Page 1 Keysight Technologies E5250A Low Leakage Switch Mainframe User’s Guide...
Page 2: Declaration Of Conformity
© Keysight Technologies 1995-2015 Declarations of Conformity for this product FAR 2.101, pursuant to FAR 12.211 and and for other Keysight products may be down- 27.404.2 and DFARS 227.7102, the U.S. gov- No part of this manual may be reproduced in loaded from the Web.
Page 3 User’s Guide B2900-9001x xxxx 201x Edition x...
Page 4 COMPLIANCE WITH GERMAN NOISE REQUIREMENTS This is to declare that this product is in conformance with the German Regulation on Noise Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland). • Herstellerbescheinigung GERÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T.
Page 5 In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Keysight Technologies assumes no liability for customer’s failure to comply with these requirements.
Page 6 Instruments that appear damaged or defective should be made inoperative and secured against unintended operation until they can be repaired by qualified service personnel. Return the instrument to a Keysight Technologies sales or service office for services and repair to ensure that safety features are maintained.
Page 7: Safety Symbols
Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Direct current. Alternating current. Earth ground terminal. Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment.
Page 8 The CE mark shows that the product complies with all applicable European Directives. The CSA mark is a registered trademark of the Canadian Standards Association. The RCM mark is a registered trademark of the Australian Communications Authority. This signifies compliance with the Australian EMC Framework Regulations under the terms of the Radio communications Act.
Page 9 Product Category: With reference to the equipment types in the WEEE directive Annex 1, this product is classified as a “Monitoring and Control instrumentation” product. Do not dispose in domestic household waste. To return unwanted products, contact your local Keysight office or visit the following website for more information. http://about.keysight.com/en/companyinfo/environment/...
Page 10 In This Manual This manual is a user’s guide for Keysight E5250A, and consists of the following chapters. "Introduction" Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer. "Installation"...
Page 11 "Error Messages" Lists and describes the error messages for the E5250A. "SCPI Command Summary" This is a quick reference for the SCPI subsystem commands available for the E5250A. For the specifications of the E5250A/E5252A/E5255A, see Data Sheet. NOTE To get the latest Data Sheet, go to www.keysight.com/find/swm...
Page 13: Table Of Contents
1. Introduction Keysight E5250A Product Description ......1-3 Front Panel Tour ..........1-4 Rear Panel Tour .
Page 14 Connecting the E5250A Input ........4-15...
Page 15 5. Controlling the E5250A Methods for Controlling the E5250A .......5-3 Creating Your Own Program .
Page 16 Common Commands ......... . . 7-4 Common Commands for E5250A ....... . 7-4 *CLS .
Page 17 [:ROUTe]:COUPle:PORT ........7-35 Keysight E5250A User’s Guide, Edition 12...
Page 18 ........8-7 Keysight E5250A User’s Guide, Edition 12...
Page 19 .........8-26 Keysight E5250A User’s Guide, Edition 12...
Page 20 Query Errors ..........10-9 Keysight E5250A User’s Guide, Edition 12...
Page 21 Contents E5250A Specific Error Messages ....... .10-10 E5250A Channel Related Errors .......10-11 E5250A Card/Mode/Port Related Errors .
Page 22 Contents Keysight E5250A User’s Guide, Edition 12...
Page 23: Introduction
Introduction...
Page 24 Introduction This chapter gives an overview of Keysight E5250A, E5252A, and E5255A. • “Keysight E5250A Product Description” • “Keysight E5252A Product Description” • “Keysight E5255A Product Description” • “Options and Accessories” 1- 2 Keysight E5250A User’s Guide, Edition 12...
Page 25: Keysight E5250A Product Description
(plug-in cards) listed in Table 1-1. These cards can be used in various switching matrix configurations in the E5250A. For example, using four E5252As, you can configure a maximum 10-input 48-output switching matrix, or using four E5255As, you can configure a maximum 2-input ×...
Page 26: Front Panel Tour
Introduction Keysight E5250A Product Description Front Panel Tour The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in Figure 1-1. LINE key Used to turn the E5250A on or off. Line LED Turns on when the E5250A is turned on.
Page 27 ±200 Vdc. The maximum measurement current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied between input terminals is 300 Vdc. Do not apply an input signal over these limits to the E5250A inputs. If you do, the E5250A will be damaged.
Page 28: Keysight E5252A Product Description
Device Under Test (DUT), or need to scan instrument input/output for many DUTs, automatically. The E5250A can be installed with maximum four E5252As. And the input terminals of the E5252As are connected together inside the E5250A. So, the E5250A can configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and...
Page 29 WARNING Do not touch the force and guard terminals of the output connectors while the E5250A is turned on. Dangerous voltages up to the maximum input voltage may be present at the output connectors. Ne touchez pas les bornes de force et de protection des connecteurs de sortie pendant que le E5250A est en marche.
Page 30: Keysight E5255A Product Description
The E5255A is designed for semiconductor device reliability testing which needs to automatically scan instrument input/output for many DUTs. A maximum of four E5255As can be installed in the E5250A, which can use the multiplexers in several configurations. For example, the E5250A can configure...
Page 31 Be careful about the heating of the rear panel of mainframe or plug-in card, which may be heated by resistors, even if you follow this warning. Keysight E5250A User’s Guide, Edition 12 1- 9...
Page 32 IV In put 2 O u tpu t B L O C K 3 B IA S Inpu t 3 R es is tor IV In pu t 3 O u tpu t 1- 10 Keysight E5250A User’s Guide, Edition 12...
Page 33 WARNING Do not touch the force and guard terminals of the OUTPUT connectors while the E5250A is turned on. Dangerous voltages up to the maximum input voltage may be present at the OUTPUT connectors. Ne touchez pas les bornes de force et de protection des connecteurs de sortie pendant que le E5250A est en marche.
Page 34: Options And Accessories
Introduction Options and Accessories Options and Accessories This section lists the options and accessories available for the E5250A. Table 1-3 lists the options available for the E5250A. Table 1-3 Options Model Option Item Description Number E5250A Low Leakage Switch Mainframe...
Page 35 Introduction Options and Accessories Table 1-4 lists accessories furnished with the E5250A, E5252A, and E5255A. Table 1-4 Furnished Accessories Model Description Qty. Number E5250A Keysight E5250A User's Guide E5250A VXI Plug&Play Driver disk Keysight E5250A Program Disk (LIF format, 3.5 inch disk)
Page 36 E5252A, and two for HCI test and analysis using the E5255A. Runs on HP BASIC. Refer to Chapter 9. Self-test Utility Self-test and relay test program for the E5250A. Runs on the 4155/4156's built-in IBASIC controller. Refer to Chapter 3. 1- 14...
Page 37 Introduction Options and Accessories Table 1-5 lists accessories available for the E5250A. Table 1-5 Available Accessories Model Option Description Number Item E5252A 10×12 Matrix Switch E5255A 24 (8×3) Channel Multiplexer 16494A Triaxial Cable 16494A-001 1.5 m length 16494A-002 3 m length...
Page 38 Introduction Options and Accessories 1- 16 Keysight E5250A User’s Guide, Edition 12...
Page 39: Installation
Installation...
Page 40 • Warn workers around the E5250A about dangerous conditions. La tension d'entrée maximale de la E5250A est de ± 200 V. Une tension dangereuse émanant du dispositif Keysight E5250A peut être sortie aux bornes Force, Guard et Sense. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle.
Page 41: To Inspect The E5250A And Accessories
Installation To Inspect the E5250A and Accessories To Inspect the E5250A and Accessories When you receive and open the box that contains the E5250A, check the following: • Before unpacking any components, inspect all boxes for any signs of damage that might have occurred during shipment such as: •...
Page 42: Requirements
“Operating Environment” • “Storage and Shipping Environment” Power Requirements The E5250A can operate from any single-phase AC power source supplying 100-240 V (±10 %) at 50/60 Hz. The maximum power consumption is 100 VA. Power Cable WARNING FIRE HAZARD: Use only the power cable supplied with your instrument.
Page 43 • PN: 8120-8376 • PN: 8121-0564 Option 931 Option 932 • Plug: CNS 10917-2, • Plug: CS 0017, 125 V, 10 A 250 V, 10 A • PN: 8121-1635 • PN: 8121-1638 Keysight E5250A User’s Guide, Edition 12 2- 5...
Page 44: Operating Environment
• • Altitude: 0 m to 2000 m Storage and Shipping Environment The E5250A should be stored or shipped in environments within the following limits: Temperature: −40 °C to 70 °C (−40 °F to 158 °F). • Humidity: 5 % to 90 % RH at 65 °C (149 °F).
Page 45: Installing The E5250A
NOTE Plug-in module is shipped from the factory after the specifications are confirmed. Keysight can guarantee that the modules will function and that the module performance is designed to meet its specifications. However, if you have any trouble, contact your nearest Keysight Technologies service center.
Page 46: To Install Plug-In Card
1 to 4 of the E5250A. The following procedure explains the card installation and removal: 1. Turn off the E5250A, then wait at least 10 seconds before you remove or install a card. 2. Remove a blank panel or a card attached to the slot you want to install a new card, as follows.
Page 47: To Install Blank Panel
To Install Blank Panel CAUTION To prevent thermal damage to the E5250A cards, be sure that blank panels (Keysight part number E5250-60003) are installed in all unused slots. If the blank panel is not installed to cover an unused slot, install the blank panel as follows: 1.
Page 48: To Configure E5255A
Installation Installing the E5250A To Configure E5255A The Keysight E5255A has three 2-input 8-output multiplexers. You can configure several multiplexers by modifying some internal connections. Component locations on the E5255A are shown in Figure 2-2, and the relationship of the multiplexer...
Page 49 When a module is installed in a mainframe slot, six module pins are connected to the mainframe internal bus. So, if multiplexers on different E5255As use the same module pin, the IV inputs are connected together via the internal bus. Keysight E5250A User’s Guide, Edition 12 2- 11...
Page 50 For example, if a mainframe installs four E5255As which the IVin1 cable is connected to the SMU1 input connector and the IVin2 and IVin3 cables are not connected, the E5250A configures a 32-output multiplexer that uses the SMU INPUT 1 connector as the IV input.
Page 51: E5255A Configuration Examples
24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module) 1. Connect the IVin1 cable to the SMU1 input connector on the E5255A. 2. Connect the IVin2 cable to the IVout1 connector. 3. Connect the IVin3 cable to the IVout2 connector. Keysight E5250A User’s Guide, Edition 12 2- 13...
Page 52 2. Connect the IVin2 cable to the IVout1 connector. 3. Connect the IVin3 cable to the IVout2 connector. 4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3. 2- 14 Keysight E5250A User’s Guide, Edition 12...
Page 53 Keysight part number 1250-2405: male(side)-female(center)-female(side) Figure 2-5 Interconnection of BIAS INPUT Connectors Keysight E5255A BIAS INPUT( 200V /1A Max) CAT I 24 (8x3) CH MULTIPLEXER BNC T-adapter To Bias Source BNC cable Keysight E5250A User’s Guide, Edition 12 2- 15...
Page 54 Otherwise, you will be shocked if you touch the connectors while bias is applied. DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and the Bias Source will be destroyed when the bias is applied. 2- 16 Keysight E5250A User’s Guide, Edition 12...
Page 55: To Set Gpib Address
Every device on the GPIB bus must have a unique address. If you need to change the GPIB address of the E5250A, make sure the E5250A is turned off. With a small flatblade screwdriver, set the GPIB ADDRESS switch on the rear panel to the new address (0 to 30).
