SRS Labs IGC100 Operating Manual And Programming Reference

Ion gauge controller

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Operating Manual and

Programming Reference

IGC100

Ion Gauge Controller

Stanford Research Systems

Revision 2.5 (01/10/2020)

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Page 1 Operating Manual and Programming Reference IGC100 Ion Gauge Controller Stanford Research Systems Revision 2.5 (01/10/2020)
Page 2 Information in this document is subject to change without notice. Copyright © Stanford Research Systems, Inc., 2001, 2002, 2020. All rights reserved. Stanford Research Systems, Inc. 1290-C Reamwood Avenue Sunnyvale, California 94089 www.thinksrs.com Printed in U.S.A. IGC100 Ion Gauge Controller...
Page 3: Safety And Preparation For Use I
INCLUDED IN THIS SECTION BEFORE USING THE IGC100 ION GAUGE CONTROLLER AND ITS ACCESSORIES. SAFETY PAYS! Within this section, the word 'product' specifically refers to the IGC100 Ion Gauge Controller and any of its accessories. Safety risks are associated with all research and production activities. Though long experience has proven high vacuum instrumentation to be remarkably safe, hazards are always associated with vacuum system operation.
Page 4 NOT line power. • The IGC100 has a detachable, three-wire power cord for connection to the power source and to a protective ground. The exposed metal parts of the instrument are connected to the outlet ground to protect against electrical shock. Always use an outlet which has a properly connected protective ground.
Page 5 High voltage cables from ion gauge controllers, ion guns, photomultiplier tubes, mass spectrometer probes, power supplies, etc , can be inadvertently damaged if pinched while tightening flange bolts. Keep all cables away from vacuum ports frequently opened to air. IGC100 Ion Gauge Controller...
Page 6 Explosions can also occur if flammable or explosive gases are exposed to hot elements such as the hot filaments of a Bayard-Alpert gauge or the sensor wire of a Pirani gauge. IGC100 Ion Gauge Controller...
Page 7 Do not allow the gauge tube temperature to exceed 100° C in glass tubulated gauges. Sustained high temperatures can damage the tube, causing air leakage into the vacuum system and increasing the chances of dangerous implosion. • Make all glass windows as small and thick as possible. IGC100 Ion Gauge Controller...
Page 8 Section 239, p. 836, titled: 'Accidental Electrical Charging From Ionization Gauge'. 4. Gerardo Brucker, "Prevention is Key to Vacuum System Safety", R&D Magazine, February 2001, p. 57. 5. Donald M. Mattox, "Safety Aspects of Vacuum Processing", Vacuum Technology and Coating Magazine, March 2001, p. 22. IGC100 Ion Gauge Controller...
Page 9: Table Of Contents
Damage Requiring Service xxxi Declaration of Contamination of Vacuum Equipment xxxii Chapter 1 Getting Started Unpacking 1-3 Installing the IGC100 Controller 1-5 Before You Install a Vacuum Gauge 1-7 Installing an Ionization Gauge 1-9 Connecting an Ionization Gauge 1-13 Installing a Pirani Gauge 1-24...
Page 10 Security Menu 3-53 Security Settings 3-54 Remote Menu 3-57 RS-232 3-57 GPIB 3-58 Web 3-59 Web Control 3-61 Screen Menu 3-63 Backlight Menu 3-64 Chapter 4 Analog I/O Ports Analog I/O Ports (AN1-AN4) 4-3 Capacitance Manometers (CM1-CM4) 4-6 IGC100 Ion Gauge Controller...
Page 11 Security Commands 7-38 System Commands 7-40 Interface Commands 7-42 Status Reporting 7-44 Status Reporting Commands 7-47 Chapter 8 Embedded Web Server EWS Quick Start 8-3 Installing the EWS 8-5 Using the EWS 8-18 Networking Terms 8-29 IGC100 Ion Gauge Controller...
Page 12 Appendix B Manufacturer Cross-Reference for Bayard-Alpert Gauges Manufacturer Cross Reference Table B-3 Specifications of SRS Bayard-Alpert Gauges B-5 ® Appendix C Using the IGC100 with STABIL-ION Gauges Compatibility C-3 Gauge Setup Parameters C-3 Final Comments C-5 References C-6 Appendix D...
Page 13 Appendix K Conversion Factors for Pressure Units Appendix L Dual Ion Gauge Connector Option (SRS# O100IGC) What is Included? L-3 Installation L-3 ® Appendix M Using MICRO-ION Gauges Wiring Requirements M-3 Gauge Setup Parameters M-4 References M-6 IGC100 Ion Gauge Controller...
Page 14 Contents Appendix N Parts Lists and Schematics Warnings N-3 Circuit Board Locations N-4 Circuit Descriptions N-5 Parts Lists N-12 IGC100 Ion Gauge Controller...
Page 15: Front Panel Overview
Overview xiii Front Panel Overview Figure i. IGC100 Front Panel. 1. IG1 BUTTON (Black w/green LED). Ionization gauge 1 power switch. 2. IG2 BUTTON (Black w/green LED). Ionization gauge 2 power switch. 3. DEGAS Button (Black w/red LED). Degas Power switch.
Page 16: Touchscreen Display Overview
Overview Touchscreen Display Overview Choose data format Main Pressure Display Gauge Setup Choose gauge or input Help about a button Main Menu Data Log Display Gauges (Chart or Table) Display Process Control Display IGC100 Ion Gauge Controller...
Page 17: Back Panel Overview
IGC100. • Read Chapter 1 for detailed instructions and safety information regarding the installation of the IGC100 and connection of gauges. Figure ii. The IGC100 back panel. 1. Power - Power Entry Module, CHASSIS GND. 2. Ionization Gauge - ION GAUGE POWER.
Page 18: Connector Pinouts
Figure iii. The ion gauge power connector. Name Description O100IG_ID This pin is used by the IGC100 to verify the presence of option O100IG ( Dual Ion Gauge Connector Box) unused O100IG_24V _SUPPLY This pin provides 24 VDC (100 mA) to the relays of option O100IG when: (1) O100IG is detected (pin 1) and (2) IG2 is selected.
Page 19 4) Pins 1, 3 and 7 are for the optional Dual Ion Gauge Connector Box (O100IG). Do not make connections to those pins. The ION GAUGE connector of a standard IGC100 is treated as the IG1 port. If the Dual Gauge Option (SRS# O100IG) is installed, this connector is used to power the option box.
Page 20 Common ( C ) Inactive ( I ) Active ( A ) Common ( C ) Inactive ( I ) Active ( A ) Common ( C ) Inactive ( I ) Active ( A ) IGC100 Ion Gauge Controller...
Page 21 IGC100 Vcc +5 V OUT Process Control TTL_OUT_5 TTL OUT for Channel 5. TTL OUT LOW=ACTIVE TTL_OUT_6 TTL OUT for Channel 6. LOW=ACTIVE TTL_OUT_7 TTL OUT for Channel 7. LOW=ACTIVE TTL_OUT_8 TTL OUT for Channel 8. LOW=ACTIVE IGC100 Ion Gauge Controller...
Page 22 Control inputs, connect pins 2 and 20 to the external +5 V supply. Pull inputs to external ground for low inputs. For non-isolated operation of ALL Process Control inputs, connect pins 2 and 20 to IGC100 Vcc (pin 1 or 15) and pull inputs to IGC100 Ground (pin 30 or 31) for low inputs.
Page 23 Overview RS-232 Connector The IGC100 uses a DIN8 connector for its RS-232 port while most PC computers use DB9 connectors. A DIN8-DB9 connector adapter cable is provided with every IGC100 controller. The female DB9 connector of the DIN8-DB9 connector adapter cable is configured as a DCE.
Page 24 Overview IGC100 Ion Gauge Controller...
Page 25: Specifications
1 to 75 W, adjusted in 1 Watt steps Time 1 to 30 min., adjusted in 1 min. steps Anode potential 500 Vdc Emission current 2 to 150 mA Display Approximate pressure, degas power and remaining time IGC100 Ion Gauge Controller...
Page 26 Analog output log, 1V/decade, 1 to 8 V Capacitance Manometer Number of gauges Simultaneous readout of up to four capacitance manometers using the auxiliary inputs. Auxiliary power output ±15 Vdc, 100 mA (for CM power) IGC100 Ion Gauge Controller...
Page 27 All channels can be operated from front panel. Remote TTL control 12 opto-isolated TTL channels (Remote Enable, IG1 on/off, IG2 on/off, Degas on/off, Fil 1/Fil 2 select, IG lockout, IG Control keypad lockout, PG1 on/off, PG2 on/off, data logging time reset, touchscreen enable/disable) IGC100 Ion Gauge Controller...
Page 28 Specifications IGC100 Ion Gauge Controller...
Page 29 GHGF ? Read Gauge History First GHGN ? Read Gauge History Next Pirani Gauge Setup GPOW (?) p {, i} Power CGCF (?) p {, x} Gas Correction Factor CRVP (?) n {, i} Calibration Curve IGC100 Ion Gauge Controller...
Page 30 Deactivation Time RTIL (?) d {, i} TTL Activation Level TTLL ? Read TTL Inputs RHGF ? Read Process Log First RHGN ? Read Process Log Next RHCL Clear Process Log RBAD ? Relay Failure Status IGC100 Ion Gauge Controller...
Page 31 ERSE (?) {i} {, j} Error Status Enable GSSW ? {i} Read Gauge Status GSSE (?) {i} {, j} Gauge Status Enable RSSW ? {i} Read Process Status RSSE (?) {i} {, j} Process Status Enable IGC100 Ion Gauge Controller...
Page 32 Commands IGC100 Ion Gauge Controller...
Page 33: Damage Requiring Service
Do not use accessories not recommended in this manual as they may be hazardous. Note Within this section, the word 'product' specifically refers to the IGC100 Ion Gauge Controller, any of its accessories, or any SRS manufactured vacuum gauge. Contact the factory for instructions on how to return the instrument for authorized service and adjustment.
Page 34: Declaration Of Contamination Of Vacuum Equipment
Please describe symptoms and problems: _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ Equipment condition Has the equipment been used ? (circle one) • Yes • No Describe the operating environment the instrument was exposed to: _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ Page 1 IGC100 Ion Gauge Controller...
Page 35 Labeling of Dangerous Substances. Name (print): _______________________________________________________________________ Job Title: __________________________________________________________________________ Organization: _______________________________________________________________________ Address: ___________________________________________________________________________ Telephone: ___________________________________ Fax: _________________________________ Email: _________________@____________________ Legally binding signature: _________________________________________ Date: _______________ SRS Use Only. RMA#:___________________________ Form reviewed by: Signature_________________________ Name/Initials______________________ Page 2 Date:_____________________________ IGC100 Ion Gauge Controller...
Page 36 Damage Requiring Service IGC100 Ion Gauge Controller...
Page 37 Chapter 1 Getting Started This chapter provides instructions for • unpacking, checking and installing the IGC100 Ion Gauge Controller and its gauges • connecting the cabling between the controller and its gauges • setting up the controller • measuring pressures...
Page 38 1-50 Auto Scaling Bar Graph 1-51 Full Range Bar Graph 1-51 Status Information 1-51 Logging 1-52 IG Auto-Start mode (IG AUTO) 1-53 RS232 Serial Cable Connection 1-54 Proper Grounding Test Procedure 1-55 Ground Test Procedure: 1-56 IGC100 Ion Gauge Controller...
Page 39: Unpacking
Checklist Open the box(es) and inspect all components of the IGC100 system. Report any damage to Stanford Research Systems immediately. Compare the contents of the shipping boxes against your original order and the checklist below.
Page 40 Includes: (1) one DB37 Digital I/O Connector (male) (2) two 12-position Terminal Block Plugs for relay connections. Rack Mount Shelf, for up to two IGC100’s (SRS# O100IGRM). Bayard-Alpert Ionization Gauge(s). Ionization Gauge Signal Cable(s) (SRS# O100C1, O100C2 or O100C3). ®...
Page 41: Installing The Igc100 Controller
Line Power Connection Line Voltage Selection The IGC100 operates from a 100 V, 120 V, 220 V, or 240 V nominal AC power source having a line frequency of 50 or 60 Hz. Use the power entry module on the back panel of the IGC100 to power the unit from a wall outlet.
Page 42 IGC100 . This will provide an earth ground for the IGC100 in case the power cable is not in place. Do not connect the CHASSIS GND lug to the vacuum system or other electrical component. Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply line.
Page 43: Before You Install A Vacuum Gauge
IGC100, only use gauges known to be fully compatible with this instrument. This chapter describes the basic steps required for the safe and successful installation of the three types of gauges compatible with IGC100 onto a vacuum system. With the exception of capacitance manometers, the gauge installation information is tailored towards gauges purchased directly from Stanford Research Systems.
Page 44 Typical high voltage sources include plasma sources, ionization gauges, mass spectrometers and electron multiplier detectors. • When high voltage is present, all exposed conductors of a gauge must be rigorously grounded or shielded from contact. IGC100 Ion Gauge Controller...
Page 45: Installing An Ionization Gauge
Compatible Gauges To take advantage of the full pressure range of IGC100, and to avoid the risks of injury and damage to equipment, you must always use compatible ionization gauges.
Page 46 The IGC100 can be programmed to accommodate a large range of gauge sensitivities, emission currents and degas power levels. The grid (+180 Vdc) and filament (+30 Vdc) bias potentials are not adjustable.
Page 47 SRS# O100C3 cable package. This cable is required to connect your nude ionization gauge to the IGC100 controller. Separate the metal ring from the package. Before you begin, make sure you also have: 1. a new and clean OFHC ®...
Page 48 ) Port. 1. Vacuum system port, 2. Gauge feedthrough flange, 3. Metal ring, 4. Bolts (6 places). WARNING! Do not connect the ionization gauge to the IGC100 cable until instructed to do so later in this chapter. Important The sensitivity value of a nude gauge is dependent on the way it is mounted on the system.
Page 49: Connecting An Ionization Gauge
IGC100 controller. All cables are identical at the end that connects to the IGC100, but different at the end that connects to the ionization gauge header. Separate instructions are required for the connection of each of the three signal cables to their respective ionization gauges.
Page 50 1-14 Connecting an Ionization Gauge Connecting to the IGC100 Controller (All Cables) All signal cables are the same on the end that connects to the IGC100 controller (i.e. no gauge-specific instructions are required.) Single Gauge Connection (IG1) (i) Connect the signal cable’s BNC connector to the upper COLLECTOR BNC (labeled '1'), located on the back of the IGC100.
Page 51 ION GAUGE receptacle, and used to simultaneously connect two ionization gauges (i.e. IG1 and IG2 port connections) to the back of the IGC100. This makes it possible for the controller to switch operation between two separate gauges (i.e. sequential operation) from the front panel, and measure pressure at two locations at a small fraction of the cost of a second instrument.
Page 52 Figure 1-9. O100C1 4-pin connector safely attached to the base of the glass-tubulated gauge. Connect the remaining single-pin connector, attached to the coaxial cable, to the collector pin located on top of the ionization gauge envelope. Push the connector into the pin until it seats firmly in place. IGC100 Ion Gauge Controller...
Page 53 Once attached, the signal cable must be properly secured to provide strain relief for the gauge tube pins. Figure 1-11. Picture of properly and safely connected glass-tubulated ionization gauge. IGC100 Ion Gauge Controller...
Page 54 The green POWER LED on the IGC100 front panel should be off. • Connect the cable to a properly grounded IGC100 before attaching the cable to the gauge. The SRS# O100C2 cable is specifically designed for connection to glass-tubulated ionization gauges with dual filament design.
Page 55 Figure 1-14. O100C2 6-pin connector properly attached to the base of the glass-tubulated gauge. Connect the single pin connector attached to the thin coaxial cable to the top of the Ion Gauge. Push the connector into the pin until it sits firmly in place. IGC100 Ion Gauge Controller...
Page 56 Once attached, the signal cable must be properly secured to provide strain relief for the gauge tube pins Figure 1-16. Picture of the properly and safely connected glass-tubulated ionization gauge. IGC100 Ion Gauge Controller...
Page 57 The green POWER LED on the IGC100 front panel should be off. • Connect the cable to a properly grounded IGC100 before attaching the cable to the gauge. The SRS# O100C3 cable is specifically designed for connection to nude (i.e. all-metal) ionization gauges with both single and dual filament electrode structures.
Page 58 Slide the connector-shield assembly towards the gauge and fasten it to the metal ring on the gauge flange using its three side screws and a Phillips screwdriver. Fasten the connector-shield cable-clamp to firmly hold the entire connector assembly firmly in place. IGC100 Ion Gauge Controller...
Page 59 Figure 1-20. Cable connection to the base of a nude ionization gauge with connector shield in place. ® ® Connecting a STABIL-ION or MICRO-ION Gauge ® ® IGC100 is fully-compatible with Granville Phillips' STABIL-ION and MICRO-ION gauges. Please consult Appendix C or Appendix M for detailed installation, wiring and operation instructions. IGC100 Ion Gauge Controller...
Page 60: Installing A Pirani Gauge
® 317 and Convectron (Granville-Phillips) models. WARNING! Do not connect a Pirani gauge to the IGC100 cable until instructed to do so later in this chapter. SRS Gauges SRS has developed its own line of convection-enhanced Pirani Gauges (PG105 and PG105-UHV) to complement the IGC100.
Page 61 Care must be taken not mount the PG105 tube in a way such that deposition of process vapor impurities may occur through direct line-of-sight access from the vacuum chamber to the interior of the gauge. Figure 1-21. PG105 Gauge mounting examples. IGC100 Ion Gauge Controller...
Page 62 Twist the gauge body by hand until the first sign of resistance is felt. Do not use the body of the gauge as its own wrench past this point. Instead, finish tightening with a wrench IGC100 Ion Gauge Controller...
Page 63 In addition to the standard tube, which provides a compression port and a 1/8" NPT male thread, a variety of other mounting options are available. They include: NW16KF, ® ® NW25KF, 1.33" and 2.75" ConFlat , Cajon SS-4-VCR and SS-6-VCO, etc. Consult Stanford Research Systems for additional information on available fittings. IGC100 Ion Gauge Controller...
Page 64: Connecting A Pirani Gauge
PG105 and PG105-UHV gauges. The standard IGC100 box has a DB-15 receptacle on its back panel for interfacing up to two Pirani gauges with the controller (PG1 and PG2 ports). Accordingly, the O105C4 signal cable has a DB-15 plug on one end that leads to two separate connection cables.
