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MTI AccuMeasure 9000 User Manual

Capacitance sensor amplifier
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MTI Instruments Technical Manual 7001-0029
Revision 4.0 – January 21, 2013
AccuMeasure™ 9000
Capacitance Sensor Amplifier
Users Manual
MTI Instruments Incorporated
325 Washington Avenue Extension, Albany, New York 12205 USA
█ Phone (518) 218-2550 or 800-342-2203 (USA Only)
█ Web www.mtiinstruments.com
!
!
█ Fax (518) 218-2506
█ Email sales@mtiinstruments.com
!
!

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  • Page 1 MTI Instruments Technical Manual 7001-0029 Revision 4.0 – January 21, 2013 AccuMeasure™ 9000 Capacitance Sensor Amplifier Users Manual MTI Instruments Incorporated 325 Washington Avenue Extension, Albany, New York 12205 USA █ Phone (518) 218-2550 or 800-342-2203 (USA Only) █ Fax (518) 218-2506 █...
  • Page 2 This page was intentionally left blank...
  • Page 3 Revision History Rev 4.0 Release...
  • Page 4 Plug the instrument into a different outlet so that the instrument and the other device are on different branch circuits. If necessary, consult a representative of MTI Instruments. You may find the following booklet helpful: FCC Interference Handbook, 1986, available from the U.S. Government Printing Office, Washington, D.C.

  • Page 5: Disclaimers

    This is the Original Instructions version of the User Manual. It is illegal to operate this equipment in a European Union (EU) Member State unless the manual is written in an official language of the Member State. Contact MTI Use Requirements Instruments for the availability of translated manuals.

  • Page 6: Table Of Contents

    TABLE OF CONTENTS SAFETY WARNINGS DISCLAIMERS TABLE OF CONTENTS ..........................INTRODUCTION ™ 9000 S ..................1 CCUMEASURE YSTEM ESCRIPTION ...................... 2 ROBE MPLIFIER PECIFICATIONS ........................3 ROBE PECIFICATIONS ....................4 ECEIVING NSPECTION ROCEDURE ......................5 ETURN HIPMENT ROCEDURE OPERATING PRINCIPLES INSTALLATION INSTRUCTIONS ........................

  • Page 7: Introduction

    The second type of calibration produces a normalized 0.025m per millivolt (0.98 micro-inch per millivolt) calibration slope when used with any MTI probe. With this type of calibration, a 1mm (0.039 inch) range probe would have a range of 200m (7.8mils), a 0.025m per millivolt (0.98 micro-inch per millivolt) sensitivity factor, and a standoff of 1mm (0.039 inches).

  • Page 8: Probe Amplifier Specifications

    Probe Amplifier Specifications Output Signal: 0-10VDC Nominal Maximum Adjustable Offset: -5V (provides and output of -5 to +5VDC) Measurement Range 0-12.5mm (0.500inch) Dynamic Resolution 0.000075%/√Hz FSR RMS Linearity ±0.02% FSR Repeatability ±0.01% FSR Frequency Response (Factory Selectable): DC-5kHz Warm-up Up time 1 Hour Temperature Stability: ±0.01% FSR/ºC...

  • Page 9: Probe Specifications

    Probe Specifications Temperature Rating: Standard Probes: -130 to 205ºC (-200 to 400ºF) Probe Connector (if equipped): -65 to 105ºC (-85 to 220ºF) Cable: -90 to 200ºC (-130 to 390ºF) Cable Termination at Amplifier: -65 to 165ºC (-85 to 330ºF) High-temperature, Cryogenic, and Vacuum compatible probes are available.

  • Page 10: Receiving Inspection Procedure

    The voltmeter reading should be higher than +10.000 VDC. If the unit is an Accumeasure 9000-2, attach a coaxial cable from the channel 2 output signal connector on the rear panel to a digital voltmeter. The voltmeter reading should be higher than +10.000 VDC.

  • Page 11: Return Shipment Procedure

    Return Shipment Procedure Contact MTI at 1-518-218-2550 to receive return authorization prior to shipping the instrument. Reference the instrument's name, model and serial numbers on all correspondence. Be sure to include a brief description of the reason for the return. Place the instrument in the original shipping carton (if available) and forward prepaid to: MTI Instruments, Inc.

  • Page 12: Operating Principles

    OPERATING PRINCIPLES Accumeasure System measurement technology is based on the principle of parallel plate capacitor measurement. The electrical capacitance formed between an Accumeasure probe and a target surface varies as a function of the distance (gap) between these two surfaces. This function can be stated as: Figure 1: Capacitance Probe Physics...
  • Page 13 The Accumeasure System measures the electrical impedance of the capacitance between a sensing electrode in the probe and a ground-referenced target. The magnitude of the impedance is proportional to the reciprocal of the capacitance value as defined by the equation below: ...

  • Page 14: Installation Instructions

    INSTALLATION INSTRUCTIONS Power Requirements The Accumeasure System 9000 unit may be powered by either a 50-Hz or 60-Hz power source with a voltage ranging from 100 to 240 Vac. No changes in the unit setup are required for power source voltages in this range.

