Adixen ATH 2300 M Operating Instructions Manual
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Adixen ATH 2300 M Operating Instructions Manual

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Operating instructions
Operating instructions
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ATH 2300 M/MT

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Summary of Contents for Adixen ATH 2300 M

  • Page 1 ATH 2300 M/MT Turbopumps Operating instructions Operating instructions...
  • Page 2 This operating instruction manual includes only the instructions to connect the pump to the equipment. Refer to the controller operating instructions to power and use the pump (chapter B, C and D). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 3 All rights reserved, including copying this document in whole or any part without prior written authorization from adixen Vacuum Products. Specifications and information are subject to change without notice by adixen Vacuum Products. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 4: General Contents

    Translated from original version Chapter A INTRODUCTION A 150 - Introduction to the ATH 2300 M/MT pumps A 200 - Control loop of the pump A 210 - The pump operating principle A 400 - Technical characteristics of the pump...
  • Page 5 Water Water cooling circuit connection Water max Pr.7 bar/101 psi Max. cooling water pressure Direction of rotation of the pump adixen Vacuum Products - Operating instructions - ATH 2300 M/MT adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 6 Technical characteristics of the pump A 510 The accessories of the pump A 515 Pump accessory dimensions - Purge valve (50 sccm) dimensions - Air inlet valve dimensions - Water valve dimensions adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 7 Temperature regulated by the controller. The MT version is supplied with a water valve. Controllers The ATH 2300 M/MT pumps work with the OBC controller or with the MAGPOWER controller. (refer to the operating instructions corresponding). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 8 Electronics Bearing Position Stator sensor Position of Reference Power Correction Rotor amplifiers Electro- magnet Position return adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 9 It ensures the lowest possible levels of noise and vibration. Stator geometric axis Rotor geometric axis Rotor inertia axis adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 10 Molecular drag Motor Magnetic EXHAUST levitated bearings Gas purge* Cooling * The gas purge provides an excellent protection of the maglev bearings for corrosive applications and ensures the rotor cooling. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 11 This device is controlled by the controller. The MT version must be equipped with its water valve (the water valve is supplied with the MT model). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 12 A distinction is made between the following speeds: - reduced speed (STANDBY speed) which can be set between the low speed value and the nominal speed. - nominal speed preselected at factory. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 13 With a low exhaust pressure, depends on external conditions (water temperature, water flow, ambient temperature). (not applicable for air cooling version). With ratio inlet pressure/exhaust pressure >100, max. throughput reduced. ISO/F flange, better with CFF flange. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 14 Not all leakage current is necessary evacuated through the earth wire; it depends on the pump earth connect regarding the equipment to which the pump is connected. Maximum relative humidity 80 % for temperatures up to 31 °C, decreasing linearly to 50 % relative humidity at 40 °C. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 15 15.43 14.55 15.85 12.05 10.24 0.43 0.47 8.03 inch 15° 12,00 276,50 366,60 392,00 369,50 402,50 306,00 213,00 DN 200 CF-F 0.47 10.89 14.43 15.43 14.55 15.85 12.05 8.39 inch adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 16 15.43 14.55 15.85 12.05 10.24 0.43 0.47 8.03 inch 15° 12,00 276,50 366,60 392,00 369,50 402,50 306,00 213,00 DN 200 CF-F 0.47 10.89 14.43 15.43 14.55 15.85 12.05 8.39 inch adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 17 14.62 18.62 13.50 10.88 9.09 0.78 0.27 5,625 369,50 371,50 276,50 DN 250 CF-F inch 0.22 1.26 0.34 11.18 12.04 1.02 20.66 14.55 14.62 18.62 13.50 10.88 9.09 0.78 0.27 adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 18 12 CHC M10x35 * 114510 12 stub M10x35 * ATH 2303 M 110034 12 CHC M10x30 ATH 2300 MT 118690 32 Studs M8x35 110676S 12 CHC M10x35 * * With centering ring adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 19 Water valve Water valve 108668 Air inlet valve cables Dimensions and purge valve cables A462403-010 (for pumps controlled by 3.5 m A462403-035 Magpower) A462403-050 10 m A462403-100 20 m A462403-200 adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 20: Accessory Dimensions

