Summary of Contents for Tempress Systems M440-01
- Page 1 Touchscreen Reference Manual ® Tempress Systems, Inc. Touchscreen manual M440_01 January 2004...
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Page 3: Table Of Contents
TABLE OF CONTENTS Table of contents 1. Introduction ............1-1 2. System specifications ......... 2-1 3. Installation ............3-1 Installation into a new furnace ..........3-1 Upgrading the front panel display ..........3-1 4. Screen Hierarchy..........4-1 5. Data Input.............. 5-1 Using the qwerty keyboard ............ - Page 4 TABLE OF CONTENTS 6.2.1.8 Graphic System Layout ......6-14 Temperature Controller Certifications ...... 6-15 6.2.2 6.2.2.1 Tube Configuration........6-16 6.2.2.2 Normal Temperature Table ....... 6-18 6.2.2.3 Profile Temperature Table......6-19 6.2.2.4 Paddle TC Calibration Table ..... 6-20 6.2.2.5 PID Parameter Table ........ 6-21 6.2.2.6 Maximum Spike Correction Table .....
- Page 5 LIST OF FIGURES List of figures Figure 3-1 Location of Connectors ............3-2 Figure 4-1 Screen Hierarchy ..............4-1 Figure 6-1 Main Menu ................6-1 Figure 6-2 Sytem Control Access Screen ..........6-3 Figure 6-3 System Control Menu ............6-3 Figure 6-4 Access Control...............
- Page 6 LIST OF FIGURES Figure 6-29 Abort Process Recipe ............6-31 Figure 6-30 Clear Process Alarms ............6-32 Figure 6-31 Variable Process Commands..........6-32 Figure 6-32 Select a Process Recipe ............ 6-33 Figure 6-33 Assign Control Zones To Paddle Inputs......6-34 Figure 6-34 Edit Lot Id................
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Page 7: Introduction
INTRODUCTION 1.Introduction The Flat Panel Display (Touchscreen) has been designed to provide the user of the Digital Temperature Controller (DTC) and the Digital Process Controller (DPC) with improved system control and easy alteration of parameters. As well as displaying the required information, its unique “touchscreen”... -
Page 8: System Specifications
SYSTEM SPECIFICATIONS 2.System specifications flexibility: Although the touchscreen has been designed for controlling the DTC and DPC, a simple change of firmware allows it to be used for any application. compactness: The controlling electronics and firmware are mounted onto the back of the display making it suitable for tight spaces. -
Page 9: Installation
INSTALLATION 3.Installation The touchscreen can be installed very easily. The only tool required is a Phillips screwdriver. Installation into a new furnace or to upgrade a furnace from the old display panel is very similar, but for clarity the two procedures are divided into the following two sections. Installation into a new furnace To install the touchscreen into a new furnace, ensure that the DPC is fitted. -
Page 10: Figure 3-1 Location Of Connectors
INSTALLATION 9. Secure the touchscreen with the screws. It is now ready for starting. 10. Turn the tube switch on. The Main Menu should appear after about 10 seconds. Figure 3-1 Location of Connectors OUCHSCREEN EFERENCE MANUAL... -
Page 11: Screen Hierarchy
SCREEN HIERARCHY 4.Screen Hierarchy SYSTEM CONTROL MENU 1. Access Control 2. Access: Start on another recipe STEP (Status = YES/NO) 3. Buzzer (Status = ON/OFF) 4. Set Date and Time 5 Tube Control Mode TUBE CERTIFICATION MENU DPC CERTIFICATION MENU 1. -
Page 12: Data Input
DATA INPUT 5.Data Input Once the desired screen has been obtained, numeric or text entries can be made by the alphanumeric keys displayed at the bottom of the screen. If only numeric entries are required, one line of digits is displayed. Enter data by selecting the required sequence of digits, followed by <RETURN>. -
Page 13: Operation Menu's
OPERATION MENU’S 6. Operation menu’s Figure 6-1 Main Menu This is the first screen after power-on. The Main Menu has a title bar containing the menu name, the tube identification number and the tube name. The center of the screen contains five menus, and the bottom line gives the date and time and allows at any moment alarm messages to be displayed. - Page 14 OPERATION MENU’S 2. Certifications The Certifications Menu describes the hardware to the DPC and DTC. This menu is split up in two parts, one for the DPC and one for the DTC. It is vital that the information stored in those submenus matches the actual hardware.