Page 56: Maintenance
Installation Maintenance Maintenance Maintenance should be performed periodically to keep the E5250A in good condition. Performance Verification Performance verification must be performed periodically so that the instruments satisfy the specifications, and keep a good condition. It is recommended to perform the performance verification once a year at least.
Page 57: Executing Self-Test And Leak Test
Executing Self-Test and Leak Test...
Page 58 This chapter describes how to execute the Self-Test and the Leak Test. The Self-Test consists of three tests that check the operation of Keysight E5250A firmware, LEDs, and key that are on the E5250A front panel, and the relays on the cards installed in the E5250A.
Page 59: Executing Self-Test
Executing Self-Test and Leak Test Executing Self-Test Executing Self-Test The Self-Test of the E5250A consists of the following three tests: Table 3-1 E5250A Self-Test Items Test Item Description Executed by Refer to Controller Checks the operation of Turning on the E5250A.
Page 60: To Execute Self-Test (Standalone)
DUT end of cable. If end of cable is Kelvin connection, disconnect the cable or make non-Kelvin connection at end of cable. 3. Attach the Relay Test Adapter to the E5250A input connectors as shown in Figure 3-1.
Page 61 • A plug-in card may be defective. Contact your nearest Keysight Technologies Service Center. Figure 3-1 Relay Test Adapter Connection Relay Test Adapter NOTE Settings after Relay Test After Relay Test, the E5250A settings are changed to same as after :SYST:CPON command execution. Keysight E5250A User’s Guide, Edition 12 3- 5...
Page 62: To Execute Self-Test Using External Controller
For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL. If the Fail LED turns on after executing the Self-Test, the E5250A or modules may be defective. Contact your nearest Keysight Technologies Service Center.
Page 63 Front Panel Interface Test After the :DIAG:TEST:FRAM:EXEC? FPAN command is executed, the Remote, System Fail, Fail, and Local/Self Test LEDs on the E5250A front panel blink for about 10 seconds. If an LED does not blink, the LED is defective.
Page 64 Executing Self-Test Self-Test Programming Example This sample program is effective for an E5250A that has four cards installed. If your E5250A does not have four cards installed, delete the Relay Test program lines for the empty card slots. The program runs on HP BASIC.
Page 65 Executes the Relay Test for the card installed in slot 3 of the E5250A, then returns test result. 490 to 550 Executes the Relay Test for the card installed in slot 4 of the E5250A, then returns test result. Keysight E5250A User’s Guide, Edition 12 3- 9...
Page 66: Using The Self-Test Utility
Executing Self-Test and Leak Test Using the Self-Test Utility Using the Self-Test Utility The Self-Test Utility is a Self-Test program for the E5250A, and runs on the Keysight 4155/4156's built-in IBASIC controller. Self-Test Utility can execute all Self-Test items listed in...
Page 67: To Start The Self-Test Utility
Executing Self-Test and Leak Test Using the Self-Test Utility To Start the Self-Test Utility 1. Before turning on the 4155/4156 and E5250A, connect the GPIB cable between the E5250A and the 4155/4156. 2. Turn on the 4155/4156 and E5250A. 3. Set the 4155/4156 to "SYSTEM CONTROLLER" mode on SYSTEM: MISCELLANEOUS page.
Page 68: To Execute Self-Test
Executing Self-Test and Leak Test Using the Self-Test Utility To Execute Self-Test On the MAIN MENU of the E5250A Self-Test Utility, select the SELF TEST softkey to display the E5250A SELF TEST MENU and following softkeys: Softkey Description CARD1 RELAY For executing Relay Test for Card1.
Page 69 Using the Self-Test Utility Executing the Controller Test To execute the controller test, press the CONTROLLER softkey. If [F] result is displayed after the test, the E5250A is defective. Contact your nearest Keysight Technologies Service Center. Executing the Front Panel Interface Test To execute the front panel interface test, do the following: 1.
Page 70 CANCEL Cancels the Relay Test execution. 2. Disconnect all cables from the E5250A input terminals. And attach the Relay Test Adapter to the E5250A input terminals. For each E5255A card, connect a BNC short cap to each E5255A BIAS INPUT port.
Page 71: To Execute Leak Test
Technologies Service Center. Leak test does not verify specifications of the E5250A and installed cards. The Leak Test applies 10 Vdc to the specified input port of the E5250A, and measures the leakage current. The test limits are shown in Table 3-4.
Page 72 Executing Self-Test and Leak Test Using the Self-Test Utility To execute the Leak Test, do the following: 1. On MAIN MENU of the E5250A Self-Test Utility, select LEAK TEST softkey. The following message is displayed: Input 4155/4156 GPIB address (default 817):? 2.
Page 73 4. Select desired IVn softkey (n=1 to 6) for input port you want to test. If the E5252A is installed in your E5250A, and the 4156 is used for the Relay Test, then when you press IV1, IV3, or IV5 softkey, the following message and...
Page 74 CANCEL Cancels the Leak Test execution. 6. Disconnect all cables from the E5250A input/output terminals. Then connect triaxial cable or Kelvin triaxial cable to the 4155/4156 SMU terminal you specified in step 5 because the next step executes the zero offset cancel.
Page 75 Using the Self-Test Utility 8. Connect the cable from the 4155/4156 SMU port specified by the SMUm softkey (m=1 to 6) in step 5 to the E5250A input port specified by the IVn softkey (n=1 to 6) in step 4.
Page 76 Executing Self-Test and Leak Test Using the Self-Test Utility 3- 20 Keysight E5250A User’s Guide, Edition 12...
Page 77: Setting Up Measurement Environment
Setting up Measurement Environment...
Page 78 This chapter explains how to connect your instruments to Keysight E5250A input, and how to connect the E5250A output to your wafer prober or test fixture. You can connect the E5250A output (E5252A or E5255A) to your prober or fixture in the following three ways: •...
Page 79: Connector Plates
Connector Plates Connector Plates A connector plate is the interface to connect the E5250A to your prober or test fixture. The following connector plates are available for the E5250A. To install the connector plate, refer to Keysight 16495 Installation Guide.
Page 80: Blank Plate
This plate is used to cover openings when you made too big openings for mounting the connector plate. You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate. 4- 4 Keysight E5250A User’s Guide, Edition 12...
Page 81: Connecting 8-Channel Shielded Coaxial Cable
Setting up Measurement Environment Connecting 8-Channel Shielded Coaxial Cable Connecting 8-Channel Shielded Coaxial Cable This section introduces Keysight 16494E wide temperature 8-channel shielded coaxial cable, and explains how to connect the 16494E to the Device Under Test (DUT). WARNING Do not connect the 16494E cable to the E5255A or any instrument until connecting to the DUT as described below.
Page 82: Mounting Connectors Directly
4-13. Table 4-1 lists the parts required to mount connectors on your shielding box. From this table, select the parts that you need to mount. Quantity of parts depends on your site. 4- 6 Keysight E5250A User’s Guide, Edition 12...
Page 83 Triaxial Connector (in mm) ∅11.3 10.3 2 − ∅11.3 ∅3.2 2 − M3 x 0.5 8 Channel Shielded Coaxial Connector (in mm) Interlock Connector (in mm) 63.5 2 − ∅ 3 4 − R1.5 Keysight E5250A User’s Guide, Edition 12 4- 7...
Page 84: To Make Interlock Circuit
3) of the interlock connector. See Figure 4-2. For example, Keysight 4155/4156 is connected to the interlock circuit, it cannot force more than ±40 V when the door is open. When door is closed, it can force more than ±40 V.
Page 85 Setting up Measurement Environment Mounting Connectors Directly Figure 4-3 Dimensions of Interlock Switch (Keysight N1254A-402) 10.3 4.75 35.6 Switch off 15.3 10.3 15.9 18.8 C OM 22.2 27.8 Units: mm Keysight E5250A User’s Guide, Edition 12 4- 9...
Page 86 2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock connector. Refer to Figure 4-2. Figure 4-4 Dimensions of LED (Keysight part number 1450-0641) 4- 10 Keysight E5250A User’s Guide, Edition 12...
Page 87 • For Keysight 4155/4156 semiconductor parameter analyzer: Connect Intlk connector of the 4155/4156 to the interlock connector by using Keysight 16493J Interlock cable that is furnished with the 4155/4156. You can connect it directly without using any adapter. • For the instruments which has a BNC-Type interlock connector:...
Page 88 LED turns on within 1 sec from when interlock circuit is shorted. • LED turns off within 1 sec from when interlock circuit is open. To stop the interlock test, select STOP secondary softkey. 4- 12 Keysight E5250A User’s Guide, Edition 12...
Page 89: To Connect Connectors To Dut
Setting up Measurement Environment Mounting Connectors Directly To Connect Connectors to DUT Following figure shows a connection example from the connector to DUT. Use low-noise coaxial cable (Keysight part number: 8121-1191). Kelvin connections non-Kelvin connections This connection is available only for the Following connection is for the Kelvin Kelvin connectors.
Page 90 Low-Noise Coaxial Cable When you make a SMU output connection by using low-noise coaxial cable (Keysight part number: 8121-1191), shave the Conductive layer and the Insulator (clear) by knife so that the Center Conductor is insulated from the Conductive layer.
Page 91: Connecting The E5250A Input
“To Connect GNDU to the E5250A Input” WARNING Turn off the E5250A and all instruments connected to the E5250A. And do not turn them on until the connection described in this section is completed. If you ignore this warning, you may be exposed to dangerous voltage.
Page 92 16493H GNDU cable and E5250-60044 Adapter − 16493H GNDU cable (for direct connection to Connector Plate) − Intlk 16435A Interlock cable adapter and 16493J Interlock cable (for direct connection to Connector Plate) 4- 16 Keysight E5250A User’s Guide, Edition 12...
Page 93 • AUX means CV1, CV2, HF1, or HF2 connector. • The E5250A does not have input connectors for the interlock. Connect directly from instrument to the connector plate which has an interlock connector. • Can't use Keysight 41422A/41423A (HCU/HVU) of the 4142B with the E5250A.
Page 94: To Connect Bias Source To The E5255A Bias Input
DUT, connect the GNDU to the E5250A input as shown below. CAUTION Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A. The maximum input current of the E5250A is 1A.
Page 95 1, 3, or 5 Force 2, 4, or 6 Sense If you make non-Kelvin connection for the E5250A outputs, use the odd input port only. Because non-Kelvin connection uses only Force signal for measurement. Keysight E5250A User’s Guide, Edition 12 4- 19...
Page 96: Connecting The E5250A Output
“To Connect the E5255A Output” WARNING Turn off the E5250A and all instruments connected to the E5250A. And do not turn them on until the connection described in this section is completed. If you ignore this warning, you may be exposed to dangerous voltage.
Page 97 9 (Force) and 10 (Sense) 11 (Force) and 12 (Sense) Figure 4-8 shows the 16494B Kelvin triaxial cable for the E5252A. Figure 4-8 16494B Kelvin Triaxial Cable for E5252A E5252A Side Connector Plate Side Keysight E5250A User’s Guide, Edition 12 4- 21...
Page 98: To Connect The E5255A Output
E5255A Output Cable Keysight Model No. Description 16494D-001 8-Ch Shielded Coaxial cable, 1.5m 16494D-002 8-Ch Shielded Coaxial cable, 3m Figure 4-10 16494D 8-Channel Shielded Coaxial Cable for E5255A MALE FEMALE E5255A Connector Plate 4- 22 Keysight E5250A User’s Guide, Edition 12...
