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Summary of Contents for Primes MSM+
- Page 1 Original Instructions MicroSpotMonitor MSM+ MSM+ 35, MSM+ 120 LaserDiagnosticsSoftware LDS Revision 00 EN – 06/2021...
- Page 3 MicroSpotMonitor MSM+ IMPORTANT! READ CAREFULLY BEFORE USE. KEEP FOR FUTURE USE. Revision 00 EN – 06/2021...
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Page 4: Table Of Contents
MicroSpotMonitor MSM+ Table of contents Basic safety notes Symbols and conventions About this operating manual Device description Functional description ......................10 Measuring principle .........................12 Short overview installation Transport and storage Selection and change of measuring objectives Selection of the measuring objective ..................16 Exchanging the measuring objective ..................18 Damage thresholds .........................19 Installation... - Page 5 MicroSpotMonitor MSM+ 12.4 General procedure for measuring ....................43 12.4.1 Opening the „Device control“ menu ................43 12.4.2 Moving camera housing to desired z-position .............43 12.4.3 Opening a measuring mode with adapted toolbench ..........44 12.4.4 Configuring and saving measurement settings ............45 12.4.5 Performing a measurement ..................47 12.4.6 Considering messages in the LaserDiagnosticsSoftware LDS during measurement ..48 12.4.7 Checking the quality of the measurement results in the adapted toolbench ....48 12.4.8 Remeasuring a caustic or plane (optional) ..............49...
- Page 6 MicroSpotMonitor MSM+ 19.2.1 NA limit value, typical magnification and measuring plane distance ......94 19.2.2 Measuring objective ....................95 19.2.3 Prisms ........................97 19.2.4 Fixed filter and filter wheel ...................99 19.2.5 Beam path extension (BPE)..................100 19.2.6 Field objektive (FO) ....................100 19.2.7 Absorber ........................101 19.2.8 Trigger diode ......................101 19.3 Measuring pulsed irradiation ....................101 19.3.1 Trigger operation .......................101...
- Page 7 MicroSpotMonitor MSM+ PRIMES - The Company PRIMES manufactures measuring devices used to analyze laser beams. These devices are employed for the diagnostics of high-power lasers ranging from CO lasers and solid-state lasers to diode lasers. A wave- length range from infrared through to near UV is covered, offering a wide variety of measuring devices to determine the following beam parameters: •...
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Page 8: Basic Safety Notes
Every person who is responsible for the installation, start-up or operation of the device must have read and understood the operating manual and, in particular, the safety instructions. If you still have questions after reading this operating manual, please contact PRIMES or your supplier for your own safety. -
Page 9: Symbols And Conventions
MicroSpotMonitor MSM+ Conversions and modifications The device may not be modified in terms of design or safety without the explicit consent of the manufacturer. The same applies to unauthorised opening, dismantling and repair. The removal of covers is only permitted within the scope of the intended use. -
Page 10: About This Operating Manual
MicroSpotMonitor MSM+ Further symbols and conventions in this operating manual Here you can find useful information and helpful tips. Indicates a simple instruction. If several such instructions appear one below the other, then the order of their execution is irrel- evant or they are alternative procedures. - Page 11 MicroSpotMonitor MSM+ power densities can be measured. The beam cross sections are imaged on a CCD sensor in the device − enlarged by a measuring objective. Before hitting the sensor, the laser beam is attenuated by beam splitters and neutral-density filters inside the device. From the determined power density distribution of the beam cross-section, beam position and beam radius at this position are obtained.
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Page 12: Measuring Principle
MicroSpotMonitor MSM+ Measuring principle The device is a camera-based measuring system. Depending on the application, up to 7 different optical components can be placed within the beam path. The purpose and functionality of individual components are described in chapter 19.2, „Optical components“, on page 93. Laser beam Upper limit Measuring... -
Page 13: Short Overview Installation
MicroSpotMonitor MSM+ Short overview installation Installing the LaserDiagnosticsSoftware LDS on the PC See separate Operating Manual of the LaserDiagnosticsSoftware • Software is part of the scope of delivery Taking safety precautions Chapter 1 on page 8 Transport and storage Chapter 6 on page 14 •... -
Page 14: Transport And Storage
Before transporting / storing the device, close the water connections of the cooling circuit with the sealing plugs provided. The device only fits into the original PRIMES transport case (optional) when the camera housing is in home position. Revision 00 EN – 06/2021... - Page 15 5. Lift the device by the handle. If you are not using a lifting device, we recommend that two people lift the device. 6. If possible, pack the device in the original PRIMES transport case (optional). Revision 00 EN – 06/2021...