Page 65 Connecting a Pirani Gauge 1-29 Figure 1-24. Pirani Gauge signal cable connection to the IGC100 controller: DB-15 plug connects to PIRANI receptacle. Connection to Gauge Head(s) PG1 Port (RED) Push the RED RJ-45 connector into the matching receptacle located on the back-side of the detachable plastic connector of the first PG105 Pirani gauge.
Page 66 1-30 Connecting a Pirani Gauge Figure 1-25. Pirani gauge signal cable connection to PG105 Pirani Gauge head. 1. PG105 Gauge, 2. RJ-45 connector (1of 2) on O105C cable. IGC100 Ion Gauge Controller...
Page 67: Installing A Capacitance Manometer
(CMs). Up to four independent CM readings can be monitored simultaneously using the four ANALOG I/O ports located on the back panel of the controller. The IGC100 also supplies auxiliary power (±15 Vdc, 100 mA) sufficient to operate a pair of standard (i.e.
Page 68: Connecting A Capacitance Manometer
1-32 Connecting a Capacitance Manometer Connecting a Capacitance Manometer WARNINGS! • Connect all gauge signal cables to the IGC100 controller first, before establishing a connection to the gauge heads. DO NOT • switch the controller or gauge power on until instructed to do so.
Page 69 OUT/SIGN COM, etc. Power Connection For convenience, the IGC100 also includes an auxiliary ±15 Vdc (100 mA) CM Power connector (3-position terminal block) on its back panel. This output is usually sufficient for the simultaneous operation of a pair of standard gauges (i.e. non-heated, ±15 Vdc, 35 mA typ.).
Page 70 This can be used to assure the reliability of your CM gauges at all times, and to protect delicate and expensive components sensitive to inaccurate pressure readings. Consult your gauge manual for availability of these options in your gauge heads. IGC100 Ion Gauge Controller...
Page 71: Measuring Pressure
Measuring Pressure 1-35 Measuring Pressure IGC100 Quick Setup This section describes the setup steps required to prepare the IGC100 for accurate pressure measurements with ionization, Pirani and capacitance manometer gauges. The steps in this section assume: The IGC100 box has been properly installed and grounded.
Page 72 If your Pressure Display Screen does not appear like the one in Figure 1-27 at this point, it is possible to force the IGC100 to revert to its factory-preset settings by holding down the IG AUTO button during the Power-On procedure. However, keep in mind that this will also revert many other important settings of the instrument to factory default values (you might lose some important setup information).
Page 73: Gauge Setup Procedure
Help for any menu button is available on screen by touching the [Help] QuickKey and then the menu button. In order to enter new gauge setup parameters into the IGC100 controller, the user must follow the simple gauge setup procedure below. This procedure must be repeated for every new vacuum gauge connected to the controller.
Page 74 Default Setup Files are pre-loaded for commercially available ionization gauges of standard design only. Individual parameters may still be modified after loading a Default Setup File. Step 4 Once finished modifying parameters, touch the [Pressure] QuickKey to return to the original Pressure Display. IGC100 Ion Gauge Controller...
Page 75: Setting Gauge Parameters
Setting Gauge Parameters A different set of parameters must be considered for each type of gauge technology (i.e. ionization, Pirani or capacitance manometer) compatible with the IGC100 controller. Uncalibrated Ionization Gauge (IG1, IG2) The basic set of parameters that needs to be configured for any uncalibrated ionization gauge includes: •...
Page 76 Consult your gauge manufacturer and Stanford Research Systems if unsure about the compatibility of IGC100 default setup files with your third-party ionization gauge products. Whenever available, replace the nominal sensitivity factor (N2 Sense Factor) provided by the default setup file with the actual (known or calculated) sensitivity factor for your gauge.
Page 77 Micro-Ion (1) Granville-Phillips Part# 360120 and 370120 (5x10 - 10 Torr). See Appendix C. (2) Granville-Phillips Part# 370121 (5x10 - 2x10 Torr). See Appendix C. (3) Granville-Phillips Part# 355001 (10 - 5x10 Torr). See Appendix M. IGC100 Ion Gauge Controller...
Page 78 Once the calibration data is successfully loaded into the controller, choose Cal Curve as the IG Cal Source in the Gauge Setup menu, and the IGC100 will automatically be configured to match the setup conditions of the calibration data.
Page 79 The Gauge Location label is very convenient and its use is highly recommended in multi-gauge setups. IGC100 allows you to assign a location name for each gauge port. Gauge locations are displayed next to their pressure readings. Use the Gauge Location to differentiate between identical gauges in a multiple gauge setup.
Page 80: Pressure Measurement
This effect is aggravated by long signal cables, old filaments, the use of tungsten as filament material and operation at high pressures. Recommendation The accuracy specifications of the IGC100 should be relaxed by a factor of two for dual filament operation. Ionization Gauge (IG1) WARNING! •...
Page 81 As a rule of thumb, choose the longest time you can wait and the minimum amount of power (under the manufacturer’s maximum specification) that will be compatible with your contamination tolerance. Maximum recommended degas powers for common gauge designs are listed in Table 1-1 of this chapter. IGC100 Ion Gauge Controller...
Page 82 This requires pressures <10 Torr for the removal process to be effective. Degassing cannot be activated in the IGC100 unless (1) the ionization gauge is turned on and (2) the pressure is below the 2x10 Torr threshold. Degassing above this pressure...
Page 83 C. R. Tilford, A. R. Filipelli and P. J. Abbott, “Comments on the stability of B-A ionization gauges”, J. Vac. Sci. Technol. A13(2) (1995) 485. See comments on second column of p. 486. ® Degassing MICRO-ION Gauges ® Consult Appendix M for degassing information specific to MICRO-ION gauges. IGC100 Ion Gauge Controller...
Page 84 1-48 Pressure Measurement Pirani Gauge By factory default, all Pirani gauges connected to IGC100 are automatically activated during power-up and their pressures are displayed on the front panel. Pirani Gauge Power is On as the factory default. The PG1 and PG2 Data Bars display pressures from Pirani Gauges connected to the PG1 and PG2 ports, respectively.
Page 85 The analog and pressure output display will show 'OVERLOAD' if the Pressure Output signal exceeds 12 V. Figure 1-36. IGC100 displaying pressures from: IG1, AN1 and the CM pressure output signal at Analog I/O 1 port. IGC100 Ion Gauge Controller...
Page 86: Pressure Display Formats
1-50 Pressure Measurement Pressure Display Formats Use the [Pressure] QuickKey to bring up the IGC100 Pressure Display at any time. Pressure Units The factory default for pressure units is Torr (1 Torr = 1 mm Hg). Use the [Menu] QuickKey to display the Main menu.
Page 87 Use this display to learn more about the state of a gauge. This is especially useful if the gauge is in a fault or error condition. The lowest line in this display shows who last modified the status of the gauge (front panel user, remote user, etc.). IGC100 Ion Gauge Controller...
Page 88 Figure 1-43. Logging Setup menu. Choose between Chart and Table display formats or adjust Logging Parameters. Step 4 Select Table or Chart display format. Activate Logging or change the Logging Interval as required using the menu. IGC100 Ion Gauge Controller...
Page 89 Auto-Start function may be linked to either ionization gauge port. The user specifies the ionization gauge (IG1 or IG2) which will auto-start. Since the IGC100 only operates one ion gauge at a time, IG2 is automatically turned off if IG1 is put in Auto-Start (and vice- versa).
Page 90 1-54 Pressure Measurement RS232 Serial Cable Connection The IGC100 is a stand-alone instrument - there is no need to connect the controller to an external computer for normal operation. However, a serial RS232 connection to a computer will be required for: •...
Page 91: Proper Grounding Test Procedure
• This risk is not specific to the IGC100! As a rule-of-thumb, all parts of a vacuum system utilized with the IGC100, or any similar high voltage product, must be maintained at earth-ground for safe operation.
Page 92 Use a ground lug on a flange bolt if necessary. Step 2 With the IGC100 controller turned off (but still plugged into an outlet): Test for both AC and DC voltages between the metal parts of the vacuum system and the controller’s chassis.
Page 93 Chapter 2 IGC100 Basics This chapter describes the basic features and functionality of the IGC100 controller. In This Chapter IGC100 Overview Back Panel 2-19 Ionization Gauge (IG1) Power 2-20 Pirani Gauges (PG1 and PG2) Power Entry Module 2-20 IG Auto-Start mode (IG AUTO)
Page 94 IGC100 Basics IGC100 Ion Gauge Controller...
Page 95: Igc100 Overview
The IGC100 is a high accuracy controller that measures pressures from Bayard-Alpert ionization gauges, convection-enhanced Pirani gauges and capacitance manometers, providing uninterrupted pressure readings from 1000 Torr to UHV. The IGC100 has a touchscreen LCD display, pressure vs. time plots, built-in relays for vacuum system control and several multipurpose (analog and digital) I/O ports.
Page 96 IGC100 Basics The IGC100 is designed to be accurate and stable. All ion gauge bias voltages and emission current supplies are accurate to better than 0.3% (see 'Specifications'). The IGC100 has a low noise, autoranging electrometer that delivers high accuracy pressure readings into the UHV.
Page 97 (Appendix I) to convert nitrogen-equivalent readings to other gases. The calibration data loaded into all IGC100 controllers is based on the response of a new gauge, free of contaminants. If a tube becomes contaminated or does not seem to read...
Page 98 Ion Gauge. In dual ionization gauge systems (with option O100IG) the user specifies the ionization gauge (IG1 or IG2) which will auto- start. Since the IGC100 only operates one ion gauge at a time, IG2 is automatically turned off if IG1 is put in Auto-Start (and vice-versa).
Page 99 ANALOG I/O ports located on the back of the controller. Pressure readings are updated at 2 Hz. The IGC100 precisely measures the 0 to 10 Vdc linear output signal from the CM to determine pressure. Direct pressure readings are available only if the full scale pressure (Pmax) of the gauge is entered into the controller.
Page 100 For More Information Chapter 1 includes all the basic information required to install and set up your IGC100 controller and its gauges, including capacitance manometers. Consult Chapter 4 of this manual for further details on the operation of capacitance manometers and their proper connection to ANALOG I/O ports.
Page 101 Password Cards. Display Formats The IGC100 includes a very flexible Pressure Display that can present pressure and analog signals in a variety of numeric and graphical formats. Figure 2-1. Pressure display using 3 different data display formats.
Page 102 [Help] button and then any button for which help is required. For More Information Touch [Help], then [Help] again, for a complete description of the IGC100 help system. Backlight Saver The IGC100 touchscreen LCD is illuminated by a fluorescent lightbulb (physically located to the side of the screen).
Page 103 (Queue display mode) simplifying testing and debugging of communication programs. Note that the IGC100 is a stand-alone instrument - there is no need to connect the controller to an external computer to access its full performance and functionality. All instrument functions and parameters are manually accessible and easily modified through the front panel.
Page 104 When connected to an ethernet network with an internet gateway, the EWS can deliver IGC100 data to a user anywhere on the world wide web using a standard browser. Users can monitor your vacuum system from anywhere in the world.
Page 105 Manual override is available for all channels, making it possible to manually control channel relays and TTL output levels directly from the front panel. Manual relay control makes it possible to use the IGC100 as a standalone controller capable of manually or automatically controlling the operation of any standard vacuum system.
Page 106 Consult Chapter 5 of this manual for detailed connection, configuration and operation information for the Process Control option. Consult Chapter 3 for information on menu items related to the configuration and operation of the Process Control module. IGC100 Ion Gauge Controller...
Page 107: Front Panel
5. Memory Card Module Power LINE LED The LINE LED (red) lights up to indicate that the IGC100 is connected to, and getting line power from, an AC outlet. POWER Button and LED Press the red POWER button to turn the IGC100 ON or OFF.
Page 108 The top Data Bar of the Pressure Display screen switches to IG2 when the IG2 button turns on a gauge. • Operation of a second ionization gauge is optional in IGC100 controllers. See the Dual Ionization Gauge Connector Box (O100IG) option (Appendix L). •...
Page 109 Touchscreen/LCD Display The IGC100 has a large backlit, touchscreen /LCD display. The resolution of the display is 320 x 240 pixels. Screen size is 4.7 in. (diagonal) The LCD displays an intuitive menu-driven interface for instrument setup and operation.
Page 110 Simply insert the Password Card (loaded with the current password) into the memory card slot to unlock the controller. The controller returns to the locked state as soon as the card is removed For More Information Consult chapter 6 for detailed information on the MEMORY CARD module. IGC100 Ion Gauge Controller...
Page 111: Back Panel
2-19 Back Panel The back panel of the IGC100 includes all the electrical connectors required to (1) power and ground the controller, (2) power its gauges, (3) read pressure and analog signals, (4) connect the process control channels (relays and DIGITAL I/O) and remote TTL control pins and (5) interface to a host computer and/or the web.
Page 112 Use the power entry module receptacle to power the IGC100 controller. Use the three-wire power cord provided by SRS to connect the instrument directly to a properly grounded AC outlet. The IGC100 has a universal input (100 to 240 VAC, 46-63 Hz) and must have 500 W of power available. WARNING! Refer to Chapter 1 of this manual for instructions on connecting power to an IGC100 controller.
Page 113 Figure 2-5. The Ion Gauge Collector BNC connectors. Use the BNCs labeled COLLECTOR to connect the collectors of up to two ionization gauges to the IGC100. The upper connector is for IG1 (labeled '1'), the lower connector is for IG2 (labeled '2').
Page 114 Use the 14-pin ION GAUGE connector to power an ionization gauge. The ION GAUGE connector of a standard IGC100 is treated as the IG1 port. If the Dual Gauge Option (SRS# O100IG) is installed, this connector is used to power the option box.
Page 115 NULL (+) (filament side) NULL (-) (divider side) Vbr_PWR Vbr_Sense unused Use only O105C4 Dual Pirani Gauge signal cables, available from Stanford Research Systems to connect PG105 Pirani Gauges to the IGC100 controller. Consult Chapter 1 for details. IGC100 Ion Gauge Controller...
Page 116 Chart mode in the Data Log. When used as inputs, these ports can read the output signals from standard capacitance manometers. The IGC100 will display the readings as pressures provided the full scale range (Pmax) of the gauge is programmed into the controller.
Page 117 Troubleshooting and Maintenance 2-25 IGC100 for proper operation of its Analog I/O ports, including direct pressure display from capacitance manometers. Degas Fuse At pressures of 5x10 Torr and higher, a Bayard-Alpert ionization gauge can generate sufficient plasma that significant electrical coupling can occur between the anode grid and the metal parts of the vacuum system.
Page 118 GPIB/IEEE-488 (Opt. 01) This port is available only in units containing the GPIB/IEEE-488 computer interface option (Opt. 01). Use this 24-pin port (standard IEEE-488 connector) to interface your IGC100 to a host computer with a GPIB/IEEE-488 interface. For More Information Consult Chapter 7 of this manual for information on the interfacing capabilities of the IGC100, including GPIB communications.
Page 119 This port is only available in units containing the Embedded Web Server interface option (Opt. 02). Use this RJ-45 Ethernet port to connect your IGC100 to your facility network (LAN) or directly to a host computer (cross-over cable). Use standard Ethernet cables, with RJ-45 connector ends, to connect your IGC100 to a network hub port.
Page 120 For More Information Consult Chapter 5 of this manual for complete details on the Process Control Module, including connection to the relay ports. Chapter 3 includes full descriptions of the menus required to program the Process Control Rules. IGC100 Ion Gauge Controller...
Page 121 IGC100 Vcc +5 V OUT Process Control TTL_OUT_5 TTL OUT for Channel 5. TTL OUT LOW=ACTIVE TTL_OUT_6 TTL OUT for Channel 6. LOW=ACTIVE TTL_OUT_7 TTL OUT for Channel 7. LOW=ACTIVE TTL_OUT_8 TTL OUT for Channel 8. LOW=ACTIVE IGC100 Ion Gauge Controller...
Page 122 33 to the external +5 V supply and pin 32 to the external ground. For non- isolated operation of ALL outputs, connect pin 33 to IGC100 Vcc (pin 1 or 15) and pin 32 to IGC100 Ground (pin 30 or 31).
Page 123 Troubleshooting and Maintenance 2-31 to IGC100 Vcc (pin 1 or 15) and pull inputs to IGC100 Ground (pin 30 or 31) for low inputs. Remote Control TTL IN The Process Control option also includes 12 logic inputs for remote, TTL control of various controller functions.
Page 124: Maintenance And Service
2-32 IGC100 Basics Maintenance and Service 1. The IGC100 does not have any user-serviceable parts and requires minimum routine maintenance. 2. Do not perform any unauthorized service, adjustment or modification of the controller. 3. Do not install any substitute parts.
Page 125 Chapter 3 Displays and Menus The IGC100 has a menu driven, touchscreen user interface. To activate an on-screen button, simply touch the LCD display over the button area. There are 5 main display screens – Pressure, Gauges, Logging, Process Control (optional) and Menus.
Page 126 TTL Reset Enable 3-38 Calibration 3-55 Time Length of Log 3-38 Process Setup 3-55 Chart Y Axis Menu 3-39 Process Manual 3-55 Pmax Pmin 3-39 Units/Time/Date 3-55 Vmax Vmin 3-39 Local Access 3-55 Autoscale 3-39 Remote Access 3-56 IGC100 Ion Gauge Controller...
Page 127 3-62 Screen Menu 3-63 Contrast Up Contrast Down 3-63 Clean Touch Screen 3-63 Calibrate Touch Screen 3-63 Test Touch Screen 3-63 Backlight Menu 3-64 Backlight Saver 3-64 Backlight Saver Delay 3-64 TurnOff Time Turnon Time 3-64 IGC100 Ion Gauge Controller...
Page 128 Displays and Menus IGC100 Ion Gauge Controller...
Page 129: Quickkeys
The Pressure QuickKey is available in most displays. Menu QuickKey Access the IGC100 Menu. Use the Menu to modify important IGC100 parameters such as units, communications, clock, touchscreen, backlight, password protection, audio, etc. The Menu QuickKey is available only in the Pressure Display.
Page 130 Rules. The Process Control Display allows editing of channel Rules and Labels, as well as manual control of all channels. If option 03 is NOT present, the IGC100 will not display this key. Instead, a key labeled 'No Proc' will be displayed.
Page 131 Back to Previous QuickKey Return to the previous menu screen indicated in the button. Help QuickKey On-screen Help provides information on the operation of the IGC100. Help information is available for menus, buttons, displays and hardware. To display help on an item...