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Page 15: System Controller
OPERATION MENU’S System controller Entering the System Control Menu requires a username and a password. Figure 6-2 System Control Access Screen It is recommended to set these settings first. Once the other access rights have been changed, the System will not allow access to a second level menu without a name and password. Once the NAME and PASSWORD are given, the following screen with the “SYSTEM CONTROL MENU”... -
Page 16: Access Control
OPERATION MENU’S Access control 6.1.1 Figure 6-4 Access Control Access Control gives the opportunity to make a distinction in the user access rights. To edit a username and password, press the corresponding number (1 to 4). The username may consist of ten characters, the password only five. -
Page 17: Buzzer (Status= On / Off)
OPERATION MENU’S Start on another recipe STEP (status= YES / NO) 6.1.2 To change access/status of ‘starting on another recipe step’ in YES or NO. To allow jumping to another step in a running process recipe set status to ON. Disabling this feature is done by selecting this menu item again. -
Page 18: Tube Control Mode
OPERATION MENU’S Tube control mode 6.1.5 Tube Control takes place by Touchscreen and TSC-II. Tube Control Mode Menu allows to define which one of the user interfaces is allowed to control the tube. This is to provide unauthorized or unwanted recipe selection, or starting and stopping a recipe. It can be important to disable one (or both) controller interface(s) to prevent any dangerous situation, like starting a recipe from TSC-II (remote control) at the same time the maintenance engineer is working on the system. -
Page 19: Select Recipe Control
OPERATION MENU’S 6.1.5.2 Select Recipe Control Select Recipe Control mode allows 4 different levels of authority concerning recipe selection: REMOTE (TSC) Recipe selection is only possible via the TSC-II. NORMAL (Local + Remote) Recipe selection is possible via the TSC-II as well as the Touch Screen. DISABLED Recipe selection via the TSC-II as well as the Touch Screen is not possible. -
Page 20: Certifications
OPERATION MENU’S Certifications Figure 6-7 Tube Certification Menu ‘Certifications’ in the Main Menu gives access to the submenu ‘Tube Certification Menu’. This submenu gives access to the DPC and the DTC certifications. 1. Process Controller Certifications To change the certifications of the Digital Process Controller (DPC). 2. -
Page 21: Process Controller Certifications
OPERATION MENU’S Process Controller Certifications 6.2.1 Figure 6-8 DPC Certification Menu 1. Tube Id and Tube Name: To change the Id or name of the tube. 2. Tube Configuration: To change the number of process recipes, pressure control or boat parameters. 3. -
Page 22: Tube Id And Name
OPERATION MENU’S 6.2.1.1 Tube Id and Name Figure 6-9 Tube Id and Tube Name This screen enables the user to change the Id and the name of the tube. Enter the new Id, with a maximum of two characters, followed by <RETURN>. The first character must be a letter of the alphabet in the range A to Z. -
Page 23: Analog Outputs
OPERATION MENU’S Boat Loader When it is installed, this field shows the minimum and maximum position of the boat. (The number of pulses per mm. is only applicable to old step motors. The current servo motors do not use this parameter). External Pressure: YES: Nothing can be edited. -
Page 24: Analog Inputs
OPERATION MENU’S 6.2.1.4 Analog Inputs Figure 6-12 Analog Inputs This submenu defines the settings for the analog inputs. To define an analog input first select its number. Give for each input the name (mnemonics, maximum eight characters), the minimum and maximum range value and its unit. -
Page 25: Digital Inputs
OPERATION MENU’S 6.2.1.6 Digital Inputs Figure 6-14 Digital Inputs This submenu defines the Digital Inputs. The input can be edited by entering its number, followed by <RETURN>. When the name is set, confirm with the <RETURN> key. When all the changes are performed, press <ESCAPE>... -
Page 26: Graphic System Layout
OPERATION MENU’S Use messages as mnemonics in your recipe. During the process these messages give an idea of the progress of the process. 6.2.1.8 Graphic System Layout Figure 6-16 Graphic System Layout There are two options, Graphics-1 and Graphics-2. ‘Graphics–1’ gives the possibility to design a graphic display. -
Page 27: Temperature Controller Certifications