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Page 16: Selection And Change Of Measuring Objectives
MicroSpotMonitor MSM+ Selection and change of measuring objectives Selection of the measuring objective The selection of the suitable measuring objective is essential for the quality of the measurement. The measur- ing objective should be optimally matched to the wavelength, the numerical aperture and the radius to be measured. - Page 17 MicroSpotMonitor MSM+ The following table specifies the limits that apply to standard objectives. On the basis of this table, a suitable measuring objective can be selected. The values apply for a wavelength of 1 064 nm (the values are slightly different for other wavelengths). Standard Objective Max.
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Page 18: Exchanging The Measuring Objective
MicroSpotMonitor MSM+ Exchanging the measuring objective 1. Unscrew the two knurled screws. 2. Remove the measuring objective upwards. Note that the measuring objective is fixed by two dowel pins and will not tilt during removal. Knurled screw Dowel pins 2x Fig. -
Page 19: Damage Thresholds
MicroSpotMonitor MSM+ Damage thresholds The operating limits of the device are determined by the damage thresholds of the optical components. NOTICE Damaging / destroying the measuring objective Measuring objectives can be destroyed by an excessive power / energy density. Observe the following maximum values on the first lens: •... - Page 20 MicroSpotMonitor MSM+ The graphs in Fig. 7.4 and Fig. 7.5 can be used to estimate the minimum distance. Measuring plane distance PRIMES 10x without BPE Measuring plane distance PRIMES 3,3x without BPE F = 5 F = 10 F = 15...
- Page 21 MicroSpotMonitor MSM+ Measuring plane distance PRIMES 10x without BPE Measuring plane distance PRIMES 3,3x without BPE 532 nm 1064 nm = 5 μm M² = 1 = 8 μm = 10 μm = 15 μm = 30 μm = 50 μm Distance between focus and measuring objective in mm Fig.
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Page 22: Installation
MicroSpotMonitor MSM+ Installation CAUTION Crushing hazard The camera housing of the device can be moved along the z-axis. Never reach into the traversing range of the camera housing. Possible hazard spots are marked on the device as follows: NOTICE Damaging / destroying the device Contamination can damage or destroy the optical components. -
Page 23: Manually Aligning The Device
MicroSpotMonitor MSM+ Manually aligning the device 8.3.1 Important conditions for the position of the focused laser beam The device must be aligned to the laser beam both along the z-axis and on the x-y plane. Fig. 8.1 shows schematically the essential conditions for the manual alignment. z-axis Laser beam Upper limit... -
Page 24: Moving Camera Housing To Axis Center Position (Optional)
MicroSpotMonitor MSM+ Measuring Measuring plane distance in mm objective Standard using using beam path extension (BPE) field objective (FO) 3.3x 1 064 nm 64.6 63.7 532 nm 70.5 62.6 61.5 355 nm 67.3 60.1 57.7 1 064 nm 51.1 47.1 46.7 532 nm 49.3 45.7 45.1 355 nm 47.2 43.8 42.7... -
Page 25: Selecting Measuring Objective And Attaching Associated Alignment Tool
MicroSpotMonitor MSM+ Proceed as follows to move the camera housing to the axis center position: 1. Establish the electrical connections according to chapter 10 on page 31. 2. Switch on the device and connect it to the LaserDiagnosticsSoftware LDS according to chapter 12.2 on page 38. -
Page 26: Aligning Device To Laser Beam
MicroSpotMonitor MSM+ Special alignment tools are supplied for measuring objectives with a cyclone. Marking in the alignment tool Alignment tool Protective window Cyclone with disassembled protective window Cyclone with mounted protective window mount and attached alignment tool mount and removed alignment tool Fig. -
Page 27: Mounting The Device
MicroSpotMonitor MSM+ Mounting the device DANGER Serious eye or skin injury due to laser radiation If the device is moved out of the aligned position, there will be increased scattered or direct- ed reflection of the laser beam (laser class 4). ... -
Page 28: Cooling Circuit (500 W Device Versions Only)
MicroSpotMonitor MSM+ Cooling circuit (500 W device versions only) DANGER Fire hazard; Damage / Destruction of the device due to overheating If there is no water cooling or an insufficient water flow rate, there is a danger of overheating, which can damage the device or set it on fire. ... -