Page 132: Menu Buttons
Menu Buttons Menu Buttons The IGC100 uses various types of menu buttons identified by the icon in the upper right corner. Submenu Display a submenu. Use the submenu to access setup parameters that do not fit (or belong) on the top menu.
Page 133 Touch the button to display text data on the screen. The text display includes scroll up/down and page up/down buttons. This button is used to display large amounts of text information, such as annotated Data Log event entries (Table display format) and IGC100 configuration information (Utilities submenu). IGC100 Ion Gauge Controller...
Page 134 3-10 Menu Buttons IGC100 Ion Gauge Controller...
Page 135: Pressure Display
Pressure Display Use the Pressure Display as the main starting point in operating the IGC100. Use the [Pressure] or [Back to Pressure] QuickKeys to bring up the Pressure Display. Figure 3-2. Use the [Pressure] QuickKey to bring up the Pressure Display.
Page 136 Full Range Bar Graph Figure 3-6. Full Range Bar Graph display. Best display to view the overall status of your vacuum system at any given time. Fifteen decade logarithmic bargraph display, covering the entire useful range of the instrument IGC100 Ion Gauge Controller...
Page 137 Touch the Port Info Box to access the Setup menu for the displayed input port. This allows easy access to all setup parameters for the displayed gauge. See 'Gauge Display' for more information on setting up IGC100 gauges/ports. The Port Info Box includes ...
Page 138: Gauges Display
(Pirani gauges) and AN1-4 (analog I/O ports). Gauge location and important status/configuration information are also included in each box. This display allows fast access to the Gauge Setup menu of any IGC100 signal port. The Gauge Info Box in the main Pressure Display can only access the 3 displayed ports.
Page 139 Touch a Gauge Data Box to display the Gauge Setup menu for its signal port. For example, touch the IG1 Data Box to modify the setup parameters used for operation of the ionization gauge connected to the IG1 port. IGC100 Ion Gauge Controller...
Page 140: Ion Gauge Setup Menu
Pressure Display (touch the Port Info Box of an ion gauge Data Bar). Each ion gauge port (IG1 and IG2) has its own setup menu. For standard IGC100 units, only the IG1 port is used. With the Dual Ionization Gauge Option (O100IG), both IG1 and IG2 may be used.
Page 141 Cal Curve as the Calibration Source to obtain gas-specific calibrated readings over the entire operating range of the gauge. Note The IGC100 stores a single calibration curve for each ion gauge port (IG1 and IG2). To use a different curve, load new calibration data using the Memory Card interface (Chapter 6).
Page 142 IG1 (IG2) Location Enter the Gauge Location name. The IGC100 assigns a location name (text string) for each signal port. Location names are displayed in the Port ID Box of the Pressure Display and also in the Gauge Data Boxes of the Gauges Display.
Page 143 This will assure the safest and most accurate operation of your gauge(s). Consult your gauge manufacturer and Stanford Research Systems, Inc. if unsure about the compatibility of IGC100 default setup files with your third-party ionization gauge products. NOTE...
Page 144: Advanced
These higher currents result in higher operating temperatures that can sometimes help minimize outgassing and ESD effects. The IGC100 uses the actual emission current to calculate pressures from the ion current. Filament Select the filament used for electron emission (fil1, fil2 or both).
Page 145 There will also be stabilization time requirement associated with the activation of any previously unused (or long retired) filament wire. Important The IGC100 does not know how many filaments an ion gauge has. The user is responsible for making sure only valid options are selected. Degas Time Enter the Degas Time (1 to 30 min).
Page 146 Factory recommended degas powers for the most common Bayard-Alpert gauge designs are included in the Default Setup Files. The maximum degas power available from the IGC100 may be limited when using long cables (>10 ft) or low efficiency filaments. Recommendation Degas is not gentle on thoriated filaments.
Page 147 The IGC100 can store a single full-calibration curve for each ionization gauge port (IG1 and IG2) in its internal memory. Confirm that the calibrated gauge is connected to the correct port after the calibration is loaded into the controller.
Page 148: Overpressure
Display the Overpressure submenu for the selected ion gauge. Several protection safeguards, designed to avoid burn-outs and extend the lifetime of ion gauge filaments, are built into the IGC100 controller. Overpressure Shutdown is probably the most important filament protection function.
Page 149: Auto-Start
(IG1 or IG2) will Auto-Start when the [IG AUTO] button is pressed. Since the IGC100 can only operate one ion gauge at a time, IG2 is automatically turned off if IG1 is put in Auto-Start mode, and vice-versa.
Page 150 Auto-Start Linked To Link the Auto-Start function to the ionization gauge IG1 or IG2. Since the IGC100 can only operate one ion gauge at a time, IG2 is automatically turned off if IG1 is put in Auto-Start mode, and vice-versa.
Page 151 Figure 3-10. Pirani Gauge Setup Menu. For More Information Chapter 1 includes all the basic information required to install and set up your IGC100 controller and its gauges, including Pirani gauges. Consult Appendix H of this manual for general information on PG105 convection-enhanced Pirani gauges.
Page 152 PG1 (PG2) Gauge Location Enter the Gauge Location name. The IGC100 assigns a location name (text string) for each signal port. Location names are displayed in the Port ID Box of the Pressure Display and also in the Gauge Data Boxes of the Gauges Display.
Page 153: Zero
Note The calibration data loaded into all IGC100 controllers is based on the response of a new gauge free of contaminants. If a tube becomes contaminated or does not seem to read correctly, the front panel readings can often be readjusted using the Zero and Atm submenus.
Page 154 Most manufacturers list the maximum pressure, power requirements and connector pinouts right on the gauge body. The IGC100 has a ±15 Vdc (100 mA) output connector on the back panel to directly power standard (non-heated) capacitance manometers. IGC100 Ion Gauge Controller...
Page 155: Analog I/O Menu
Analog I/O Setup menu. For More Information Chapter 1 includes all the basic information required to install and set up your IGC100 controller and its gauges, including capacitance manometers. Consult Chapter 4 of this manual for further details on the operation of capacitance manometers and their proper connection to Analog I/O ports.
Page 156 Enter a Location name for the analog I/O port. The IGC100 assigns a location name (text string) for each signal port. Location names are displayed in the Port ID Box of the Pressure Display and also in the Gauge Data Boxes of the Gauges Display.
Page 157 When Manual is the DAC source, the analog output is set with the [Volts when source=Manual] menu button. Volts When Source=Manual Enter the voltage setting for the DAC Output when Source=Manual. The valid range is ±12V. IGC100 Ion Gauge Controller...
Page 158 4. Turn the trim pot until the voltage displayed in the Data Box is zero. 5. Perform a Zero CM operation to adjust the IGC100 zero. 6. Switch the AN Display Format to CM Pressure to display pressure readings in the Gauges Display.
Page 159: Logging Display
Touch the right half of the chart to move the cursor to the right, the left half to move it to the left. Touch close to the center to move slowly, farther from center to move quickly. Touch and hold to move continously. IGC100 Ion Gauge Controller...
Page 160 Columns 2, 3, 4: Pressure or voltage readings from the three Data Bars of the Pressure Display. Use the up and down buttons to scroll through the entire log. Touch [Setup] to display the Logging Setup menu. IGC100 Ion Gauge Controller...
Page 161: Logging Setup Menu
[Chart] QuickKeys. Important The IGC100 always stores readings from all ports in the data log. However, the chart and table only show data from the three ports shown in the Pressure Display. To display other ports, change the Port ID Boxes in the Pressure Display.
Page 162 Logging Interval. The Time Length is the length of time covered by the data log. After this amount of time, the earliest data in the log will be overwritten by the newest data. IGC100 Ion Gauge Controller...
Page 163: Chart Y Axis Menu
However, the grid lines correspond to the values of Pmax and Pmin. Autoscale Autoscale the graph based on the data displayed in the graph. This changes the values of Pmax, Pmin (and Vmax, Vmin) to use the entire vertical space of the chart display. IGC100 Ion Gauge Controller...
Page 164: Chart X Axis Menu
Zoom to Cursor Set the left edge of the chart to the cursor position. The right edge remains the most recent point. Scale to Full Set the Time Range to display all data points. IGC100 Ion Gauge Controller...
Page 165: Process Control Display
TTL input trigger signal. This option also includes 12 opto-isolated TTL level inputs for triggering gauge on/off, degas on/off, fil1/fil2/both select, IG lockout, datalogging time reset and touchscreen enable/disable. IGC100 Ion Gauge Controller...
Page 166 Manual override is available for all channels, making it possible to control channel relays and TTL output levels directly from the front panel. With this option, the IGC100 is a stand alone controller, capable of manual or automatic operation of any standard vacuum system.
Page 167 To control a channel state manually, touch a Channel Data Box and choose 'Active' or 'Inactive'. To switch a channel to Auto mode (controlled by its Rules), touch a Channel Data Box and choose 'Auto'. Figure 3-16. Manual Channel control. IGC100 Ion Gauge Controller...
Page 168: Edit Rules Menu
When using the Dual Ionization Gauge option (opt. O100IG), • Linked to ANY IG EMISSION means that the channel is ACTIVE as long as either ion gauge (IG1 or IG2) is turned on. The channel becomes INACTIVE if both gauges are off. IGC100 Ion Gauge Controller...
Page 169 BELOW {Setpoint – Hysteresis_V}. Below The channel becomes ACTIVE when the pressure, or voltage, goes BELOW the Setpoint. The channel becomes INACTIVE when the pressure goes ABOVE {Setpoint x (1+Hysteresis_%/100)} the input voltage goes ABOVE {Setpoint + Hysteresis_V}. IGC100 Ion Gauge Controller...
Page 170 DAC Output mode or the input is overloaded (no pressure readings available). For Channel Sources AN1-4, specify the desired channel state when port is switched to DAC Output mode or the input is overloaded (no voltage readings available). IGC100 Ion Gauge Controller...
Page 171 Activate When High means the channel is ACTIVE when the TTL input level is HIGH (and INACTIVE when LOW). Activate When Low means the channel is ACTIVE when the TTL input level is LOW (and INACTIVE when HIGH). IGC100 Ion Gauge Controller...
Page 172: Edit Messages Menu
Description Enter a Channel Description. The IGC100 assigns a Description (text string) to each process control channel. The Description is displayed at the top of each Channel Data Box (next to the channel #). Assign Description to all channels used for process control. Descriptions such as "heater", or "gate valve"...
Page 173 "gate valve / closed" depending on the state of the channel. Beep Enable the Channel Beep (On or Off). On means that a beep is sounded every time the channel changes states. Off means that no beep is sounded. IGC100 Ion Gauge Controller...
Page 174: Main Menu
Display the Units selection list. Select from Torr, Micron, Bar, mbar or Pascal. This units system is global to the IGC100. All pressure readings in the Pressure Display and data logs use these units. All pressure parameters in menus use these units.
Page 175: Utilities Menu
The clock requires adjustment after daylight savings corrections take place. Volume Control Adjust the speaker volume (0 to 10). The IGC100 speaker is used for different purposes, such as user interface feedback and sounding alarms during process control and overpressure events. Configuration Display the Configuration Report.
Page 176 3-52 Utilities Menu Button & LED Test Touch this button to test the BLACK hardware keys, the 8 process LEDS and the 4 ion gauge LEDS. Xmit via RS-232 Transmit the string "SRS IGC100" over the RS-232 interface. IGC100 Ion Gauge Controller...
Page 177: Security Menu
The security state of the IGC100 is indicated by an icon on the upper right corner of the screen. A padlock indicates that the system is locked and password protected.
Page 178: Security Settings
Protected means that all gauge setup menus, required for proper gauge operation, cannot be modified when the system is locked. Use this option to eliminate accidental parameter changes. Normal means that the gauge parameters are not protected by the security system. IGC100 Ion Gauge Controller...
Page 179 Protected means that all front panel actions (including Power Off) are disallowed, except for the required security functions, when the system is locked. This is the most powerful protection option available. Normal means that front panel actions are not affected by the security system. IGC100 Ion Gauge Controller...
Page 180 Protected means that remote commands may only query the settings/readings of the IGC100 when the system is locked. Any command which tries to change a setting will result in an error. Use this option to prevent remote control of your instrument. The remote user may still unlock the system via the password.
Page 181 Touch [Remote] in the Main menu to display the Remote menu. System Name Enter a system name for this IGC100. The system name identifies this unit over the remote interfaces. In addition, the name is displayed on all web pages served by this unit.
Page 182: Gpib
3-58 Remote Menu RS-232 Queue Display the RS-232 transmit and receive buffers. The IGC100 buffers the most recent characters received and transmitted over the interface. The Queue display shows the interface history. The Queue display may slow down communications and should be displayed only when testing or debugging a host program.
Page 183: Web
Important! Use the web security measures in the Web/Control menu to prevent unauthorized control of the IGC100 via the web. Disable the server to prevent ALL web access to the IGC100. IP Address Enter the IP Address for the IGC100 web server.
Page 184 (but the same IP address). 2. If you are experiencing attacks on port 80 that block access to the IGC100. In this case, change the port to something else (like 8080). You will need to specify this port in your browser address window as 208.123.123.32:8080 where 208.123.123.32 is...
Page 185: Web Control
There are two types of security. Password security requires the user to enter the password from their browser and IP Checking allows access only to those IP addresses entered in this menu. Both types can used together. The IGC100 requires the use of at least one type of security.
Page 186 3-62 Remote Menu Password Enter a password for web access. When accessing the IGC100 web server from your browser, it will ask for this password before any pages will be displayed. Trusted IPs Enter trusted IP addresses. When IP Checking security is enabled, the web server only allows access to those IP addresses entered in this menu.
Page 187: Screen Menu
Test Touch Screen Display the Touchscreen Test window. The cross-hairs on the screen should be aligned under the touch point across the entire screen. If the alignment is significantly off, use the Touchscreen Calibration window to re-calibrate. IGC100 Ion Gauge Controller...
Page 188: Backlight Menu
Backlight Menu Display the Backlight saver submenu. The IGC100 has a back-lit LCD display. Backlighting is supplied by a fluorescent tube. Use the Backlight Saver feature to extend its useful lifetime by automatically turning it off after hours. Using the Backlight Saver can double the lifetime of the fluorescent tube.
Page 189 Chapter 4 Analog Input/Output Ports This chapter includes a complete description of the Analog I/O capabilities of the IGC100, including specifications, connections, possible configurations, and capacitance manometer operation. In This Chapter Analog I/O Ports (AN1-AN4) Capacitance Manometers (CM1-CM4) 4-6 Connection...
Page 190: Chapter 4 Analog I/O Ports
Analog I/O Ports IGC100 Ion Gauge Controller...
Page 191: Analog I/O Ports (An1-An4)
2 Hz Connection The four Analog I/O ports are located on the back panel of the IGC100 and are easily identified as the vertical row of four BNC connectors, labeled ANALOG I/O 1 through 4. Figure 4-1. Rear panel Analog I/O ports.
Page 192 (through the computer interface), or may be linked to the log pressure of the IG1, IG2, PG1 or PG2 gauges (DAC Source). The IGC100 allows you to assign a descriptive Location name (text string) to each signal port. Locations are displayed in the Port Info box of the Pressure Display screen, and in the Port’s Data Box of the Gauges Display.
Page 193 12 V indicates gauge fault Recommendation Use analog outputs to control auxiliary vacuum equipment such as heaters, actuators, ion sources and throttle controllers. Connect analog output signals to Programmable Logic Controllers to perform sophisticated process control. IGC100 Ion Gauge Controller...
Page 194: Capacitance Manometers (Cm1-Cm4)
Sons, NY, 1998, p. 384. 2. R. W. Hyland and R. L. Shaffer, "Recommended Practices for the Calibration and Use of Capacitance Diaphragm gauges as transfer standards", J. Vac. Sci. Technol. A 9 (1991) 2843. IGC100 Ion Gauge Controller...
Page 195 Analog I/O ports. Pressure readings are updated at 2 Hz. The IGC100 precisely measures the 0 to 10 Vdc linear output signal from the CM to determine pressure. Direct pressure readings are accurate only if the full scale range (PMax) of the gauge is entered into the controller.
Page 196 Analog I/O Ports IGC100 Ion Gauge Controller...
Page 197 This chapter provides the basic guidelines required to successfully interface and program the automation features built into the Process Control option (Opt. 03) of the IGC100 controller. If this option is installed, the [Process] QuickKey is available in the Pressure Display and all features described in this chapter are available.
Page 198 Process Control IGC100 Ion Gauge Controller...
Page 199: Process Control Warnings
• It is the user’s responsibility to ensure that the automatic control signals provided by the process control option (Opt. 03) of the IGC100 are always used in a safe manner. • Carefully check the programming of the system, and test every individual channel connection under MANUAL control, before switching to AUTO Mode operation.
Page 200: Why Use Process Control
In fact, an IGC100 with an embedded web server (Opt. 02) provides remote control capabilities from anywhere in the world.
Page 201: Process Control Basics
Process Control Basics Process Control Basics An IGC100 controller fitted with a Process Control Board, Opt. 03, becomes a powerful and versatile vacuum system controller. The process control board provides eight independent channels for system automation. Each channel has a relay closure output, and associated opto-isolated TTL output logic signal, that may be linked to a variety of input sources through user-programmable rules.
Page 202 Power-On State All process control channels are set to Manual Mode and INACTIVE, when the IGC100 is powered up. The user must switch the required channels back to Auto Mode to restart automated operation every time the unit is powered up.
Page 203 This display consists of eight Channel Data Boxes, each displaying state and configuration information for a process control channel. Figure 5-1. Process Control Display. Touch a Channel Data Box to choose a channel state (Active, Inactive or Auto) or edit the channel rules and labels. IGC100 Ion Gauge Controller...
Page 204 Use Channel Labels to display real system names and states for each channel. This eliminates confusion over which channel is connected to which device. All process control channels default to Manual Mode, INACTIVE, when the IGC100 controller is first turned on.
Page 205 During this time, all relays are de-energized and in the INACTIVE state. • When the IGC100 is turned on, all channels are set to Manual Mode and INACTIVE. This is considered the fail-safe operating mode. The user must set the required process control channels back to Auto to restart automated process control every time the IGC100 controller is turned on.
Page 206: Relay Connections
N.C. Active ( A ) N.O. Common ( C ) Inactive ( I ) N.C. Active ( A ) N.O. Note: Block #2 must be removed in order to be able to access its side screws. IGC100 Ion Gauge Controller...
Page 207 Heat is available only when the channel state is ACTIVE. Power Ground SPDT Relay Active Heater Inactive Common Figure 5-6. Using a relay as a power switch. (Shown in Inactive state.) IGC100 Ion Gauge Controller...