Page 99: Measurement Cable Length
Guard capacitance means the capacitance between the signal line (FORCE or SENSE) and the GUARD line. Table 4-6 lists the guard capacitance for each element of the E5250A measurement environment. When using the 4155/4156/4142B/E5270, the maximum limit of the guard capacitance is approximately 900 pF.
Page 100 Setting up Measurement Environment Measurement Cable Length Table 4-6 Guard Capacitances of E5250A Measurement Environment (Typical) Cable Guard Connection Keysight Model/Part No. Length Capacitance from SMU to 16494A-003 (for non-Kelvin) 80 cm 75 pF E5250A 16494B-003 (for Kelvin) 80 cm...
Page 101: Controlling The E5250A
Controlling the E5250A...
Page 102 E5252A and E5255A plug-in cards. • “Using Virtual Front Panel Utility” describes how to use Virtual Front Panel (VFP) utility furnished with the E5250A. The VFP is for Keysight 4155/4156 users. 5- 2 Keysight E5250A User’s Guide, Edition 12...
Page 103: Methods For Controlling The E5250A
Methods for Controlling the E5250A This section introduces several methods for controlling the E5250A. Table 5-1 lists the E5250A control methods, and the operating systems on which each control method can be used. Table 5-1 Summary of Control Methods Operating System (Controller)
Page 104: Modifying A Sample Program
5-3. Using the Virtual Front Panel (VFP) Utility The Virtual Front Panel (VFP) Utility is used to control the E5250A by using Keysight 4155/4156 Semiconductor Parameter Analyzer's built-in Instrument BASIC (IBASIC) controller. You can control the E5250A interactively without the control program.
Page 105: Switch Control Basics
This section introduces basic information for controlling the relay switches on the E5252A and the E5255A. • “Channel List and Channel Configuration” • “Connection Rule” • “Connection Sequence” • “Bias Mode” • “Couple Port” • “E5252A Channel List” • “E5255A Channel List” Keysight E5250A User’s Guide, Edition 12 5- 5...
Page 106: Channel List And Channel Configuration
First two digits: specifies input port. Last two digits: specifies output port. Depends on type of card and Channel Configuration mode. Refer to “E5252A Channel List” on page 5-15 “E5255A Channel List” on page 5-19. 5- 6 Keysight E5250A User’s Guide, Edition 12...
Page 107 As shown in last two examples, you can specify a range across input ports and card slots. NOTE In the Auto Configuration mode, you can omit any zeros at beginning of channel. For example, channel 00101 can be expressed by 101. Keysight E5250A User’s Guide, Edition 12 5- 7...
Page 108 Switch Control Basics Channel Configuration The E5250A allows the following two channel configuration modes. The way to specify the channel_list depends on the channel configuration mode. You can set the channel configuration by using the [:ROUT]:FUNC command described in Chapter...
Page 109: Connection Rule
Connection rule is used to specify if an input or output port can have multiple connections, and it is specified by the [:ROUTe]:CONNection:RULE command described in Chapter 7. For each card installed in the E5250A (for auto configuration mode, installed cards are treated as one card), you can specify one of...
Page 110: Connection Sequence
2. Wait for relays to open. 3. Connect new route. Make Before Break 1. Connect new route. 2. Wait for relays to close. 3. Disconnect previous route. No Sequence 1. Disconnect previous route. 2. Connect new route. 5- 10 Keysight E5250A User’s Guide, Edition 12...
Page 111: Bias Mode
When Bias Mode is OFF, the input Bias Port is the same as the other input ports, so relays can be controlled directly to connect to output ports. You can independently control the Bias Mode for each card installed in the E5250A. Refer to [:ROUTe]:BIAS[:STATe] in Chapter 7.
Page 112 Mode is turned ON, all bias enabled output ports (that are not connected to other input ports) are connected to the input Bias Port. So, the output ports that are connected to input port 1 and 3 are not connected to the input Bias Port. 5- 12 Keysight E5250A User’s Guide, Edition 12...
Page 113: Couple Port
01 to 48 (for Auto Config.) HF1, HF2 01 to 12 (for Normal Config.) 01 to 48 (for Auto Config.) CV1, CV2 01 to 12 (for Normal Config.) 01 to 48 (for Auto Config.) Keysight E5250A User’s Guide, Edition 12 5- 13...
Page 114 M=1 to 6 for Normal Config. Open M=1 to 24 (max) for Auto Config. NOTE For each E5252A installed in the E5250A, you can independently specify the same or different couple ports. 5- 14 Keysight E5250A User’s Guide, Edition 12...
Page 115: E5252A Channel List
01 to 10 01 to 12 01 to 10 01 to 12 Card Number: One digit: 1 to 4. E5250A slot number in which card is installed. Channel Number: Four digits: XXYY. • XX: input port number (01 to 10).
Page 116 0903 0904 0905 0906 0907 0908 0909 0910 0911 0912 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 Input Port XXXX : Channel No. Input Port No. Output Port (Output Port No.) 5- 16 Keysight E5250A User’s Guide, Edition 12...
Page 117 Switch Control Basics Auto Configuration Mode To use this mode, the E5252A must be installed in the E5250A slots continuously from slot1 (slots 1,2; or slots 1,2,3; or slots 1,2,3,4). To specify a channel, you use five digits as shown in Table 5-6.
Page 118 0903 0904 0905 0906 0945 0946 0947 0948 1001 1002 1003 1004 1005 1006 1045 1046 1047 1048 Input Port XXXX : Channel No. Input Port No. Output Port (Output Port No.) 5- 18 Keysight E5250A User’s Guide, Edition 12...
Page 119: E5255A Channel List
IV Input: 02 BIAS Input: 52 IV Input: 03 BIAS Input: 53 IV Input: 01 01 to 08 BIAS Input: 51 IV Input: 02 BIAS Input: 52 IV Input: 03 BIAS Input: 53 Keysight E5250A User’s Guide, Edition 12 5- 19...
Page 120 Controlling the E5250A Switch Control Basics Card Number: One digit: 1 to 4. E5250A slot number in which card is installed. Channel Number: Four digits: XXYY. • XX: input port number (depends on the block number). 01, 02, or 03 for IV Input Port Number.
Page 121 Switch Control Basics Auto Configuration Mode To use this mode, the E5255A must be installed in the E5250A slots continuously from slot1 (slots 1,2; or slots 1,2,3; or slots 1,2,3,4). To specify a channel, use five digits as shown in...
Page 122 5-7, Table 5-9 Figure 5-8 show examples of the Channel Number. In this example, four E5255As are installed in the E5250A. And the E5255As are configured to make the following multiplexers: • Slot1 and Slot2: all six blocks are used together to make a 2×48 multiplexer.
Page 123 3 card SMU3 IV Input: 03 09 to 16 2×16MUX-2 BIAS Input: 13 with block2 in slot 3 card SMU5 IV Input: 05 01 to 08 2×8MUX-2 BIAS Input: 15 Keysight E5250A User’s Guide, Edition 12 5- 23...
Page 124 0302 0303 0315 0316 SMU3 (03) XXXX : Channel Number Output Made from Block #2 of Cards in Slot #3 and #4. Block #2 of each card should be connected in series. 5- 24 Keysight E5250A User’s Guide, Edition 12...
Page 125: Using Virtual Front Panel Utility
Using Virtual Front Panel Utility Using Virtual Front Panel Utility The Virtual Front Panel (VFP) Utility is a control program for the E5250A. The VFP utility runs on Keysight 4155/4156 Semiconductor Parameter Analyzer's built-in IBASIC controller. You can control the E5250A interactively from the 4155/4156 by using the VFP utility.
Page 126: Functions Of Virtual Front Panel Utility
Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility The Virtual Front Panel (VFP) utility is used to create the E5250A setup data and interactively (from the 4155/4156) make channel connections on the E5250A plug-in cards. The VFP utility can perform the following: •...
Page 127: Requirements
If not, type the GPIB address of your E5250A, then press key. Enter The main menu of VFP is displayed on the 4155/4156 screen. And the E5250A is initially set to settings of setup memory 1. Keysight E5250A User’s Guide, Edition 12...
Page 128: Confirming The E5250A Card Configurations
Block 2 : Input 2, No Resistance Block 3 : Input 3, No Resistance For Input N, the N can be 1 to 6, and indicates which E5250A SMU input port is connected to the IV input of each multiplexer block. The next parameter indicates if resistor is used between input Bias Port and IV Input ports as follows: •...
Page 129: Changing The Vfp Setup Mode
For returning to VFP main menu. See next page. MENU CAUTION If you change the VFP Setup Mode, all data is cleared from the setup memories when you return to the VFP main menu. Keysight E5250A User’s Guide, Edition 12 5- 29...
Page 130 Enters the changes you made, and returns to the VFP main menu. MODE All the previous setup memory data is cleared. CANCEL Cancels the changes you made, and returns to the VFP main menu. Setup memory data is not cleared. 5- 30 Keysight E5250A User’s Guide, Edition 12...
Page 131: Defining Labels For The E5250A Input Ports
To define labels for the E5250A input ports Select the E5250A INPUT softkey. The following softkeys are displayed. Softkey Description INPUTn For selecting the E5250A input port. You can define a label for the LABEL selected input port. See below. (n=1 to 10) MORE For displaying more softkeys to select the input port.
Page 132 INPUT10 : " CV2 " CARD1 E5252A No Bias Input Port CARD2 E5252A No Bias Input Port CARD3 E5255A BIAS1:"C3B1 " BIAS2:"C3B2 " BIAS3:"C3B3" CARD4 E5255A BIAS1:"C4B1 " BIAS2:"C4B2 " BIAS3:"C4B3" Select desired softkey. 5- 32 Keysight E5250A User’s Guide, Edition 12...
Page 133: Making Connections And Changing The Setup Data
Using Virtual Front Panel Utility Making Connections and Changing the Setup Data Select SETUP MEMORY softkey. The E5250A is initially set to connections of setup memory 1, then SETUP MEMORY MENU and following softkeys are displayed. Current Setup Memory indicates setup memory that currently sets E5250A.
Page 134 Type the desired setup memory number, then press the key. Current Setup Enter Memory changes to the specified setup memory, and the E5250A changes to the new settings. If you press key without typing a number, the operation is canceled.
Page 135 Clear all setup memory. OK? Softkey Description CLEAR ALL Clears all setup memories. CANCEL Cancels the clear operation. Select the CLEAR ALL softkey to clear all setup memories. Keysight E5250A User’s Guide, Edition 12 5- 35...
Page 136 Current Setup Memory : 1 Comment : MOSFET Vth Card Number 111111111122222222223333333333444444444 Input 123456789012345678901234567890123456789012345678 @..........@..........@..........@.................................................................... Use softkeys to move cursor and to change status. 5- 36 Keysight E5250A User’s Guide, Edition 12...
Page 137 E5250A Virtual Front Panel Utility ** MEMORY SETUP PANEL ** Current Setup Memory : 1 Comment : MOS CAP Card Number 111111111122222 Input 123456789012345678901234 @....... * .@@@@@@@@@@@@@@@-------- Use softkeys to move cursor and to change status. Keysight E5250A User’s Guide, Edition 12 5- 37...
Page 138 Displays other page of MEMORY SETUP PANEL if more than 48 output ports. This softkey is displayed if the E5250A is configured for multiplexer that has more than 48 outputs (example, 2×96 multiplexer). This softkey toggles between the MEMORY SETUP PANEL for outputs 1 to 48, and for 49 to 96.