Page 29: Humidity
MicroSpotMonitor MSM+ Humidity • The device must not be operated in a condensing atmosphere. The humidity has to be considered in order to prevent condensates inside and outside the device. • The temperature of the cooling water must not be lower than the dew point (see Tab. 9.1). NOTICE Damage / Destruction of the device due to condensing water Condensation water inside of the device can lead to damage. -
Page 30: Water Connections And Water Flow Rate
MicroSpotMonitor MSM+ Water connections and water flow rate Connection diameter Recommended flow rate Minimum flow rate PE hoses 6 mm 1.5 l/min not lower than 1.0 l/min Tab. 9.2: Water connections and water flow rate Removing the sealing plugs of the water connections 1. -
Page 31: Electrical Connection
Observe the correct sequence: All electrical connections must be established before the device is switched on (see chapter 12.2 on page 38). Only the provided PRIMES power supply and connecting cables are to be used. 10.1 Connections On/Off switch... -
Page 32: Pin Assignment
Harting M12-P-PCB-THR-2PC-5P-LCOD-M-STR (view: connector side) Function +24 V Not assigned Not assigned FE (functional earth) Tab. 10.1: Connection socket for the PRIMES power supply in the connection panel 10.2.2 Input external trigger BNC connector (view: connector side) Function +5 V (Trigger signal) Fig. 10.2: Connection socket Inlet for an external trigger in the connection panel 10.2.3... -
Page 33: Monitoring Of The Inspection Chamber By External Safety Circuit (Interlock)
MicroSpotMonitor MSM+ 10.3 Monitoring of the inspection chamber by external safety circuit (interlock) The device has a connection for an external safety circuit (interlock), which monitors the cover of the inspec- tion chamber during operation. If the cover is opened, the laser switches off. The M8 device connector provides connections for two redundant safety circuits. - Page 34 MicroSpotMonitor MSM+ Connect the external safety circuit according to Tab. 10.2. If pin 1 and pin 3 (and pin 4 and pin 6) are connected, the laser is switched off. Pin 7 must be connected to pin 8 via an external switch or bridge so that the circuit to the interlock relay is closed.
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Page 35: Connection To The Pc And Power Supply
Connect / disconnect all plugs only when the power is off. 1. Connect the device with the PC via a crossover cable or with the network via a patch cable. 2. Plug the power supply into the connector socket for the power supply. PRIMES Power Supply Crossover Cable Patch cable... -
Page 36: Status Display
MicroSpotMonitor MSM+ Status display The status display consists of an indicator field. The various device states are indicated by different lights. Color Meaning White The device is switched on and operational Yellow A measurement is running. Lights up briefly: a measuring plane is being recorded. Staying lit: a device error has occurred. -
Page 37: Measurement
MicroSpotMonitor MSM+ Measurement This chapter describes measurements with the LaserDiagnosticsSoftware LDS. For a detailed description of the software installation, file management and evaluation of the measured data, refer to the separate operat- ing manual LaserDiagnosticsSoftware LDS. 12.1 Warning messages DANGER Serious eye or skin injury due to laser radiation The device measures direct laser radiation, but does not emit any radiation itself. -
Page 38: Switching On The Device And Connecting It To The Laserdiagnosticssoftware Lds
MicroSpotMonitor MSM+ 12.2 Switching on the device and connecting it to the LaserDiagnosticsSoftware LDS. 12.2.1 Switching on and connecting device CAUTION Crushing hazard The camera housing of the device can be moved along the z-axis. Never reach into the traversing range of the camera housing. NOTICE Damaging / destroying the device The camera housing of the device can be moved along the z-axis. - Page 39 MicroSpotMonitor MSM+ Only if the Show start screen option is enabled: The start screen appears. Select the Measure operating mode. Only if the Show start screen option is disabled: Click on the Devices tab and then on the +Connect to device button. The Connections window appears.
