary to successfully acquire and interpret your measured data.
- Page 3 ON the CRT screen. 4. Start the Vision 3.43 software. 5. If the Wyko has just been turned ON, it will need to be recalibrated with the appropriate calibration standard (Fig. 2).
- Page 4 12. Select the AUTO CALIBRATE option. 13. Type in the STEP HEIGHT VALUE that is written on the calibration standard (9.898 µm) then press OK and wait for the Wyko to finish calibrating. 14. Select OK to complete the calibration.
- Page 5 3. Select the INTENSITY box from the Measurement Options window. Arrange both windows side by side. 4. Select VSI from the measurement type box and set the following settings to your desired field of view. ( The field of view for several optics combinations are in Table 1 Resolution = Objective = FOV =...
- Page 6 IV. PSI – Mode (Phase Shifting Interferometry): PSI – Calibration: 1. Select the MEASUREMENT OPTIONS icon from the toolbar. 2. Select the INTENSITY box from the Measurement Options window. Arrange both windows side by side. 3. Select PSI from the measurement type box and verify the following settings: Resolution = Full Objective = 5X FOV = 1.0X...
- Page 7 3. Select the INTENSITY box from the Measurement Options window. Arrange both windows side by side. 4. Select PSI from the measurement type box and set the following settings to your desired field of view. ( The field of view for several optics combinations are in Table 1 Resolution = Full Objective = 5X FOV = 1.0X...
- Page 8 IV. Turning off the Wyko If you will not be using the Wyko within the next hour or the time is after 5pm, please shut down the machine as follows.
- Page 9 Download Veeco Vision 3.43- www.nanolab.ucla.edu/downloads/vision.zip...
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