Adjust The Load Port Modules (Lpms); Verify The Level Of The Load Locks/Process Tool Handoff And Custom Modules - Brooks MARATHON LEAP AX User Manual

Brooks Automation
Part Number: 606712 Rev. A

Adjust the Load Port Modules (LPMs)

The Load Port Modules (LPMs) are kinematically mounted to the MARATHON LEAP AX. This
mounting ensures proper alignment once the system is properly installed. Adjusting the position is
usually only necessary on new installations.
Verify the Level of the Load Locks/Process Tool Handoff and Custom
Modules
Step
Place a MicroTool electronic level on the station bottom surface to record Pitch and Roll.
1. Make sure that the wafer level orientation relative to the Wafer Engine remains consistent as it was
with the system enclosure leveling.
2.
If the surface level is greater than ± 0.10°, recofirm the levelness of the entire station.
Place a MicroTool electronic wafer level on the handoff shelf to record Pitch and Roll.
3. Make sure the wafer level orientation relative to the Wafer Engine remains consistent as it was with
the system enclosure leveling.
If the surface is level within ± 0.10° but the shelf is greater than ± 0.10°, relevel the handoff shelf.
4.
NOTE: In some cases the station(s) cannot be adjusted. If so make a note and continue leveling
the end effectors.
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Action
5. Alignment and Teaching
Alignment Process
83