Summary of Contents for Inficon PEG100
- Page 1 Operating Manual Incl. EU Declaration of Conformity Penning Gauge PEG100 tina14e1-a (2017-12)
-
Page 2: Product Identification
The electrical connection is provided through a screened 8-pin FCC 68 connector. Unpacking and Checking Unpack the PEG100 immediately after delivery, even if it is to be installed at a later date. Examine the packaging for any external damage. Completely remove all packaging materials. -
Page 3: Design And Function
Design and Function Based on a supply voltage of 24 V the PEG100 generates the internal supply vol- tages required for operation of the integrated Penning measurement system. The PEG100 supplies a logarithmic representation of the vacuum pressure by way of a voltage signal which ranges from 0.66 V to 10 V. -
Page 4: Table Of Contents
6 Troubleshooting 7 Wearing Parts and Original Spare Parts 9 Returning the Product Disposal Appendix Output Voltage vs. Pressure Examples for Connecting EU Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used. tina14e1-a (2017-12) PEG100.om... -
Page 5: Safety
Communicate the safety instructions to all other users. 1.4 Liability and Warranty INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document •... -
Page 6: Technical Data
U <7 V (for this refer also to figure 3 and section 3.2.2) Status Output Ready to measure High level (13.5 to 35 V, max. 50 mA) Error (not ignited, HV off) For this refer also to section 3.2.4. tina14e1-a (2017-12) PEG100.om... - Page 7 10 °C to 50 °C Max. rel. humidity of the ambient air (on 30 days per year, non-condensing) 70 % or 95 % usable measurement range 10 to 10 mbar usable measurement range 10 to 10 mbar tina14e1-a (2017-12) PEG100.om...
-
Page 8: Installation
Flange up installation is not permissible because under such circumstances con- densate may collect in the PEG100. This will either adversely affect the measure- ments, or the sensor itself may possibly be damaged. - Page 9 Two examples of how to connect the PEG100 are given in Annex B. Fig. 3 Block diagram tina14e1-a (2017-12) PEG100.om...
-
Page 10: Power Supply
5×10 mbar. 3.2.3 Measurement Signal The PEG100 supplies a defined output signal ranging from 0.66 V to 10 V at Pin 3 Output with reference to Pin 5 which is signal ground. For this also refer to Table 1 in Annex A. -
Page 11: Status Output
For the purpose of identifying the connected type of gauge and the pressure range, the PEG100 is equipped with an identification resistor (R = 100 kΩ) between Pin 4 and Pin 2. This resistor may be sensed by connected operating or control units so that these can automatically adapt. -
Page 12: Operation
PE G100. You mu ust always sw witch off the su pply voltage the PEG100 b before starting g any work on the gauge (ev ven when moving the gau uge from the c... -
Page 13: Measurement System Status Indication
70 °C. Before baking out, you must make sure that an ultra sealing disc (PEG100, DN 25 KF) or a copper seal (PEG100, DN 40 CF) is used as the flange seal. The PEG100 is equipped with all-metal sensing cells so that any outgassing caused by polymer seals is entirely avoided. -
Page 14: Maintenance
PEG100 by turning these by about 1.5 turns. Then the electronics assembly and the magnet assembly (7/1) may be pulled off from the sensor housing. -
Page 15: Disassembly Of The Sensor
5.2.2 Disa assembly o of the The sen nsor consists o of the vacuum housing, the anode ring (7 7/4) with ignitio on aid Sens (7/2) an d the cathode e plate (7/5). S See Fig. 7. How to d disassemble: 1) Use a pair of twee... -
Page 16: Assembly Of The Electronics Assembly
When the electronics assembly has been placed as required, the black magnet housing is fully surrounded by the housing of the PEG100. 3) Retighten the cross head screws at the rear of the gauge. -
Page 17: Wearing Parts And Original Spare Parts
PSG500-S (DN 16 CF-R) 350-082 DN 20 / 25 KF clamping ring 211-002 DN 25 KF (Al) centering ring 211-061 For overpressure operation and Ordering number degassing: Ultra sealing disc (3 pcs.) 211-168 Clamping ring for ultra sealing discs 211-009 tina14e1-a (2017-12) PEG100.om... -
Page 18: Returning The Product
9 Returning the Product WARNING WARNING: forwarding contaminated products Products returned to INFICON for service or repair should, if possible, be free of harmful substances (e.g. radioactive, toxic, caustic or micro- biological). Otherwise, the type of contamination must be declared. -
Page 19: Appendix
1,41E-08 1,26E-06 1,12E-04 1,00E-02 1,68E-08 1,50E-06 1,33E-04 2,00E-08 1,78E-06 1,59E-04 2,37E-08 2,11E-06 1,88E-04 2,82E-08 2,51E-06 2,24E-04 3,35E-08 2,99E-06 2,66E-04 3,98E-08 3,55E-06 3,16E-04 4,73E-08 4,22E-06 3,76E-04 5,62E-08 5,01E-06 4,47E-04 6,68E-08 5,96E-06 5,31E-04 7,94E-08 7,08E-06 6,31E-04 9,44E-08 8,41E-06 7,50E-04 tina14e1-a (2017-12) PEG100.om... -
Page 20: B: Examples For Connecting
Examples for Connecting Example for connecting the PEG100: Switching the high tension via an external switch or contact Example for connecting the PEG100: Switching the high tension automatically through a Pirani Standard Gauge with switching point tina14e1-a (2017-12) PEG100.om... -
Page 21: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare, that the equipment mentioned below complies with the following directives: • 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC directive; Directive on electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS directive; Directive on the restriction of the use of certain hazardous substances in electrical... - Page 22 Notes tina14e1-a (2017-12) PEG100.om...
- Page 23 Notes tina14e1-a (2017-12) PEG100.om...
- Page 24 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina14d1-a (2017-12) www.inficon.com t i na14e1- a...