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Raith 150 System Operation Manual

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System Operation Manual
RAITH150
Version 4.0

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Summary of Contents for Raith 150

  • Page 1 System Operation Manual RAITH150 Version 4.0...
  • Page 2 All information in this document has been carefully prepared and are Statement believed to be accurate and complete. If doubts exist about any detail or additional information is necessary, please inquire Raith GmbH or their accredited representative. © 2004 by Raith GmbH. All rights reserved.

  • Page 3: Table Of Contents

    1 Introduction 1.1 Using this manual 1.2 Notes, cautions, and warnings 1.3 Navigating through the manuals 2 Safety and handling 2.1 Site requirements 2.2 General precautions 2.3 Operation, maintenance, service procedures 2.4 Miscellaneous Precautions 3 Notes concerning Personal Computer 3.1 Operation system 3.2 Hardware 3.3 Software 3.4 Backup...

  • Page 5: Introduction

    Make sure that you use the system correctly by reading the operation manual before usage carefully. Keep the operation manual on hand to read it whenever necessary. Contact directly Raith or your local representative whenever you are uncertain about operating your system. 1.2 Notes, cautions, and warnings Stickers on the left column provide you with the following messages: A note emphasizes information requiring special attention.

  • Page 6: Navigating Through The Manuals

    1 Introduction 1.3 Navigating through the manuals This manual provides information about safety and handling procedure for system and personal safety, • startup, standby, shutdown, and bakeout procedures. • Information on the task-oriented operation of the system as well • as the user interface are given in separate documents.

  • Page 7: Safety And Handling

    Operators and service personnel must be trained on potential safety hazards and safe techniques, and must observe all warnings and cautions encountered on the system and in the manuals. If you have any doubt regarding procedures, contact Raith directly or your local representative.
  • Page 8 Only authorized service personnel are allowed to service the • system. Service procedures are described in the system service manual, which is only available for Raith’s service engineers only. 2.3.1 X-ray radiation The system produces X-rays, if the high voltage is switched on. Under no mode of operation the measured X radiation exceeds 1µSv/h at a...
  • Page 9 2.3 Operation, maintenance, service procedures Overriding interlocks is dangerous and should never be done. Never attempt maintenance of any kind on the high voltage other than that described in this Operation manual. Servicing the high voltage is restricted to service engineers. The system meets the requirement for protection against electrical shocks.

  • Page 10: Miscellaneous Precautions

    2 Safety and handling 2.3.5 LASER radiation Your system uses a LASER. Therefore, Never look into the LASER beam to avoid damaging your eyes. Never attempt maintenance of any kind on the LASER other than that described in this Operation manual. Servicing the LASER is restricted to service engineers.
  • Page 11 2.4 Miscellaneous Precautions 2.4.3 Corrosion Components are painted, plated, or otherwise treated to resist corrosion. However, the components must be handled and stored properly to prevent corrosion.

  • Page 13: Notes Concerning Personal Computer

    3 Notes concerning Personal Computer 2.1 Site requirements 2.2 General precautions 2.3 Operation, maintenance, service procedures 7 2.4 Miscellaneous Precautions The system comes with two personal computers (PC) whose operation system is Windows. The following notes and caution apply to both PC.

  • Page 14: Backup

    3 Notes concerning Personal Computer Never delete additional software. • Never modify the current software settings. • If you do so, the system may not work normally and a service visit causing additional costs may be required. 3.4 Backup Make sure that the system is backup on a regularly basis. •...

  • Page 15: Power On And Off

    4 Power on and off 4.1 Starting the instrument 4.2 Troubleshooting 4.3 Going into standby 4.4 Shutting down the instrument 4.1 Starting the instrument 4.1.1 Turning on the hardware Before turning on the lithography system make sure that all the STEP 1 ►...
  • Page 16 4 Power on and off Figure 3 Power switch; use green button for full power. The column PC and the lithography PC are starting automatically. If not turn them on. Further all the electrical components located in the rack are starting automatically. Check if the follow hardware components are turned on.
  • Page 17 4.1 Starting the instrument 4.1.3 Starting the lithography software Login at the windows system with your assigned user account or as STEP 1 ► the user “training”, password “training” The lithography software is starting automatically. If not, double click STEP 2 ► on the corresponding link on the desktop.

  • Page 18: Troubleshooting

    20 Minutes. After the frequency is locked the stage can be switched to laser mode via the laser control window. The communication between the Raith and the SEM software failed. PROBLEM 2 ► Check if the RenCom32 program is running on the SEM PC. If not Cause / solution start this interface program.

  • Page 19: Going Into Standby

    4.3 Going into standby The communication between the Raith PC and the High Speed Pattern PROBLEM 3 ► Generator failed. The High Speed Pattern Generator hangs up or was turned off when Cause / solution the Raith PC was booting. Reset the High Speed Pattern Generator and restart the software.
  • Page 20 4 Power on and off Figure 5 Power switch; use red button for shut down. STEP 6 ► On the back of the system, rotate the MAINS switch to OFF.

  • Page 21: Maintenance Of System

    Please consult a Raith engineer with any questions or comments. 5.1 Column maintenance Performing a bake out for the first time: Consult Raith first! Bake outs need to be performed periodically to keep the tip healthy and stable, but excessive bake outs will shorten the filament’s lifetime.
  • Page 22 5 Maintenance of system When baking out the column intense heat will develop. Be careful not to get in contact with the column to avoid injuries. A bake out should be done under the following conditions: Gun vacuum drops below 7 or 8e-9 mbar. •...

  • Page 23: Filament Lifetime

    There are several factors that may contribute to an unstable beam current, including sample grounding problems and aperture or column contamination. So please get in contact with Raith personal to discuss possible origins. 5.2.1 Performing a filament stability test It is recommended to perform a filament stability test every month.

  • Page 24: Utility Maintenance

    C:\Raith150\beamcurrent.dat or .rag. STEP 10 ► Copy this file to a new location for reference purposes. If in doubt, how to interpret the data email it to a Raith service engineer for analysis. 5.3 Utility maintenance In the following some general maintenance rules are described.

  • Page 25: Sample Holders

    The other sample holders are less critical. Please pay special attention when pre-leveling the holders using the sapphire insets. Pre-leveling is described in a separate manual. Contact Raith for information on spare parts. 5.4.1 Universal sample holder, mask holder, wafer carrier Periodically clean the sample holders in an ultrasonic bath.

  • Page 26: Computer Systems

    Standard maintenance procedures like de-fragmentation, backup of data, applying Service Packs and bug fixing should be done on a regular base. Installing service packs and bug fixes include the operation systems as well as the Raith software. Please see section ► section for additional...

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