Page 139 Input setup memory number to be connected? Type the desired setup memory number, then press the key. Current Setup Enter Memory changes to the specified setup memory, and the E5250A changes to the new settings. To cancel this operation, press the key without typing a number.
Page 140 CLOSE cursor. The softkey toggles the state between open and close. The E5250A settings are changed in real time. If bias mode is ON and cursor is in the row of input bias port, this softkey changes the relay state; open, close, and bias disabled.
Page 141 Bias enables all output ports, then connects all output ports (that are not connected to another input port) to the input Bias Port. MORE Displays softkey menu 1. RETURN Displays the previous level of softkey menu. Keysight E5250A User’s Guide, Edition 12 5- 41...
Page 142: Saving/Loading The Setup Data
VFP. To cancel this operation, press the key without typing the file name. Enter After loading the file, the E5250A changes to the setting of setup memory 1. 5- 42 Keysight E5250A User’s Guide, Edition 12...
Page 143: Programming The E5250A
Programming the E5250A...
Page 144 For the details about SCPI commands, refer to Chapter 7. In addition to this chapter, refer to Chapter 9, which describes how to use and modify the sample programs furnished with the E5250A, and helps to increase your understanding about programming.
Page 145: Scpi Programming Basics
Programming the E5250A SCPI Programming Basics SCPI Programming Basics This section describes the structure of SCPI commands, and the basics of using an program that contains SCPI commands to control the E5250A and runs on HP BASIC: • “SCPI Command Hierarchy”...
Page 146: Scpi Command Hierarchy
For example, :ROUT:CONN:RULE ALL,FREE;SEQ ALL,BBM is the same as the following two commands: :ROUT:CONN:RULE ALL,FREE :ROUT:CONN:SEQ ALL,BBM So, using a semicolon reduces typing and simplifies the program. A command terminator (such as carriage return) resets the path to root. 6- 4 Keysight E5250A User’s Guide, Edition 12...
Page 147: Controlling E5250A By Using Hp Basic
SCPI Programming Basics Controlling E5250A by Using HP BASIC 1. Assign I/O path for controlling the E5250A by using the ASSIGN command. In the following example, the select code of the external computer is 7 and GPIB address of the E5250A is 22.
Page 148: Creating A Control Program
“Controlling Relay Switching” Table 6-1 summarizes the commands for each part of the control program for the E5250A. In the table, default setting means the instrument state by the *RST command or power on. CAUTION The SCPI commands introduced in this section are ROUTe subsystem commands for controlling the E5250A.
Page 149 1, 3, 5, 7 or 9 are available for :ROUT:COUP:PORT. For details about these parameters, refer to Chapter 5 and Chapter 7. CAUTION Bias Port and Couple Port cannot be set for the same input port number. Keysight E5250A User’s Guide, Edition 12 6- 7...
Page 150: Defining Channel Configuration Mode
:ROUT:FUNC ACON Sets Auto Channel Configuration mode. Example: 100 OUTPUT @Hp5250;":ROUT:FUNC NCON" 110 ! Sets E5250A to Normal channel configuration mode. Defining Connection Rule Following commands are used to set the Connection Rule. For details, refer to “Connection Rule” on page 5-9.
Page 151: Defining Connection Sequence
:ROUT:CONN:SEQ card_no,NSEQ Connection sequence not specified. :ROUT:CONN:SEQ card_no,BBM Specifies Break-before-Make connection sequence. :ROUT:CONN:SEQ card_no,MBBR Specifies Make-before-Break connection sequence. Example: 100 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM" 110 ! Sets all cards to Break-before-Make connection sequence. Keysight E5250A User’s Guide, Edition 12 6- 9...
Page 152: Using Bias Mode
110 ! Selects SMU1 input port to be input Bias Port for all cards. 120 OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL" 130 ! Bias enables all output ports on all cards. 140 OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON" 150 ! Turns on the Bias Mode for all cards. 6- 10 Keysight E5250A User’s Guide, Edition 12...
Page 153: Using Couple Port (For E5252A Only)
100 OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1,3'" 110 ! Sets up two couple ports (1&2 and 3&4) on all cards. 120 OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" 130 ! Turns on the couple port mode for all cards. Keysight E5250A User’s Guide, Edition 12 6- 11...
Page 154: Controlling Relay Switching
:ROUT:OPEN channel_list Open the relays specified by channel_list. :ROUT:OPEN:CARD card_no Open all relays on card specified by card_no. Example: 100 OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" 110 ! Closes relays to create channels 10101 and 10202. 6- 12 Keysight E5250A User’s Guide, Edition 12...
Page 155: Programming Examples
Programming the E5250A Programming Examples Programming Examples This section provides examples of control programs for the E5250A. The programs are written in the HP BASIC language, and can be executed without any modifications. But the program examples do not include instrument control routines, so to make a measurement, you need to add the desired routines.
Page 156: Channel Creation Example
Programming the E5250A Programming Examples Channel Creation Example The following example is a typical control program for the E5250A with the E5252A, which connects instrument output to DUT as shown in Figure 6-1. Bias Mode and Couple Port are not used in this example.
Page 157 Channel$="(@10101,10202,10303,10404)" ! Channels to Create ! Put Instrument Initialization Routine here 100 ASSIGN @Hp5250 TO 722 ! Assigns E5250A GPIB address to 722 110 OUTPUT @Hp5250;"*RST" 120 OUTPUT @Hp5250;":ROUT:FUNC NCON" ! Sets Normal Config mode 130 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"! Sets Single rule 140 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM"...
Page 158: Bias Mode Example
SMU INPUT 2 to 6: not used. • AUX INPUTs: not used. E5255A Connection: • IV Input Connection: IVin1 should be connected to the E5250A SMU INPUT 1. • Bias Input Connection: BIAS INPUT 51 should be connected to bias source. E5255A Output Ports: •...
Page 159 Here, insert the initialization routine for your measurement instrument. Resets the E5250A. Sets the E5250A to Normal channel configuration mode. Sets the connection rule to FREE. This line is not used (commented) for the E5255A. If you use the E5252A instead of the E5255A, use this line, which defines AUX INPUT HF1 to be the input Bias Port.
Page 160 Turns off the Bias Mode. 260 to 280 Opens all relays, then connects all output ports of block 1 to the input Bias Port again, and waits until the connections are completed. Resets the E5250A. 6- 18 Keysight E5250A User’s Guide, Edition 12...
Page 161: Couple Port Example
The program couples SMU INPUT 3&4 and couples SMU INPUT 5&6. For each Couple Port, use Kelvin triaxial cable for instrument connection. E5252A Output Ports: Output 1, 2, 3, 4, 5, 6 should be connected to : Substrate, Gate, Drain, Drain, Source, Source, respectively. Keysight E5250A User’s Guide, Edition 12 6- 19...
Page 162 Defines the desired channel_list. Here, insert the initialization routine for your measurement instrument. Resets the E5250A. Sets the E5250A to Auto channel configuration mode. Sets the connection rule to Single. Sets the connection sequence to Break-Before-Make. 6- 20 Keysight E5250A User’s Guide, Edition 12...
Page 163 Waits until the relay close operation is completed. Here, insert measurement routine for your measurement instrument. 240 to 260 Opens all relays, and waits until open operation is completed. Resets the E5250A. Keysight E5250A User’s Guide, Edition 12 6- 21...
Page 164: Using The Vfp Data Upload Library
For information about using the VFP, refer to “Using Virtual Front Panel Utility” on page 5-25. CAUTION The VFP Data Upload Library can be used only in an program runs on HP BASIC. 6- 22 Keysight E5250A User’s Guide, Edition 12...
Page 165: Vfp Data Upload Library
Data string for internal use in the library. Must declare 14000 Setup_data$: byte data size. Example: CALL Load_vfp_data(722,"MAT48_1",Mat48_data$) Init_vfp_setup subprogram Initializes the E5250A based on the setup mode data loaded by the Load_vfp_data subprogram. This subprogram sets the following parameters: • Configuration Mode: Auto or Normal • Connection Rule: Free •...
Page 166 Parameters: Data string for internal use in the library. Must declare 14000 Setup_data$: byte data size. Setup Memory number from which to get comment: 1 to 24. Setup_num: Example: Comment$=FNGet_vfp_comment$(Mat48_data$,1) DISP "Comment=";Comment$ 6- 24 Keysight E5250A User’s Guide, Edition 12...
Page 167: Programming Example
Declares data size of Comment$, which is for storing comment from Setup Memory. Loads the data file MAT48, which was made by VFP utility. Initializes the E5250A based on the loaded data. Connects relays based on data from specified Setup Memory. 160 to 180 Gets the comment from specified Setup Memory, and displays the comment.
Page 168: Before Executing Your Program
1. Link the library to your program: Link the library as shown in the following example. The VFP Data Upload Library is an ASCII file on the E5250A Program Disk. a. GET the file UPLOAD from the E5250A Program Disk.
Page 169: Error Messages
• GPIB address, connection or firmware is bad. Timeout occurred for connecting the E5250A. Confirm the GPIB address of the E5250A, and the connection of the GPIB cable. Or the E5250A firmware may be defective. • Must execute Init_vfp_setup before Connect_vfp.
Page 170: Using The Capacitance Compensation Routine
Measurement Range: Maximum 1000 pF Measurement Terminal: At the end of the Keysight 16494A-001 (1.5 m triaxial cable) connected to the E5252A output terminal. The typical data does not apply to cable or anything extended from the 16494A triaxial cable. Also the conditions specified in “Required Conditions”...
Page 171: Capacitance Compensation Routine
Capacitance Compensation Routine This routine is an subprogram used to compensate for capacitance measurement error caused by the E5250A with the E5252A matrix card installed. The subprogram is used with Keysight 4284A Precision LCR Meter. You enter capacitance and conductance data measured by the 4284A as a parameter, and this subprogram returns the compensated value.
Page 172: Required Conditions
Cable”. Using Other than Recommended Cable If you do not use the low noise coaxial cable (Keysight part number: 8121-1191) for the connection from Connector Plate to DUT, the Capacitance Compensation Routine cannot return accurate results. To get more accurate compensation results,...
Page 173 DATA 100.70E-3, 400.00E-9, 80.00E-12 !User Triax Cbl H 1430 DATA 100.70E-3, 400.00E-9, 80.00E-12 !User Triax Cbl L 1440 DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl H 1450 DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl L Keysight E5250A User’s Guide, Edition 12 6- 31...
Page 174: Programming Example
Before executing a program that uses the capacitance compensation subprogram, you must link the subprogram to your program as follows. The subprogram is in an ASCII file on the E5250A Program Disk. 1. GET the file C_COMPEN from the E5250A Program Disk. GET "C_COMPEN" 2. RE-STORE the file.
Page 175: Command Reference
Command Reference...
Page 176 This chapter describes the following for Keysight E5250A: • SCPI commands available to control the E5250A via GPIB interface. SCPI is a universal programming language for electronic test and measurement instruments, and is based on IEEE 488.1 and IEEE 488.2.
Page 177 Braces (curly brackets) are used to enclose one or more parameters that may be included zero or more times. < > Angular brackets indicate that the word or words enclosed represent something other than themselves. For example, <newline>. Keysight E5250A User’s Guide, Edition 12 7- 3...
Page 178: Common Commands
Standard Event Status Register Query *IDN? Identification Query *OPC(?) Operation Complete Command (Query) *RST Reset Command *SRE(?) Service Request Enable Command (Query) *STB? Read Status Byte Query *TST? Self-Test Query *WAI Wait-to-Continue Command 7- 4 Keysight E5250A User’s Guide, Edition 12...
