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Gamma Vacuum TSP User Manual

Titanium sublimation pump & remote tsp pump controller
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Titanium Sublimation Pump & Remote
TSP Pump Controller Users Manual
PN 900016, Rev C
Specification information is located on our website at:
www.gammavacuum.com
ISO 9001:2000 Certified
rd
2915 133
Street West • Shakopee, MN 55379 • (p) 952.445.4841 • (t) 800.237.3603• (f) 952.445.7615
www.gammavacuum.com • info@gammavacuum.com

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Summary of Contents for Gamma Vacuum TSP

  • Page 1 Titanium Sublimation Pump & Remote TSP Pump Controller Users Manual PN 900016, Rev C Specification information is located on our website at: www.gammavacuum.com ISO 9001:2000 Certified 2915 133 Street West • Shakopee, MN 55379 • (p) 952.445.4841 • (t) 800.237.3603• (f) 952.445.7615...

  • Page 2: Table Of Contents

    TSP & Remote TSP Controller Users Manual Table of Contents General Information..............................3 TSP Specifications ..............................5 Remote TSP/NEG Controller Specifications ......................6 Approvals ................................7 Installation................................8 Receiving and Unpacking............................8 Safety Notices ............................... 8 TSP Installation Procedure ........................... 9 Remote TSP Controller Installation Procedure ....................

  • Page 3: General Information

    (e.g. ion pump). Due to the conductive nature of the titanium film, it is a good practice to eliminate line of sight from the TSP to the rest of the vacuum system. If the film coats electrical insulators (e.g. the ceramic insulators of the sputter-ion pump) it will create an electrical path which can lead to electrical leakage or shorts.
  • Page 4 The remote controller operates in conjunction with the DIGITEL Ion Pump Power Supply Line. It has the capability of operating up to 8 filaments total in any TSP configuration (independently, 3 or 4 filaments per TSP). The remote TSP/NEG controller system consists of: •...

  • Page 5: Tsp Specifications

    (included with Remote TSP Controller) TSP2 (optional) TSP Specifications Temperature (max): Bakeable to 250°. Includes adapter cables for mating with the TSP controller. Number of Filaments 3 Spiral design Filament Material: mm (in.) 85% titanium, 15% molybdenum alloy wire Total length of each wire: mm 219 (8.6)

  • Page 6: Remote Tsp/Neg Controller Specifications

    TSP & Remote TSP Controller Users Manual Remote TSP/NEG Controller Specifications The Remote TSP Controller specifications match the Digitel MPCe specifications with the following additions: Parameter Specification Number of Independent TSPs 1 or 2 (up to 4 filaments per TSP)

  • Page 7: Approvals

    TSP & Remote TSP Controller Users Manual Approvals TSP Products are shown to meet the intent of Directive 89/336/EEC for Electromagnetic Compatibility and Low- Voltage Directive 73/23/EEC for product Safety. Compliance was demonstrated to the following specifications as listed in the Official Journal of the European Communities: EN 50081-1 Emissions •...

  • Page 8: Installation

    Inspect for any obvious damage. If the equipment is damaged in any way, a claim should be filed with the carrier (one copy to Gamma Vacuum). If equipment is to be retuned for inspection or repair, authorization must be obtained from Gamma Vacuum Prior to reshipping. Instructions for return will be provided at that time.

  • Page 9: Tsp Installation Procedure

    L’EQUIPEMENT. EQUIPO. TSP Installation Procedure If purchased as part of an ion pump, the TSP and corresponding shield come pre-installed. Refer to this section if the TSP and shield are purchased separately. Required Items You need the following items to install the TSP: •...

  • Page 10: Remote Tsp Controller Installation Procedure

    1. Place the 2 ¾” or 3 3/8” gasket on the corresponding shield port. 2. Insert the TSP in the corresponding shields (cryo shown) 2 ¾” or 3 3/8” port through the gasket. 3. Insert bolts through TSP flange into shield and tighten according to standard CFF procedures.

  • Page 11: Dual Tsp Installation Procedure

    5. Route the high current cable to the TSP. 6. If installed, remove the strain relief shroud from the TSP connection using a Philips screw driver. 7. Place the shroud over the high current wires and around the cable. Loosen the wire clamp if necessary.

  • Page 12: Remote Tsp Controller Operation

    TSP & Remote TSP Controller Users Manual Remote TSP Controller Operation Description The Remote TSP Controller user interface is conducted through the MPCe front panel. For more information on how to use the MPCe, refer to the MPCe/LPCe Users Manual (pn 900015). Menu Display The TSP parameters are controlled through the MPCe Menu screen.

