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Temescal BJD-1800 Ebeam Evaporator (1) Operation
When you approach the system check that the cryo pump temperature is 20K or less
If the cryo temperature is above 20K, do not use. Notify Nano3 staff.
The system should be left in high vacuum when not in use. If the system was not left in high
vacuum by the previous user you may proceed with your deposition but note that depending on
how long the system was left in roughing, the pump-down time may be longer than usual due to
mechanical pump oil back streaming into the chamber. Always remember to leave the system in
high vacuum!
Before you begin the process you must start your log book entry. Please write down your name,
date and the material you intend to evaporate on the log sheet.
Sample Loading Instructions:
1.
Close the "High vac" valve.
2.
Open the "Vent" valve. It will take approximately three minutes for the chamber to
reach atmospheric pressure.
3.
Open the chamber lid and close the "Vent" valve.
4.
Check that the glass slide mounted over the view port is clear. If not, replace it with a
new one.
5.
Remove the sample holder.
6.
If you need to deposit a metal other than one of those that is already in the chamber,
remove one of the crucibles and replace it with the desired material. The name of the
material contained in each crucible is scribed on the bottom of the crucible.
7.
If the metal is getting low add more pellets. If the gold is getting low notify Nano3
staff.
8.
Check the thickness monitor crystal usage (See the "I/C5 Deposition Controller"
segment of this operation procedure) Replace the crystal if necessary.
9.
Place the sample holder and samples back in the chamber.
10.
Check the chamber O-ring, make sure it is seated properly.
11.
Close the chamber lid.
12.
Record the load time on the log sheet.
Pump-down:
1.
Turn on the Mechanical Pump by switching the breaker to the on position.
2.
Open the "Roughing" valve.
3.
Wait till the pressure reaches 50mT or less.
4.
Close the "Roughing" valve. Allow a few seconds to insure that the valve is
completely shut.
5.
Open the "High Vac" valve.
6.
Wait till the pressure reaches 1.0e-6T or less.
Procedure
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Table of Contents
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Summary of Contents for Temescal BJD-1800
- Page 1 Temescal BJD-1800 Ebeam Evaporator (1) Operation Procedure When you approach the system check that the cryo pump temperature is 20K or less If the cryo temperature is above 20K, do not use. Notify Nano3 staff. The system should be left in high vacuum when not in use. If the system was not left in high...
- Page 2 Allow enough pumping time to reach 2.0e-6T or less. Record the base pressure in the log sheet before you begin the deposition process. I/C5 Deposition Controller: Check crystal usage: a. Press “Sensors”. b. Check the reading in the “ACT” column. This is a reading of the crystal’s ability to conduct current.
- Page 3 you are evaporating. This will give you an idea of how far you should turn the dial before the evaporation starts. You may choose to close the shutter for a short period so that the initial evaporated material does not reach your samples. Continue to SLOWLY (0.1 per minute) increase the emission control setting.
- Page 4 Set the longitudinal and latitudinal sweep frequencies to 1. Starting with the beam position as it was left by the last user, make sure that the beam is hitting in the center of the crucible. Typically the beam is already in the correct position and does not require significant adjustment.
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