Zeiss EVO Manuals

Manuals and User Guides for Zeiss EVO. We have 1 Zeiss EVO manual available for free PDF download: Instruction Manual

Zeiss EVO Instruction Manual (180 pages)

Scanning Electron Microscope

Brand: Zeiss | Category: Microscope | Size: 3.9 MB

Table of Contents
3
General Information
6
Text Conventions and Link Types
6
Explanation of Warning Messages and Additional Information
7
Further Applicable Documents
8
Contact
8
Safety
9
Intended Use
9
General Safety Information
10
Requirements for Operators
10
Safe Operating Condition
10
Prevention of Hazards
11
Mechanical Hazards
11
Electrical Hazards
11
Hazards Generated by Materials and Substances
12
Care and Maintenance
12
Hazards Generated by Radiation
13
Thermal Hazards
13
Warning Labels and Lights
13
Warning Labels
14
Troubleshooting
14
Safety Devices and Interlocks
18
Protective Cover Panels
18
Main Disconnect Device
19
Circuit Breaker
19
Locking Devices
20
Product and Functional Description
21
Vacuum System
22
Variable Pressure Modes
23
Electron Optical Column
27
Optibeam Modes
29
Detectors
29
Principle of Signal Detection
30
Detectors Overview
32
SE Detector
33
Chamber CCD Camera
37
Specimen Stage
38
Optional Components and Accessories
39
Optional Detectors
39
Dual Joystick
47
Control Panel
48
Decommissioning and Disposal
48
Software Description
50
Smartsem User Interface
50
Graphical Control Elements
51
User Access Levels and User Privileges
52
Technical Data and Conformity
52
Smartsem Program Suite
53
Installation
55
First Operating Steps
56
Prerequisites for Commissioning and Operation
56
Switching on the Microscope System
56
Energizing the Microscope
56
Starting the Microscope
58
Starting the Software
59
Calling up the Help
59
Keyboard Shortcuts
59
Acquiring an Image
61
Preparing the Specimen Holder
61
Loading the Specimen Chamber
63
Locating the Specimen
67
Switching on the Gun | Lab₆ Filament
68
Switching on the EHT | Lab₆ Filament
68
Choosing the Lab₆ Mode
69
Setting up the Lab₆ Source
70
Parts and Tools
71
Switching on the Gun and EHT | Tungsten Filament
72
Acquiring an Image
73
Glossary
73
Optimizing the Image
76
Index
76
Saving the Image
79
Modifying Gun Parameters and Optibeam Mode
79
Using the Automatic Gun Alignment Functions
79
Using the Auto Aperture Alignment Function
80
Setting the Probe Current
81
Measuring the Probe Current
81
Selecting the Optibeam Operation Mode
81
Finding Appropriate Detector Settings
82
Selecting a Detector
82
Setting up the SE Detector
83
Setting up the C2D Detector
83
Setting up the C2DX Detector
84
Setting up the BSD Detector
85
Setting up the YAG BSD Detector
87
Using the Variable Stage Bias
88
Working with Specific Specimen Types
91
Conductive Specimen
91
Non-Conductive Specimen
93
Hydrated Specimen
97
Switching off the Microscope System
108
Finishing the Work Session | Lab₆ Filament
108
Finishing the Work Session | Tungsten Filament
108
Closing the Smartsem User Interface
109
Energizing the Microscope
110
Performing an Emergency Shutdown
111
Safety During Cleaning and Maintenance
112
Maintenance Schedule
112
Maintenance Work
113
Change of Consumables and Chemicals
113
Care and Cleaning Work
113
Cleaning the Microscope
113
Chamber
115
Initializing the Stage
115
Defining the Post Initialization Position of the Stage
116
Changing the Joystick TV Angle
116
Resetting the Touch Alarm
117
Checking the Temperature
117
Replacing the Chamber Door Seal
117
Adjusting the Isolation Mounts
119
Column
120
Baking out the Gun Head
120
Replacing Filaments
121
Power Circuit
147
Checking the Position of the Circuit Breakers
147
Cleaning up the PC
147
Decommissioning
148
Transport and Storage
149
Disposal
151
Decontamination
151
Layout and Connections
152
System Layout
153
Performance Data and Specifications | EVO 10
153
Performance Data and Specifications | EVO 15
159
Performance Data and Specifications | EVO 25
164
Applicable Standards and Regulations
169
Consumables
171
Spare Parts
171
Tools and Accessories
171

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Zeiss EVO Instruction Manual (180 pages)

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