Page 179: Cls
The Standard Event Status "Enable" Register consists of 16 bits, but only the lower 8 bits are used, which correspond to the bits of the Standard Event Status Register. For details, refer to “Standard Event Status Enable Register” on page 7-54. Keysight E5250A User’s Guide, Edition 12 7- 5...
Page 180 OUTPUT @Hp5250;"*ESE 32" using decimal numeric OUTPUT @Hp5250;"*ESE #B100000" using binary numeric OUTPUT @Hp5250;"*ESE #Q40" using octal numeric OUTPUT @Hp5250;"*ESE #H20" using hexadecimal numeric The following is example for query: OUTPUT @Hp5250;"*ESE?" ENTER @Hp5250;A 7- 6 Keysight E5250A User’s Guide, Edition 12...
Page 181: Esr
OPC (Operation Complete) not used. always 0. QYE (Query ERROR) DDE (Device-Dependent ERROR) EXE (Execution ERROR) CME (Command ERROR) not used. always 0. PON (Power on) Example OUTPUT @Hp5250;"*ESR?" ENTER @Hp5250;A Keysight E5250A User’s Guide, Edition 12 7- 7...
Page 182: Idn
Command Reference Common Commands *IDN? This query command returns the ID of your E5250A. Syntax *IDN? Query response HEWLETT-PACKARD,model,0,revision <newline><^END> Response Type Explanation character model model number. E5250A character revision number. A.01.00 or later revision Example DIM A$[50] OUTPUT @Hp5250;"*IDN?"...
Page 183: Opc
*OPC? places ASCII character 1 into the Output Queue when all pending operations are completed. For details, refer to “Output Queue” on page 7-55. Example OUTPUT @Hp5250;"*OPC" The following example is for query: OUTPUT @Hp5250;"*OPC?" ENTER @Hp5250;A Keysight E5250A User’s Guide, Edition 12 7- 9...
Page 184: Rst
No Couple Port Card Channel Status: All relays open Self-Test Result: No Change Syntax *RST Example OUTPUT @Hp5250;"*RST" NOTE This command does not change the self-test result. For the power-on settings, see :SYSTEM:CPON. 7- 10 Keysight E5250A User’s Guide, Edition 12...
Page 185: Sre
The following table shows the bits of the Status Byte Register, and the binary-weighted decimal value of each bit. binary- description weight not used not used not used not used MAV (Message Available summary-message) ESB (Event Status Bit) MSS (Master Summary Status) not used Keysight E5250A User’s Guide, Edition 12 7- 11...
Page 186 OUTPUT @Hp5250;"*SRE 48" using decimal numeric OUTPUT @Hp5250;"*SRE #B110000" using binary numeric OUTPUT @Hp5250;"*SRE #Q60" using octal numeric OUTPUT @Hp5250;"*SRE #H30" using hexadecimal numeric The following is example for query: OUTPUT @Hp5250;"*SRE?" ENTER @Hp5250;A 7- 12 Keysight E5250A User’s Guide, Edition 12...
Page 187: Stb
0. not used. always 0. not used. always 0. MAV (Message Available summary-message) ESB (Event Status Bit) MSS (Master Summary Status) not used. always 0. Example OUTPUT @Hp5250;"*STB?" ENTER @Hp5250;A Keysight E5250A User’s Guide, Edition 12 7- 13...
Page 188: Tst
Command Reference Common Commands *TST? This query command executes an internal self-test, then returns the result. After this command execution, the E5250A becomes same status as after *RST command execution. Syntax *TST? Query response test_result <newline><^END> Explanation test_result pass fail Example OUTPUT @Hp5250;"*TST?"...
Page 189: Diagnostic Subsystem
The :DIAGnostic subsystem has commands for executing the self-test function. For more info, see Chapter 3. NOTE The :DIAGnostic subsystem commands ignore the E5250A channel configuration mode. For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL.
Page 190: Diagnostic:test:card:clear
:SYST:CPON command. Syntax :DIAGnostic:TEST:CARD[:EXECute]? card_number Parameter Explanation card number: 1, 2, 3, 4, or ALL card_number Query response test_result <newline><^END> 1 : Fail card exists 0 : Pass Example OUTPUT @Hp5250;":DIAG:TEST:CARD? ALL" 7- 16 Keysight E5250A User’s Guide, Edition 12...
Page 191: Diagnostic:test:card:state
<newline><^END> 1 : Fail 0 : Pass -1 : Not Tested Example OUTPUT @Hp5250;":DIAG:TEST:CARD:STAT? 1" ENTER @Hp5250;A :DIAGnostic:TEST:FRAMe:CLEar This command clears test result of the specified E5250A test. Syntax :DIAGnostic:TEST:FRAMe:CLEar CONTroller | FPANel Parameter Explanation CONTroller Controller test FPANel...
Page 192: Diagnostic:test:frame[:Execute]
Command Reference :DIAGnostic Subsystem :DIAGnostic:TEST:FRAMe[:EXECute]? This command executes the specified E5250A test, then returns the test result. For more info, see Chapter 3. After :DIAG:TEST:FRAM:EXEC CONT execution, the E5250A status becomes same as after *RST command execution. After :DIAG:TEST:FRAM:EXEC FPAN execution, the E5250A status is not changed.
Page 193: Diagnostic:test:frame:state
Command Reference :DIAGnostic Subsystem :DIAGnostic:TEST:FRAMe:STATe? This command returns the most recent test result (pass/fail) of the specified E5250A test. Syntax :DIAGnostic:TEST:FRAMe:STATe? CONTroller | FPANel Parameter Explanation CONTroller Controller test FPANel Front panel interface test Query response test_result <newline><^END> 1 : Fail...
Page 194: Route Subsystem
[:LIST] (@channel_list) [:LIST]? (@channel_list) :ENABle card_number | ALL :CARD [:LIST] (@channel_list) (@channel_list) [:LIST]? card_number | ALL,bias_port :PORT card_number :PORT? card_number | ALL,state [:STATe] card_number [:STATe]? :CLOSe card_number :CARD? [:LIST] (@channel_list) [:LIST]? (@channel_list) 7- 20 Keysight E5250A User’s Guide, Edition 12...
Page 195 Normal Config Mode: 1 | 2 | 3 | 4 Refer to Chapter 5. channel_list: ON | OFF | 0 | 1 state: FREE | SROU rule: ACON | NCON channel_config: NSEQ | BBM | MBBR sequence: Keysight E5250A User’s Guide, Edition 12 7- 21...
Page 196: [:Route]:Bias:channel:disable:card
In above example, the input Bias Port on card 1 is disabled for output ports 1 and 2. Specified input ports 3 and 4 are ignored because the input port is always the input Bias Port. 7- 22 Keysight E5250A User’s Guide, Edition 12...
Page 197: Route]:Bias:channel:disable[:List]?
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL" OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS (@10101)" OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS? (@10101,10102,10201)" ENTER @Hp5250;A$ In above example, A$ will be as follows: 1,0,1 10101 and 10201 have the same meaning because the specified input port is ignored. Keysight E5250A User’s Guide, Edition 12 7- 23...
Page 198: [:Route]:Bias:channel:enable:card
At *RST, all output ports are bias enabled. Syntax [:ROUTe]:BIAS:CHANnel:ENABle:CARD card_number Parameter Explanation card number: card_number For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Example OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL" 7- 24 Keysight E5250A User’s Guide, Edition 12...
Page 199: [:Route]:Bias:channel:enable[:List]
In above example, the input Bias Port on card 1 is enabled for output ports 1 and 2. Specified input ports 4 and 5 are ignored because input port is always the input Bias Port. Keysight E5250A User’s Guide, Edition 12 7- 25...
Page 200: Route]:Bias:channel:enable[:List]?
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS:CARD ALL" OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB (@10101)" OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB? (@10101,10102,10201)" ENTER @Hp5250;A$ In above example, A$ will be as follows: 1,0,1 10101 and 10201 have the same meaning because the specified input port is ignored. 7- 26 Keysight E5250A User’s Guide, Edition 12...
Page 201: [:Route]:Bias:port
Explanation card number: card_number For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Input port number: 1 to 10. bias_port Example OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,6" Keysight E5250A User’s Guide, Edition 12 7- 27...
Page 202: Route]:Bias:port?
For Normal Config mode: 1, 2, 3, or 4 Query response port_number <newline><^END> port_number = 1 to 10 Example OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,4" OUTPUT @Hp5250;":ROUT:BIAS:PORT? 1" ENTER @Hp5250;A For above example, A will be as follows: 7- 28 Keysight E5250A User’s Guide, Edition 12...
Page 203: [:Route]:Bias[:State]
For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL ON or 1: turn ON the Bias Mode state OFF or 0: turn OFF the Bias Mode Example OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON" Keysight E5250A User’s Guide, Edition 12 7- 29...
Page 204: [:Route]:Close:card
For Normal Config mode: 1, 2, 3, or 4 Query response channel_list <newline><^END> Example OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL" OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" OUTPUT @Hp5250;":ROUT:CLOS:CARD? 1" ENTER @Hp5250;A$ A$ will be @10101,10202. For the meaning of channel_list, refer to Chapter 5. 7- 30 Keysight E5250A User’s Guide, Edition 12...
Page 205: [:Route]:Close[:List]
For details about channel_list, refer to Chapter 5. Query response close_status{,close_status} <newline><^END> 1 : closed, or 0 : opened Example OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" OUTPUT @Hp5250;":ROUT:CLOS? (@10101,10102,10201,10202)" ENTER @Hp5250;A$ In above example, A$ will be 1,0,0,1. Keysight E5250A User’s Guide, Edition 12 7- 31...
Page 206: [:Route]:Connection:rule
For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Query response FREE or SROU <newline><^END> Example OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU" OUTPUT @Hp5250;":ROUT:CONN:RULE? 1" ENTER @Hp5250;A$ In above example, A$ will be SROU. 7- 32 Keysight E5250A User’s Guide, Edition 12...
Page 207: [:Route]:Connection:sequence
For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL NSEQ: No-Sequence mode sequence BBM: Break-Before-Make mode MBBR: Make-Before-Break mode Example OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR" Keysight E5250A User’s Guide, Edition 12 7- 33...
Page 208: Route]:Connection:sequence?
For Normal Config mode: 1, 2, 3, or 4 Query response NSEQ or BBM or MBBR <newline><^END> Example OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR" OUTPUT @Hp5250;":ROUT:CONN:SEQ? 0" ENTER @Hp5250;A$ In above example, A$ will be as follows: MBBR 7- 34 Keysight E5250A User’s Guide, Edition 12...
Page 209: [:Route]:Couple:port
The lower output port of the couple port is always the odd number port, even if you specify an even output port in the :ROUT:CLOS command. For example, if you used :ROUT:CLOS (@10104), the connections would be the same as above. Keysight E5250A User’s Guide, Edition 12 7- 35...
Page 210: [:Route]:Couple:port
Query response port_number{,port_number} <newline><^END> port_number = 1 or 3 or 5 or 7 or 9 Example OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1,3'" OUTPUT @Hp5250;":ROUT:COUP:PORT? 1" ENTER @Hp5250;A$ In above example, A$ will be as follows: 7- 36 Keysight E5250A User’s Guide, Edition 12...