    Connector for coil Pump connection (possible to rotate) dimensions mm (inch) 1/8NPT female connector (air inlet) DN 40 ISO KF 82 (3.23) 65,5 (2.58) 18,5 (0.73) 1/8 NPT female connector Dust filter adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 21 A 515 Accessory dimensions Water valve (0.59) Cable water valve dimensions mm (inch) Inlet and outlet (0,59) 1/8 NPT female Scale 13/20 38,7 (1.52) 47,7 (1.88) adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 22 - Air inlet valve B 340 Water cooling connection - Characteristics of water cooling - For ATH 2300 M model - For ATH 2300 MT model B 401 Typical electrical wiring diagram adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 23 In all cases, we recommend keeping the packaging (reusable materials) for further transport of the equipment or for prolonged storage. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 24: Installation

    Make sure all parts and chambers connected to the inlet, exhaust and purge of the maglev pump can withstand a negative pressure of 100 kPa below atmospheric pressure and that they are impervious to damage from vacuum (seals, etc.). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 25 OSHA requirement 29 CFR.1910.147. If access to the IEC connector is restricted an additional isolation device should be provided, which will be easily accessible by an operator. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 26 Specific operating conditions may exist that require extra caution from users due to the high temperatures generated (outer surfaces > 70 °C): Wear protective gloves and leave the pump to cool before working on the product. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 27 Controller can be deteriorated when any objects are introduced or any liquids penetrate into the unit. Make sure no objects enter through the ventilation holes. Keep the unit away from the liquids. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 28: Other Labels

    CHEMICALS LOCATED WHITHIN THE ENCLOSURE Explosure may result in severe injury preventive maintenance operation can only be performed by or death. Preventive maintenance must be done trained personnel. by trained personnel only. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 29: Pump Handling

    Don’t store the pump more than 6 months in a clean and dry environment. Never store a pump which has been used on corrosive process. Return it to a repair service center ( E100) adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 30 ASA, ISO, VG or CF-F blanking flange (depends on the model). Exhaust Blanked with a DN 40 ISO-KF blanking plates. Connection for air inlet Blanked with a DN 16 ISO-KF valve and nitrogen device blanking plates. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 31: Pump Connections To An Installation

    - connect the pump to the customer’s handling device using the threaded holes located at the rear of the pump (refer to chapter A400 of the operating manual). The pump can operate in any position adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 32 The manufacturer declines any responsibility if the pump installation is not designed in accordance with these installation specifications. Installations specifications Chamber Equipment ATHM Frame Connection instructions Respect the item 1, 2 and 3 pump connection instructions. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 33 Loads transmitted to the system (item 1) Pump Rotor Loads : Pump fixed to Bending system : valve moment (b) Pendulum plate Front view Axial load (a) Pump Torque (c) Top view adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 34 355000 ** Inlet flange DN250 ISO-F without ring: only use special bolts with washer delivered by the manufacturer for this type of installation (12 bolts and washer kit P/N 110034). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 35 (6 x M10 threaded holes are provided on this purpose). In this case, contact the manufacturer for calculation support. Chamber ATHM ATPM Bracket Equipment Frame adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 36: Vacuum Connections

    Use only dry and clean pipe lines, and wear gloves to make the pump connections. After connecting the product to the pumping line, check for leaks along the entire to ensure proper connections. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 37 The exhaust of the turbopump must be connected to roughing pump line compatible with process gases. It is highly recommended to install an isolation valve (closed when power is off) between the turbo pump and the roughing circuit. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 38 Absolute pressure at inlet (kPa) * Different connection accessories can be found in the manufacturer catalog. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 39: Air Inlet Valve

    Dust filter registered on the controller ATHM Operating instructions of the controller). Filtered air or N purge A nitrogen purge can be connected instead of the dust filter (1/8 NPT female). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 40: Water Cooling Connection

    - Connect the water inlet line to one of the cooler water fittings model 1/4 NPT female on the pump, with the other fitting connected to the water draining circuit via a tube (supplied by customer). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 41 - Connect the water valve, check the efficiency of the cooling system and the absence of leaks. If stopping the cooling circuit creates a significant risk, install a «water sensor» security on the circuit. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 42: Typical Connections