Page 208 Switching the channel state between ACTIVE and INACTIVE redirects the power from instrument #1 to instrument #2. SPDT Relay Active Device Device Inactive Common Ground Power Supply Figure 5-8. Using a relay as a power multiplexer. (Shown in Inactive, power-off state.) IGC100 Ion Gauge Controller...
Page 209 In order to prevent costly mistakes, label every cable connected to the process control relays with an unambiguous name. Include the pin#, pin label, and channel# in case the cable comes loose and needs to be reattached to the controller. IGC100 Ion Gauge Controller...
Page 210 This is easily implemented with the IGC100 if a thermocouple is attached to the vacuum system and its amplified voltage signal is monitored through one of the Analog I/O ports of the controller. A...
Page 211 Figure 5-11. IGC100 web page showing relay status and control via the internet. IGC100 Ion Gauge Controller...
Page 212: Digital I/O Module
The DIGITAL I/O module included with the Process Control board supports three types of logic signals. The TTL signals are opto-isolated from the IGC100 chassis. The inputs may be electrically floated as a group. The outputs may be electrically floated as a group, separate from the inputs.
Page 213 Process Control Basics 5-17 Digital I/O Connections Use the female DB37 port located on the back panel of the IGC100 controller (labeled DIGITAL I/O) to connect to the (1) eight PC TTL Output, (2) eight PC TTL input, and (3) 12 Remote Control TTL input pins of the Process Control Board.
Page 214 External User +5 V IN TTL_OUT_1 TTL OUT for Channel 1. LOW=ACTIVE TTL_OUT_2 TTL OUT for Channel 2. LOW=ACTIVE TTL_OUT_3 TTL OUT for Channel 3. LOW=ACTIVE TTL_OUT_4 TTL OUT for Channel 4. LOW=ACTIVE Note !=HIGH-to-LOW, "=LOW-to-HIGH Unconnected inputs are HIGH. IGC100 Ion Gauge Controller...
Page 215 Vcc supply (+5 to +15 Vdc). Pull inputs to external ground for low inputs. For non-isolated operation of ALL TTL inputs, connect ANODE_COM (pins 2 and 20) to IGC100 Vcc (pin 1 or 15) and pull inputs to IGC100 Ground (pin 30 or 31) for low inputs.
Page 216 • The use of external TTL logic circuitry to provide additional logic manipulation of the TTL I/O signals complements the process control capabilities of IGC100. For example, connect the TTL I/O pins to an external PLC (programmable logic controller) or a home-built logic circuit to extend the capabilities of the process control ports.
Page 217: Remote Control Inputs
Degas can be terminated before the Degas Time has elapsed through the remote input by • Switching the Degas_On input HIGH after it has been LOW for at least 50 ms • Turning the ionization gauge off • Pulling the IG_Lockout pin LOW. IGC100 Ion Gauge Controller...
Page 218 LOW until it is required to turn the filament selection off. Select Filament 1 and Filament 2, as described above, to use both filaments in the IG emission. Turning both filaments off turns off the gauge. IGC100 Ion Gauge Controller...
Page 219 Prerequisites: • None The IG_Remote_Enable line must be LOW for the IGC100 Remote Control Module to acknowledge the edge triggers from the IG1_On, IG2_On, Degas_On, Fil1_On and Fil2_On pins. If unconnected, this pin will be HIGH and remote control is disabled (default).
Page 220: Off
LOW locks the touchscreen LCD. The display does not respond to touches. Recommendation The Front_Panel_Disable signal is often used to lock the front panel and block unauthorized changes to the controller during a process or experiment. IGC100 Ion Gauge Controller...
Page 221: Automated Pumpdown Example
Automated Pumpdown Example 5-25 Automated Pumpdown Example The following example is intended to provide ideas on how to use the IGC100 process control capabilities to automate vacuum system procedures. The same basic control concepts can be applied to almost any kind of system ranging from the simple experimental setups found in research labs to the more complex vacuum equipment used in production environments.
Page 222 Vacuum System Diagram (Ch 4) External Audio Alarm Main Chamber (Ch 5) Vent (Ch 1) Valve Roughing Gate Valve (Ch 3) Valve Hybrid Turbo Pump (Ch 2) Foreline Valve Diaphragm Pump Figure 5-15. Example vacuum system diagram. IGC100 Ion Gauge Controller...
Page 223 Pneumatically actuated valve controlled by process channel 5, operated manually and only opened to pressurize the main chamber to atmosphere during ventings. This valve remains closed and under Manual control throughout the entire Pumpdown procedure. Channel Description: Vent Valve. IGC100 Ion Gauge Controller...
Page 224 Similarly, channel 6 is described as "Main Status" and displays a "Wait" message while the pressure in the Main Chamber remains above the 2x10 Torr setpoint. Figure 5-17. Process Control Display showing Channel Data Boxes with messages and descriptions for this example. IGC100 Ion Gauge Controller...
Page 225 14 (I) only 15 (A) +24Vdc 2x10 Torr INACTIVE Ready Wait 16 (C ) (Main ( below ) 17 (A) Status) 18 (I) 19 (C) 20 (A) 21 (I) 22 (C) 23 (I) 24 (A) IGC100 Ion Gauge Controller...
Page 226 Ch 1 opens Roughing Valve (ACTIVE) Wait PG1 < 0.1 Torr? Ch 1 closes Roughing Valve (INACTIVE) Ch 2 (30 s) and Ch 3 (60 s) delays start Ch 2 delay over? Wait Full Auto Mode IGC100 Ion Gauge Controller...
Page 227 Channel 3 opens Gate Valve (ACTIVE) Turbo pumping on main chamber starts Wait PG1 < 2x10 Torr? Auto-Start turns IG1 filament ON IG1 < 2x10 Torr? Wait Channel 6 goes ACTIVE User is notified that pumpdown is complete Pumpdown complete IGC100 Ion Gauge Controller...
Page 228 (Ch 1 ACTIVE) and rough pumping of the Main Chamber starts. The Gate valve and the Foreline valve remain safely closed while the chamber pumps down. At this point the IGC100 automation capabilities take over and no more user involvement will be required. The Roughing, Foreline and Gate valves are under full automatic control.
Page 229 7 (C) 8 (I) 9 (A) 10 (C) 11 (I) 12 (A) 13 (C) 14 (I) 15 (A) 16 (C ) 17 (A) 18 (I) 19 (C) 20 (A) 21 (I) 22 (C) 23 (I) 24 (A) IGC100 Ion Gauge Controller...
Page 230 5-34 Process Control Worksheet IGC100 Ion Gauge Controller...
Page 231 Chapter 6 Memory Card IGC100 includes a MEMORY CARD module on its front panel. This module consists of a long vertical slot specifically designed to accept a special type of information storage device referred to as Memory Card throughout this manual.
Page 232 Memory Card IGC100 Ion Gauge Controller...
Page 233: Password Cards
Memory Card provided with the calibrated gauge. The calibration data is easily uploaded into the controller via the front panel MEMORY CARD module. See Calibration Storage in the IGC100 and Cal Curve Loading sections below for additional details.
Page 234 Memory Card Figure 6-3. Password Cards. Three blank Password Cards are provided with every IGC100 controller. Consult the Security Menu section of chapter 3 for details on the security options built into the IGC100 controller. IGC100 Ion Gauge Controller...
Page 235 IGC100 controller without any significant change in the accuracy of the results. For the same reason, the actual IGC100 controller used for real measurements does not need to be present at the SRS High Vacuum Calibration Facility during the calibration procedure.
Page 236 Step 3. Select the gauge’s port (IG1 or IG2) by touching its display button (Data Box). This brings up a Gauge Setup menu for the ionization gauge’s port. Figure 6-6. Gauge Setup menu. Step 4. Touch [Advanced] to display the Advanced submenu for the gauge’s port. IGC100 Ion Gauge Controller...
Page 237 Once the calibration data is successfully loaded into the controller, choose Cal Curve as the IG Cal Source in the gauge setup menu of the port, and the IGC100 will automatically be configured to match the setup conditions required for the calibration data.
Page 238 Step 5. Touch [Copy Password to card] to store a copy of the password in the memory card (i.e. password card). Step 6. Remove the card from the MEMORY CARD Slot. The controller reverts to a locked state as soon as the card is removed. IGC100 Ion Gauge Controller...
Page 239 The controller returns to the locked state as soon as the card is removed. A unit locked after removing a password card can also be unlocked by manually typing the password through the security menu. IGC100 Ion Gauge Controller...
Page 240 6-10 Memory Card IGC100 Ion Gauge Controller...
Page 241 Serial Poll to Read the Status 7-45 Ion Gauge Setup Commands 7-20 Service Request 7-45 Power-On Status 7-46 Pirani Gauge Setup Commands 7-24 Status Reporting Commands 7-47 Analog Port Setup Commands 7-25 Logging Commands 7-26 Charting Commands 7-29 IGC100 Ion Gauge Controller...
Page 242 Remote Programming IGC100 Ion Gauge Controller...
Page 243: Index Of Commands
Read Gauge History First GHGN ? 7-23 Read Gauge History Next Pirani Gauge Setup GPOW (?) p {, i} 7-24 Power CGCF (?) p {, x} 7-24 Gas Correction Factor CRVP (?) n {, i} 7-24 Calibration Curve IGC100 Ion Gauge Controller...
Page 244 RTIL (?) d {, i} 7-34 TTL Activation Level TTLL ? 7-35 Read TTL Inputs RHGF ? 7-35 Read Process Log First RHGN ? 7-35 Read Process Log Next RHCL 7-36 Clear Process Log RBAD ? 7-36 Relay Failure Status IGC100 Ion Gauge Controller...
Page 245 7-50 Error Status Enable GSSW ? {i} 7-50 Read Gauge Status GSSE (?) {i} {, j} 7-51 Gauge Status Enable RSSW ? {i} 7-51 Read Process Status RSSE (?) {i} {, j} 7-52 Process Status Enable IGC100 Ion Gauge Controller...
Page 246 Index of Commands IGC100 Ion Gauge Controller...
Page 247: Alphabetical List Of Commands
CMPX (?) n {, x} 7-25 CM PMax CPWD 7-38 Copy Password to Card CRVI (?) p {, i} 7-20 Calibration Source CRVP (?) n {, i} 7-24 Calibration Curve CSEN (?) p {, x} 7-20 Sensitivity Factor IGC100 Ion Gauge Controller...
Page 248 LCPX (?) {x} 7-29 Pmax LCRG (?) {n} 7-29 Time Range LCSA 7-29 Autoscale Y-Axis LCSF 7-30 Scale X-Axis to Full LCVN (?) {x} 7-29 Vmin LCVX (?) {x} 7-29 Vmax LOCK ? 7-38 Query Locked IGC100 Ion Gauge Controller...
Page 249 RVHY (?) d {, x} 7-33 Voltage Hysteresis SECF (?) d {, i} 7-38 Security Flags SNUM? 7-40 Serial Number STPW s 7-38 Set Password. TIME (?) {s} 7-40 Time TTLL ? 7-35 Read TTL Inputs IGC100 Ion Gauge Controller...
Page 250 7-10 Index of Commands VERB (?) {i} 7-42 Verbose RS-232 VOLC (?) {n} 7-40 Volume VRDT ? 7-41 Firmware Build WSEN (?) {i} 7-39 Web Server Enable IGC100 Ion Gauge Controller...
Page 251: Introduction
3) device and supports CTS/DTR hardware handshaking. The CTS signal (pins 1, 6 and 8) is an output indicating that the IGC100 is ready, while the DTR signal (pin 7) is an input that is used to control the IGC100's data transmission. Ground is pin 5. If desired, the handshake pins may be ignored and a simple 3 wire interface (pins 2, 3 and 5) may be used.
Page 252 Values returned by the IGC100 are sent as a string of ASCII characters terminated by a carriage return <cr> on RS-232 and by a line-feed <lf> on GPIB. If multiple query commands are sent on one command line (separated by semicolons, of course), the answers will be returned individually, each with a terminator.
Page 253 Remote Programming 7-13 Command Synchronization IFC (Interface Ready, bit 7) in the Serial Poll status signals that the IGC100 is ready to receive and execute a command. When a command is received, this bit is cleared, indicating that command execution is in progress. No other commands will be processed until this command is completed.
Page 254 7-14 Remote Programming IGC100 Ion Gauge Controller...
Page 255: Command Syntax
Pressure Units The entire IGC100 operates with a SINGLE units system. All commands that query or set pressure parameters use the global units system of the IGC100. The units may be changed in the Main Menu or with the GPMU command.
Page 256 GPMU are in effect. Use the Local Access Security feature if a units change would result in system malfunction. See Chapter 3 (Security Menu) for details. IGC100 Ion Gauge Controller...
Page 257 Auto Scaling Bar Graph Full Range Bar Graph Gauge Status Information Example Returns the display format i of the upper Data Bar. GPDF? 0 Sets the lower Data Bar to Full Scale Bar Graph. GPDF 2, 3 IGC100 Ion Gauge Controller...
Page 258 GSTA ? p Gauge Status The GSTA? query returns the status of gauge port p. The parameter p selects a gauge port below and is required. port port port The returned value is an integer n described below. IGC100 Ion Gauge Controller...
Page 259 The GSTT? query returns the time and date that gauge p last changed status. The parameter p selects a gauge port below and is required. port port port See the GSTA? command. Example Returns a string of the form "10:22 AM 22may01". GSTT? 1 IGC100 Ion Gauge Controller...
Page 260 IG1 (1) or IG2 (2) and is required. The parameter x is the emission current (milliamps) from 0.01 to 12.0. Example Returns the Emission Current x of IG2 in mA. IGEC? 2 Sets IG1 Emission Current to 1.00 mA. IGEC 1, 1.00 IGC100 Ion Gauge Controller...
Page 261 Times are stored in milliseconds, but this timer is only accurate to within a second. Example Returns the Overpressure Delay for IG1 in ms. GODE? 1 Sets the Delay of IG1 to 1 minute (60,000 ms). GODE 1, 60000 IGC100 Ion Gauge Controller...
Page 262 Times are stored in milliseconds, but this timer is only accurate to within a second. Example Returns the Degas Time in ms. DTIM? Sets the IG1 Degas Time to 10 minutes (600,000 ms). DTIM 1, 600000 IGC100 Ion Gauge Controller...
Page 263 Read Gauge History GHGN ? The IGC100 logs all ion gauge events in the Gauges/History. To read the log, use the GHGF? query to return the most recent entry in the log. Then issue GHGN? repeatedly to get the rest of the entries, until the string "&" is returned, signaling that all entries have been read.
Page 264: Pirani Gauge Setup
PG1 (1) or PG2 (2) and is required. The parameter i selects Curve (0) or Ar Curve (1). Example Returns the Cal Source i of PG2. CRVP? 2 Sets the PG1 Cal Source to N Curve. CRVP 1, 0 IGC100 Ion Gauge Controller...
Page 265: Analog Port Setup
(1-4 for CM1-4). The parameter x is the pressure Pmax in the current units. Example Set Pmax of CM1 to 100.0 in the current units. CMPX 1, 100.0 Return the value of Pmax for CM1 in the current units. CMPX? 1 IGC100 Ion Gauge Controller...
Page 266: Logging Commands
Read Data Log PLGN ? The IGC100 logs all gauge readings in the Data Log. To read the log, use the PLGF? query to return the most recent entry in the log. Then issue PLGN? repeatedly to get the rest of the entries, until the string "&" is returned, signaling that all entries have been read.
Page 267 The PLWT command sets (queries) the Log Length. The parameter n is the Log Length in seconds. This command will change the Logging Interval. Examples Returns the Log Length n in seconds. PLWT? Sets the Log Length to 1 hours (3600 sec). PLWT 3600 IGC100 Ion Gauge Controller...
Page 268 The PLTR command sets (queries) whether the TTL Log Reset input is Enabled (i=1) or Disabled (i=0). Examples Returns 1 if TTL Log Reset input is enabled, 0 if disabled. PLTR? Enables TTL Log Reset input. PLTR 1 IGC100 Ion Gauge Controller...
Page 269: Charting
The LCRG command sets (queries) the Chart X-Axis Time Range. The parameter n is a number of seconds. Examples Returns the X-Axis Time Range in seconds. LCRG? Sets the X-Axis Time Range to 10 minutes (600 s). LCRG 600 IGC100 Ion Gauge Controller...
Page 270 The LCSF command Scales the X-Axis to Full. This sets Time Range to display all of the data in the log. This command has no effect unless the chart display is on the screen. This command has no parameters and no query. IGC100 Ion Gauge Controller...
Page 271: Process Control Commands
Process Control 7-31 Process Control Commands These commands require the Process Control Option installed in the IGC100. RDES (?) d {, s} Channel Description The RDES command sets (queries) the process channel Description string. The parameter d selects a process channel (1-8) and is required. The string s is the channel description.
Page 272 The parameter d selects a process channel (1-8) and is required. The parameter i selects Inactive (0) or Active (1). Example Returns 1 if channel 2 Gauge Off State is Active, 0 if RGOS? 2 Inactive. Sets channel 2 Gauge Off State to Active. RGOS 2, 1 IGC100 Ion Gauge Controller...
Page 273 The parameter d selects a process channel (1-8) and is required. The parameter i selects Active Below (0) or Above (1). Example Returns 1 if channel 6 is active Above, 0 if Below. RPOL? 6 Sets channel 6 to Active Above the setpoint. RPOL 6, 1 IGC100 Ion Gauge Controller...
Page 274 Active when TTL input Low (0) or High (1). Example Returns 1 if channel 3 is active when TTL Input High, 0 if RTIL? 3 Low. Sets channel 3 to active when TTL Input High. RTIL 3, 1 IGC100 Ion Gauge Controller...
Page 275 Read Process Log RHGN ? The IGC100 logs all process control events. To read the process log, use the RHGF? query to return the most recent entry in the log. Then issue RHGN? repeatedly to get the rest of the entries, until the string "&" is returned, signaling that all entries have been read.
Page 276 Bit 0 corresponds to Channel 1 and bit 7 corresponds to Channel 8. If the bit is 0, the relay is ok. If the bit is set, the relay is not trustworthy. IGC100 Ion Gauge Controller...
Page 277: Backlight Commands
Backlight Delay The BLTD command sets (queries) the Backlight Saver Delay. The parameter n is the Delay in milliseconds. Example Returns the Backlight Saver Delay in ms. BLTD? Sets Delay to 5 minutes (300,000 ms). BLTD 300000 IGC100 Ion Gauge Controller...
