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Ulvac LC1kV-5C Instruction Manual

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RF0004E-06
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LC FILTER
model：LC1ｋV-5Ｃ/8Ｃ/15Ｃ/20Ｃ/40Ｃ/50C
th
6
version 2023.07.01
ULVAC Inc.
※ Read this manual before operation this product
Keep this manual at your hand for immediate reference.

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  • Page 1 RF0004E-06 LC FILTER model：LC1ｋV-5Ｃ/8Ｃ/15Ｃ/20Ｃ/40Ｃ/50C version 2023.07.01 ULVAC Inc. ※ Read this manual before operation this product Keep this manual at your hand for immediate reference.
  • Page 3  The contents of this manual are subject to change without notice for improvement.  If you come up with any question or trouble, contact your local ULVAC representative or ULVAC, Inc.  Always use the product safely and take care of it correctly.
  • Page 4 LC FILTERー ～LC1ｋV-*C～ INTRODUCTION １．SAFTY CAUTIONS １ Most accidents are attributed to careless operation, inspection, maintenance or repair. Also failure to comply with safety cautions or predict potential danger is responsible for accidents. Accidents can be prevented by predicting a potentially dangerous situation at an early stage. ２...
  • Page 5 LC FILTERー ～LC1ｋV-*C～ INTRODUCTION ２．SAFETY DENOTATIONS Safety denotations are used throughout this manual and labeled on the equipment to call operators attention to safety. Safety denotations are classified as follows. Failure to comply with this involves the possibility of impending death or serious personal injury.
  • Page 6 １This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or replaced at no charge.
  • Page 7 Complete information about the trouble will prevent loss on both sides due to misunderstanding or misjudgment and allow us to take quick actions for repair. If you encounter any trouble or come up with any question, please contact your local ULVAC representative.

  • Page 8: Table Of Contents

    LC FILTERー ～LC1ｋV-*C～ table of contents Table of contents １. FOR SAFETY OPERATION ................................. 1 １.１. CAUTION For HANDLING............................1 １.２. CONTACT INFORMATION ............................1 ２. GENERAL DESCRIPTION ................................2 ２.１. INTRDUCTION ................................2 ２.２. CONFIGURATION ............................... 2 ２.３. SPECIFICATION ................................2 ２.３.１.

  • Page 9: For Safety Operation

    Maintenance work must be done by an expert on high voltage handling or with training. １.２.CONTACT INFORMATION If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your local ULVAC representative, after confirming information of the product. In case of trouble, let us know the product information and trouble symptom and situation in detail as much as possible.

  • Page 10: General Description

    LC FILTERー ～LC1ｋV-*C～ 2. GENERAL DESCRIPTION ２. GENERAL DESCRIPTION This section describes character, construction and specification about this product. ２.１.INTRDUCTION This filter is used to cut the RF noise superimposed on the supply line such as electrode for DC sputter and the heater power supply, and consists of air-core reactor installed to the shielded internal block, a capacitor and the terminal block.

  • Page 11: Types Of Filter

    LC FILTERー ～LC1ｋV-*C～ 2. GENERAL DESCRIPTION Types of filter ２.３.２. There are the following products as indicated in below table in LC filter different from the current capacity. Select the filter with more than current capacity of your used DC power supply. Furthermore, when selected the filter of large current capacity more than needed, since it does not function as the filter, make sure to use one rank above filter in the DC power supply current capacity.

  • Page 12: Preparation

    LC FILTERー ～LC1ｋV-*C～ ３．PREPARATION ３. PREPARATION The section describes necessary preparation and precaution before operation of the product. ３.１.NAME OF LC FILTER PARTS Wire thickness Terminal block ５Ａ： １．２５ｍｍ of a LC filter ８Ａ： ２ｍｍ １５Ａ： ３．５ｍｍ ２０Ａ： ５．５ｍｍ ５０Ａ： ５．５ｍｍ LC filter capacitor To DC power supply or heater power supply ,etc.

  • Page 13: Mounting A Lc Filter

    LC FILTERー ～LC1ｋV-*C～ ３．PREPARATION ３.２.MOUNTING A LC FILTER Caution on installing and use ３.２.１. Do not use the lead wire of a coil by twisting. 1） Do not twist the lead wire of a coil ・L value changes. ・The influence of stray capacitor is given. ・It does not work as a LC filter.
  • Page 14 LC FILTERー ～LC1ｋV-*C～ ３．PREPARATION Be sure to connect the one apart from the earth in RF side. 3） Be sure to connect the one apart from the earth potential to RF electrode. Connect wiring near to the earth potential terminal block. Panel (Earth potential) Don’t use the central terminal of Terminal Block 4）...

  • Page 15: Distance Of Lc Terminal Block

    LC FILTERー ～LC1ｋV-*C～ ３．PREPARATION ３.２.２. Distance of LC terminal block In the distance of a coil, a capacitor and the terminal block, arrange so that it becomes sh ort to the utmost, and caution should be taken so that wiring does not contact with the ea rth.

  • Page 16: Attached Materials

    LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS ４. ATTACHED MATERIALS Following materials are attached with this manual.  Figure ７．１ LC1ｋV-5C/8C/15C/20C Capacitor（included terminal block） Outside drawing  Figure ７．２ LC1ｋV-40C/50C Capacitor（included terminal block） Outside drawing  Figure ７．３ LC1ｋV-5C/8C air-core coil  Figure ７．４...
  • Page 17 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．１ LC1ｋV-5C/8C/15C/20C Capacitor（included terminal block） Outside drawing...
  • Page 18 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure７．２ LC1ｋV-40C/50C Capacitor（included terminal block） Outside drawing...
  • Page 19 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．３ LC1ｋV-5C/8C air-core coil...
  • Page 20 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．４ LC1ｋV-15C air-core coil...
  • Page 21 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．５ LC1ｋV-20C air-core coil...
  • Page 22 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．６ LC1ｋV-40C air-core coil...
  • Page 23 LC FILTERー ～LC1ｋV-*C～ ４．ATTACHED MATERIALS Figure ７．７ LC1ｋV-50C air-core coil...

This manual is also suitable for:

Lc1kv-8cLc1kv-15cLc1kv-20cLc1kv-40cLc1kv-50c

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