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Page 40: If The Device Does Not Appear In The Connections Window
MicroSpotMonitor MSM+ 12.2.2 If the device does not appear in the connections window The connection of the device to the Laser- The UDP port should be enabled by a system administrator. DiagnosticsSoftware LDS may be blocked by the firewall: In Windows > Control panel > Fire- wall, enable the UDP port 20034 The network address of the PC is not The IP address should be entered by a system administrator. -
Page 41: Disconnecting The Device From The Laserdiagnosticssoftware Lds And Switching It Off
MicroSpotMonitor MSM+ 12.3 Disconnecting the device from the LaserDiagnosticsSoftware LDS and switching it When measurements are completed, the device must be disconnected from the LaserDiagnosticsSoftware LDS and switched off. CAUTION Crushing hazard The camera housing of the device can be moved along the z-axis. ... - Page 42 MicroSpotMonitor MSM+ Click on the Devices tab. Right-click on the device and select the Disconnect menu point. The Close connection window ap- pears. Select one of the options offered: Confirm by clicking the OK button. Select this option to prepare the device for transport or storage.
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Page 43: General Procedure For Measuring
MicroSpotMonitor MSM+ 12.4 General procedure for measuring This chapter describes in general which steps are necessary after connecting your device with the LaserDiagnosticsSoftware LDS to perform measurements and what you should pay attention to. Read this general information before you turn to the following chapters on the different measuring tasks. 12.4.1 Opening the „Device control“... -
Page 44: Opening A Measuring Mode With Adapted Toolbench
MicroSpotMonitor MSM+ 12.4.3 Opening a measuring mode with adapted toolbench In the Device control menu, a measuring mode can be selected. Here, all relevant settings for a measur- ing task are clearly arranged in a menu. For example, to measure individual planes, the Single planes mode provides all the options necessary. -
Page 45: Configuring And Saving Measurement Settings
MicroSpotMonitor MSM+ Only if the Open measurement tool- benches option is enabled in the Extras > Options menu: The toolbench adapted to the se- lected measuring mode is automati- cally opened in the main area of the user interface. Only if the Open measurement tool- benches option is disabled in the Extras > Options menu: The Open measurement toolbench... - Page 46 MicroSpotMonitor MSM+ Entering and activating parameters To transfer a parameter value entered in the Device control menu to the active configuration, it must be confirmed with the Enter key. Enter the desired value in the param- eter field. The background color of the param- eter field changes to blue.
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Page 47: Performing A Measurement
MicroSpotMonitor MSM+ Saving a configuration to a file / load- ing from a file All options marked with an asterisk in the Device control menu can be saved to a preset file with the .pre extension. To save a configuration, click the icon. -
Page 48: Considering Messages In The Laserdiagnosticssoftware Lds During Measurement
MicroSpotMonitor MSM+ 12.4.6 Considering messages in the LaserDiagnosticsSoftware LDS during measurement If problems occur during a measurement, the LaserDiagnosticsSoftware LDS displays them in different cat- egories and different colors. Notes Notes provide assistance in interpreting the measurement results and are dis- played in a blue window. -
Page 49: Remeasuring A Caustic Or Plane (Optional)
MicroSpotMonitor MSM+ Fig. 12.1: Display of measurement results in the tools of the adapted toolbench (example) 12.4.8 Remeasuring a caustic or plane (optional) A caustic or plane can be remeasured using the Remeasure function. Note that this function is only available if a device is connected. - Page 50 MicroSpotMonitor MSM+ Proceed as follows (Example caustic measurement):: Click on the Projects tab. In the project tree, select the caus- tic measurement that you want to remeasure. Right-click to open the context menu and select Remeasure. The settings of the selected measure- ment are applied and displayed in the Device control menu.
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Page 51: Performing Single Plane Measurement
MicroSpotMonitor MSM+ 12.5 Performing single plane measurement In the Single planes measuring mode, single planes are measured at selected z-positions. Measurement window size and exposure can be set automatically or determined freely. You can also have the software search the laser beam automatically in the entire measurement range. To measure a custom caustic, several planes can be measured —... -
Page 52: Configuring Settings
MicroSpotMonitor MSM+ 12.5.2 Configuring settings Click on the Settings tab. Maintain the options according to the explanations in Tab. 12.2. Graphic representation Measurement range (thin line) Measurement window (thick line) Option Explanation Graphic representation In a window in the upper area of the Settings tab, the measurement plane is displayed graphically. - Page 53 MicroSpotMonitor MSM+ Option Explanation Power P in W * Enter the laser power used during measurement. Only if the power is entered, a calculation of the power density distribu- tion can be performed. Otherwise, the measured amplitudes are given directly in counts. autom.