OPERATION MENU’S Temperature Controller Certifications 6.2.2 Figure 6-17 DTC Certification Menu This menu is used to configure the DTC parameters. It is VITAL that the parameters match the actual hardware. Failure to do so leads to serious danger. It is not possible to choose another tube from this menu. -
Page 28: Tube Configuration
OPERATION MENU’S 6. Maximum Spike Correction Table: The maximum spike correction table is used to prevent large overshoot in special situation. 6.2.2.1 Tube Configuration Figure 6-18 Tube Configuration The Tube Configuration Menu is used to set the type of thermocouples on the furnace, the maximum heat up rate and the maximum profile deviation. - Page 29 OPERATION MENU’S Maximum Heat Up: The maximum heat up rate is a software limitation on the maximum ramp-up speed for each temperature range. The maximum heat up rate can be anything between 0.0 (= no limitation) and 25.5ºC/min. (controlled). Maximum Profile Deviation: The maximum profile deviation is a limit used for profiling the tube.
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Page 30: Normal Temperature Table
OPERATION MENU’S 6.2.2.2 Normal Temperature Table Figure 6-19 Normal Temperature Table The Normal Temperature Table consists of 16 positions (0-15) for process temperature recipes. These process temperature recipes can be selected based on recipe number. Every process temperature recipe contains the following parameters: Recipe number: The recipe number is the main source of recipe selection. -
Page 31: Profile Temperature Table
OPERATION MENU’S High/Low limits: The high and low limits are used to allow some temperature deviation around the setpoint. If the actual temperature falls outside these limits a temperature alarm is generated. The limits must be in the range 0.0 to 25.5 C where 0.0 means NO alarm limit set. GAIN: The gain is a amplification factor in the PID temperature control Loop and can be increased if a particular temperature zone does not reach its setpoint. -
Page 32: Paddle Tc Calibration Table
OPERATION MENU’S Four profile temperature tables are available (A-D) to accommodate different process environments. Typically only one table is used, occasionally two (such as dry and wet environment in a steam oxidation capable table). The paddle setpoint entries will be the same to all four tables and must be entered in ASCENDING order. -
Page 33: Pid Parameter Table
OPERATION MENU’S NOTE If a not calibrated paddle thermocouple is used the calibrated values of each zone must be made equal to the calibration temperature. <INSERT> This enables a profile temperature recipe to be inserted into the table. All the other lines in the table are moved down one line. <ERASE>... -
Page 34: Maximum Spike Correction Table
OPERATION MENU’S 6.2.2.6 Maximum Spike Correction Table Figure 6-23 Maximum Spike Correction Table The maximum spike correction table is used to prevent excess temperature overshoot in the particular situation of Paddle Control and Boat Out. Due to cold cleanroom air entering the process tube when the boat is out the door zones measured by the paddle thermocouple will cool down. -
Page 35: Edit A Process Recipe
OPERATION MENU’S used in editing a recipe. Appendix A gives a detailed description of all the commands that can be entered. Selecting the menu <3> Process Recipes on the Main Menu gives the screen: Edit A Process Recipe. The current process recipe number and name are presented at the top, including its numbering status. - Page 36 OPERATION MENU’S Editing modes 1=Append The Append mode allows a new command to be added at the end of the process recipe. The editor asks: “Enter command to append (Y/N for New Process Step). Press “Y” to create a new step, or “N” to insert the step into the current one.
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Page 37: Tube Control
OPERATION MENU’S NOTE If a new step is inserted any branch instruction in the recipe is automatically recalculated. Paging modes The paging modes First, Next, Previous, Last and Step allow navigation through a process recipe. 6 FIRST Moves the cursor to the first line of the process recipe. 7 NEXT Scrolls one screen down. - Page 38 OPERATION MENU’S From this screen it is possible to start stop the current process recipe, abort that recipe or return to the Process Control Menu. 2. Start/Stop Process Recipe To start a new process recipe or allow a current recipe to be continued when it has been paused can be done with this instruction.
