Related Manuals for Karl Suss MA6
Summary of Contents for Karl Suss MA6
- Page 1 MASK ALIGNER MA6 Standard Operation Procedure Nano Fabrication Unit...
- Page 2 Turn On/Off instructions Turn On 1. Switch On the cooling delay control 2a. Turn On power supply 2b. Press “CP” button. 2b. Press “Start”. 3. Turn on switch on the Controller unit. In case of turn on error hit “Off” button and after 2 min delay repeat “ON”...
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Page 4: First Mask Print Mode
First Mask Print Mode The first mask print of a wafer is done without alignment. This software sequence is started by the EXPOSURE key. Starting from the initial state of the machine these steps have to be performed: 1. Adjust Parameters a. -
Page 5: Top Side Alignment
Top Side Alignment In this mode the wafer is aligned to the mask using the top side alignment microscope (TSA). 1. Adjust Parameters a. Make secure that no mask is loaded before select mask loading manual. b. Deactivate BSA MICROSCOPE key (LED off). c. - Page 6 e. Set STG/TSA/BSA button to dark to activate microscope motors. f. Adjust microscope to the mask alignment marks. Move the left/right objective to the left/right mask alignment mark by the X-Y-JOYSTICK (joystick on the right). 5. Wafer Alignment a. Focus on the wafer plane. b.
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Page 7: Bottom Side Alignment
Bottom Side Alignment The wafer is aligned to the mask using the bottom side alignment microscope (BSA). 1. Adjust Parameters a. Make secure that no mask is loaded before select mask loading manual. b. Deactivate BSA MICROSCOPE key (LED off). c. - Page 8 e. GRAB IMAGE key (option). First keystroke grabs the mask image. The objectives move to the wafer focus plane (TOP/BOTTOM key LED off). The motor control of the microscope manipulator is disabled. Second keystroke GRAB IMAGE key deletes stored image and enables the manipulator again.