- Page 54 MicroSpotMonitor MSM+ Option Explanation autom. filter adjustment This option is available if an optional filter wheel is installed in the device. If this option is enabled, then the filter levels are set automatically. Set the check mark to enable the option. Time series A time series consists of several single plane measurements with the same settings.
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Page 55: Configuring Advanced Settings
MicroSpotMonitor MSM+ 12.5.3 Configuring advanced settings Click on the Advanced tab. Maintain the options according to the explanations in Tab. 12.3. Option Explanation Save device settings All options marked with an asterisk in the Device control menu can be saved in the EEPROM of the device. These and other options for saving / loading configurations are de- scribed in chapter 12.4.4 on page 45. - Page 56 MicroSpotMonitor MSM+ Option Explanation Averaging * If this option is enabled, different algorithms for averaging a plane mea- surement can be selected in the drop-down list below. Averaging over several measurements can be useful, for example, when measuring a laser with significant power fluctuations. Set the check mark to enable the option Select an algorithm from the drop-down list: •...
- Page 57 MicroSpotMonitor MSM+ Option Explanation Locked area Locked area means a restriction of the traversing range in the z-direc- tion. The lower limit of the enabled traversing range is always home position. The upper limit can be set freely. Maximum z-Position in mm * Use one of the following options to set the locked area: ...
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Page 58: Measuring A Plane
MicroSpotMonitor MSM+ 12.5.4 Measuring a plane DANGER Serious eye or skin injury due to laser radiation Observe the warning messages in chapter 12.1 on page 37. Switch on the laser. Click on the Settings tab. Click on the Find beam button. ... - Page 59 MicroSpotMonitor MSM+ During the measurement, the prog- ress is shown in the following indica- tors: Measuring plane While the indicator is rotating, the mea- surement is performed. Measurement completed After successful measurement, the indica- tor lights up green. 10. Switch off the laser after the measure- ment is completed, unless you want to perform further measurements.
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Page 60: Measuring Further Planes
MicroSpotMonitor MSM+ 12.5.5 Measuring further planes Directly after a plane measurement, further measurements at other z-positions can be performed. In this way, a free caustic can be measured. Single measurement at a specific z-position Click on the Settings tab. In the z-Position in mm field, enter the desired position of the next plane to be measured. -
Page 61: Performing Continuous Plane Measurement
MicroSpotMonitor MSM+ 12.6 Performing continuous plane measurement In the Monitor measuring mode, measuring planes can be continuously observed in a false-color image. The laser beam can be automatically searched by the software in the entire measurement range. After a success- ful search the measurement can be run as long as desired. - Page 62 MicroSpotMonitor MSM+ Option Explanation Graphic representation In a window in the upper area of the Settings tab, the measurement plane is displayed graphically. Here you can see: • the entire measurable area (measurement range, thin lines) • the area to be recorded (measurement window, thick lines) •...
- Page 63 MicroSpotMonitor MSM+ Option Explanation Find beam This option enables a measurement in which the laser beam is automati- cally searched for in the entire measurement range. The plane at the defined z-position is then displayed in the graphic representation. Mea- surement window size, integration time, and filter level of the filter wheel (if available) are set automatically.
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Page 64: Configuring Advanced Settings
MicroSpotMonitor MSM+ 12.6.3 Configuring advanced settings Click on the Advanced tab. Maintain the options according to the explanations in Tab. 12.5. Option Explanation Save device settings All options marked with an asterisk in the Device control menu can be saved in the EEPROM of the device. These and other options for saving / loading configurations are de- scribed in chapter 12.4.4 on page 45. -
Page 65: Measuring A Plane Continuously
MicroSpotMonitor MSM+ 12.6.4 Measuring a plane continuously DANGER Serious eye or skin injury due to laser radiation Observe the warning messages in chapter 12.1 on page 37. If you use continuous plane measurement to align the device, observe the following: ... - Page 66 MicroSpotMonitor MSM+ Data is continuously read out from the previously set measurement window and displayed with a high frame rate in the false-color image. To stop the measurement, click on the Stop button. 10. Switch off the laser after the measure- ment is completed, unless you want to perform further measurements.
