HP HP 4062UX Manuals

Manuals and User Guides for HP HP 4062UX. We have 1 HP HP 4062UX manual available for free PDF download: Installation Manual

HP HP 4062UX Installation Manual (174 pages)

Semiconductor Process Control System Semiconductor Parametric Test System

Brand: HP | Category: Control Systems | Size: 1.46 MB

Table of Contents
7
General Information
15
Introduction
15
System Installation Flow Diagram
15
Installation Sequence
16
Arranged Installation Sequences for HP 4062UX/F
16
Required Equipment
17
Utility Software
17
Abbreviations
17
System Controller Installation
19
Unpacking
20
Line Voltage Switch and Line Fuse
20
HP 9000 Series 300 Hardware Installation
21
Backplane Expander
21
Random Access Memory (RAM)
21
HP-IB Interface Cards
22
HP-IB Interface Settings
22
HP-IB Interface Card Switch Settings
22
Computers)
22
ID Module
23
HP-IB Interface Card Switch Settings
23
Verifying Installed Accessories
24
Connecting the ID Module in the HP-HIL Interface
24
HP 9000 Series 700 Hardware Installation
25
HP-IB Interface Cards
26
HP E2071B HP-IB Interface Card Switches
26
HP-IB Interface Supported for Series 700 Computers
26
ID Module
27
Connecting the ID Module in the HP-HIL Interface
27
Rack Mounting Instructions
28
Controller and Backplane Expander Installation Procedure (Option 701 or 702)
29
Controller and Bus Expander Installation Procedure (Option 703 or 704)
29
Rack Mounting the Controller and Backplane Expander
30
Installing Controller (Option 705 or 706)
31
Rack Mounting the Controller (Option 705 and 706)
31
Mass Storage Unit
32
Mass Storage Installation Procedure
32
Rack Mounting the Mass Storage Unit
33
Switching Matrix Installation
35
Introduction
35
HP 4085B/F (48-Pin) SWM Installation
35
Unpacking
35
Installing Additional Pin Boards
36
Installing the SWM on a Wafer Prober
38
Automatic Wafer Probers
38
Manual and Small Automatic Wafer Probers
38
Connecting Test Fixtures
40
HP 4089B (96-Pin) SWM Installation (HP 4062UX Only)
42
Unpacking
42
Installing Additional Pin Boards
42
Installing a Port Expander
43
System Installation
47
Introduction
47
Installing the System Cabinet
47
Stabilizing the System Cabinet
48
Installing Power Cables
48
When an Emergency O Unit Is Furnished
49
Maximum Current for PDU
49
When an Emergency O Unit Is NOT Furnished
51
Installing Power Cables for each Instrument
53
Changing the Line Voltage
54
Fuse
54
Installation of HP 4142B DC Subsystem (DCS)
55
Installing the Customer's HP 4142B
55
Installation Preparation
55
Contents of Rack Mount Kit for the HP 4142B
55
Installing the HP 4142B
56
Attaching Rack Flanges to the HP 4142B
56
HP 4142B DCS Settings
57
Installation of HP 4280A Capacitance Measurement Subsystem (CMU)
58
Installing the Customer's HP 4280A
58
Installation Preparation
58
Contents of Rack Mount Kit for the HP 4280A
58
Installing the HP 4280A
59
Attaching Rack Flanges to the HP 4280A
59
Installing the HP 4280A
60
HP 4280A CMU Settings
61
Installation of HP 4284A Capacitance Measurement Subsystem (CMU84)
62
Installing the Customer's HP 4284A
62
Installation Preparation
62
Contents of Rack Mount Kit for the HP 4284A
62
Attaching Rack Flanges for HP 4284A
63
Installing the HP 4284A
64
HP 4284A CMU84 Settings
64
Installation of HP 8110A Pulse Source Subsystem (PSS) (HP 4062F Only)
65
Installing the Customer's HP 8110A
65
Installation Preparation
66
Contents of Rack Mount Kit for the HP 8110A
66
Installing the HP 8110A
67
Attaching Rack Flanges to HP 8110A
67
Trigger Cable Connections of One HP 8110A
68
Pulse Adder/Splitters Fixed on the Support Rail
71
HP-IB Cables and Addresses
72
HP-IB Addresses and Connections of the Rack Mounted Instruments
72
Connections between the Controller and the System Instruments
73
Connections of the HP-IB Cables
74
Connections of the HP-IB Cables with Controller
74
HP-IB Address and Connection of the Wafer Prober
76
Installing Signal Cables
77
When Your System Is HP 4062UX
77
Connecting the CMU to the SWM