Page 278: Security Commands
Ion gauge control keys Gauge setup. Gauge calibration. Process control setup. Process control operation. Time & Date. Local user lockout. Prevents changes from the touch screen. Remote user lockout. Prevents changes from the remote interfaces. IGC100 Ion Gauge Controller...
Page 279 It may take up to 10 seconds for this to take effect. Example Returns 1 if web server is Enabled, 0 if Disabled. WSEN? Disables the web server option. WSEN 0 IGC100 Ion Gauge Controller...
Page 280: System Commands
MENU d Display Screen The MENU d command changes the screen to the display listed below. feature Pressure Display Gauges Display Process Display Chart Display Table Display Example Shows the Process Display on the screen. MENU 2 IGC100 Ion Gauge Controller...
Page 281 If *TST ? returns any other value contact Stanford Research Systems for further instructions. FREV ? Firmware Revision The FREV? query returns the IGC100 firmware revision code. VRDT ? Firmware Build The VRDT? query returns the date of the IGC100 firmware revision. IGC100 Ion Gauge Controller...
Page 282: Interface Commands
*OPC command, the instrument should set the OPC bit in the Standard Event Status register (bit 0) when all pending operations have been completed. If the host sends *OPC, the IGC100 sets the OPC bit when all pending operations complete. Since the IGC100 completes all commands in the order received, the bit is set when the *OPC command completes.
Page 283 The *WAI command prevents the instrument from executing any other commands or queries until all pending commands and queries are complete. Since the IGC100 executes commands to completion in the order received, the IGC100 operates in this manner for all commands (not just *WAI). This command has no parameters or return value.
Page 284: Status Reporting
Standard Event, Error, Gauge and Process Control status registers. Status Registers In the IGC100, a status register is a read-only, 16 bit word where the state of each bit indicates a specific instrument state or condition. Bits in status registers are set when their corresponding condition or status is met. Once set, bits remain set until cleared by reading them with the appropriate status reporting command.
Page 285 A bit stays set as long as the status condition exists. When reading the status using a GPIB serial poll, the SRQ bit signals that the IGC100 is requesting service. The SRQ bit will be set the first time the IGC100 is polled following a service request.
Page 286 Powering on does not clear the status registers. Reading status registers or issuing *CLS clears status registers. Upon power-on, the IGC100 may either clear all of its status enable registers or maintain them as they were on power-off. The *PSC command determines which action will be taken.
Page 287: Status Reporting Commands
Process, Gauge, Error or Standard Event status words (by reading them). Example Returns the Serial Poll Status register (0-255). STB? Returns 0 if bit 2 (GERR) is clear, 1 if it is set. STB? 2 IGC100 Ion Gauge Controller...
Page 288 These bits remain set until read, cleared by *CLS or power-up with *PSC enabled. Example Returns the Standard Event Status register (0-255). ESR? Returns 0 if bit 5 (CME) is clear, 1 if it is set. ESR? 5 IGC100 Ion Gauge Controller...
Page 289 These bits REMAIN SET until read, cleared by *CLS or power-up with *PSC enabled. Example Returns the Error Status register (0-65535). ERSW? Returns 0 if bit 10 (Flt_Err) is clear, 1 if it is set. ERSW? 10 IGC100 Ion Gauge Controller...
Page 290 However, if AN1 remains out-of-range, then bit 4 will become set again (within 0.5 second). This can lead to repeated SRQs if the appropriate enable bits are set. In this case, the SRQ handler should not just read IGC100 Ion Gauge Controller...
Page 291 Process control channel 3 is active. Ch4_Act Process control channel 4 is active. Ch5_Act Process control channel 5 is active. Ch6_Act Process control channel 6 is active. Ch7_Act Process control channel 7 is active. Ch8_Act Process control channel 8 is active. IGC100 Ion Gauge Controller...
Page 292 Returns 0 if bit 2 is clear, 1 if it is set. RSSE? 2 Sets the Process Status Enable register to 48 decimal (bits 4 RSSE 48 and 5 set). Clears bit 12 of the Process Status Enable register. RSSE 12, 0 IGC100 Ion Gauge Controller...
Page 293 Chapter 8 Embedded Web Server (EWS) The embedded web server (EWS) is a factory installed option for the IGC100. The EWS provides an ethernet connection between the IGC100 and a network. The EWS allows monitoring and control of the IGC100 (and vacuum system) from a local network or the world wide web.
Page 294: Chapter 8 Embedded Web Server
Embedded Web Server IGC100 Ion Gauge Controller...
Page 295: Ews Quick Start
Use a CAT5 ethernet cable to connect your hub or switch to the ethernet connector on the back of the IGC100 (with EWS installed). Do not use a crossover cable. Bring up the Web setup menu by pressing the [Menu] QuickKey (in the Pressure Display), choosing [Remote] and then [Web].
Page 296 EWS. Make sure JavaScript is not disabled in your browser. You should see a web page similar to below. Relay status is displayed only if Option 03 (Process Control) is installed in the IGC100. Figure 8-1. EWS web page.
Page 297: Installing The Ews
Installing the EWS This section covers the network installation and configuration of the Embedded Web Server option. While this option adds powerful functionality to the IGC100, connecting your vacuum system to the world-wide-web can expose it to unauthorized access, resulting in harm to personnel as well as equipment.
Page 298 IP address. Each IGC100 is assigned a 'fictitious' IP address and the router presents a single IP address to the rest of the world. In this case, all of the IGC100's will appear at the same IP address to the outside world (they will have different IP addresses on the local network).
Page 299 System Name The System Name (Menu/Remote/System Name) identifies this IGC100 on the web. This is important if your setup includes multiple web-enabled IGC100's. The system name is displayed in the web pages to identify the source of the data. IGC100 Ion Gauge Controller...
Page 300 Your administrator will want to make sure that this server doesn’t create a security risk for the rest of the network. To find the MAC address of your IGC100 from a networked PC (which can access the IGC100 via the web) : Type in the IGC100's IP address (and port if not 80) in your browser's address window.
Page 301 Laboratory PC Figure 8-3. Crossover Cable Configuration This configuration does NOT allow access to the IGC100 from the outside world. However, if security is a concern, this limitation is a strong reason for its use. The only security question to ask is "who will have access to this computer?". Since there is no intermediate connection, or dependence on outside hardware, this is also a very reliable connection.
Page 302 You can retain the security of the crossover connection and still allow more than one computer to access the IGC100. An ethernet hub will allow you to make a local area network (LAN) that can use fictitious IP addresses in order to access the instrument (as well as other computers on the LAN).
Page 303 Talk with your network administrator for their advice on setting up this configuration to allow outside access to the IGC100. To maintain the security of the LAN, your administrator may wish to place the IGC100 outside the firewall, as described in the next section.
Page 304 8-12 Installing the EWS Outside Firewall Configuration Here, the IGC100 is connected to the world wide web via a router outside the workplace firewall. This connection requires setting up real network parameters (as discussed in the previous sections) and your network administrator should work with you to set this type of connection.
Page 305 9) Run a web browser on your workstation. At the browser’s "http://" prompt, type the fictitious IP address you set on the IGC100 front panel and hit the return key. In a moment, you should see the opening screen of the web page.
Page 306 PC network card. • The IP address on the front panel of the IGC100 matches the IP address you typed in on your browser. •...
Page 307 Control. Web Control of the IGC100 includes setting relay states and turning ion gauges on and off. When control is disabled, the EWS does not allow changes to the IGC100 settings. If you allow web control, make sure that the security features below are enabled.
Page 308 Figure 8-9. Trusted-IP setup menu. The IGC100 allows you to specify the IP addresses that will be allowed to access the instrument over the web. You may specify a range of addresses as well as four addresses that are outside that range.
Page 309 Installing the EWS 8-17 Password Checking Only This is the lowest level of security for the IGC100’s control functions. However, if you require access to the control functions over a dial-up connection to the instrument, this is the method to use. A dial-up connection almost always assigns a different IP address to your connection each time you log on to your internet service provider (ISP).
Page 310: Using The Ews
Using the EWS To view the EWS web pages, simply type the IP address of the EWS into your web browser. Figure 8-10. Enter the IGC100's IP address into your browser. Figure 8-11. Main EWS web page. IGC100 Ion Gauge Controller...
Page 311 Using the EWS 8-19 Bookmarking the IGC100 You can add a bookmark to the IGC100 in your browser. Be sure to rename the bookmark to something meaningful. If you are accessing multiple IGC100's, make sure each bookmark is unique. Monitoring the IGC100 The simplest use of the EWS is to monitor your data.
Page 312 These same ideas can be applied to the analog inputs to monitor parameters such as temperature. Figure 8-13. Auto Monitor window. IGC100 Ion Gauge Controller...
Page 313 Using the EWS 8-21 Process History If your IGC100 is equipped with a Process Control option, this function will return up to the last 20 events in the process history. Each entry of the history has a timestamp, a listing of what relays were active at that moment, a listing of what relays were under automatic control at that moment, and what change took place at that moment.
Page 314 8-22 Using the EWS Get Datalog The Get Datalog function downloads IGC100 log data to your computer, via the web. You can select data from four categories, pressures, analog port values, relay states, and TTL levels. The data is downloaded either as a web page or as a comma separated variable (.csv) file compatible with Microsoft Excel.
Page 315 This page displays information about e-mail notification including a summary of the e-mail setup and a list of e-mails which have been sent from the IGC100. In addition, the number of messages sent is shown along with the maximum number allowed.
Page 316 Request Control If web control is disabled from the front panel of the IGC100, the control functions do not appear on the EWS web pages. If control is disabled while someone is browsing the page, the control functions will still be in the web page, but any control operation is prevented.
Page 317 Using the EWS 8-25 to an interlock system, not in replacement of one. Since the only purpose of e-mail is to alert users to process control changes, this button will be functional only if the IGC100 has the Process Control option.
Page 318 8-26 Using the EWS address. For example, if your e-mail address is me@mycompany.com, you may wish to use igc100@mycompany.com as the "from" address. Ask your network administrator if a particular domain name is required is required to use your SMTP server.
Page 319 This function allows you to turn an ion gauge on or off, as well as choose the filament usage mode. Figure 8-17. Controlling the Ion Gauge. IGC100 Ion Gauge Controller...
Page 320 Changing relay states from a remote interface can be dangerous. Make sure you understand your vacuum system and all process controls you have in place before using this feature. This feature will not be functional if the IGC100 does not have the process control option.
Page 321: Networking Terms
In order to send e-mail, a special machine called a Simple Mail Transfer Protocol server is often used. These servers respond to commands for sending e-mail and will forward your messages to the recipient’s local mail handling machine. IGC100 Ion Gauge Controller...
Page 322 8-30 Networking Terms IGC100 Ion Gauge Controller...
Page 323 Troubleshooting a vacuum system can be a complex and daunting task. This chapter contains troubleshooting information for the IGC100 and some typical gauges. Please read and follow all warnings presented in this chapter. See 'Safety and Preparation for Use' at the beginning of this manual to remind yourself of some of the dangers involved in working with vacuum systems.
Page 324 Troubleshooting and Maintenance IGC100 Ion Gauge Controller...
Page 325: Warnings
• Use only SRS supplied replacement/accessory parts. • The IGC100 controller does not have any serviceable parts other than the Degas Fuse. • Consult the 'Damage Requiring Service' section at the end of this chapter for instructions on how to return the instrument for authorized service and adjustment.
Page 326: Error Detection
Important Diagnose and troubleshoot problems as soon as they are detected. Even though the hardware tests built into the IGC100 can test the instrument for a large variety of problems, they cannot detect all possible error conditions. If system downtime is of prime concern, it is recommended that a spare IGC100 unit be available for immediate replacement in the cause of failure or problems.
Page 327 Interface Queues The IGC100 buffers the most recent characters received and transmitted over the RS-232, GPIB and Web interfaces. A Queue Display, accessed through the Remote submenu of the Main Menu, shows the interface history for both transmitted and received data. Use this feature to troubleshoot communications during the development of your custom control software.
Page 328: Error Messages
Error Messages Error Messages Error Messages alert IGC100 users of instrument malfunctions detected during normal operation. They are short descriptive messages (one or two words) displayed within a Port Data Box or Data Bar where measurements are normally displayed. Touch the Data Box and choose 'Status Information' to display a more complete description of the problem.
Page 329 All ionization gauges are turned off. Turn an ionization gauge on using the IG1 (or IG2) button on the front panel. NO FILAMENT IGC100 failed to detect a filament IMPORTANT! Use only ionization gauge after the gauge emission was turned signal cables provided by Stanford Research Systems.
Page 330 Set the IG_Lockout pin high or disable by the IG_Lockout pin of the TTL Remote Control (set Remote Control Module (opt 03). IG_Remote_Enable=High). The IG1 and IG2 gauges remain off as long as this pin is held LOW, and IG_Remote_Enable is LOW. IGC100 Ion Gauge Controller...
Page 331: Basic Troubleshooting
Basic Troubleshooting Basic Troubleshooting This section documents symptoms, causes and possible solutions for some of the common problems encountered during the operation of an IGC100 controller. Note The problems listed below DO NOT GENERATE Error Messages. Input Power Power Problems...
Page 332 Incorrect Gauge Protection setting Choose the proper Gauge Protection setting for the gauge. DEGAS FUSE blown Replace the fuse (See Maintenance). Degas power Pressure rises above 2x10 Torr Reduce initial pressure at the gauge. fluctuates during during degas degas IGC100 Ion Gauge Controller...
Page 333 Gauge Zero out of The gauge is severely Perform Pirani gauge Cleaning/bakeout calibration range contaminated and the ZERO Procedure, or replace the gauge. adjustment can no longer compensate for drift. The controller is faulty Contact SRS. IGC100 Ion Gauge Controller...
Page 334 Gauge output circuit is faulty Contact the gauge manufacturer. Gauge reading is The pressure output signal from Reduce the pressure at the CM until it is 'OVERLOAD' the CM exceeds 12V below Pmax. IGC100 Ion Gauge Controller...
Page 335 Output and linked to the of the pressure of the right gauge. gauge Analog reading is Reduce the input voltage until it is The input signal exceeds ±12V 'OVERLOAD' between –12V and +12V. range. IGC100 Ion Gauge Controller...
Page 336 Maintenance IGC100 Controller IMPORTANT The IGC100 controller box does not have any serviceable parts (other than the Degas Fuse) and requires no scheduled maintenance. The IGC100 is only recommended for use in a clean, dry laboratory environment. Operation in other environments may cause damage to the controller and reduce the effectiveness of the safety features.
Page 337 If the new fuse burns out as soon as emission is established, do not insert a new one until the cause for the failure is identified first. Contact Stanford Research Systems for additional help. If emission is still not possible after replacing the fuse, consult the troubleshooting section above. IGC100 Ion Gauge Controller...
Page 338 250°C for glass-tubulated gauges. Consult your gauge’s specifications, or contact the manufacturer directly, for bakeout recommendations. Frequently, an ion gauge is automatically degassed and/or the system baked after the gauge is exposed to ambient, or after surface contamination is suspected. Gauges will be IGC100 Ion Gauge Controller...
Page 339 N2 Sense Factor into the controller. Sense Factor (new) = N Sense Factor (old) x ( P gauge 0std IGC100 Ion Gauge Controller...
Page 340 Pirani Gauges Zero and ATM adjustments. The PG105 Pirani gauge calibration data loaded into all IGC100 controllers is based on the response of a new gauge free of contaminants. If a tube becomes contaminated or does not seem to read correctly, the front panel readings can often be adjusted using the 'ZERO and 'ATM' calibration menus.
Page 341 Solvent outgassing rates can be significantly diminished: (a) baking the gauge tube overnight in a vacuum oven between 100-110°C before gauge installation or (b) baking out the gauge while attached to the vacuum system and before reconnecting its plastic connector. IGC100 Ion Gauge Controller...
Page 342 250°C for metal-gasket sealed tubes (PG105-UHV) used in UHV or low contamination applications. NOTE An overnight bakeout, at 200-250°C, is the only recommended cleaning procedure for PG105-UHV gauges in direct contact with ultra high vacuum environments. IGC100 Ion Gauge Controller...
Page 343 1 to 4 Sensor 20 – 22 2 to 3 Compensate 35 - 40 3. Gauge wires are not replaceable! Replace the gauge head if the wire resistance values do not fall within the ranges specified above. IGC100 Ion Gauge Controller...
Page 344: Damage Requiring Service
Do not use accessories not recommended in this manual as they may be hazardous. Note Within this section, the word 'product' specifically refers to the IGC100 Ion Gauge Controller, any of its accessories, or any SRS manufactured vacuum gauge. Contact the factory for instructions on how to return the instrument for authorized service and adjustment.
Page 345 Ionization Gauge Connection 10-7 Filament Emission Current Test 10-17 Line Power Connection 10-9 Electrometer Test 10-19 Power-On Reset 10-9 IGC100 Performance Test Record 10-20 Screen Contrast Adjustment 10-10 Serial Number 10-10 Firmware Revision 10-10 1. Self-Tests 10-11 Power-On Selftest (POST)
Page 346 10-2 Performance Tests IGC100 Ion Gauge Controller...
Page 347: Getting Ready
• Use only SRS supplied replacement/accessory parts. • The IGC100 controller does not have any serviceable parts other than the Degas Fuse. • Consult the 'Damage Requiring Service' section at the end of Chapter 9 for instructions on how to return the instrument for authorized service and adjustment.
Page 348 10-4 Performance Tests Low Noise Coaxial Cable Used to connect the DC Calibrator to the IGC100. Recommended: Belden 9239 Low Triboelectric Noise cable. Sealed Ionization Gauge and Signal Cable In order to eliminate the need for the presence of a vacuum system during performance testing, all ionization gauge related electrical specifications are tested using a sealed ionization gauge connected to the proper signal cable.
Page 349 Performance Tests 10-5 The Test Record Make a copy of the IGC100 Performance Test Record at the end of this section. Fill in the results of the tests on this form. The Test Record will allow you to determine whether the tests pass or fail and also preserve proper test documentation.
Page 350 1. IGC Power - LINE LED and POWER button with LED The LINE LED (red) lights up to indicate that the IGC100 is connected to, and getting power from, an AC outlet. Press the red POWER button to turn the IGC100 on/off.
Page 351: Preparation For Testing
(i.e. LINE LED off) during the following connection procedure. Check your unit, and disconnect the IGC100 from its power source (i.e. wall outlet ) at this time if necessary. This section describes the procedure required to connect the sealed ionization gauge to the IGC100 controller with the SRS# O100C3 signal cable.
