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SECTION I
Model 4145A
l-4.
DESCRIPTION
l-5.
The
Hewlet t-Packard
Model
4145A
Semiconductor
Parameter
Analyzer
is a fully
automatic,
high performance,
programmable
test
instrument
designed
to measure,
analyze,
and
graphically
display
the DC characteristics
of a
wide range
of semiconductor
devices,
such as
diodes,
bipolar
transistors,
field-effect
transistors,
wafers,
ICs, etc.
Main applications
include computer-aided
design (CAD) of ICs, new
device
evaluation,
materials
evaluation,
component
selection
for
circuit
design,
incoming/outgoing
inspection,
semiconductor
process
control,
quality
control,
and quality
assurance.
It
is
equipped
with
four
programmable
stimulus/measurement
units
@MU),
two programmable
voltage
source
units
(Vs), two
voltage
monitor
units
(Vm), a fully
interactive
graphics
display,
removable
flexible-disc
storage,
softkeys,
full
arithmetic
keyboard,
and HP-IB.
And it can be used on the
bench
or as part
of a complete
measurement
system
in the laboratory
or on the production
line.
l-6.
For device stimulation
and characteristics
measurement,
the
4145A
has eight
channels.
Channels
1 through
4 are stimulus/measurement
units (SMU); channels 5 and 6 are voltage
source
units
(Vs); and channels
7 and 8 are voltage
monitor
units (Vm).
_..
Each SMU channel has three modes of operation:
voltage
source/current
monitor
(V),
current
source/voltage
monitor
(I), and common
(COM).
Source voltage
and source current
can be held
constant
or swept
linearly
or logarithmically.
When used as a voltage
source/current
monitor
(V mode),
each
SMU can be programmed
to
output
DC voltages
from OV to +lOOV over three
ranges--OV
to f 19.999V,
*2OV to +39.998V,
and
+4OV to +lOOV--with
a resolution
of lmV,
2mV,
and 5mV, respectively.
When used as a current
source/voltage
monitor
(I mode), each SMU can
be programmed
to output
currents
from
*lpA
to
+lOOmA over nine ranges,
with a resolution
of
1pA max.
(current
measurement
resolution
is
50fA
max.),
depending
on the current
range.
Current
through
the
sample
in V mode
and
voltage
across the
sample
in I mode can be
limited
to prevent damage to the sample.
The two Vs channels
are programmable
voltage
source&
Output
voltage
can be held constant
or
linearly
or logarithmically
swept
from
OV to
f 20V with
1mV resolution.
The voltage
sources
are used when many bias and voltage
sources are
required.
Of the six source channels
(four SMUs, two Vs),
any combination
of three
can be automatically
swept in a linear or logarithmic
staircase
manner
within
the range
of each channel.
Hold times
from 0 to 650 sec$ds
and delay times from 0 to
6.5
seconds
can
be
programmed.
In
a
multi-channel
sweep
setup,
one
channel
functions
as the main sweep channel.
One of the
other
channels
can be swept synchronously
with
the main channel,
while one other channel can be
swept subordinately
to the main channel.
SMUs
not swept
can be used as constant
current
or
constant
voltage sources.
The
two
Vm channels
are
used
to
measure
voltages up to +2OV.
1-7.
Measurement
results,
measurement
setups,
operator
prompts,
error
messages,
and
diagnostics
are displayed
on a fully interactive,
microprocessor
based
graphics
display.
Measurement
results
can be displayed
in one of
four modes : graphic,
list, matrix,
and schmoo.
Front
Panel softkeys
provide
a wide range
of
automatic
display
control
functions,
such
as
AUTO
SCALE,
STORE,
RECALL,
CURSOR,
MARKER,
vertical
and horizontal
ZOOM, LINE
(two), GRAD, l/GRAD,
X intercept,
Y intercept,
and INTERPOLATE.
Softkeys
are used in all
phases
of
instrument
operation--from
measurement
setup
to
measurement
analysis-and
make overall
instrument
operation
quick and easy.
By pressing
the PLOT key or PRINT
key, the
presently
displayed
screen,
whether
a
measurement
result
or measurement
setup, can
be dumped
directly
onto
an HP-IB compatible
printer/plotter,
providing
clear, inexpensive
hard
copies.
The plot area is user selectable
within
the
limits
of
the
printer/plotter,
and
if
a
multi-pen
plotter
is used, multi-color
plots can
be made automatically.
All PLOT and PRINT
operations
are
done
automatically,
without
a
controller.
Also, the 4145A's display is equipped
with
X-Y-Z
outputs
to allow
connection
of a
large-screen
graphics display.
The 4145A is fluent
in HP-GL (Hewlett-
Packard
Graphics
Language),
permitting
external
control
of its display via the HP-IB.
Cursor
and
marker
positioning
is
user
controllable
via the front
panel,
and X-Yl-Y2
coordinates
are digitally
displayed on the CRT.
l-2
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