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The various chemical vapors, acids and bases used in
the semiconductor manufacturing wet benches pose a
high potential for costly fires. Fires may result in costly
damage to equipment, inventory and clean room facili-
ties. Personnel injury and costly business interruptions
are also likely. Factory Mutual requires electro-optical
flame detectors in the semiconductor wet benches to
monitor for fire. These flame detectors must be suit-
able for the hostile chemicals used in the etching pro-
cess (such as hydrofluoric, sulfuric, and hydrochloric
acids). Furthermore, they must be tested and approved
for fire response to FR polypropylene now used in the
construction of wet benches as well as other fuels such
as isopropyl alcohol.
The Model 3200 easily adapts to most standard fire
extinguishing systems and wet bench systems. It uti-
lizes relay output for alarm and trouble and does not
require special controllers or wiring / junction boxes.
The Model 3200 Flame Detector uses proven, stable
UV/IR technology to continuously monitor for flame in
wet bench applications. Using state-of-the-art micro-
processor controlled fire algorithms, the Model 3200
can recognize different types of flame signatures while
Model 3200 Dimensions
Sierra Monitor Corp 1991 Tarob Court Milpitas, CA 95035 USA (408) 262-6611 (800) 727-4377 Fax: (408) 262-9042
Field of View
Model 3200 Series
Wet Bench Flame Detector
rejecting common false alarms. Continuous self diag-
nostics perform tests of the detector operation. Each
flame detector is tested to respond to a 4-inch diam-
eter isopropyl alcohol (IPA) fire at 10 feet with a 120
field of view.
The standard Model 3200 has a sealed polypropylene
housing designed to an IEC 529 IP67 rating for pro-
tection from a wide variety of acids and solvents. Thus
occasional submersion by these chemicals will not dam-
age the detector. The detector is rated over a wide
operating temperature range for those applications
where drying or heating elements are used. A version
utilizing Polyvinylidene Fluoride (PVDF) is also avail-
able.
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Related Manuals for Sierra Monitor Corporation 3200 Series
Summary of Contents for Sierra Monitor Corporation 3200 Series
- Page 1 Model 3200 Dimensions Field of View Sierra Monitor Corp 1991 Tarob Court Milpitas, CA 95035 USA (408) 262-6611 (800) 727-4377 Fax: (408) 262-9042 Model 3200 Series Wet Bench Flame Detector rejecting common false alarms. Continuous self diag- nostics perform tests of the detector operation. Each...
- Page 2 Incorporate internal self-test and a RS-485 computer interface for downloading real time spectral data pre-fire spectral data (includes 2 additional wires in pigtail) i l u l l i t " 5 E-Mail: sierra@sierramonitor.com © 2009 by Sierra Monitor Corporation Rev. B2-02-23-09...
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