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AL120-LMB86-180
Olympus AL120-LMB86-180 Manuals
Manuals and User Guides for Olympus AL120-LMB86-180. We have
2
Olympus AL120-LMB86-180 manuals available for free PDF download: Operation Manual, Maintenance Manual
Olympus AL120-LMB86-180 Operation Manual (80 pages)
Wafer Loader
Brand:
Olympus
| Category:
Laboratory Equipment
| Size: 3.81 MB
Table of Contents
Table of Contents
20
Stoppage of Transfer
43
Inspections
45
Preparations
45
Inspection Operations
45
Special Operations
57
Specifications
59
AL120-L6-150 and LMB6-150
59
Problems During Use and Solutions
67
When Warning Codes Are Displayed
67
When Error Codes Are Displayed
69
How to Reset the Circuit Breaker
73
After Use of Loader Stop
73
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Olympus AL120-LMB86-180 Maintenance Manual (66 pages)
Wafer Loader
Brand:
Olympus
| Category:
Laboratory Equipment
| Size: 2.3 MB
Table of Contents
Table of Contents
19
Nomenclature
21
Wafer Loader Main Body
21
Operation Panel
22
Remote Controller (Option)
23
Vacuum Stage
24
Adjustments
25
Adjusting the Cassette Positioning Guide Position
25
Registration of a New Type of Inspection Wafer
26
Thickness)
26
Test Programs
31
How to Use the Programs
31
Test Names and Functions
32
Replacement of Consumables
57
Macro (Center) Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
57
Macro (Center) Table Oil Seal: if a Vacuum Error Has Occurred
57
Arm: if a Vacuum Error Has Occurred or the A-Arm Has Become Damaged
59
Vacuum Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
60
Oil Seal for Vacuum Table: if a Vacuum Error Has Occurred
60
Arm Vacuum Pad
62
Rubber Microscope Legs: if Wafer Transfer Sound Has Increased
63
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