  • Page 13: Tsp Configuration (Config) Menu

    Note: Re-Scanning will activate all installed filaments. TSP Configuration The TSP configuration pull down menu allows the current number of TSPs (1 or 2) and the current number of filaments (3 or 4) to be viewed and selected when automatically scanned or manually overwritten.
  • Page 14 (filament 5 in the above example). . Independent Filament Operation Selecting this box overrides the TSP configuration and forces each filament to be treated as an independent TSP (a one to one relationship). This option disables any programmed TSP parameters and can only be operated in manual TSP mode.

  • Page 15: Tsp Settings Menu

    TSP & Remote TSP Controller Users Manual Degas The TSP degass feature can be customized to specific amperage and on time values. While degassing, the actual levels are displayed. The degass routine ramps voltage up slowly for each active filament independently and maintains the set amperage for the set on-time.
  • Page 16 TSP & Remote TSP Controller Users Manual 1) Settings for TSP, selects if the shown parameters are for TSP1 or TSP2 (each TSP can be set for either manual or programmed). 2) Control Source, determines which supply (1 or 2) the current TSP responds to for pressure limits. If “None” is selected, the TSP program will activate regardless of any pump pressure.

  • Page 17: Tsp Sublimation Screen

    Once the TSP has been properly configured and the settings entered, the TSP will show the appropriate parameters in the TSP firing screen. This screen is entered by pressing the TSP button in the lower right hand corner of MPCe units equipped with the TSP option.

  • Page 18: Procedures And Additional Information

    This procedure is used when the pump is started after exposure to any pressure above 3.3 Pa (including atmospheric pressure). 1. Check to see that the ion pump power supply and TSP Control are properly connected and that the system is tightly sealed.

  • Page 19: Titanium Consumption

    • 24 copper lugs (newer TSPs only require 12 of these) • Four 2 ¾” and three 3 3/8” silver plated gaskets (for use with either a 3 or 4 filament TSP respectively) • Wrench (a special wrench designed to prevent bending of posts during filament installation) To replace the filaments: 1.

  • Page 20: Tsp Controller Connections

    Contact Gamma Vacuum if a change in input power is required. MPC/MPCe Controller, J2 (J2/J3 for Dual only) The Remote TSP/NEG Controller is supplied with a 15-pin Sub-D connector to facilitate communications between the MPC and Remote TSP/NEG Controller. The mating connection on the MPC/MPCe is J505.

  • Page 21: Mpce Serial Interface, J112 (Mpce Backpanel)

    Applicable to MPCe and legacy product. TSPX TIMED, N, XXX,YYY, N is the corresponding TSP (1 or 2) Z.ZE-ZZ, XXX is the cycle period in minutes Sets TSP (1 or 2) mode of A.AE-AA,DDD, YYY is the number of cycles operation to programmed.
  • Page 22 Description Response Data Field Data/Response Interpretation Command R, I R = the corresponding TSP (1 or 2) FILAMENT AUTOX, I = rotation mode Automatically advances to the next 0 = disabled filament if the one being used is 1 = balanced open.
  • Page 23 AUTO SCAN Rescans filaments determine filament configuration. CAUTION: Activates all filaments. R, N R = the corresponding TSP (1 or 2) SET CONTROL SOURCE N = High Voltage Section (1 or 2) Sets the HV control source for programmed mode corresponding TSP.

  • Page 24: Warranty & Service

    Gamma Vacuum warrants to the Buyer that the equipment sold is new equipment, unless previously stated, and is, at the time of shipment to Buyer from Gamma Vacuum, free from defects in material and workmanship. As Buyers sole exclusive remedy under this warranty, Gamma Vacuum agrees to either repair or replace, at Gamma...
  • Page 25 Statements made by any person, including representatives of Gamma Vacuum, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Gamma Vacuum unless reduced to writing and approved by an officer of Gamma Vacuum.

  • Page 26: Returning Material

    In the event a product requires service, exchange, or return, a Return Material Authorization (RMA) number must be obtained from Gamma Vacuum prior to shipment. RMA numbers can be obtained by calling the Gamma Vacuum toll-free number. The RMA process will be expedited if any of the following information can be provided: •...

  • Page 27: Return Material Authorization Form

    Return Material Authorization Form Thank you for taking the time to complete this form. Please complete this form in word and return to Gamma Vacuum in word, Adobe Acrobat format (.pdf), or via fax. The “tab” key moves between fields. Digital signatures are acceptable.

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