Page 352: 10-8 Performance Tests
(1) Connect Fil 1 and one of the FIL RET connectors to the Filament pins on the gauge, and (2) push the GRID connector onto one of the two Grid Pins on the gauge. Consult Fig. 10-6 for a completed connection. IGC100 Ion Gauge Controller...
Page 353 50 or 60 Hz. Procedure Use the power entry module on the back panel of the IGC100 to power the unit from a wall outlet. Make sure that suitable power is available for the controller: 100-240 Vac, 50-60Hz, 500 W.
Page 354 The firmware revision code, along with the update date, is briefly displayed on the LCD screen as part of the Self-Test Report when the unit is turned on. The revision code is also displayed with the serial number in the Configuration Report screen described above. IGC100 Ion Gauge Controller...
Page 355 No external setup is required for these tests. No warm-up is required for these tests. Power-On Selftest (POST) The IGC100 automatically performs a Power-On Selftest on its hardware every time it is powered up. Enter the results of the Power-on Selftest in the Tests Record at the end of this chapter.
Page 356 10-12 Performance Tests 2. Analog I/O Tests These tests measure the accuracy of the Analog I/O ports located on the back panel of the IGC100 (see Fig. 10-7). Each port is individually tested. Figure 10-7. The four analog I/O ports. Input Test The four Analog I/O ports are factory preset to operate as inputs.
Page 357 The IGC100 includes a +/-15V (100 mA max) auxiliary power output. This output will be tested with the digital multimeter. Setup Locate the +/- 15V AUX POWER output port in the back panel of the IGC100. Configure the DC Multimeter for voltage measurement. IGC100 Ion Gauge Controller...
Page 358 The +/- 15V AUX POWER includes a three (3) position Terminal Bock plug for easy connection to capacitance manometers. Figure 10-8. Aux Power connector. Procedure Measure the -15 V output. Enter test result in Test Record. Measure the +15 V output. Enter test result in Test Record. IGC100 Ion Gauge Controller...
Page 359 IG Turn-on/Warm-up Procedure Press the IG1 button on the front panel of the IGC100 to activate the gauge’s filament emission. The filament lights up, the gauge electrodes are biased, and a 0.1 mA filament emission current is established. Zero (nominal) is displayed in the IG1 data box of the Gauges Display, since no collector current is available (collector input is open).
Page 360 Connect the (LO) input of the multimeter to the Grounding Lug on the back of the IGC100. Use the (HI) input of the multimeter to probe the Fil pin of the ionization gauge head connected to the FIL RET connector of the O100C3 cable. Beware that the...
Page 361 Press the POWER button to momentarily turn off the ionization gauge controller, wait for 30 seconds for the electrical voltage to dissipate from the electrodes. Acting promptly to keep the IGC100 warmed-up, disconnect the (red) GRID push-on connector from the Grid pin of the ionization gauge and re-route the electrical connection...
Page 362 9. Repeat steps 6 through 8 for emission currents: 0.5, 5 and 10 mA. Leave the ionization gauge on, with 10 mA of emission current as a filament setting. Remain in the Advanced Gauge Setup Menu. IGC100 Ion Gauge Controller...
Page 363 This completes all the required tests. Press IG1 to turn off the ion gauge, and the POWER button to turn off the controller. Wait 30 seconds for electrical voltages to dissipate from the gauge before disconnecting any connectors. IGC100 Ion Gauge Controller...
Page 364: Performance Test Record
10-20 Performance Tests IGC100 Performance Test Record Serial # Firmware Revision Tested By Firmware Updated Date Equipment Used Self Tests Test Pass Fail Comment Power-On Selftest System Seltest Button & Led test Analog I/O Tests Input Port Voltage Lower limit...
Page 365 Lower Limit Reading Upper Limit Normal Operation 179.5 V 180.5 V Degas Mode 498.5 V 501.5 V Filament Bias Test Lower Limit Reading Upper Limit Normal Operation 29.91 V 30.09 V Degas Mode 29.91 V 30.09 V IGC100 Ion Gauge Controller...
Page 366 Lower Limit Reading Upper Limit 1 nA 9.90e-10 1.01e-9 10 nA 9.90e-9 1.01e-8 100 nA 9.90e-8 1.01e-7 1 µA 9.90e-7 1.01e-6 10 µA 9.90e-6 1.01e-5 9.90e-5 1.01e-4 100 µA 1 mA 9.90e-4 1.01e-3 Tester’s Final Comments IGC100 Ion Gauge Controller...
Page 367: Bayard-Alpert Ionization Gauges
A-43 Emission Current A-19 X-rays A-44 Envelope Bias (Forward vs. Reverse X-ray Effect) A-19 References A-45 Electron-Stimulated Desorption (ESD) A-20 Leakage Currents A-21 Outgassing A-21 Gauge Pumping A-22 Filament reactions and outgassing A-24 Gas Permeation A-24 IGC100 Ion Gauge Controller...
Page 368 Bayard-Alpert Ionization Gauges IGC100 Ion Gauge Controller...
Page 369: Principle Of Operation
Standardization of the BAG design has made it possible for vacuum equipment manufacturers to produce generic ion gauge controllers, such as the IGC100, capable of controlling BAGs from many different manufacturers.
Page 370 = P/(k·T). The collective ionization cross area of the molecules contained σ σ in this volume is A = (n·L·A) · ·L·A·P/(k·T) and the fraction of incoming electrons σ IGC100 Ion Gauge Controller...
Page 371 BAGs fall in the range of 8 to 45 Torr . Several aging mechanisms are also responsible for changes in gauge sensitivity with time, affecting the long term stability and reproducibility of BAG pressure readings. IGC100 Ion Gauge Controller...
Page 372 A more accurate approach (available on the IGC100) that does not rely on linear behavior of the sensitivity, and has been shown to effectively extend the usable range of conventional...
Page 373 Torr. Tiny gauges are a modern alternative to glass tubulated gauges and will likely become relatively more important in the future. Note The IGC100 controller is compatible with most commercially available BAG designs ® including: Glass-tubulated, Nude, Nude-UHV, STABIL-ION (Granville-Phillips, Helix ®...
Page 374 Note The IGC100 controller uses a nitrogen sensitivity factor, S , and a single relative sensitivity factor R (labeled 'gas correction factor') for every BAG connected to its back panel.
Page 375 The ion collection efficiency of an ionization gauge is affected by the diameter of the collector wire. This effect has been extensively studied and discussed in the vacuum literature . The 'conventional' BAG has a 0.25 mm diameter ion collector wire. This IGC100 Ion Gauge Controller...
Page 376 Torr under identical operating conditions. The origin of this effect is poorly understood, but it is most likely caused by the relative increase in space charge from the non-collectable ions that accumulate inside the enclosed grid volume IGC100 Ion Gauge Controller...
Page 377 Broad-range BAGs have been reported to exhibit the largest sensitivities to electrode bias variations of all current designs . Most BAGs are so non-stable and so non-reproducible for other causes that the relatively minor effects of variations in potentials applied by IGC100 Ion Gauge Controller...
Page 378 (such as the IGC100). A quality ionization gauge controller designed for high accuracy measurements (such as the IGC100) must control biasing voltages to within a few volts directly at the gauge head and emission currents to within a few percent.
Page 379 They concluded that sensitivity non-linearities in those gauges could be minimized by holding the inner surface to a fixed direct current potential or by using a controller (such as the IGC100) that provides a noise-free filament heating DC current. Note These effects are not commonly considered by the users of glass ionization gauges because very often the gauge envelope is an integral part of the gauge structure (i.e.
Page 380 The effects are generally non-linear with both magnetic field and pressure. The common approach is to either remove the gauge from the magnetic field or to try shielding it. In both cases, it is a good idea to test the gauge readings by changing the IGC100 Ion Gauge Controller...
Page 381 In general, a temperature increase results in a longer segment of the cathode being heated and emission from a relatively larger area of its surface. The temperature of operation of a filament is affected by the gauge history as described next. • Changes in cathode dimensions (i.e. diameter). IGC100 Ion Gauge Controller...
Page 382 Changes in the potential distribution around the gauge caused by contamination will affect its sensitivity. The progressive darkening of the bulb in glass gauges results in higher envelope temperatures due to increased absorption of filament radiated power. IGC100 Ion Gauge Controller...
Page 383: Limiting Factors For Low Pressure Operation
The 'X-ray induced' contribution to the pressure indication, in terms of pressure, is calculated as / (S · I (eqn. 8) IGC100 Ion Gauge Controller...
Page 384 The thin collector wire reduces the X-ray induced residual current by minimizing the collisional cross section with the X-rays emitted from the grid. The combination of enhanced sensitivity and reduced X-ray induced residual current is responsible for the extended X-ray limit. IGC100 Ion Gauge Controller...
Page 385 (3) If the gauge envelope is at a suitable negative potential relative to the collector, the two effects might be adjusted to temporarily cancel . B. R. F. Kendall and E. Drubetsky were able to successfully stabilize this cancellation process by the use of IGC100 Ion Gauge Controller...
Page 386 100, were also achieved by the same authors. Metal and glass encapsulated gauges using the X-ray cancellation technique are now commercially available and are fully compatible with the IGC100. Electron-Stimulated Desorption (ESD) In the context of BAGs, ESD implies desorption of atoms, molecules, ions and fragments from the anode grid surface as the direct result of electron impact excitation.
Page 387 BAG. It is generally accepted that BAGs outgas at rates about 10-100 times faster than cold cathode gauges under identical conditions. IGC100 Ion Gauge Controller...
Page 388 . Whenever possible minimize the emission current during degas and extend the degas time to compensate. Note The IGC100 offers fully adjustable Degas power and Degas time as part of its Gauge Setup Parameters. Gauge Pumping It is well known that all BAGs have gas-sinking capacity at pressures below 10 Torr.
Page 389 A glass envelope gauge with a 0.75" side-arm tubulation has adequate conductance for use down to 10 Torr. Operation into the 10 Torr range requires minimum 1" diameter connection. IGC100 Ion Gauge Controller...
Page 390 The simplest way to eliminate this problem in UHV systems is to use metal envelopes and all-metal BAGs. Note Remember this effect while leak testing your vacuum system! If helium leak testing with the ion gauge is common practice in your facility, consider an all metal gauge instead. IGC100 Ion Gauge Controller...
Page 391: Mechanical Construction
(57 mm diameter typical) with a side tube that attaches to the vacuum system. The most common construction materials for the glass envelope are Nonex (an inexpensive glass used in old vacuum tubes), Pyrex and 7052 (another soft glass similar to Nonex). IGC100 Ion Gauge Controller...
Page 392 All glass tubulated gauges use the same bias voltages and emission currents, making them compatible with generic ion-gauge controllers (such as the IGC100). The anode grid structure is always a wire helix with open ends. A popular double-helix design allows for resistive, as well as electron bombardment, heating of the electrode assembly during degas, and also provides a fairly robust structure.
Page 393 The correct pinouts for a gauge can be obtained from the original manufacturer. Experienced users can usually identify the different pins by visual inspection. Wrong connections can cause damage to equipment and may be dangerous for the vacuum system operator. IGC100 Ion Gauge Controller...
Page 394 Stanford Research Systems offers a line of BAG connection cables (O100C1, O100C2 and O100C3) that make it easy and safe to connect almost any commercially available gauge to the IGC100 controller without having to be a gauge expert! Tubulated gauges owe their popularity to their low cost, convenient measurement range, and ease of mounting.
Page 395 The input screen is necessary to eliminate the collection of ions produced somewhere else in the vacuum system, and attracted by the exposed electrodes of the ion gauge. IGC100 Ion Gauge Controller...
Page 396 0.25 mm) is very ineffective at collecting the energetic ions produced by electron stimulated desorption from the grid. The main limitation of the UHV design is the reduced linearity of the pressure gauge readings at upper pressures, starting sometimes as early as 10 Torr IGC100 Ion Gauge Controller...
Page 397 No certified independent vacuum calibration laboratory has looked at these gauges over a long period of time and compared their long term behavior to that of traditional designs. IGC100 Ion Gauge Controller...
Page 398 A-32 Mechanical Construction Full enjoyment of the enhanced accuracy and stability capabilities of high-accuracy gauges requires the use of high-quality controllers such as the IGC100. Traditional (older design) controllers can contribute up to 15% uncertainty to a BAG readout High accuracy gauges are stable and reproducible enough, that it makes sense to calibrate them.
Page 399 Mechanical Construction A-33 Note The IGC100 controller is compatible with most commercially available tiny-BAGs and a connector adapter is all that is required to operate them. Consult Appendix M for details. Tiny gauges are more expensive than tubulated designs (up to 4 times) and are usually only available with dual thoriated (burn-out resistant) filaments.
Page 400: Filament Considerations
(2) an increased reactivity with chemically active gases that react at the filament to produce other gases. Chemical reactions as well as a high vapor pressure (10 Torr at 2200K) make W a bad choice for IGC100 Ion Gauge Controller...
Page 401 Simple methods for in-house replacement of tungsten filaments in nude gauges have been described in the vacuum literature as a cost-effective alternative if high accuracy and reproducibility is not a requirement in the pressure measurements performed by the repaired gauge IGC100 Ion Gauge Controller...
Page 402 The cathode lifetime is severely compromised by this process. CH , CO and CO are also formed at the filament as a result of chemical reaction with water. IGC100 Ion Gauge Controller...
Page 403 The evaporation of neutrals and ions can be minimized by heating the pure metal cathodes at high temperature for prolonged periods of time while pumping the gauge head. IGC100 Ion Gauge Controller...
Page 404: Accuracy And Stability
W filaments the standard deviation of the maximum difference between successive calibrations was 3% (maximum 12%) while for gauges with thoria cathodes it IGC100 Ion Gauge Controller...
Page 405 W filament gauges respond to a three fold increase in pressure to within 0.1% within a few minutes. • The response is slower in a dirty system or with active gases. • The response to decreasing pressure is slower by several orders of magnitude. IGC100 Ion Gauge Controller...
Page 406 High accuracy gauges are stable and reproducible enough, that it makes sense to fully calibrate them. Using the IGC100 it is possible to perform NIST traceable calibrations on individual gauges and store calibration information in special Memory Cards that can be downloaded into the controller’s memory when needed.
Page 407: Degassing
EB degassing takes place at pressures above 10 Torr. To extend filament lifetime, minimize the emission current during degas and extend the degas time to compensate. Keep the EB degas power under 40 W for all thoriated filament gauges. IGC100 Ion Gauge Controller...
Page 408 (1) the gauge is heavily contaminated or (2) after exposure to surface active gases such as . Whenever possible minimize the emission current during degas and extend the degas time to compensate. Note The IGC100 offers EB degas with fully adjustable Degas power and Degas time. IGC100 Ion Gauge Controller...
Page 409: Safety And Health Considerations
All-metal nude gauges should also be considered if the risk of breakage is high. Burns Gauge envelopes can get hot, and cause burns if touched during operation. IGC100 Ion Gauge Controller...
Page 410 The X-rays produced at the anode grid, and responsible for the X-ray limit, are not a risk since they do not have enough energy to penetrate through the gauge envelope. This is also true for the X-rays generated during EB Degas. IGC100 Ion Gauge Controller...
Page 411: References
10 Pa", J. Vac. Sci. Technol. A 9(5) (1991) 2757. J. T. Tate and P. T. Smith, Phys. Rev. 39 (1932) 270; P. T. Smith, Phys. Rev. 36 (1930) 1293. IGC100 Ion Gauge Controller...
Page 412 R. N. Peacock and N. T. Peacock, "Sensitivity variation of Bayard-Alpert Gauges with and without closed grids from 10 to 1 Pa", J. Vac. Sci. Technol. A8 (4) (1990) 3341. George Comsa, "Ion Collection in Bayard-Alpert Gauges" , J. Vac. Sci. Technol. 9 (1) (1971) 117. IGC100 Ion Gauge Controller...
Page 413 J. Vac. Sci. Technology 20(4) (1982) 1140. See comments on page 1143. P. J. Abbott and J. P. Looney, "Influence of the filament potential wave form on the sensitivity of glass envelope Bayard-Alpert gauges", J. Vac. Sci. Technol. A 12(5) (1994) 2911. IGC100 Ion Gauge Controller...
Page 414 The X-ray production in electron tubes was recognized and demonstrated first by J. Bell, J. W. Davies and B. S. Gossling, J. Inst. Electr. Eng. 83 (1938) 176. N. T. Peacock, "Measurement of X-ray currents in Bayard-Alpert type gauges", J. Vac. Sci. Technol. A 10(4) (1992) 2674. IGC100 Ion Gauge Controller...
Page 415 J. Vac. Sci. Technol. A 13(2) (1995) 448. Stanford Research Systems offers a full line of state-of-the-art residual gas analyzers with 100, 200 and 300 amu range. For information visit www.thinksrs.com. IGC100 Ion Gauge Controller...
Page 416 Granville Phillips Co. , Helix Technology Corporation, Boulder, CO, part# 360138, 4/97, page 12. Midrange accuracy is better than 2% when the calibration is performed by a primary standards lab such as NIST. Werner Grosse-Bley, "A hot cathode ionization gauge transmitter for industrial vacuum measurement", Vacuum 51(1) (1998) 31. IGC100 Ion Gauge Controller...
Page 417 C. R. Tilford, A. R. Filippelli and P. J. Abbott, "Comments on the stability of Bayard-Alpert Ionization Gauges", J. Vac. Sci. Technol. A13(2) (1995) 485. See section IV on page 486. P. E. Siska, "Partial Rejuvenation of Bayard-Alpert ionization gauge tubes", Rev. Sci. Instrum. 68(4) (1997) 1902. IGC100 Ion Gauge Controller...
Page 418 Alpert ionization gauge", J. Vac. Sci. Technol. A 12(2) (1994) 580. The gauge described is commercially available from Granville-Phillips, HELIX TECHNOLOGY CORP, Boulder, CO under part #s 370120 and 370121(UHV Version). Both gauges are compatible with the IGC100 controller manufactured by Stanford Research Systems.
Page 419: Manufacturer Cross-Reference For Bayard-Alpert Gauges
Appendix B Manufacturer Cross-Reference for Bayard-Alpert Gauges In This Appendix Manufacturer Cross Reference Table B-3 Bayard Alpert Gauge- Pin Connector Configuration-Cable Selector Specifications of SRS Bayard-Alpert Ionization Gauges IGC100 Ion Gauge Controller...