Page 211: [:Route]:Couple[:State]
For Normal Config mode: 1, 2, 3, 4, or ALL ON or 1: turn ON the Couple Port Mode state OFF or 0: turn OFF the Couple Port Mode Example OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" Keysight E5250A User’s Guide, Edition 12 7- 37...
Page 212: Route]:Couple[:State]?
0 or 1 <newline><^END> 0 : Couple Port Mode is OFF 1 : Couple Port Mode is ON. Example OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" OUTPUT @Hp5250;":ROUT:COUP:STAT? 2" ENTER @Hp5250;A For above example, A will be as follows: 7- 38 Keysight E5250A User’s Guide, Edition 12...
Page 213: [:Route]:Function
For details, refer to "Channel List and Channel Configuration" in Chapter 5. Syntax [:ROUTe]:FUNCtion? Query response ACON or NCON <newline><^END> Example OUTPUT @Hp5250;":ROUT:FUNC ACON" OUTPUT @Hp5250;":ROUT:FUNC?" ENTER @Hp5250;A$ In above example, A$ will be as follows: ACON Keysight E5250A User’s Guide, Edition 12 7- 39...
Page 214: [:Route]:Open:card
Bias Port. Syntax [:ROUTe]:OPEN[:LIST] (@channel_list) Parameter Explanation Channels to open (disconnect). channel_list For details about channel_list, refer to Chapter 5. Example OUTPUT @Hp5250;":ROUT:OPEN (@10101,10202)" 7- 40 Keysight E5250A User’s Guide, Edition 12...
Page 215: Route]:Open[:List]?
Chapter 5. Query response open_status{,open_status} <newline><^END> 1 : opened 0 : closed Example OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL" OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" OUTPUT @Hp5250;":ROUT:OPEN? (@10101,10102,10201,10202)" ENTER @Hp5250;A$ In above example, A$ will be as follows: 0,1,1,0 Keysight E5250A User’s Guide, Edition 12 7- 41...
Page 216: System Subsystem
Command Parameter :SYSTem card_number :CCONfig? card_number :CDEScription? card_number | ALL :CPON card_number :CTYPe? :ERRor? :VERSion? Parameter values: Auto Config Mode: 0 card_number: Normal Config Mode: 1 | 2 | 3 | 4 7- 42 Keysight E5250A User’s Guide, Edition 12...
Page 217: System:cconfig
F: indicates if resistance is set for block 3 Bias Port: 1: resistance set, 0: not set Example OUTPUT @Hp5250;":SYST:CCON? 1" ENTER @Hp5250;A$ ENTER A$ USING "3X,6A";B$ FOR I=1 TO 6 C=NUM(B$[I;1]) PRINT "BYTE No. ";I;"= ";C NEXT I Keysight E5250A User’s Guide, Edition 12 7- 43...
Page 218: System:cdescription
Where In is the number (two characters) of output ports for each input port n. For example: "E5255A 24,24, 0,16,16,16 Channel Multiplexer" • For E5255A in Normal Config mode: "E5255A 24 (8x3) Channel Multiplexer" Example OUTPUT @Hp5250;":SYST:CDES? 1" ENTER @Hp5250;A$ 7- 44 Keysight E5250A User’s Guide, Edition 12...
Page 219: System:cpon
For the device reset state, see *RST. Syntax :SYSTem:CPON card_number Parameter Explanation card number: card_number For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Example OUTPUT @Hp5250;":SYST:CPON ALL" Keysight E5250A User’s Guide, Edition 12 7- 45...
Page 220: System:ctype
HEWLETT-PACKARD,model,0,revision <newline><^END> model = E5252A or E5255A revision = A.01.00 or later version NOTE If designated card is not installed or initialize failed, this command returns NONE,NONE,0,0 Example OUTPUT @Hp5250;":SYST:CTYPE? 1" ENTER @Hp5250;A$ 7- 46 Keysight E5250A User’s Guide, Edition 12...
Page 221: System:error
0,"No error" Example OUTPUT @Hp5250;":SYST:ERR?" ENTER @Hp5250;A,B$ :SYSTem:VERSion? This command returns the SCPI version number for which the E5250A complies. This command has query form only. Syntax :SYSTem:VERSion? Query response YYYY.V <newline><^END> YYYY is the year (for example, 1995).
Page 222: Status Reporting Structure
In general, the status reporting structure is used to request service via Service Request (SRQ) or to indicate a specific condition, such as operation complete. Refer to the following figures for a model of the E5250A status reporting structure. 7- 48...
Page 223 (must be in the program) that uses a Serial Poll to read Status Byte of each instrument to determine which instrument requested service. See “Status Byte Register” on page 7-50. Keysight E5250A User’s Guide, Edition 12 7- 49...
Page 224: Status Byte Register
Status Reporting Structure Status Byte Register The E5250A Status Byte Register contains bits (ESB and MAV) for status summary messages from other registers. The status of these bits depends on the condition of the Standard Event Status Register and the Output Queue. If service request occurs, Bit6 (RQS) of Status Byte Register is set.
Page 225 Message has occurred. Read by Serial Poll. Master Summary Status Indicates that the instrument has at least one (MSS) Summary reason for requesting service. Read by Message *STB?. Not Used. Always zero. Keysight E5250A User’s Guide, Edition 12 7- 51...
Page 226: Service Request Enable Register
The Service Request Enable Register is an 8-bit register that can be used by the programmer to select which summary messages in the Status Byte Register may cause service requests. Refer to Figure 7-3. Figure 7-3 Service Request Enable Register of E5250A 7- 52 Keysight E5250A User’s Guide, Edition 12...
Page 227: Standard Event Status Register
Status Reporting Structure Standard Event Status Register The Standard Event Status Register has specific events assigned to specific bits. Refer to Figure 7-4 Table 7-2. Figure 7-4 Standard Event Status Register of E5250A Keysight E5250A User’s Guide, Edition 12 7- 53...
Page 228: Standard Event Status Enable Register
Command Reference Status Reporting Structure Table 7-2 Standard Event Status Register of E5250A Definition Explanation Operation Complete This event bit has meaning only if a request (OPC) to monitor is set by the *OPC command. Refer to “*OPC” on page 7-9.
Page 229: Output Queue
Output Queue in response to query commands. These messages are removed from the Output Queue as they are read by the controller. As long as the Output Queue contains an unread message, MAV is 1. Keysight E5250A User’s Guide, Edition 12 7- 55...
Page 230 Command Reference Status Reporting Structure 7- 56 Keysight E5250A User’s Guide, Edition 12...
Page 231: Vxiplug&Play Driver
VXIplug&play Driver...
Page 232 VXIplug&play Driver This chapter introduces the VXIplug&play driver available for Keysight E5250A, and consists of the following sections: • “System Requirements” • “Installing VXIplug&play Driver” • “Driver Functions” 8- 2 Keysight E5250A User’s Guide, Edition 12...
Page 233: System Requirements
• Application Development Environment (or programming environment) Microsoft Visual Basic, Microsoft Visual C++, Borland C++Builder, National Instruments LabWindows or LabVIEW, or Keysight VEE. It must be supported by the VISA I/O library. • GPIB (IEEE 488) Interface and VISA I/O Library Keysight GPIB interface with Keysight IO Libraries or equivalent.
Page 234: Installing Vxiplug&Play Driver
Follow the setup program instructions. 5. Install the VXIplug&play driver as shown below. a. Insert the E5250A Plug&Play Driver disk into the drive connected to your b. Execute the SETUP.EXE program stored on the disk. The program automatically installs the following files in <install folder>\Winnt\Hpe5250a folder.
Page 235: Driver Functions
Driver Functions Driver Functions Table 8-1 lists all the functions for the E5250A. You will see a brief description of the functions in the table. For the description, syntax and parameters of the function, refer to the reference section following this table. The driver functions in the reference section will appear in the alphabetical order.
Page 236 Sends a command to read 32 bit integer array response. hpe5250a_cmdReal64_Q Sends a command to read 64 bit real response. hpe5250a_cmdReal64Arr_Q Sends a command to read 64 bit real array response. 8- 6 Keysight E5250A User’s Guide, Edition 12...
Page 237: Hpe5250A_Biaschancard
Channel numbers. 5 digits integer. ABCDE. where A: card number, BC: input port number, DE: output port number. Top zero(s) can be ignored. For example, if A=0, BC=01, and DE=01, channel number should be 101 instead of 00101. Keysight E5250A User’s Guide, Edition 12 8- 7...
Page 238: Hpe5250A_Biaschanlist_Q
Bias status of the channels given in the biaschan_list. Returned value depends on the setting of bias_disen as shown below: when bias_disen=0, 0 means bias disabled, 1 means enabled. when bias_disen=1, 0 means bias enabled, 1 means disabled. 8- 8 Keysight E5250A User’s Guide, Edition 12...
Page 239: Hpe5250A_Biasport
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5 (all card) in the normal configuration mode, or 0 (all card in the automatic configuration mode). For the configuration mode, see hpe5250a_func. state Bias mode. 0 (OFF) or 1 (ON). Keysight E5250A User’s Guide, Edition 12 8- 9...
Page 240: Hpe5250A_Close
Card number. 1 (card 1), 2 (card 2), 3 (card 3), or 4 (card 4) in the normal configuration mode, or 0 (all card in the automatic configuration mode). For the configuration mode, see hpe5250a_func. closechan_list[ ] Channels closed of the specified card. 8- 10 Keysight E5250A User’s Guide, Edition 12...
Page 241: Hpe5250A_Closelist
Channel numbers to connect. 5 digits integer. ABCDE. where A: card number, BC: input port number, DE: output port number. Top zero(s) can be ignored. For example, if A=0, BC=01, and DE=01, channel number should be 101 instead of 00101. Keysight E5250A User’s Guide, Edition 12 8- 11...
Page 242: Hpe5250A_Closelist_Q
This function passes the cmd_str string to the instrument. Must be a NULL terminated C string. Syntax ViStatus _VI_FUNC hpe5250a_cmd(ViSession vi, ViString cmd_str); Parameters Instrument handle returned from hpe5250a_init( ). cmd_str Instrument command (cannot exceed 256 bytes in length). 8- 12 Keysight E5250A User’s Guide, Edition 12...
Page 243: Hpe5250A_Cmddata_Q
Syntax ViStatus _VI_FUNC hpe5250a_cmdInt(ViSession vi, ViString cmd_str, ViInt32 value); Parameters Instrument handle returned from hpe5250a_init( ). cmd_str Instrument command (cannot exceed 256 bytes in length). value Parameter for command. -2147483647 to 2147483647. Keysight E5250A User’s Guide, Edition 12 8- 13...
Page 244: Hpe5250A_Cmdint16Arr_Q
16 bit integer. Syntax ViStatus _VI_FUNC hpe5250a_cmdInt16_Q(ViSession vi, ViString cmd_str, ViPInt16 result); Parameters Instrument handle returned from hpe5250a_init( ). cmd_str Instrument command (cannot exceed 256 bytes in length). result Response from instrument. 8- 14 Keysight E5250A User’s Guide, Edition 12...
Page 245: Hpe5250A_Cmdint32Arr_Q
32 bit integer. Syntax ViStatus _VI_FUNC hpe5250a_cmdInt32_Q(ViSession vi, ViString cmd_str, ViPInt32 result); Parameters Instrument handle returned from hpe5250a_init( ). cmd_str Instrument command (cannot exceed 256 bytes in length). result Response from instrument. Keysight E5250A User’s Guide, Edition 12 8- 15...
