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Olympus MX61 Manuals
Manuals and User Guides for Olympus MX61. We have
1
Olympus MX61 manual available for free PDF download: Assembly Manual
Olympus MX61 Assembly Manual (49 pages)
200mm/300mm COMPATIBLE SEMICONDUCTOR/FPD INSPECTION MICROSCOPES
Brand:
Olympus
| Category:
Microscope
| Size: 3.99 MB
Table of Contents
Table of Contents
3
Safety Precautions
4
MX61L Installation Space
5
MX61 Installation Space
6
MX61L External View, Eye Point and Center of Gravity
6
MX61 External View, Eye Point and Center of Gravity
7
Caution Indications
8
Safety Symbols
8
Applicable Standards
9
Getting Ready
9
Maintenance and Storage
9
Semi
10
Caution
10
Nomenclature
11
Stage and Holder System for the MX61
12
Stage and Holder System for the MX61L
13
Assembly Diagram
14
Tools Used
14
Attaching the Stage
15
Attaching the Y-Stroke Limit Stopper
15
Caution before Transporting the Stage
15
Detailed Assembly Procedures
15
Attaching the Black Plate/Glass Plate
16
Attaching the Holders
16
Attaching the Mask Holder
16
Attaching the Wafer Holder
16
Attaching the Motorized Revolving Nosepiece
17
Attaching the Objectives
17
Attaching the Observation Tube
17
Using the Brightfield Objective Adapter
17
Attaching the Eyepieces
18
Attaching the Halogen Bulb
18
Attaching the Lamp Housing
19
Attaching the Mercury Burner
19
Mercury Burner Replacement
20
Resetting the Burner Hour Counter
20
Attaching the High-Intensity Light Source Lamp Housing
21
Connecting the Hand Switch (U-HSTR2)
21
Setting up the Power Supply Unit for Mercury Burner
21
Applicable Fuses
22
Attaching the Breath Shield
22
Connecting the Power Cord
22
Fuse Replacement
22
Setting the DIP Switches and PRESET Switches
23
AS (Aperture Stop) PRESET Switch Setting
24
AS Interlocking
24
Setting the as Values
24
When Using the U-HSTR2 Hand Switch:
24
Centering the Reflected Light Aperture Iris Diaphragm
25
Modules Installed by Olympus
26
Transmitted Light Module (MX-TILLA/TILLB)
26
(Optional) Light Path Setup
27
Reflected Neutral Density Filter (ND 0.5)
27
Centering the Mercury Burner
28
Centration of the Mercury/Xenon Burner
28
Turning the Burner on
28
Precise Centering of the Mirror
29
Microscope Control from Computer
30
RS-232C Communication Parameters
30
Connection of the RS-232C Cable
30
Connection of Connectors and Pin Assign
30
Communication Specifications
31
Command and Response
31
Request Commands and Query Commands
31
Remote Mode and Local Mode
31
Command Sequences
32
During Initialization of the MX61/61L
32
Command List
33
Command Details
34
Log-In
34
Functions
34
Special Notes
34
Objective Switching
35
Function
35
Command Descriptions
35
Aperture Iris Switching
36
Objective/Aperture Iris Switching
37
Cube Status Check
38
Unit Presence
38
Glare Prevention Setting
39
Error Code List
40
External Control of Revolving Nosepiece
41
Connector Used
41
Pin Layout and Signal Names
41
Control Specifications
41
Revolving Nosepiece Position Numbers (Index Nos. on the Center of Revolving Nosepiece)
41
Fuses
42
Immersion Oil
42
Maintenance Part Lists
42
Certified Cord
43
Specifications
43
HAR Flexible Cord
44
Proper Selection of the Power Supply Cord
43
Light Source Bulbs/Burners
42
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