Page 420 Bayard-Alpert Gauge Cross Reference IGC100 Ion Gauge Controller...
Page 421 (dual) (6-558) Note ® ® The IGC100 is also compatible with STABIL-ION and MICRO-ION gauges manufactured by Granville-Phillips (Helix Corp., Longmont, CO, USA). Consult Appendices C and M for more information on using these third party gauges. Replacement Filament Assemblies for Nude Gauges...
Page 422 Figure B-4 Nude Gauge Nude Gauge-UHV Single ThO /Ir filament Dual ThO /Ir or W filaments Bi-filar helical anode grid Closed end anode grid cage IGC100 Cable: O100C3 IGC100 Cable: O100C3 Default Setup: NUDE Default Setup: NUDE-UHV IGC100 Ion Gauge Controller...
Page 423 Emission Current (nom) 10 mA 10 mA 4 mA Filament Supply Current 4 to 6 amps Filament supply Voltage 3 to 5 Volts O100C1 – one filament O100C3 O100C3 SRS Cable # O100C2-dual filament GLASS NUDE NUDE-UHV Default Setup File IGC100 Ion Gauge Controller...
Page 424 Direct current (dc) bias and supply voltages are recommended for all electrical connections. O100C3 cable is compatible with all Bayard Alpert Gauges in this table. Default Setup files are factory pre-loaded in the IGC100 controller and facilitate controller setup. Single filaments are hair pin shaped and spring loaded to eliminate sagging.
Page 425: Using The Igc100 With Stabil-Ion
® Using the IGC100 with STABIL-ION Gauges ® The IGC100 controller is compatible with STABIL-ION gauges - model numbers 360120, 370120 and 370121- manufactured by Granville-Phillips, Helix Technology Corp (Longmont, CO, www.granville.com). This short note discusses the wiring details, parts and gauge setup parameters required to connect and ®...
Page 426 Using Stabil-Ion® Gauges IGC100 Ion Gauge Controller...
Page 427: Compatibility
Using Stabil-Ion® Gauges Compatibility The ION GAUGE connector (female), located on the back panel of the IGC100, is ® pin-compatible with the connector (male) found on all STABIL-ION Gauge cables manufactured by Granville-Phillips – model numbers 360112 through 360117. ®...
Page 428 They can also have an effect on the long-term stability of the gauges. Note The IGC100 will not begin a degas process if the pressure at the gauge is above 5x10 Torr. A rough pressure indication is displayed during the degas process. The degas power is controlled during the entire process to minimize pressure bursts above 5x10 Torr.
Page 429: Final Comments
Granville-Phillips controllers (models 360 and 370) to fully enjoy accurate pressure readings. The IGC100 is a high quality instrument, built with all the electrical specifications required to control high accuracy Bayard-Alpert gauges, while at the same time providing powerful new features and significant cost savings.
Page 430: References
1996. Contact Granville-Phillips at: www.granville.com. Cables with part numbers 360113, 360115 and 360117 are also compatible with the IGC100 box but have an unnecessarily long collector current cable. P. C. Arnold, et. al. , “Stable and reproducible Bayard-Alpert ionization gauge”, J. Vac. Sci. Technol. A 12 (2) (1994) 580.
Page 431 The standard gas, used by the entire industry for gauge specification, is nitrogen and, unless gas correction factors are applied, all readings are considered to be 'nitrogen-equivalent pressures'. In This Appendix Gas Correction Factors Nominal Gas Correction Factors for Common Gases References IGC100 Ion Gauge Controller...
Page 432 Gas Correction Factors IGC100 Ion Gauge Controller...
Page 433: Gas Correction Factors
See Appendix A 'Bayard-Alpert Ionization Gauges' for a detailed explanation of gauge sensitivity. Note The IGC100 controller stores a nitrogen sensitivity factor, S (N2 Sense Factor), and a single relative sensitivity factor, R (Gas Correction Factor), for every BAG connected to its back panel.
Page 434 Relative sensitivities are pressure dependent and become particularly unreliable above 10 Torr. Where greater precision is required, gauges must be calibrated individually against the specific gases and under conditions as close as possible to the operating conditions of the vacuum system. IGC100 Ion Gauge Controller...
Page 435: References
OH", Fresenius Journal of Analytical Chemistry, 348(11) (1994) 778 Ionization cross sections L. J. Kieffer and Gordon H. Dunn, "Electron Impact Ionization Cross section. Data for Atoms, Atomic Ions, and Diatomic Molecules: I. Experimental Data", Reviews of Modern Physics, 38 (1966) 1 IGC100 Ion Gauge Controller...
Page 436 Gas Correction Factors IGC100 Ion Gauge Controller...
Page 437 Standardization of the BAG design has made it possible for generic ion gauge controllers, such as the IGC100, to control gauges from many different manufacturers. This appendix provides an overview of the current state of BAG technology to help high vacuum users choose the best hot-cathode ion gauge for their application.
Page 438: Selecting A Bayard-Alpert Gauge
Selecting a Bayard-Alpert Ionization Gauge IGC100 Ion Gauge Controller...
Page 439: Bag Designs
Figure E-1. Glass tubulated Bayard-Alpert ionization gauge, with glass side tube. All glass tubulated gauges use the same bias voltages and similar emission currents, compatible with IGC100 electrical specifications, and provide pressure readings between and ≈5x10 Torr (typical X-ray limit). Specification claims beyond this range must...
Page 440 A glass envelope gauge with 1" tubulation is recommended for applications requiring pressure measurements down to the Torr scale, ¾" tubulation is adequate for routine pressure measurements above 10 Torr. IGC100 Ion Gauge Controller...
Page 441 The electrode arrangement, biasing voltages and emission current are similar (or identical) to the glass-tubulated BAG and the IGC100 controller can operate both gauge designs without any problems. A cable replacement is usually all that is required to switch from one gauge design to another.
Page 442 UHV versions. Long term stability is comparable to that of tubulated gauges. Overall accuracies better than 30% should not be expected in general. Repeatability is improved in the absence of the insulating glass envelope. IGC100 Ion Gauge Controller...
Page 443 At the time of this writing, high-accuracy gauges are only available from one commercial source and the IGC100 controller is compatible with all available models (consult Appendix C). It is very likely that as a market is established, and the utility of the new design is demonstrated, other vacuum gauge manufacturers will follow with similar offers.
Page 444 In fact, it is possible to perform NIST traceable calibrations on individual gauges and store their calibration information in the IGC100 controller memory. Stored values of gauge sensitivity track the actual gauge sensitivity across the entire pressure range, providing real time correction for the non- linearities that lead to errors in traditional gauge systems.
Page 445 IGC100 Ion Gauge Controller...
Page 446 E-10 Selecting a Bayard-Alpert Ionization Gauge IGC100 Ion Gauge Controller...
Page 447: Appendix G Hot Vs. Cold Ionization Gauges
The best choice requires careful consideration of the operating characteristics of both gauges and is dependent on the application. In This Appendix Introduction Hot-Cathode Gauges (HCG) Cold-Cathode Gauges (CCG) Conclusions IGC100 Ion Gauge Controller...
Page 448 Hot vs. Cold Ionization Gauges IGC100 Ion Gauge Controller...
Page 449 February 2000, p. 51. Note: The special gauging requirements of ion implant applications are nicely discussed in this article. 7. J. H. Singleton, "Practical Guide to the use of Bayard-Alpert Ionization Gauges", J. Vac. Sci. Technol. A 19(4) (2001) 1712. IGC100 Ion Gauge Controller...
Page 450: Hot-Cathode Gauges
3% measurement accuracy following calibration against NIST standards. Calibrated, high-accuracy BAGs combined with high quality controllers, such as the IGC100, are commonly used as transfer standards in high vacuum gauge calibration laboratories. BAG readings are gas dependent due to varying ionization efficiencies, and are usually calibrated for nitrogen gas (argon is also a popular choice in semiconductor processing).
Page 451 A good quality controller, such as the IGC100, must always be part of a BAG measuring system. Controllers have been known to add as much as ±15% inaccuracies to BAG readings.
Page 452: Cold-Cathode Gauges
10 Torr. No standard method for dealing with currents below the magnetron knee is available as of this writing. CCG readings are gas dependent and the gas correction factors are not the same as for HCGs. IGC100 Ion Gauge Controller...
Page 453 CCG can be turned on during pumpdown before the pressure reaches 10 or 10 Torr. A gauge also starts quickly if charges from any other source of ionization can reach the gauge. Once a CCG strikes, the readings are meaningful within a few IGC100 Ion Gauge Controller...
Page 454: Conclusions
CCGs can also be turned on at higher pressures during a pumpdown. Careful consideration of the effects described in this note should help you choose between the two competing ionization gauge technologies. IGC100 Ion Gauge Controller...
Page 455 The SRS PG105 is a convection-enhanced Pirani gauge (CEPG) manufactured by Stanford Research Systems. When used with an IGC100 controller the PG105 provides a convenient, reliable and low-cost measurement of vacuum over an wide pressure range extending from atmosphere to 10 Torr.
Page 456 PG105 Convection Enhanced Pirani Gauge IGC100 Ion Gauge Controller...
Page 457: Principle Of Operation
( ≈120°C ) during operation. PG105 - Gauge Head PG105 - Control Circuit (inside IGC100) _Sense _PWR NULL (+) sense NULL NULL (-)
Page 458 The nominal 'V vs. P' curve for the PG105 operated in air is shown in Fig. H-3. PG105 - Air response 0.001 0.01 1000 Pressure (Torr) Figure H-3. PG105 Air response (gauge in horizontal orientation). IGC100 Ion Gauge Controller...
Page 459 10°C and 40°C. A very simple but effective scheme, first described in 1965 , is used to provide ambient temperature compensation: The R component of the comp Wheatstone bridge is not a simple resistor as sketched in Fig. H-2, but rather a composite, IGC100 Ion Gauge Controller...
Page 460: Construction
The back end of the tube, facing the plastic connector, consists of a gasket-sealed, 4-pin, electrical feedthru flange with 1/16" diameter Ni alloy conductors and glass-ceramic insulators. Two of the electrical IGC100 Ion Gauge Controller...
Page 461 As indicated before, the entire resistor bridge circuit is located inside the PG105 Pirani head. The IGC100 measures pressure-dependent bridge voltages right at the PG105 head using a four-wire (i.e. Kelvin probe) arrangement. Two wires supply electrical power to the bridge while a separate pair senses the bridge voltage right at the gauge head without drawing any additional current out of the circuit.
Page 462: Calibration
P curve for the specific gas type), it is possible to obtain accurate pressure measurements for other gases. IGC100 controllers are factory loaded with nitrogen and argon specific calibration curves compatible with all PG105 convection gauges . The non-linear dependence of the bridge voltage on pressure is evident from Fig.
Page 463: Accuracy And Stability
Please consult the 'Safety Considerations' section below for information on overpressure risks. The calibration data loaded into all IGC100 controllers is based on the response of a new gauge free of contaminants. If a tube becomes contaminated or does not seem to read correctly, the front panel readings can often be readjusted using the ZERO and ATM adjustments in the Pirani Gauge calibration menu.
Page 464: Operation Below 10 -3 Torr
The peak-to-peak random noise for pressure measurements below 10 Torr is ±1.5x10 Torr (nom) for all IGC100 controllers. Mounting Orientation Below 1 Torr The PG105 convection gauge will operate and report accurate pressures in any orientation.
Page 465: Mounting Recommendations
If placed near a gas inlet or source of contamination, the pressure in the gauge may be much higher. Long tubulation or other constrictions between the gauge and the rest of the vacuum system can cause large errors in the pressure readings. IGC100 Ion Gauge Controller...
Page 466 They include: NW16KF, ® ® NW25KF, 1.33" and 2.75" ConFlat , Cajon SS-4-VCR and SS-6-VCO, etc. Consult Stanford Research Systems for additional information on available fittings. IGC100 Ion Gauge Controller...
Page 467: Contamination
Changes in surface properties result in changes in the efficiency of heat conduction by the gas molecules and cause calibration drifts. If, and when, contamination causes the PG105 calibration to change, the user can correct the pressure readings displayed by the IGC100 controller performing a quick ATM readjustment of the controller readings at atmospheric pressure.
Page 468 Slightly warming the gauge will help dry the gauge. Allow the gauge tube to dry overnight with the port facing downward. Before reinstalling the gauge in the system, be certain no solvent odor remains. IGC100 Ion Gauge Controller...
Page 469: Application Examples And Tips
Convection gauges are found in virtually every modern semiconductor and thin film process system, for monitoring pumping system performance. IGC100 Ion Gauge Controller...
Page 470 This is particularly true if complex or changing gas mixtures are involved. PG105 gauges are not recommended in contaminating environments because of their sensitivity to surface conditions. IGC100 Ion Gauge Controller...
Page 471: Safety Considerations
A capacitance manometer is always a safer alternative in the presence of combustible, flammable or explosive gases. IGC100 users can turn their PG105 convection gauges off directly from the front panel, without the need to physically disconnect the gauge tube from the controller. The filament cools down very rapidly to ambient temperature as soon as the electrical power is removed from the bridge circuit.
Page 472 Alternatively, the gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a #12 AWG copper wire to the system’s safety ground. IGC100 Ion Gauge Controller...
Page 473: Electrical Connection
PG105 gauge head and a Pirani port of the IGC100 controller: Two wires supply the electrical power to the bridge while an independent pair senses the bridge voltage right at the gauge head without drawing any additional current out of the circuit.
Page 474: Pg105 Gauge Test Procedure
1 to 4 Sensor 20 – 22 2 to 3 Compensate 35 - 40 3. Gauge wires are not replaceable! Replace the gauge head if the wire resistance values do not fall within the ranges specified above. IGC100 Ion Gauge Controller...
Page 475: References
Chapter 2, titled "Thermal conductivity gauges", starting at page 39. Blackie & Son Ltd., Glasgow, England, 1989. Two amplifier circuits are built into every IGC100 controller, to control up to two PG105 gauges simultaneously. For theoretical derivations consult: J. M. Lafferty, "Foundations of vacuum science and technology", Wiley Interscience, 1998, NY, p.
Page 476 R. N. Peacock, "Safety and health considerations related to vacuum gauging", J. Vac. Sci. Technol. A 11(4) (1993) 1627. R. Chapman and J. P. Hobson, J. Vac. Sci. Technol. 16 (1979) 965, D. G. Bills, J. Vac. Sci. Technol. 16 (1979) 2109. IGC100 Ion Gauge Controller...
Page 477 IGC100 controllers are factory-loaded with Nitrogen and Argon specific calibration curves compatible with all PG105 gauges, and direct pressure measurements are possible for both gases.
Page 478 Gas Correction Curves for PG105 Gauges IGC100 Ion Gauge Controller...
Page 479: Gas Correction Curves And Factors
2. the gauge tube is mounted with its axis horizontal. N2 Pressure Reading (Torr) 0.001 0.01 Helium Methane Argon Deuterium Oxygen 0.01 0.001 Figure I-1. PG105 Gauge Indicated Pressure (N equivalent) vs. Actual Pressure Curve: 10 to 10 Torr. IGC100 Ion Gauge Controller...
Page 480 Nominal Gas Correction Factors for Figures I-1 and I-2. Actual pressure = N equivalent reading x K (Use for pressures below 1 Torr only!) 1.59 1.10 Oxygen 1.03 Nitrogen 1.00 Deuterium 0.79 Methane 0.63 IGC100 Ion Gauge Controller...
Page 481: Overpressure Risks
. With systems that could be potentially backfilled to excessive pressures by failure of gauges or regulator valves the inclusion of a pressure relief valve or burst disk is the safest way to avoid over pressurization! IGC100 Ion Gauge Controller...
Page 482: References
J. Vac. Sci. Technol. A 18(5) (2000) 2568, for information on thermal gauge calibration and accuracy. R. Chapman and J. P. Hobson, J. Vac. Sci. Technol. 16 (1979) 965, D. G. Bills, J. Vac. Sci. Technol. 16 (1979) 2109. IGC100 Ion Gauge Controller...
Page 483 TC gauges should be upgraded to PG105 convection gauges. In This Appendix Introduction Pressure Range Considerations Response Times Ion Gauge Auto Start Remote Sensing Controller/Gauge Interchangeability Contamination Resistance UHV Compatibility Price/Performance ratio Freeze-Drying Processes Leak Testing IGC100 Ion Gauge Controller...
Page 484 PG105 vs. Thermocouple Gauges IGC100 Ion Gauge Controller...
Page 485: Introduction
Chapter 2., "Thermal Conductivity Gauges", p. 39, Blackie and Sons, Glasgow, 1989. 3. Stephen P. Hansen , "Pressure measurement and control in loadlocks", Solid State Technology, Oct. 1997, p. 151. 4. Simplify Rough Pumping with a Wide-Range Gauge", R&D Magazine, May 1999, p. 57. IGC100 Ion Gauge Controller...
Page 486: Pressure Range Considerations
The ultimate pressure of the mechanical (diaphragm) pump is one of the numbers that can be used to define if the system is properly pumped down. IGC100 Ion Gauge Controller...
Page 487: Response Times
Ion Gauge Auto Start The IGC100 has a built in Auto-Start mode that makes it possible to automatically link the emission status of an ionization gauge to the pressure readings of a PG105 gauge exposed to the same vacuum environment. The ion gauge emission is immediately turned off as soon as the pressure goes above a user specified threshold value.
Page 488: Controller/Gauge Interchangeability
PG105 gauges and IGC100 controllers are completely interchangeable without any need for instrument adjustments! In order to assure that calibration does not change with use, all gauge tubes are baked at high temperature for an extended period of time before final calibration takes place.
Page 489: Price/Performance Ratio
Typical gases used for leak testing include hydrogen, helium, argon and freon. This can eliminate the need for a very expensive leak detector. Several applications of Pirani gauges to leak detection have been reported in the vacuum literature. IGC100 Ion Gauge Controller...
Page 490 PG105 vs. Thermocouple Gauges IGC100 Ion Gauge Controller...
Page 491 'Torr-to-mbar' conversion factor at the intersection with the mbar column. The conversion factor is 1.3332 (mbar/Torr). Multiply the pressure value expressed in Torr by this conversion factor to obtain the corresponding pressure value in mbar units – 2.1 Torr x 1.3332 mbar/Torr = 2.7997 mbar. IGC100 Ion Gauge Controller...
Page 492 IGC100 Ion Gauge Controller...
Page 493 (i.e. sequential operation) from the front panel, and measure pressure at a first or second location (IG1 or IG2) at a small fraction of the cost of a second instrument. The O100IG option is easily installed in the field making it easy to extend the capabilities of the IGC100 controller as needed.