Page 246: Hpe5250A_Cmdreal
Instrument command (cannot exceed 256 bytes in length). size Size of result[ ] (number of items in the array). 1 to 2147483647. result[ ] Response from instrument. count Count of valid items in result[ ]. 8- 16 Keysight E5250A User’s Guide, Edition 12...
Page 247: Hpe5250A_Cmdreal64_Q
ViInt32 size, ViChar _VI_FAR result[ ] ); Parameters Instrument handle returned from hpe5250a_init( ). cmd_str Instrument command (cannot exceed 256 bytes in length). size Length of result in bytes. 2 to 32767. result[ ] Response from instrument. Keysight E5250A User’s Guide, Edition 12 8- 17...
Page 248: Hpe5250A_Compenc
Instrument handle returned from hpe5250a_init( ). frequency Measurement frequency. 1E+3 to 1E+6 Hz. len_hptrx Keysight 16494A triaxial cable. 1.5 or 3.0 m. len_usrtrx_h Triaxial cable length (in m) between connector plate and DUT high terminal. If you do not use triaxial cable, enter 0 (zero).
Page 249: Hpe5250A_Connruleseq
For the configuration mode, see hpe5250a_func. rule Connection rule. 0 (free route) or 1 (single route). sequence Connection sequence. 0, 1, or 2. See below. 0 (no sequence) 1 (break before make) 2 (make before break) Keysight E5250A User’s Guide, Edition 12 8- 19...
Page 250: Hpe5250A_Coupleport
0 (disable) or 1 (enable). port7 Couple port by the input ports 7 and 8. 0 (disable) or 1 (enable). port9 Couple port by the input ports 9 and 10. 0 (disable) or 1 (enable). 8- 20 Keysight E5250A User’s Guide, Edition 12...
Page 251: Hpe5250A_Couplestate
The device clear ensures that the instrument will be able to begin processing the new commands. Syntax ViStatus _VI_FUNC hpe5250a_dcl(ViSession vi); Parameters Instrument handle returned from hpe5250a_init( ). Keysight E5250A User’s Guide, Edition 12 8- 21...
Page 252: Hpe5250A_Error_Message
ViStatus _VI_FUNC hpe5250a_error_query(ViSession vi, ViPInt32 error_number, ViChar _VI_FAR error_message[ ] ); Parameters Instrument handle returned from hpe5250a_init( ). error_number Instrument’s error code. error_message[ ] Instrument’s error message. This is limited to 256 characters. 8- 22 Keysight E5250A User’s Guide, Edition 12...
Page 253: Hpe5250A_Errorquerydetect
This function indicates if automatic instrument error detection is enabled or disabled. Syntax ViStatus _VI_FUNC hpe5250a_errorQueryDetect_Q(ViSession vi, ViPBoolean pErrDetect); Parameters Instrument handle returned from hpe5250a_init( ). pErrDetect Error checking enable (VI_TRUE) or disable (VI_FALSE). Keysight E5250A User’s Guide, Edition 12 8- 23...
Page 254: Hpe5250A_Esr_Q
This function is used to set the channel configuration to the auto configuration mode or the normal configuration mode. Syntax ViStatus _VI_FUNC hpe5250a_func(ViSession vi, ViInt16 channel_config); Parameters Instrument handle returned from hpe5250a_init( ). channel_config Configuration mode. 0 (auto) or 1 (normal). 8- 24 Keysight E5250A User’s Guide, Edition 12...
Page 255: Hpe5250A_Init
This function does the *OPC? common command. Syntax ViStatus _VI_FUNC hpe5250a_opc_Q(ViSession vi, ViPBoolean result); Parameters Instrument handle returned from hpe5250a_init( ). result VI_TRUE (Operation complete), or VI_FALSE (Operation is pending). Keysight E5250A User’s Guide, Edition 12 8- 25...
Page 256: Hpe5250A_Opencard
A: card number, BC: input port number, DE: output port number. Top zero(s) can be ignored. For example, if A=0, BC=01, and DE=01, channel number should be 101 instead of 00101. 8- 26 Keysight E5250A User’s Guide, Edition 12...
Page 257: Hpe5250A_Openlist_Q
This function returns the contents of the status byte register. Syntax ViStatus _VI_FUNC hpe5250a_readStatusByte_Q(ViSession vi, ViPInt16 statusByte); Parameters Instrument handle returned from hpe5250a_init( ). statusByte The contents of the status byte are returned in this parameter. Keysight E5250A User’s Guide, Edition 12 8- 27...
Page 258: Hpe5250A_Reset
ViChar_VI_FAR driver_rev[ ] , ViChar _VI_FAR instr_rev[ ] ); Parameters Instrument handle returned from hpe5250a_init( ). driver_rev[ ] Instrument driver revision. This is limited to 256 characters. instr_rev[ ] Instrument firmware revision. This is limited to 256 characters. 8- 28 Keysight E5250A User’s Guide, Edition 12...
Page 259: Hpe5250A_Selectcompenfile
# User Triax Cbl L [/m] DATA07 114.00E-3 544.00E-9 130.00E-12 # User Coax Cbl H [/m] DATA08 114.00E-3 544.00E-9 130.00E-12 # User Coax Cbl L [/m] DATA09 0.00E-3 0.00E-9 1.20E-12 # Stray Capacitance # END of Data Keysight E5250A User’s Guide, Edition 12 8- 29...
Page 260: Hpe5250A_Self_Test
2 (card 2 relay test result) 3 (card 3 relay test result) 4 (card 4 relay test result) 5 (relay test result of all card) 6 (front panel test result) 7 (controller test result) 8- 30 Keysight E5250A User’s Guide, Edition 12...
Page 261: Hpe5250A_Testexec_Q
This function returns the timeout value for driver I/O transactions in milliseconds. Syntax ViStatus_VI_FUNC hpe5250a_timeOut_Q(ViSession vi, ViPInt32 pTimeOut); Parameters Instrument handle returned from hpe5250a_init( ). pTimeOut Minimum timeout period that the driver can be set to, in milliseconds. Keysight E5250A User’s Guide, Edition 12 8- 31...
Page 262 VXIplug&play Driver Driver Functions 8- 32 Keysight E5250A User’s Guide, Edition 12...
Page 263: Executing Sample Programs
Executing Sample Programs...
Page 264 NOTE To Keep Original Program Disk Copy the E5250A Program Disk, and keep the original disk for your backup. Also, for storing a program after you modify it, use a file name that is different from the original program name.
Page 265: Vth And Capacitance Measurement Program
Table 9-2. In this program, the 4155/4156 is set up by loading the 4155/4156 setup file E5252.MES, which is saved on the E5250A Program Disk. So, the program disk must be in the 4155/4156's disk drive when you execute the program.
Page 266 Measures Vth of MOSFET: 1. Loads the 4155/4156 setup file for Vth measurement. And sets up the 4155/4156 measurement conditions. 2. Creates connection channels in the E5250A for Vth measurement. 3. Measures Vth of MOSFET. 4. Disconnects the connection channels in the E5250A.
Page 267 Executing Sample Programs Vth and Capacitance Measurement Program Vth Measurement Setup Measurement setup of the E5250A and 4155/4156 for this program is as follows: • E5250A/E5252A Setup: Slot No Channels 10101, 10202, 10303, and 10404 not used. not used. not used.
Page 268 At a point where [ GRAD ] = [ MAX(GRAD) --------------------- *Interpolate: [OFF] Capacitance Measurement Setup Measurement setup of the E5250A and 4284A for this program is as follows: • E5250A/E5252A Setup: Slot No Channels 10905 and 11006 not used.
Page 269: Setting Up The Measurement Environment
Before executing the program, you need to set up the measurement environment. Table 9-3 lists the required equipment. Connect the E5250A output to Device Under Test (DUT). For details, refer to “Setting up Measurement Environment” on page 4-1. And connect all equipment as shown in...
Page 270 OUTPUT 3 MOSFET Source SMU 4 SMU INPUT 4 OUTPUT 4 MOSFET Substrate 4284A Hp, Hc AUX INPUT CV1 OUTPUT 5 Capacitance (H) Lp, Lc AUX INPUT CV2 OUTPUT 6 Capacitance (L) 9- 8 Keysight E5250A User’s Guide, Edition 12...
Page 271: Executing The Program
In following example, the file is stored as program file C_COM. GET "C_COMPEN" RE-STORE "C_COM" For details of Capacitance Compensation Routine, refer to “Using the Capacitance Compensation Routine” on page 6-28. Keysight E5250A User’s Guide, Edition 12 9- 9...
Page 272 LOADSUB ALL FROM "C_COM" 3. Eject the E5250A Program Disk from the disk drive connected to the computer. 4. Insert the E5250A Program Disk into the 4155/4156's disk drive. Setup file E5252.MES is stored on the disk and is used to set up 4155/4156 for the Vth measurement.
Page 273: Modifying The Program
Usercomm$ Header comment (title) of the report. "Vth C Meas. Sample Program" Test_num Initial number for numbering the test item. If value is 0, the first test item will be number 1. Keysight E5250A User’s Guide, Edition 12 9- 11...
Page 274 ! OUTPUT @Hp415x;":MMEM:STOR:TRAC DEF,'VTH.DAT','DISK'" ! OUTPUT @Hp415x;"*OPC?" ! ENTER @Hp415x;A The measurement data will be saved to the VTH.DAT file after the measurement. If desired, you can use another file name instead of VTH.DAT. 9- 12 Keysight E5250A User’s Guide, Edition 12...
Page 275 "(@10101,10202,10303,10404)" To change the E5250A input port/output port connections, change the Channel$ parameter. And if you want to change the E5250A connection functions (Channel Configuration mode, etc.), modify the Set5250init subprogram. To change the 4155/4156 measurement setup, change the Param_file$ parameter to the name of your desired setup file.
Page 276 E5250A channel_list to use. "(@10905,11006)" To change the E5250A input port/output port connections, change the Channel$ parameter. And if you want to change the E5250A connection functions (Channel Configuration mode, etc.), modify the Set5250init subprogram. 9- 14 Keysight E5250A User’s Guide, Edition 12...
Page 277 Meas_c OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL" "Connection All Open" block OUTPUT @Hp5250;"*OPC?" ENTER @Hp5250;A Set5250init OUTPUT @Hp5250;":ROUT:FUNC NCON" OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,OFF" OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU" OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM" OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL" OUTPUT @Hp5250;"*OPC?" ENTER @Hp5250;A Keysight E5250A User’s Guide, Edition 12 9- 15...
Page 278 In Load_vfp_data subprogram, enter your VFP data file name instead of "VFP_FILE". Your VFP data file must contain data for at least 3 Setup Memories: for Vth measurement, C mea- surement, and "Open All" condition. 9- 16 Keysight E5250A User’s Guide, Edition 12...
Page 279: Hci Measurement Program
4155/4156 for each part of the SP_MUX_M program. These setup files are stored on the E5250A Program Disk. So, the program disk must be in the 4155/4156's disk drive when you execute the program.
Page 280 HCI Degradation Measurement Flow 4155/4156 step Description setup file Initializes the Instruments: 1. Resets the 4155/4156. 2. Resets and initializes the E5250A. Configuration Mode: AUTO Bias Mode: OFF Connection Rule: FREE Channel Status: All Relays Open Determines Stress Condition. See later. IBVG.MES Selects devices valid for the HCI test.
Page 281 The IGLEAK.MES and IDLEAK.MES files are used to set up the 4155/4156 for this step. As shown below, 24 devices are connected to the E5250A, and measured individually by switching. For devices that fail this step, no further testing is performed, and "0.0"...