    The impedance between the pump-body and the earth connection point must be < 0.1 Ohm at 25A. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 43: Operation

    Operation ATH 2300 M/MT Operating manual Detailed contents C 100 Safety instructions for product use adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 44 Never unplug the pump by disconnecting the main cable. Only the authorized and trained technicians can perform intervention on the product. Located on the controller, this label indicates that the controller musn’t be disconnected when the pump is running. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 45 Refer to the controller Operating instructions to control and monitor the pump chapter C). Refer to the controller Operating instructions if a fault appears ( D 200). adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 46: Maintenance

    Maintenance ATH 2300 M/MT Operating manual Detailed contents D 100 Safety instructions for product removal D 150 Maintenance Frequency adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 47 During pump removal, operator could be in contact with process residues on the inlet and exhaust ports which could cause severe injury or death. Ask your safety department for instructions according to the local regulations. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 48 Vacuum Products original spare parts, delivered by adixen Vacuum Products, containing i.e. all its components and sub-assemblies. This obligation will not cover the shipping cost to an adixen Vacuum Products service center. Before returning the product, fill in the declaration of contamination form available on our website, and refer to the service conditions ( G200).

  • Page 49: Maintenance Frequency

    The full overhaul must be performed by manufacturer’s trained personnel. Only controller replacement, inlet screen or pump valve replacement are authorized at the customer’s site. Contact nearest service center or the service support at the following e-mail address: support.service@adixen.fr. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 50: Maintenance Instructions

    - Coil dismantling - Coil reassembling E 100 Shipping procedure for contaminated pumps - Connecting ports - Rough decontamination procedure - General flushing - Purge inlet/ flushing - Pressurize the pump adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 51 Stick the first threads of M5 fitting with Loctite 542* glue. Screw the M5 fitting and tighten it slightly with a 14 mm open end wrench. * Registered trade mark Loctite. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 52: Shipping Procedure For Contaminated Pumps

    Preventive maintenance must be done by trained personnel only. Whenever you return the product to an adixen repair service center, please make sure you follow the «procedure for returning products « and fill in the declaration of contamination (see our website, link Service).
  • Page 53 Fit the DN 40 blank flange on the pump exhaust port. flushing 10’ Flush with dry nitrogen* for 10 minutes. Stop the nitrogen flow. B 330. * Characteristics of dry nitrogen: adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 54 Blank the inlet port and exhaust port. pump Pressurize the pump with dry nitrogen* to an absolute pressure of 110 kPa using the injector. * Characteristics of dry nitrogen: B 330. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 55: Maintenance Components

    ATH 2300 M/MT Operating Manual Detailed contents F 000 Spare parts - Instructions of use - Replacement of parts and use of non genuine parts F 100 First level maintenance parts adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 56 The manufacturer urges the user not to use «imitation parts», or the misappropriation and pirating of intellectual property performed by some dishonest operators. The manufacturer supplies maintenance components, spare parts or kits to perform the maintenance of its products adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 57 Dust filter 106229 A complete range of connecting accessories is available in the manufacturer’s catalogue (flanges, fittings...). Water valve coil 108667 Coil 24 V DC adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 58 Appendix ATH 2300 M/MT Operating manual Detailed contents G 150 Pumping curves G 200 Service adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...

  • Page 59: Pumping Curves

    G 150 Pumping curves ATH 2300 M (DN200) Pumping Speed Curves adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 60 G 150 Pumping curves ATH 2300 M (DN250 Pumping Speed Curves adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 61 G 150 Pumping curves ATH 2300 M Flow curves adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 62 If you use specifi c parameters for your application, you have to devices set these again. Service orders All service orders are carried out exclusively according to our general terms and conditions for the repair and maintenance, available in our website. adixen Vacuum Products - Operating instructions - ATH 2300 M/MT...
  • Page 63 Pfeiffer Vacuum stands for innovative and custom vacuum Pfeiffer Vacuum stands for innovative and custom vacuum Vacuum Solutions Vacuum Solutions from a single Source from a single Source solutions worldwide, technological perfection, competent advice solutions worldwide, technological perfection, competent advice and reliable service.

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