- Page 39 OPERATION MENU’S 3. Abort Process Recipe The abort instruction can be used to kill a running process recipe in case of emergencies. Automatic abort commands can be implemented in the process recipe to handle out of buzzer or sensor signal failure situation. A manual abort command can be issued in this menu only.
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Page 40: Graphic Process Control
OPERATION MENU’S Graphic Process Control 6.4.1 Figure 6-27 Graphic Process Control The Graphic Process Control is a graphical interface to the tube control. The screen contains three main divisions, the process recipe status in the top field, the tube status in the large center field and the control buttons on the left. - Page 41 OPERATION MENU’S The following symbols are used Open Valve Flow Meter Closed valve Pump Fine Metering Valve Tube (FM) Mass Flow Orifice Controller Baratron Up to four graphical screens can be setup to fully match the tube hardware. Each screen can be accessed by using the <NEXT>...
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Page 42: Start/Stop Process Recipe
OPERATION MENU’S Start/Stop Process Recipe 6.4.2 Figure 6-28 Start/Stop Process Recipe The <Start> command is used to start a process recipe, that is to go from Step “0” to step “1”. Additionally, <Start> will be required to continue a process recipe if it has been paused by the Stop command and if the system is “Waiting for operator”. -
Page 43: Abort Process Recipe
OPERATION MENU’S Abort Process Recipe 6.4.3 Figure 6-29 Abort Process Recipe The abort command is a powerful instruction that will bring the tube in a safe state. Abort instruction can be implemented in the process recipe to automatically handle undesired situation such as pressure failure, gas flow problems and temperature related issued. -
Page 44: Clear Alarms
OPERATION MENU’S Clear Alarms 6.4.4 Figure 6-30 Clear Process Alarms Alarm messages are generated automatically and indicate the type of alarm and location (for example Digital Input number 1 (N pressure)). Solving the cause of the alarm condition automatically removes the alarm from the current alarm list (it will be stead in the process alarm list for review). -
Page 45: Select A Process Recipe
OPERATION MENU’S Press <ESCAPE> to go back to the Process Control Menu. If any changes have been made, the new values will be stored and the following message will appear: “Process variable commands are stored”. The Variable Process Command is a special instruction used to quickly modify predefined commands from the process recipe, without the need to use the recipe editor. -
Page 46: Assigns Control Zones To Paddle Inputs
OPERATION MENU’S Assigns Control Zones to Paddle Inputs 6.4.7 Figure 6-33 Assign Control Zones To Paddle Inputs The Digital Temperature Controller (DTC) can use different thermocouples as input signals. Default the spike TC’s are used to control the temperature as they give the fastest response and shortest recovery timer. -
Page 47: Edit Lot Id
OPERATION MENU’S Edit Lot Id 6.4.8 Figure 6-34 Edit Lot Id The “Edit Lot ID” menu is used to enter a batch name. It allows tracking of process results to a particular process recipe and batch number. A maximum of 16 Lot ID’s can be entered, including lot name, type and amount of wafers and the first slot position. -
Page 48: Figure 6-35 Monitor Menu
OPERATION MENU’S It is not possible to modify any of the parameters using this menu. The information is updated once every second. Figure 6-35 Monitor Menu The Monitor Menu presents an overview of the available information. The following sub menus can be selected: 1. -
Page 49: Main Detail Status
OPERATION MENU’S and power parameters, the alarms, the alarm limits, the PID and gain parameters, the type of control and if automatic profiling is ready. 7. Normal Recipe Status This contains the Normal (Process) Temperature Recipes, stored in the Normal Temperature Table and includes temperature setpoint, slope, limits, gain and type of control. -
Page 50: Figure 6-37 Branch Status