Page 282 Idlin: Gate voltage VG=5 V Substrate voltage VB=0V W/L Ratio (Gate width/Gate length ratio) =10 μm/1 μm Vtci: For changing the conditions, refer to “Modifying the Program” on page 9-35. 9- 20 Keysight E5250A User’s Guide, Edition 12...
Page 283 5000 sec 10000 sec 50 sec 100 sec 10000 sec 20000 sec 100 sec 200 sec 30000 sec 50000 sec 300 sec 500 sec 50000 sec 100000 sec 500 sec 1000 sec Keysight E5250A User’s Guide, Edition 12 9- 21...
Page 284 Triaxial Cable (1.5 m or 3 m) 16494A-003 Triaxial Cable (80 cm) 16494D-001 or -002 8 Channel Shielded Coaxial Cable (1.5 m or 3 m) 16495D Connector Plate 10833A/B/C GPIB Cable E5250-17002 E5250A Program Disk (furnished) 9- 22 Keysight E5250A User’s Guide, Edition 12...
Page 285: Adding The Bias Source Control Routine
The following subprogram is for bias sources that support SCPI commands: 1. Get the HCI test program (SP_MUX_M) from the E5250A Program Disk by using the computer: GET "SP_MUX_M"...
Page 286: Setting Up The Measurement Environment
3. Connect all equipment and devices as shown in Figure 9-4 Table 9-7. Refer to Chapter 4 for the details of the connection from the E5250A output to Device Under Test (DUT). 9- 24 Keysight E5250A User’s Guide, Edition 12...
Page 287 Output 1 to 24 (SLOT 1) Gate SMU 3 SMU INPUT 3 Output 25 to 48 (SLOT 2) Drain SMU 4 SMU INPUT 4 Output 49 to 72 (SLOT 3) GNDU (directly connected to Connector Plate) Source Keysight E5250A User’s Guide, Edition 12 9- 25...
Page 288 Device used to Determine Stress Conditions HCI test program (SP_MUX_M) uses Device1 above to determine stress voltages (Vdstr and Vgstr). So, during the program, you are prompted to replace Device1 after these voltages are determined. 9- 26 Keysight E5250A User’s Guide, Edition 12...
Page 289: Executing The Program
SP_MUX program, in this example. LOAD "SP_MUX" EDIT 7. Insert the E5250A Program Disk into the 4155/4156's disk drive, then get the setup file IDVD.MES to set up the 4155/4156. 8. Enter the following command from the command line of the computer: OUTPUT 722;":ROUT:CLOS (@10101,20101,30101)"...
Page 290 Executing Sample Programs HCI Measurement Program !-- Drain stress voltage should be determined by Id-Vd charact eristics Vdstr=5 ! Drain stress voltage After defining the value, re-store the program. Figure 9-5 Id-Vds Measurement Example 9- 28 Keysight E5250A User’s Guide, Edition 12...
Page 291 Then, stress/interim characterization cycle is executed until stress termination conditions are met as described previously. In each interim characterization, Idlin, Gmmax, Vtext, and Vtci are determined. An example measurement is shown in Figure 9-7. Keysight E5250A User’s Guide, Edition 12 9- 29...
Page 292 After testing, the test result data is saved to the diskette in the computer's disk drive, and the following message is displayed. "HCI Degradation Test is Completed!!" Figure 9-6 Example of Ib-Vgs Measurement Results 9- 30 Keysight E5250A User’s Guide, Edition 12...
Page 293 Executing Sample Programs HCI Measurement Program Figure 9-7 Initial/Interim Characterization Example Figure 9-8 HCI Degradation Test Result Example Keysight E5250A User’s Guide, Edition 12 9- 31...
Page 294 To Execute Analysis Program Before running the program, do the following: 1. Insert the E5250A Program Disk into the computer's disk drive. 2. Specify the mass storage device (disk drive) the program disk is inserted by using MSI statement. For example, if the device is ":CS80,702,1", enter the following command: MSI ":CS80,702,1"...
Page 295 And program pauses. This step is repeated according to entered number of devices and selected softkey. Figure 9-9 HCI Degradation Test Data Analysis Example Keysight E5250A User’s Guide, Edition 12 9- 33...
Page 296 For the above, 0 means valid and 1 means invalid. Following is an actual example for this case: 5, 1.95, 1.E-6, 1.E-5 Idlin Device Validity Tdc_idlin 1, 0, 835.5786 2, 0, 3401.432 3, 0, 6269.047 4, 0, 24366.79 Averaged Tdc_idlin 8718.2119 9- 34 Keysight E5250A User’s Guide, Edition 12...
Page 297: Modifying The Program
To change the GPIB address of the instruments, change the following parameters in the "GPIB Setup" block. Parameter Description Default Hpib_sc 4155/4156 GPIB select code Hpib_addr 4155/4156 GPIB address Swm_sc E5250A GPIB select code Swm_addr E5250A GPIB address Keysight E5250A User’s Guide, Edition 12 9- 35...
Page 298 W means Gate width in m, and L means Gate length in m. 3. Change the following parameters in the "Device geometries" block of program. Parameter Description Default Gate_length Gate length in m. 1.E-6 Gate_width Gate width in m. 1.E-5 9- 36 Keysight E5250A User’s Guide, Edition 12...
Page 299 Change the setting of the variable in the "Input Parameters" block. No_of_devices To test more than 25 devices, you must change the configuration of the E5250A. See chapter 2. To change the stress times Change the data at the DATA statement in the "Stress duration setup" block. Each data shows the cumulative stress data.
Page 300 Change the following parameter in the "Setup for drawing / saving data in main menu" block. • Save_at_last=0: Saves the data after each parameter measurement. • Save_at_last=1: Saves the data after HCI test is completely finished. For this parameter, the default is 1. 9- 38 Keysight E5250A User’s Guide, Edition 12...
Page 301: Error Messages
Error Messages...
Page 302: E5250A Specific Error Messages
Error Messages This chapter lists and describes the error messages for Keysight E5250A. An error message consists of an error number and message. There are two types of error messages: • Standard SCPI Error Messages Negative error numbers (Command Error, Execution Error, Device-Dependent Error, and Query Error) are standard SCPI errors.
Page 303: Standard Scpi Error Messages
Syntax error -102 An unrecognized command or data type was received; for example, a string was received when the E5250A does not accept strings. Keysight E5250A User’s Guide, Edition 12 10- 3...
Page 304: Keysight E5250A User's Guide, Edition
Fewer parameters were received than required for the command. Command header error -110 An error was detected in the header. This error message is reported if the E5250A cannot determine the more specific header errors -111 through -114. Header separator error -111 An illegal character for a header separator was received;...
Page 305 -128 Numeric data is not allowed in this position for this command. Suffix not allowed -138 A suffix was received after a numeric parameter. For the E5250A, no parameters have suffix. Character data error -140 An error was detected in a character parameter. This error message is reported if the E5250A cannot determine the more specific errors -141 through -148.
Page 306 String data error -150 An error was detected in a string parameter. This error is reported if the E5250A cannot determine a more specific error -151 and -158. Invalid string data -151 An invalid string parameter data was received; for example, an END message was received before the terminal quote character.
Page 307: Execution Error
If syntax of a SCPI command header and parameter is valid, but the command cannot be executed due to some condition of the E5250A, a -2XX error occurs. The error number and message are placed in the error queue, and bit4 of the Standard Event Status Register is set.
Page 308: Device-Dependent Errors
Error Messages Standard SCPI Error Messages Device-Dependent Errors -3XX errors indicate that an E5250A operation did not properly complete, possibly due to an abnormal hardware or firmware condition. These negative codes are SCPI defined. For the device-dependent positive error codes, see “E5250A Specific Error...
Page 309: Query Errors
Error Messages Standard SCPI Error Messages Query Errors If the output queue control of the E5250A detects one of following problems, a -4XX error occurs:. • An attempt was made to read data from the output queue when no output data is present or pending.
Page 310 Error Messages E5250A Specific Error Messages E5250A Specific Error Messages These are the E5250A-specific errors that are not defined by SCPI. These errors indicate that an E5250A operation did not properly complete due to card, channel, port, or mode errors.
Page 311: E5250A Channel Related Errors
Empty channel list No channel list is specified. 2012 Invalid channel range Wrong channel list is defined. Confirm the syntax of the channel list, the card configuration, and the configuration mode of the E5250A. Keysight E5250A User’s Guide, Edition 12 10- 11...
Page 312 Technologies service center. 3001 Card1 initialization fail The E5250A or card installed in slot 1 of the E5250A may be defective. Or if card is the E5255A, the internal cable connection or the DIP switch setting may be wrong. 3002...
Page 313 Maximum 200 relays can be closed. 3018 Can't change to ACONfig mode. Check card config. The present card configuration of the E5250A does not allow the Auto Config mode. Change the E5250A card configuration to allow Auto configuration mode.
Page 314 Error Messages E5250A Specific Error Messages 10- 14 Keysight E5250A User’s Guide, Edition 12...
Page 315 SCPI Command Summary...
Page 316 SCPI Command Summary This chapter is a quick reference for the SCPI subsystem commands available for Keysight E5250A. The commands are in alphabetical order. For details about these commands, see Chapter 7. For how to specify the channel_list parameter, see Chapter 5.
Page 317 For Normal Config mode: 1, 2, 3, 4, or ALL Bias disables the specified channels. [:ROUT]:BIAS:CHAN:DIS[:LIST] (@channel_list) channel_list: Channels to bias disable. Returns whether specified channels are bias [:ROUT]:BIAS:CHAN:DIS[:LIST]? (@channel_list) disabled. 1: disabled, 0: enabled. channel_list: Channels to check. Keysight E5250A User’s Guide, Edition 12 11- 3...
Page 318 Returns the Bias Mode for the specified card. 0: Bias Mode is OFF, 1: Bias Mode is ON. card_number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, 4 11- 4 Keysight E5250A User’s Guide, Edition 12...
Page 319 Specifies the connection sequence mode for the specified card. card_number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL sequence: NSEQ: No-Sequence mode BBM: Break-Before-Make mode MBBR: Make-Before-Break mode Keysight E5250A User’s Guide, Edition 12 11- 5...
Page 320 For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL state: ON or 1: turn ON Couple Mode OFF or 0: turn OFF Couple Mode 11- 6 Keysight E5250A User’s Guide, Edition 12...
Page 321 1: channel is opened (disconnected) channel_list: Channels to check. Returns the card configuration information: :SYST:CCON? card_number E5252A: no info returned. E5255A: input port and resistance info for each block. card_number: 1, 2, 3, or 4 Keysight E5250A User’s Guide, Edition 12 11- 7...
Page 322 For Normal Config mode: 1, 2, 3, or 4 Reads error from head of error queue, and removes :SYST:ERR? that error from queue. Returns SCPI version number for which the :SYST:VERS? E5250A complies. 11- 8 Keysight E5250A User’s Guide, Edition 12...
Page 324 This information is subject to change without notice. © Keysight Technologies 1995-2015 Edition 12, September 2015 *E5250-90000* E5250-90000 www.keysight.com...

Keysight E5250A User Manual

1 Introduction

2 Installation

3 Executing Self-Test and Leak Test

4 Setting up Measurement Environment

5 Controlling the E5250A

6 Programming the E5250A

7 Command Reference

8 Vxiplug&Play Driver

9 Executing Sample Programs

10 Error Messages

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Summary of Contents for Keysight E5250A