Kofloc 5100 Series Instruction Manual
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Kofloc 5100 Series Instruction Manual

Thermal mass flow controller
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MJ400195C1
Thermal Mass Flow Controller
MODEL 5100
Instruction Manual

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Summary of Contents for Kofloc 5100 Series

  • Page 1 MJ400195C1 Thermal Mass Flow Controller MODEL 5100 Instruction Manual...

  • Page 2: Principle Of Operation

    MJ400195C1 1. Overview Thank you very much for selecting the KOFLOC Corp. Mass Flow Controller MODEL5100 series. Read this manual completely and carefully before handling, installation and operation, in order to avoid injury or serious damage to this equipment and/ or surrounding equipment.
  • Page 3 MJ400195C1 【1-2 Standard Specifications】 Flow Range 1SCCM-20SLM （at Ｎ Calibration conditions） Valve type Normally close/solenoid/ diaphragm seat valve Control range 2～100%F.S. Response 0-100% response 1sec.（within±2%，typical） Accuracy ±1.0%(F.S.) Linearity ±0.5%(F.S.) Repeatability ±0.2%(F.S.) F.S.≦5SLM 50kPa-300kPa Low differential pressure specification depends on types of Operating differential pressure gas and flow rates to be used.
  • Page 4 MJ400195C1 【1-3 Outline】 MODEL5100...

  • Page 5: Installation Site

    Flow Setting Device: CK-1A (Resistance 10kΩ) ③ ④ One set of special connecting cables (If a cable longer than 1 m is required, please contact KOFLOC.) ＊With peripheral equipment, there are type CR-400/CR-300 that, in addition, ①~③ become one unit. 【2-2 Precautions】...

  • Page 6: Installation Method

    “SPAN” volume as the reference flow meter shows full scale. If the user does not have the reference flow meter, never tinker with the “SPAN” variable resistor. Please avoid calibration with user as much as possible, and please send it back to Kofloc.

  • Page 7: Caution For Using

    For example, if Helium is let flow to the meter that has been calibrated with Nitrogen, the actual flow rate is 1.40 times the indicated flow rate. For detailed data of the conversion factors, please contact KOFLOC.

  • Page 8: Troubleshooting

    Power supply faulty Please contact KOFLOC. 【5-3 Significantly Different Flow Rate Indication】 Piping ･････････････････ Stop the leak. ２ Gas leak Sensor, valve ･･････････ Contact KOFLOC. 【5-4 Significantly Different Zero】 １ Replace the power supply. Incorrect power supply voltage ２ Sensor faulty Please contact KOFLOC.

  • Page 9: Product Warranty

    MJ400195C1 7. Product warranty 1. The contents of warranty ① Warranty period The warrant period shall be one year after the shipment. ② Warranty range If a malfunction of the product you purchased occurs because of our responsible reasons, offer of substitute or it will be charge-free repaired in our factory.
  • Page 10 MJ400195C1 URL：http://www.kofloc.co.jp...

This manual is also suitable for:

5100

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