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Page 67: Performing Manual Caustic Measurement
MicroSpotMonitor MSM+ 12.7 Performing manual caustic measurement In the Manual caustic measuring mode, only the z-range and the number of plane measurements have to be specified. All other required settings are automatically determined and adjusted. In addition, advanced settings can be applied. According to ISO 11146-1, at least 10 planes shall be measured. - Page 68 The limits of the suggested z-range have a distance of ± 3 Rayleigh lengths to the determined beam focus. This z-range is optimized according to Primes quality criteria. Click this button to transfer the z-values displayed in the Caustic suggestion fields to the z-Axis position (z1 / z2) in mm fields.
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Page 69: Configuring Advanced Settings
MicroSpotMonitor MSM+ 12.7.3 Configuring advanced settings Click on the Advanced tab. Maintain the options according to the explanations in Tab. 12.7. Option Explanation All options marked with an asterisk in the Device control menu can be Save device settings saved in the EEPROM of the device. These and other options for saving / loading configurations are de- scribed in chapter 12.4.4 on page 45. - Page 70 MicroSpotMonitor MSM+ Option Explanation Used wavelength in nm * Use one of the following options to set the used wavelength of the laser: Enter a value in the input field. Use the slider below the input field. This parameter must be distinguished from the factory calibrated wave- length of the measuring objective.
- Page 71 MicroSpotMonitor MSM+ Option Explanation TriggerLevel * This drop-down list is only visible if the drop-down area for displaying the options of the trigger operation is open. The trigger level is the threshold value for triggering a signal via the inter- nal photodiode.
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Page 72: Measuring A Caustic Manually
± 3 Rayleigh lengths to the deter- mined beam focus. This z-range is optimized according to Primes quality criteria. If you want to apply this suggestion, click the Use button. The suggested limit values z1 / z2 are transfered to the z-Axis position (z1 / z2) in mm fields. -
Page 73: Performing Automatic Caustic Measurement
MicroSpotMonitor MSM+ 12.8 Performing automatic caustic measurement In the Automatic caustic measuring mode, only the initial z-position of the pre-caustic measurement and the number of measuring planes of the actual caustic measurement are not selected automatically. The z- range as well as all other required settings are determined and adjusted automatically. In addition, advanced settings can be applied. -
Page 74: Configuring Settings
MicroSpotMonitor MSM+ 12.8.2 Configuring settings Click on the Settings tab. Maintain the options according to the explanations in Tab. 12.8. Option Explanation z-Position in mm Use one of the following options to set the initial z-position for the pre- caustic measurement: ... -
Page 75: Configuring Advanced Settings
MicroSpotMonitor MSM+ 12.8.3 Configuring advanced settings Click on the Advanced tab. Maintain the options according to the explanations in Tab. 12.9. Option Explanation Save device settings All options marked with an asterisk in the Device control menu can be saved in the EEPROM of the device. These and other options for saving / loading configurations are de- scribed in chapter 12.4.4 on page 45. - Page 76 MicroSpotMonitor MSM+ Option Explanation Trigger Drop-down area for displaying the options of the trigger operation. The trigger operation is suitable for measuring special pulsed beams. Detailed information on this topic can be found in the chapter 19.3 on page 101. Drop-down list for trigger selection This drop-down list is only visible if the drop-down area for displaying the options of the trigger operation is open.
- Page 77 MicroSpotMonitor MSM+ Option Explanation Maximum z-Position in mm * Use one of the following options to set the locked area: Enter the upper limit of the permitted z-traversing range in the input field. Use the slider below the input field. We recommend saving a locked area in the device, if it is safety-relevant: If you want to save the locked area (and the other options marked with an asterisk) in the device, click the Save device settings but-...
