Omega MASS FLOW FMA-1900 User Manual page 22

Mass flow meter
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2)
3)
Cycle
purge.
and
purging
t
clean,
dry
nit
Purge
the
de
eight
to
twen
Evacuate
the
1)
-
Purge
reactiv
following
meth
3.13.1
Purging
N
Purge
non-re
dry
nitrogen
o
3.13.2
Purg
" D"
conne
tor
to
common
open-collecto
at
least
4mA
(
appearing
on
15-pin
setpoint
command
s
scale
or
DIP
The
activation
Auto-Shutoff
f
To
activate
pu
3.13
Purging
of
The
purge
fun
for
the
purpos
flushing
unwa
valve
is
opene
the
rated
full
s
uncontrolled
n
must
be
met
b
1)
The
Valve
OF
or
open
state
2)
The
Auto-Shu

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