Canon BESTEM-D01/R Recognition Setting page 10

BESTEM – D01R
Tab items are explained as follow. Set according to the procedure below.
【Chip base】--- Normal User
If「Chip Base」 tab is clicked, the right screen will be
displayed.
1. "REC result display"--- Sets recognition results
display.
2. "Chip base parameter setting"
①
"Coaxial illumination" ---
illumination during chip recognition.
※Checks image display and if adjustment is
required, click on Super User button and
change 「Chip base」tab →「②Exposure
time」in super user mode.
②
("Spare illumination" --- Not used)
③
"Chip size/Chip pitch size" --- Click Setting
button and the window as on the right will
be displayed. Refer to the below diagram
and set each position and size accordingly
then double click Confirm button.
The color of display window before being confirmed is blue.
Chip size Y
Pitch size Y
※Chip size and pitch size setting is separately.
④
Forward recognition chip count --- Sets forward
recognition chip count during chip recognition
Refer to below diagram)
※Y direction forward recognition is fix at 0.
Pickup sequence
Sets coaxial
Pitch size X
Chip size X
Chip Chip
Chip
Pickup chip
Wafer
When the forward recognition chip
count is X=2, Y=1,
recognition is done in this range
pilot
P．4