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Page 78: Measuring A Caustic Automatically
(for example measurement window position, measurement win- dow size, integration time, z-range). The measurement parameters are optimized according to Primes quality criteria. After successful pre-caustic measure- ment, the indicator lights up green. Measuring caustic While the indicator is rotating, the actual measurement is performed. -
Page 79: Monitoring Beam Pointing Stability
MicroSpotMonitor MSM+ 12.9 Monitoring beam pointing stability In the Beam pointing measuring mode, the measuring points of a series of measurements are displayed in coordinates. The measuring points show the position of the beam center on the x-y plane as well as the angle of the beam incidence to the x-y plane. -
Page 80: Configuring Advanced Settings
MicroSpotMonitor MSM+ Option Explanation z-Axis position (z1 / z2) The measuring positions z1 and z2 determined during the pre-caustic measurement are displayed here. Tab. 12.10: Options in the Device control > Settings tab of the Beam pointing measuring mode 12.9.3 Configuring advanced settings Click on the Advanced tab. -
Page 81: Measuring Beam Pointing Stability
While the indicator is rotating, the z1 and z2 positions along the beam propagation are identified. The positions are optimized according to Primes quality criteria. After successful pre-caustic measure- ment, the indicator lights up green. The process is visualized in the False- color Image tool. - Page 82 MicroSpotMonitor MSM+ Completing measurement When the beam pointing measure- ment is completed, the indicator Beam Pointing changes to green. Click on the Stop button. Switch off the laser. You can reset the values for beam position stability in the Position and Angle win- dows by pressing the Reset button.
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Page 83: Logging Beam Pointing Stability
MicroSpotMonitor MSM+ 12.9.5 Logging beam pointing stability You can log the beam pointing stability under Device control > Settings: Enter the value of 0 in the Number of planes field. Click on the Projects tab. Click on the Start button. ... -
Page 84: Troubleshooting
The measuring objective used is A measuring objective from Check the inserted measuring objective. not calibrated for this device, the a different device may have PRIMES should calibrate the measuring objective measurement inaccuracy may be been inserted. for higher accuracy. significantly increased. -
Page 85: Maintenance And Service
You can remove light contamination with compressed air. Make sure that all device openings are closed. For further cleaning, PRIMES recommends a mixture of distilled water and isopropanol in a ratio of approx. 5:1. Use lint-free cleaning cloths that do not scratch. This can be e.g. microfiber cloths or paper towels from the cosmetics sector. -
Page 86: Replacing The Protective Window
MicroSpotMonitor MSM+ NOTICE Damaging / destroying the device Contamination and fingerprints on the protective window can lead to damage or shattering or splintering of the protective window. Only replace the protective window in a dust-free environment. Do not touch the protective window. ... -
Page 87: Replacing The Protective Window For Cyclone
PRIMES gives you the opportunity to return your PRIMES measuring device for free disposal within the scope of the Waste of Electrical and Electronic Equipment (WEEE Directive). This service does not include shipping costs. You can send PRIMES measuring devices to be disposed of within the EU to our address: PRIMES GmbH Max-Planck-Str. -
Page 88: Declarations Of Conformity
MicroSpotMonitor MSM+ Declarations of conformity Revision 00 EN – 06/2021... - Page 89 MicroSpotMonitor MSM+ Revision 00 EN – 06/2021...
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Page 90: Technical Data
(500 W device version only) Cooling water temperature T Dew point temperatur < T < 30 °C (500 W device version only) Please consult with PRIMES before working beyond this specification. Communication Interface Ethernet Dimensions and weight Dimensions (L x W x H) Length: 427 mm +12 mm traversing range + connector... -
Page 91: Dimensions
MicroSpotMonitor MSM+ Environmental conditions Operating temperature range 10 – 40 °C Storage temperature range 5 – 50 °C Reference temperature 22 °C Permissible relative humidity (non-condensing) 10 – 80 % Dimensions 427 +12 157.5 187.5 166.6 2x Ø11 4x Ø6.6 2x Ø6.6 316.6 +12 All dimensions in mm Revision 00 EN –... -
Page 92: Appendix
MicroSpotMonitor MSM+ Appendix 19.1 Insert fixed OD filter (option) in the inspection chamber 1. Switch off the laser source. 2. Ensure that moving parts, for example robot arms, etc. are at a standstill and that they cannot be set in motion unintentionally. -
Page 93: Optical Components
MicroSpotMonitor MSM+ 19.2 Optical components The device is a camera-based measuring system. Depending on the application, up to 7 different optical components can be placed within the beam path. The purpose and functionality of individual components are described in the following chapters. Laser beam Upper limit Measuring... -
Page 94: Na Limit Value, Typical Magnification And Measuring Plane Distance
MicroSpotMonitor MSM+ 19.2.1 NA limit value, typical magnification and measuring plane distance The interaction of the optical components makes it possible to image a measuring plane perpendicular to the z-axis and outside the measuring device onto the CCD sensor inside the device. Three important quantities must be considered in connection with this (see Tab. -
Page 95: Measuring Objective
MicroSpotMonitor MSM+ 19.2.2 Measuring objective The measuring objective is a lens system designed to image a measuring plane perpendicular to the z-axis and outside the measuring device onto the CCD sensor inside the device. This non-contact measurement offers the advantage that even very high power densities can be detected. The measuring objective makes it possible to enlarge the beam and thus to image a sufficient resolution on the CCD sensor. - Page 96 MicroSpotMonitor MSM+ The choice of the measuring objective depends on the geometry and the beam parameters of the laser beam to be measured. The sensor area of the CCD sensor is 4.76 mm x 5.58 mm. According to ISO 11146, the measurement must be carried out for at least 4, more preferably 6 rayleigh lengths.
