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M9602A and M9603A
PXIe Precision Source/Measure Units
15 MSa/s, 1 pA/100 fA, 60 V, 3.5 A DC/10.5 A pulse
Introduction
The Keysight M9602A and M9603A are PXIe precision SMUs which offer a best-
in-their-class narrow pulse width of 10 μs, a fast sampling rate of up to 15 MSa/s,
and a wide output range that enables dynamic/pulsed measurements for broad
emerging applications such as VCSEL optical devices and IC testing. This table
shows an overview of the M9602A and M9603A, product options, and associated
accessories. This guide provides step-by-step instructions to help you configure
the product to meet the desired test requirements.
Model number
M9602A
PXIe SMU, 15 MSa/s, 1 pA, 60 V, 3.5 A DC/10.5 A pulse
M9603A
PXIe Precision SMU, 15 MSa/s, 100fA, 60 V, 3.5 A DC/10.5 A
pulse
Accessories
PX0101A-001/002
BNC-to-ferrule terminal cable, 1.5 m/ 3 m
PX0103A-001/002
Triaxial to SMB cable, 1.5 m/ 3 m
PX0104A-001/002
High current triaxial cable, 4 A, 1.5 m/ 3 m
PX0105A-001/002
Low inductance BNC cable, 1.5 m/ 3 m
PX0108A-001/002
BNC-to-SMB cable, 1.5 m/ 3 m
Options
1A7
Calibration + uncertainties + guardbanding (not accredited)
A6J
ANSI Z540-1-1994 calibration
UK6
Commercial calibration certificate with test data
Find us at www.keysight.com
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Summary of Contents for Keysight Technologies M9602A
- Page 1 15 MSa/s, 1 pA/100 fA, 60 V, 3.5 A DC/10.5 A pulse Introduction The Keysight M9602A and M9603A are PXIe precision SMUs which offer a best- in-their-class narrow pulse width of 10 μs, a fast sampling rate of up to 15 MSa/s, and a wide output range that enables dynamic/pulsed measurements for broad emerging applications such as VCSEL optical devices and IC testing.
- Page 2 Connector-terminal block 2.5 terminals and interlock terminal; orderable part number mm 6-terminal is M9601-87002 (includes 5 pcs.) Step 2. Select optional accessories The following accessories are available for connection between M9602A and M9603A to your DUT. Product number Description Note PX0101A-001/002 BNC-to-ferrule terminal cable, 1.5 m/ 3 m...
- Page 3 M9602A/M9603A front panel As shown in Figure 1, the M9602A/M9603A has High force, Low force, High sense, Low sense and Guard. It supports both two-wire and four-wire measurement, and low current measurement with a guard. Two external trigger lines —...
- Page 4 Four-wire connection for narrow pulse (<= 50 us) Figure 2 shows the connection for 4-wire connections for narrow pulse (<= 50 us). For this configuration, select the items shown in Table 1. Note the following points for this connection: • The low inductance cable does not have Guard, and is limited to low current measurement. Guard connection is required for low current measurement (~ 10 nA or less measurement.) •...
- Page 5 Table 1. Required items for 4-wire connection for narrow pulse (<= 50 us) Product number Description Qty. Note Low sense Triaxial to SMB cable PX0103A-001/002 If your DUT interface is BNC, you can use a 1.5 m/ 3 m PX0108A BNC-to-SMB cable, instead. High sense If your DUT interface is BNC, you can use a High current triaxial cable,...
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Page 6: Two-Wire Connection
Table 2. Required items for 4-wire connection for pulse (> 50 µs) or DC Product number Description Qty. Note Triaxial to SMB cable PX0103A-001/002 Low sense 1.5 m/ 3 m High current triaxial cable, 4 A PX0104A-001/002 High force, High sense 1.5 m/ 3 m Two-wire connection Figure 4 shows the connection for 2-wire connection. - Page 7 Step 2-3. Select the cables if you use an external trigger There are trigger lines in the PXIe chassis available to synchronize the M9602A/M9603A with the other PXIe modules. In addition, there are two external trigger lines available if you need to synchronize it with an external instrument.
- Page 8 ANSI Z540, and commercial calibration certificate with test data are available as follows: Description Product number Additional information Calibration + uncertainties + guardbanding M9602A-1A7/ Calibration certificate with (not accredited) measurement results are available M9603A-1A7 only at time of purchase...
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Page 9: Related Literature
Related Literature Publication Title Publication number M9602A and M9603A PXIe Precision Source/Measure Unit, Data Sheet 3120-1427EN PX0109A Quick I/V Measurement Software for PXIe Precision SMU, Technical 3121-1317EN Overview Keysight PXI and AXIe Products and Solutions, Catalog 5992-0600EN Keysight PXI & AXIe Instruments, Software, Reference Solutions, and Services 5990-6379EN Appendix. - Page 10 Keysight office. The complete list is available at: www.keysight.com/find/contactus Find us at www.keysight.com Page 10 This information is subject to change without notice. © Keysight Technologies, 2020 - 2021, Published in USA, September 14, 2021, 3120-1530.EN...
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