Omega MASS FLOW FMA-1900 User Manual page 26

Mass flow meter
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*P
relationship
gi
simr
ar
to
the
,
and
N
fo
more
than
two
m,)N,
The
equivalen
/
(br2
in,)N,
+
/
cm,
=
(fi,
P
)
The
equivale
/
P,)
(fi2
F,
=
1%
P
)
and
/
)
P,
(rf+
C,
where:
F,
=
F,
Cp,
+
=
F,
C,
#2
The
equivale
=
refers
to
)*
,
and
(
#l
=
refers
to
gas
),
(
(grn/min
=
Total
mass
rh,
61,
+
=
rir,
a
where:
p,
(7)
t?~,)
(I$/
p,
+
61~)
/
(6,
=
p
C,
and
N
dual
gas
mixtu
The
equivalen
p,
pC,
for
the
mixtu
N/
100/0.869
Equation
(6)
is
QCF ' =
QCF ' = 0.869
/
KcF,,
100
/
KsiH2Ch
QCF ' =
/
QSIH~C~
CF,
must
we
g
(CF,).
What
flow
of
preterred
reference
(SiH
CL,)
at
a
flow.
We
wish
/ 1
.Ol)
100
Please
note
th
used
in
each
case
EXAMPLE
3:
use
with
dichlo
QN*O =
(0.71
KH*,
or
/
KN*O
QH*
=
/
QN*O
found.as
follows
(N,O)
is
(H,)
and
the
flow
ra
The
flow
rate
=
740
SCC
EXAMPLE
2:
/ 1
.OOO)
10
Qco,
=
(0.74
KN*,
or
/
Kco,
=
QN*
/
Qco,
(N,)
and
the
flow
ra
The
flow
rate
EXAMPLE
1:

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