  • Page 15: Connections

    The shield integrity of the probe cable cannot be broken. If the probe cable is damaged, it is recommended that it be replaced rather than repaired. Connect the Accumeasure 9000 to a standard AC power source with the provided three-wire IEC 320, power cable plugged into the rear panel (see Figure 7: Accumeasure™ 9000-1 Rear Panel or Figure 6: Accumeasure™...
  • Page 16 Bargraph Display Offset Adjustment Gain Adjustment Power Indicator Offset Switch & Indicator Figure 2: Accumeasure™ 9000-1 Front Panel – Bargraph Display Digital Display Offset Adjustment Gain Adjustment Power Indicator Offset Switch & Indicator Probe Input Figure 3: Accumeasure™ 9000-1 Front Panel – Digital Display...
  • Page 17 Channel 2 Gain Adjustment Channel 2 Offset Adjustment Channel 2 Bargraph Display Channel 2 Offset Switch & Indicator Channel 1 Bargraph Display Channel 2 Probe Input Channel 1 Power Indicator Probe Input Channel 1 Gain Adjustment Channel 1 Offset Switch & Indicator Channel 1 Offset Adjustment Figure 4: Accumeasure™...
  • Page 18 Signal Output On/Off Switch Fuse 100-240 VAC 50/60 Hz 20 W T 0.4A, 250V Ground Connection Power Cable Connection Figure 7: Accumeasure™ 9000-1 Rear Panel Signal Output Signal Output Signal Output On/Off Switch Signal Output Fuse 100-240 VAC 50/60 Hz 20 W T 0.4A, 250V Ground Connection...

  • Page 19: Control Switches

    Accumeasure™ 9000-2 Rear Panel indicate the switch location. The position of this “rocker-type” switch controls the application of AC power line voltage to the Accumeasure 9000 unit. Pressing the “I” side of the switch connects the AC voltage to the unit and turns the unit “ON”. Pressing the “O” side of the switch disconnects the AC voltage, on turns the unit “OFF”.

  • Page 20: Probe Mounting

    A back lighted, digital panel meter to display the probe gap signal for each probe channel is available, as an option, to replace the bargraph display in the Accumeasure 9000. The meter has a 3 1/2 digit display that is calibrated to produce a reading equal to the rear panel output signal voltage with a full scale range of +/-10.00 VDC.

  • Page 21: Probe Cables

    Probe Cables MTII capacitance probes are equipped with special, low-noise coaxial cables. Standard coaxial cables are not acceptable for connecting the probes to probe amplifier. Cables are available in either 50-ohm or 95- ohm sizes. Specifications: Diameter Operating Temperature 50Cable 1.95mm (0.076 inch) -90 to +200ºC (-130 to 390ºF) 95Cable...

  • Page 22: Operating Instructions

    A Micrometer with a minimum resolution of 0.05% of the probe range (if available) and accuracy of ±0.1% of the probe range. (An MTI KD-CH-IIIA Calibration Fixture may be used for this purpose; refer to the KD-CH-IIIA Operating Instruction Manual to compare the fixture resolution to the calibration requirements.)
  • Page 23 Verify several points in the linear probe range to ensure that the slope is 1mv/1unich. If this procedure does not produce the desired system accuracy, more elaborate calibrations such as linearizing the output may be accomplished by readjusting internal potentiometers. These adjustments must be made at the factory or by a qualified MTI representative...

  • Page 24: Pushed Amplifiers And Probes

    Pushed Amplifiers and Probes Some applications require probes that have small diameters yet achieve the sensing ranges of larger- diameter probes. For example, a 500um (20mil) range would normally require an ASP-20-CTA probe with a diameter of 11.1mm (0.437 inch) used with a standard amplifier. If a smaller probe diameter is required, the amplifier may be “pushed”...

  • Page 25: Conductive Target Thickness Measurements

    The probe amplifier summation circuit in the 9000-2 unit should be set to produce a [Channel 1 + Channel 2] summation for the correct addition of the two probe signals (contact MTI if there is a question about the exact configuration of the summation circuit). With the 9000-2 unit set up to perform the thickness measurement, the rear panel located, Sum Signal Output (refer to Figures 3-5 and 3-6, on pg.13) produces an output that has an increasingly positive magnitude as the target thickness...

  • Page 26: Troubleshooting

    Set up a probe and grounded target so that probe-to-target gap is within the probe full scale range, Connect the probe to the Accumeasure™ 9000 Probe Amplifier with an MTI probe cable, Apply AC power within the specified operating range to the Probe Amplifier.
  • Page 27 2. POWER REQUIREMENTS manual position. section for fuse replacement. 3. Check the AC power line fuse. 4. Contact MTI if the power and fuse are not faulty and the power indicator will not light. 1. Disconnect the coaxial probe cable from Power indicator is 1.
  • Page 28 PROBLEM CORRECTIVE ACTION REFERENCE 1. Check the front panel offset switch The rear panel 1. PROBE AMPLIFIER CALIBRATION position. If the offset indicator is lighted, output voltage is CHECK for gain adjustment. press and release the offset switch to not +10.00 VDC at 2.
  • Page 29 PROBLEM CORRECTIVE ACTION REFERENCE Check the probe support fixture to Excessive drift of PROBE AMPLIFIER CALIBRATION ensure the probe, and the fixture are the rear panel CHECK for gain adjustment. not loose. output voltage. PROBE MOUNTING manual section. Check the shield on the sensor cable and the connectors in the sensor cable signal path for 100% shield integrity and connector cleanliness.
  • Page 30 OTHER PRODUCTS FROM MTI INSTRUMENTS 1510A Battery Powered Signal Simulator/Generator Proforma™ 300 Semiconductor Wafer Qualification and General Thickness measurement (Capacitance) MicroTrak™ Laser Triangulation Displacement Sensor...
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