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Page 97: Prisms
MicroSpotMonitor MSM+ 19.2.3 Prisms After the measuring objective, the laser beam hits three uncoated quartz glass prisms which attenuate the laser beam. Fixed OD flter (option) Measuring objektive Prisms Fig. 19.5: Section of the beam path of the device The reflection is described with the Fresnel formulas. They describe the so-called reflection respectively transmission ratio of light at surface boundaries. - Page 98 MicroSpotMonitor MSM+ : Transmission ratio of parallel polarized light. (1.8) : Medium 1 : Medium 2 Fig. 19.6: Reflection of a beam at surface boundaries The reflection respectively the translucence coefficients correspond to the squares of the respective ratios. (1.9) Plotted on a graph, the following curves are obtained: Incidence angle in degree Fig.
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Page 99: Fixed Filter And Filter Wheel
MicroSpotMonitor MSM+ Nevertheless, the attenuation of the prisms remains a function of the wavelength and polarization of the laser beam. In the optimal case for reflection, • the laser beam is attenuated by a factor of 1.7 · 10 (λ = 350 nm; polarized), •... -
Page 100: Beam Path Extension (Bpe)
MicroSpotMonitor MSM+ 19.2.5 Beam path extension (BPE) The beam path extension allows the user to adjust the overall magnification of the system. Beam path extension Fig. 19.9: Beam path extension of the device The beam path extension consists of four mirrors. Using the levers to adjust the magnification (see Fig. 4.1 on page 11), it can be inserted in the beam path directly behind the filter wheel. -
Page 101: Absorber
MicroSpotMonitor MSM+ 19.2.7 Absorber More than 99.8 % of the transmitted beam power is redirected by the first two prisms through a mirror sys- tem to an absorber. The absorber is a channel in which the beam is completely absorbed by multiple reflections. The maximum average power for the wavelength range 1030 nm to 1090 nm (NIR) is 200 W (500 W for water-cooled de- vice versions). -
Page 102: Measuring Configuration Selection
MicroSpotMonitor MSM+ Every measurement consists of a dark measurement and a measurement with photo transfer. This applies for trigger operation as well as cw / quasi-cw operation. This means that each measurement requires at least two trigger signals. The following time constants apply: Timeout: 2 sec (Standard) Minimum integration time:... - Page 103 MicroSpotMonitor MSM+ Pulse frequency in Hz Fig. 19.11: Percentage of change in the detected energy when exactly one pulse is left out, in correlation with the pulse frequency Tab. 19.2 shows the number of detected pulses during the maximum integration time and during an integra- tion time of 1 ms for different pulse frequencies.
- Page 104 MicroSpotMonitor MSM+ I in W/cm² t in μs ∆t in μs Fig. 19.12: Measuring with different integration times 12 – 200 µs: Sporadic measuring of pulses 200 – 400 µs: 1 pulse 200 – 2 ms: Quantization noise cause by a varied number of pulses ...
- Page 105 MicroSpotMonitor MSM+ Pulse frequency 1 MHz 100 kHz cw operation 10 kHz 1 kHz Quasi-cw operation 100 Hz Trigger operation 10 Hz 1 Hz 1 μs 10 μs 100 μs 10 s 100 s Pulse duration Fig. 19.13: Selection of the appropriate measurement mode based on laser parameters For the blue field laser beams, the quasi-cw operation is most suitable.
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Page 106: Examples For Trigger Operation
MicroSpotMonitor MSM+ 19.3.4 Examples for trigger operation Example 1: fixed integration time With these settings, the device detects the second laser pulse after the trigger is released. Depending on how precisely it can be triggered, the integration time can also be varied. Laser parameter Device settings Pulse duration:...
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