79
Connecting the CMU84 to the SWM
80
When Your System Is HP 4062F
82
Fastening the Interconnection Cables with Cable Ties
82
Connecting the HP 4084B SWC to the HP 4085F SWM
83
Connecting the HP 4142B DCS to the HP 4085F SWM
84
Connecting the HP 4280A CMU to the HP 4085F SWM
85
Connecting the HP 4284A CMU84 to the HP 4085F SWM
86
Connections between Output Terminals of the HP 8110A and HF Ports
88
Removing System Instruments
89
Testing each Instrument
90
Testing Emergency O Unit and Power Distribution Unit (PDU)
90
Testing Power Distribution Unit (PDU) (HP 4062UX Only)
91
Testing each System Instrument
92
Cleaning
92
Software Installation Introduction
93
Installing the HP 4062UX/F System Software
94
Installing HP-UX and Other Application Software
96
Required Swap Size and Memory for Series 300 Computers
96
Required Swap Size and Memory for Series 700 Computers
96
Installing and Customizing Your System
98
Computers
104
Installing and Customizing HP IMA
106
Installing HP IMA/UX
106
Customizing for HP IMA/UX
106
Usr/Lib/Rmbrc or $Home/.Rmbrc
106
Usr/Pcs/Etc/Xinitcolor
107
Usr/Pcs/Etc/Codeword
107
Usr/Pcs/Etc/Perconfig
107
Creating a New User Account
108
Customizing the Wafer Prober
111
System Veri Cation
113
Verifying the System con Guration with START Program
114
Verifying the System con Guration with START.F Program
116
System Performance Veri Cation for HP 4062UX
117
Running the PV4062
119
PV4062 Menu Page (HP 4062UX)
119
The 4062UX W/O DVM
120
Procedure
121
Calibration Module Menu Page for 48-Pin SWM System
122
Test Lead Connections for OPEN Correction
123
Test Lead Connections for SHORT Correction
124
PV Test Results Data Entry Page
125
Relay Test Results Page for 48-Pin SWM
127
Relay Test Results Page for 96-Pin SWM
127
SMU Test Results Page
128
VS Test Results Page
128
VM Test Results Page
129
AFU Test Results Page
129
CMS C-G Test Results Page for 48-Pin SWM
130
CMS C-G Test Results Page for 96-Pin SWM
130
CMS Bias Test Results Page for HP 4280A
131
CMU84 C-G Test Results Page for HP 4284A
131
CMU84 Bias Test Results Page for HP 4284A
132
DC Leak Test Results Page
132
Displaying and Printing Test Results
133
Displaying PV Test Results
133
Printing PV Test Results
133
An Example Page of View Result (CRT)
133
An Example Page of View Result (Printer)
135
System Performance Veri Cation for HP 4062F
136
Running PV4062.F
138
PV4062.F Menu Page (HP 4062F)
138
4062F DC W/O DVM" Test
139
Required Equipment
139
Test Procedure
140
4062F DC W/O DVM Test Startup Page
140
Calibration Module Menu Page
141
PV Test Results Data Entry Page
144
Relay Test Results Page
145
SMU Test Results Page
146
VS Test Results Page
147
VM Test Results Page
147
AFU Test Results Page
148
CMS C-G Test Results Page for HP 4280A
149
CMS Bias Test Results Page for HP 4280A
149
CMU84 C-G Test Results Page for HP 4284A
150
CMU84 Bias Test Results Page for HP 4284A
150
DC Leak Test Results Page
151
4062F AC" Test
152
Required Equipment
152
Preparation
153
Test Procedure
154
Displaying and Printing Test Results
157
Displaying PV Test Results
157
Example Page of View Result (CRT)
157
Printing PV Test Results
158
An Example Page of View Result (Printer)
159
Updating the System Software
161
Introduction
161
Updating for HP 4062UX/F
161
Con Guring the System Printer for PV4062/PV4062.F
163
Installation Problems You May Encounter
169
Errors During the START/START.F Program
169
For HP 4062UX/F System
169
START ERROR 0 : Not Authorized to Use the Software
169
START ERROR 90 : SYSCONFIG le Not Found
169
START ERROR 300 : PCS SESSION ID Not de Ned
170
START ERROR 310 : Group 'Pcs' Not Registered
170
Not Found
170
START ERROR 450 : Fatal Error in Pcsstart Command
171
Pcsstart:error in SYSCONFIG: Invalid Select Code 29
171
System con Guration Error
172
Errors During the PV4062/PV4062.F Program
172
Error Occurs While Test Infomation of File Is Being Stored
172

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