Page 494 Dual Ionization Gauge Connector IGC100 Ion Gauge Controller...
Page 495: Installation
For the most compact design and safest operation, SRS recommends you mount the O100IG box on the left side of the IGC100 controller as shown below in Fig. L-1. However, side mounting is not a requisite for the proper operation of the O100IG option (i.e.
Page 496 Figure L-3. Mounting pins in place. Step 3 Mount the O100IG box on the left side of the IGC100. Insert the side pins into the round holes of the keyhole shaped slots located at the bottom of the O100IG box, and pull the box forward, towards the front of the controller, so that the box locks in place (i.e.
Page 497 Dual Ionization Gauge Connector Step 4 Fasten the O100IG box to the side of the IGC100 controller using the Phillips screw included in the kit, as shown in Figure L-4. Figure L-4. O100IG box must be fastened to the side of the IGC100 controller.
Page 498 IGC100.The system is now fully configured for dual gauge operation and ready to go. Figure L-6. An IGC100 with an O100IG option installed and two Ion gauges connected to its back panel. Decide up front which gauge you want to connect to the IG1 port and which one to the IG2 port.
Page 499 Using MICRO-ION Gauges ® The IGC100 controller is compatible with Series 355 MICRO-ION gauges manufactured exclusively by Granville-Phillips, Helix Technology Corp (Longmont, CO, USA, www.granville.com). This appendix discusses the wiring details, parts and gauge setup parameters required to connect and ®...
Page 500 ® Using MICRO-ION Gauges IGC100 Ion Gauge Controller...
Page 501: Appendix M Using Micro-Ion
Using MICRO-ION Gauges Wiring Requirements IMPORTANT The ION GAUGE connector (female), located on the back of the IGC100, is NOT pin- ® compatible with the connector (male) found in all MICRO-ION Gauge cables manufactured by Granville-Phillips. A cable adapter, SRS# O100CA1, is required to complete the connection.
Page 502: Gauge Setup Parameters
Do not touch the MICRO-ION Gauge during degas operation. Burns can occur. The IGC100 controller will not allow a degas process to start if the pressure at the gauge head is above 2x10 Torr. A rough pressure indication is displayed during the degas...
Page 503 ® risk of overpowering is always present when MICRO-ION gauges are connected to an ion gauge controller designed to operate standard ionization gauges. Electrical overpowering will, in most cases, cause permanent damage to the filament wire. IGC100 Ion Gauge Controller...
Page 504: References
Using MICRO-ION Gauges The IGC100 controller includes a Gauge Protection function in its design which allows the user to limit the amount of power that can be safely delivered to a filament during operation. This Gauge Protection feature is gauge specific and intended to reduce the chances of filament burnouts when using gauges with delicate filaments, such as ®...
Page 505 Gauge Board N-10 Process Controller Board N-11 Parts Lists N-12 CPU Board N-12 Communications Board N-16 Motherboard N-17 High Voltage Power Supply Board N-19 Gauge Board N-24 Process Control Board N-29 Dual Ion Gauge Box N-31 IGC100 Ion Gauge Controller...
Page 506 Circuitry and Parts Lists IGC100 Ion Gauge Controller...
Page 507 • Use only SRS supplied replacement/accessory parts. • The IGC100 controller does not have any serviceable parts other than the Degas Fuse. • Consult the 'Damage Requiring Service' section at the end of this chapter for instructions on how to return the instrument for authorized service and adjustment.
Page 508 Circuitry and Parts Lists Circuit Board Locations Figure N-1. Circuit board locations inside the IGC100 (rear view). Circuit Boards The IGC100 has six main printed circuit boards shown above. 1. CPU board 2. Communications board 3. Motherboard 4. High Voltage Power Supply board 5.
Page 509 -PCS2 through –PCS6 enable individual boards plugged into the Motherboard. U208 and U212 decode on-board I/O and memory. Interrupts generated by the UART and the Communications board are routed directly to the microprocessor. U507 is the clock/calendar. IGC100 Ion Gauge Controller...
Page 510 Web Server If the Web Server option is installed, a web controller module (U109) provides the ethernet interface as well as the web server. U109 communicates with the IGC100 via 2 serial ports provided by dual UART U105. Jumpers identify which options are available in the unit.
Page 511 In the normal mode of operation, ion gauges require steady grid voltages and filament heater power. In addition, the IGC100 is capable of supplying 1.5 W to power capacitance manometers (AUX Power). The HVPS board contains the circuitry for the filament heater power, grid voltage, emission current control, analog power for the board, and a digital interface.
Page 512 The highest emission current that the IGC100 can deliver is approximately 160 mA during degas. Therefore the grid power supply should be able handle up to 80 W of power.
Page 513 Circuitry and Parts Lists Emission Control Circuit One of the most sensitive circuits in the HVPS board is the emission control circuit. The IGC100 emission current has a tolerance of 0.03% or better. The emission control ± circuit has two sections.
Page 514 8 should be at +5 V. Pirani Bridge Voltage The Pirani gauge section consists of two identical circuits to drive two gauges simultaneously. The bridge circuit inside the gauge is connected to the pin 3,4,7 and 8 of IGC100 Ion Gauge Controller...
Page 515 (from the CPU) for each relay is latched into the process controller board via octal 3-state non-inverting D flip-flop U58. The board ID generated on U54 and latched out to the CPU when requested. IGC100 Ion Gauge Controller...
Page 516 D 430 3-00926-360 MBR0540T1 Integrated Circuit (Surface Mount Pkg) D 501 3-00010-303 GREEN LED, T1 Package D 502 3-00010-303 GREEN LED, T1 Package D 503 3-00010-303 GREEN LED, T1 Package D 504 3-00010-303 GREEN LED, T1 Package IGC100 Ion Gauge Controller...
Page 517 Thick Film, 5%, 200 ppm, Chip Resistor R 523 4-01503-461 Thick Film, 5%, 200 ppm, Chip Resistor R 524 4-01503-461 Thick Film, 5%, 200 ppm, Chip Resistor R 530 4-01467-461 Thick Film, 5%, 200 ppm, Chip Resistor IGC100 Ion Gauge Controller...
Page 518 Cap, Ceramic 50V SMT (1206) +/-10% X7R W 607 5-00298-568 .01U Cap, Ceramic 50V SMT (1206) +/-10% X7R W 608 5-00298-568 .01U Cap, Ceramic 50V SMT (1206) +/-10% X7R W 609 5-00298-568 .01U Cap, Ceramic 50V SMT (1206) +/-10% X7R IGC100 Ion Gauge Controller...
Page 519 Cap, Ceramic 50V SMT (1206) +/-10% X7R W 627 5-00298-568 .01U Cap, Ceramic 50V SMT (1206) +/-10% X7R X 401 6-00514-626 6 MHZ 32PF SMD Crystal, SMT X 501 6-00515-626 3.68MHZ 20PF Crystal, SMT X 502 6-00516-626 32.768KHZ SMD Crystal, SMT IGC100 Ion Gauge Controller...
Page 520 4-40 KEP Nut, Kep 0-00187-021 4-40X1/4PP Screw, Panhead Phillips 0-00209-021 4-40X3/8PP Screw, Panhead Phillips 0-00500-000 554808-1 Hardware, Misc. 7-01008-720 I/O PCB BRK Fabricated Part 7-01297-715 BRKT Bracket 7-01298-715 BRKT Bracket 7-01299-715 BRKT Bracket 7-01300-715 BRKT Bracket IGC100 Ion Gauge Controller...
Page 521 Nut, Kep 0-00048-011 6-32 KEP Nut, Kep 0-00128-053 4" #24 Wire #24 UL1007 Strip 1/4x1/4 Tin 0-00187-021 4-40X1/4PP Screw, Panhead Phillips 0-00209-021 4-40X3/8PP Screw, Panhead Phillips 0-00222-021 6-32X1/4PP Screw, Panhead Phillips 0-00231-043 #4 SHOULDER Washer, nylon IGC100 Ion Gauge Controller...
Page 522 Motherboard Ref No. SRS Part No. Value Component Description 0-00316-003 PLTFM-28 Insulators 0-00390-024 1-72X1/4 Screw, Slotted 0-00391-010 1-72X5/32X3/64 Nut, Hex 0-00772-000 1.5" WIRE Hardware, Misc. 6-00076-600 2" SPKR Misc. Components 7-01171-720 BCKT, MOTHER BD Fabricated Part IGC100 Ion Gauge Controller...
Page 523 Cap, Ceramic 50V SMT (1206) +/-10% X7R C 2520 5-00298-568 .01U Cap, Ceramic 50V SMT (1206) +/-10% X7R C 2610 5-00299-568 Cap, Ceramic 50V SMT (1206) +/-10% X7R C 2710 5-00299-568 Cap, Ceramic 50V SMT (1206) +/-10% X7R IGC100 Ion Gauge Controller...
Page 524 J 73 1-00528-130 3 PIN 3.5MM RT Connector, Male K 41 3-00964-335 845HN1CS24 Relay K 42 3-00964-335 845HN1CS24 Relay L 121 6-00055-630 FB43-1801 Ferrite Beads L 122 6-00509-601 47.7UH Inductor L 241 6-00055-630 FB43-1801 Ferrite Beads IGC100 Ion Gauge Controller...
Page 525 Thin Film, 1%, 50 ppm, MELF Resistor R 272 4-01117-462 1.00K Thin Film, 1%, 50 ppm, MELF Resistor R 273 4-01456-461 Thick Film, 5%, 200 ppm, Chip Resistor R 311 4-01623-448 Resistor, Metal Film, 1W, 1%, IGC100 Ion Gauge Controller...
Page 526 Thick Film, 5%, 200 ppm, Chip Resistor R 3510 4-01455-461 Thick Film, 5%, 200 ppm, Chip Resistor R 3520 4-01431-461 Thick Film, 5%, 200 ppm, Chip Resistor R 5110 4-01455-461 Thick Film, 5%, 200 ppm, Chip Resistor T 12 6-00532-610 Q8283D-01 Transformer IGC100 Ion Gauge Controller...
Page 527 Wire, #18 UL1015 Strip 3/8 x 3/8 No Tin 0-01022-019 4-40 Lock Nut 1-00542-110 66181-1 Pins & Connectors, AMP 1-00612-176 1238 Terminal, Male 6-00042-611 1.25A 3AG Fuse 7-01009-721 2-POS FET BRKT Machined Part 7-01010-721 6 POS FET BRKT Machined Part IGC100 Ion Gauge Controller...
Page 528 5-00299-568 Cap, Ceramic 50V SMT (1206) +/-10% X7R C 2330 5-00299-568 Cap, Ceramic 50V SMT (1206) +/-10% X7R C 3110 5-00525-578 SMT Ceramic Cap, all sizes C 3120 5-00299-568 Cap, Ceramic 50V SMT (1206) +/-10% X7R IGC100 Ion Gauge Controller...
Page 529 DIN Connector, Male J 111 1-00233-120 RT ANGLE Connector, BNC J 121 1-00233-120 RT ANGLE Connector, BNC JP52 1-00336-130 26 PIN ELH VERT Connector, Male P 21 1-00370-160 15 PIN D Connector, D-Sub, Right Angle PC, Female IGC100 Ion Gauge Controller...
Page 530 Thin Film, 1%, 50 ppm, MELF Resistor R 345 4-01117-462 1.00K Thin Film, 1%, 50 ppm, MELF Resistor R 346 4-01117-462 1.00K Thin Film, 1%, 50 ppm, MELF Resistor R 347 4-01117-462 1.00K Thin Film, 1%, 50 ppm, MELF Resistor IGC100 Ion Gauge Controller...
Page 531 Thick Film, 5%, 200 ppm, Chip Resistor R 2331 4-00954-462 20.0 Thin Film, 1%, 50 ppm, MELF Resistor R 2431 4-00954-462 20.0 Thin Film, 1%, 50 ppm, MELF Resistor R 3110 4-01455-461 Thick Film, 5%, 200 ppm, Chip Resistor IGC100 Ion Gauge Controller...
Page 532 1-329631-2 Jam Nut 0-00501-042 1-329632-2 Washer, lock 0-01030-007 592502B03400 Heat Sinks 1-00611-171 26 PIN, 8.5" Cable Assembly, Ribbon 7-01006-720 A/D PCB BRACKET Fabricated Part 7-01007-720 BCKT, GAUGE PWB Fabricated Part 7-01292-709 Lexan Overlay 7-01305-720 Fabricated Part IGC100 Ion Gauge Controller...
Page 533 Thin Film, 1%, 50 ppm, MELF Resistor R 338 4-00992-462 49.9 Thin Film, 1%, 50 ppm, MELF Resistor R 541 4-01213-462 10.0K Thin Film, 1%, 50 ppm, MELF Resistor R 581 4-01125-462 1.21K Thin Film, 1%, 50 ppm, MELF Resistor IGC100 Ion Gauge Controller...
Page 534 2-56 X 3/16 F/F Termination 1-00586-131 24 PIN Connector, Female 1-00592-169 9" 40 PIN DB37 Cable Assembly, Custom 7-01157-720 PLATE, PROC CNT Fabricated Part 7-01158-720 BCKT, PROC CNT Fabricated Part 7-01290-709 Lexan Overlay 7-01303-709 Lexan Overlay IGC100 Ion Gauge Controller...
Page 535 RUBBER GROMMET Hardware, Misc. 1-00541-110 206043-1 Pins & Connectors, AMP 1-00612-176 1238 Terminal, Male 1-00615-169 DUAL IG BOX Cable Assembly, Custom 7-00581-721 SR625-6 Machined Part 7-01281-720 Fabricated Part 7-01282-720 Fabricated Part 7-01283-720 Fabricated Part 7-01291-709 Lexan Overlay IGC100 Ion Gauge Controller...
Page 536 N-32 Circuitry and Parts Lists IGC100 Ion Gauge Controller...
Page 537 VCPU.E RevD: Buffer SYSCLK and TMR0OUT with U211 Move N102H from TI1 to TI0 Change R511 to 3.3k RevE: Change Flash to 48pin TSOP Add D520 Add grounding caps C69X N101H U102 40MHZ-OSC U101 AD[0..19] AD[0..19] OE 1 80C186XL -20MHZ 80C186EA -20MHZ N102A...
Page 538 VBATT AD[0..19] A[0..19] AD[0..19] A[0..19] Q201 U201 2N3906 74AC573 BATTPWR U208 GAL22V10 N205H BT201 -SYS_DEN I0/CLK 82X8 CR2032 -EXT_DEN VOUT -PCS2456 -PCS2 -XRESET VBATT -PCS4 -RESET ˆ¯OUT -CE_PROT -PCS5 XRESET ˆ¯IN -WDOG -PCS6 R203 J201 -WDOG 1.0s min -DEN -PORT0_RD U202 JUMPER RESET...
Page 539 A[0..19] A[0..19] U301 R301 3.3K -ROM_SEL locate 512k at 80000h J301 HEADER4 connect 1,2 and 3,4 512KB FLASH ROM for ROM operation -SYSROM connect 2,3 for RAM 80000-FFFFF emulation (C000-FFFF) -EXPRAM -RAM_SEL -ROM_SEL ˆ¯ -SYS_RD ˇ¯ -SYS_WR ¯ TP301 RY/´ -RESET ¯...
Page 540 C450 2.2U-T16 RETCCFL +24CCFL A[0..19] A[0..19] U401 SED1352F0B LCD_D0 VOUT 3 J403 Q402A LCD_D1 VOUT2 4 IRF7103 LCD_D2 LCD_D3 RET 5 CCFLCONN LCD_SCAN U406 AB10 LCD_DLTCH CCFLPS2 AB11 R450 AB12 LCD_DCLK AB13 XSCL LCD_ON AB14 LCDENB -BAKLITE AB15 VA[0..14] AB16 RETCCFL AB17 D[0..15]...
Page 541 C512 0.33U C513 0.33U C511 0.33U C514 0.33U D[0..15] C510 D[0..15] U501 0.33U ST16C550 TQFP T1IN T1OUT TXDAT ˜ T2IN T2OUT R1OUT R1IN A[0..19] A[0..19] ˜ ˆ R2OUT R2IN ˆ˜ U502 RCLK MAX3232CSE ´` ˜ˇ RESET RESET ˇ—– D520 -SYS_WR ˇ...
Page 542 XD[0..15] XD[0..15] +24CCFL RETCCFL SPKR -XPCS2 11 12 -XPCS4 13 14 -XPCS5 15 16 -XPCS6 17 18 INT_1 11 12 19 20 INT_2 13 14 21 22 INT_3 15 16 XD10 23 24 DMA_0 17 18 XD11 25 26 DMA_1 19 20 XD12 27 28...
Page 543 IGC COMM REV E SYSCLK SYSCLK -X_WR -X_WR -X_RD -X_RD -RESET RevD: added R104,R105 -RESET U104 GAL16V8 RevE: gnd unused UART RESET SYSCLK -GPIB_SEL handshake inputs I0/CLK -X_RD -GPIB_DACK -ID_RD U108A -XPCS2 -UART_SELA 74HC04 -UART_SELB -WEB_RESET -X_WR GPIB_DBIN GPIB_CLK U105 TEST ST16C2550-PDIP JP110...
Page 544 XD[0..15] J200C XD[0..15] XA[0..7] XA[0..7] -XPCS2 -XPCS4 -XPCS5 -XPCS6 TMR0OUT TMR0IN -SBHE -20V -20V +20V +20V EUROCARD96 XD[0..15] J200B XD[0..15] XA[0..7] XD10 XA[0..7] -X_WR -X_RD SYSCLK -RESET DMA1 -20V -20V +20V +20V EUROCARD96 XD[0..15] J200A XD[0..15] XD11 XD12 XD13 XD14 XA[0..7] XD15 XA[0..7]...
Page 563 *B*5,'B6833/< *B%,$6B6833/< *B),/B5(7851 &211(&725 )25 *$8*( *B),/B6833/< *B),/B6833/< G 1 _ F I L 1 _ S U PPLY F I L 1 _ S U P P L Y $*1' G 2 _ F I L 1 _ S U PPLY G 1 _ F I L 2 _ S U PPLY F I L 2 _ S U P P L Y G 2 _ F I L 2 _ S U PPLY...

SRS Labs IGC100 Operating Manual And Programming Reference

Chapter 4 Analog I/O Ports

Chapter 8 Embedded Web Server

Appendix G Hot Vs. Cold Ionization Gauges

Appendix M Using MICRO-ION

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