OPERATION MENU’S • the Recipe Id and its name; • the message for the current step; • the process time; • the step number and time; • the action for which the controller is waiting; • the boat position, setpoint and speed. The temperature table shows for each zone the setpoint and actual temperature of the paddle and spike thermocouples. -
Page 51: Alarm Status
OPERATION MENU’S Alarm Status 6.5.2 Figure 6-38 Alarm Status The alarm status presents an overview of the alarms that (have) occurred. The alarms are grouped to allow fast fault diagnosis. Temperature, boat, analog I/O, digital I/O and wait for and a branch alarm can be viewed. Two screens are available, current and process alarm. -
Page 52: Dpc Lot Id Status
OPERATION MENU’S The Digital Output and Input menu gives an overview of mainly the valve settings, digital outputs (ON/OFF) and digital inputs such as pressure and door switches (ON/OFF) In addition the alarm active status is displayed. “Yes” means the digital input is monitored and a change in signal will generate an alarm. -
Page 53: Process Recipe Status
OPERATION MENU’S Process Recipe Status 6.5.5 Figure 6-41 Process Recipe Status The Process Recipe Status allows the user to monitor the contents of any process recipe present in the DPC memory without the possibility to modify. Accidental alteration of the process recipe contents is not possible. Therefore this menu is the safest way to review a process recipe. -
Page 54: Temperature Status
OPERATION MENU’S information consists of the line number, the step number and the instructions associated with that step. If a step number does not appear on a line, then that instruction is part of the last indicated step number. The bottom section (C) allows the user to navigate through the recipe or return to the menu. -
Page 55: Figure 6-44 Temperature Status
OPERATION MENU’S 2. Normal Recipe Status The normal recipe status menu presents the contents of the normal temperature table. 3. Profile Recipe Status The Profile Recipe Status presents the contents of the profile temperature table. 4. Paddel Correction and PID parameters The ‘Paddle correction and Parameters menu’... -
Page 56: Normal Recipe Status
OPERATION MENU’S The maximum spike correction table is used to reduce temperature overshoot and stabilization times in the situation of paddle control and boat out combination. The “Detail status of tube” displays the tube Id and name to which the information about temperature data for the zones of the furnace relates. -
Page 57: Profile Recipe Status
OPERATION MENU’S 6.5.6.3 Profile Recipe Status Figure 6-46 Profile Recipe Status The Profile Recipe Status presents the contents of the profile temperature table. The paddle TC setpoint, corresponding spike TC value and the required power output are shown in the main section for all 16 profile temperature recipes. -
Page 58: Graphic Process Status
OPERATION MENU’S The ‘Paddle correction and Parameters menu’ shows information about the calibrated correction values for the paddle thermocouple, the PID settings used for paddle control, the maximum achievable heat up rate and the maximum profile deviation. Press <ESCAPE> to go back to the “Monitor Menu”. Graphic Process Status 6.5.7 Figure 6-48 Graphic Process Status... - Page 59 APPENDIX A Appendix A This appendix lists the commands that can be entered into a recipe using the touchscreen recipe editor. The majority of commands require parameters to be set. These are shown in the second column. COMMAND: PARAMETER: 1 BOAT Boat position Boat speed (5-1000mm/min) Oscillation speed (0-100 in steps of 10)(*)
- Page 60 APPENDIX A 5 WAIT 0 - Wait for ready 1 – Wait for operator 2 – Wait for boat to reach setpoint 3 – Wait for temperature to reach setpoint in limits 4 – Wait for temperature at load zone to reach temperature 5 –...
- Page 61 APPENDIX A Recipe Number (0-15) The Setpoint and Slope parameters of the current recipe number are displayed Profile Table: 1 = Table A 2 = Table B 3 = Table C 4 = Table D 8 BRANCH 0 - Always Step number (0-99) Sonalert alarm 1 - On temperature alarm...
- Page 62 APPENDIX A 9 – On Digital Input Input (1-32) Step number (0-99) Sonalert alarm 10 – On analog input Input (1-32) Step number (0-99) Sonalert alarm 9 ABORT 0 – Select recipe (1-8) 1 – On temperature alarm 2 – On boat alarm 3 –...
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