MKS GMW-25 Operation Manual
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MKS GMW-25 Operation Manual

MKS GMW-25 Operation Manual

Rf plasma generator
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HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS
UNIT. All operating personnel should use extreme caution in handling
these voltages and be thoroughly familiar with this manual.
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE
MAINTENANCE OF THIS PRODUCT. In recognition of our responsibility to protect
the environment, this product has been manufactured without the use of CFC's. The
CFC's
no-clean flux now used in all soldering operations may leave a small inert residue that
will not affect the performance of the product. The use of CFC's for cleaning or
maintenance may result in partial liquification of the no-clean flux residue, which will
damage the unit and void the warranty.
QUALITY
This product is manufactured at an MKS Instruments' ISO-9001:2000-Quality-
ISO 9001
System-compliant facility.
SYSTEM
The material contained in this manual is subject to change without notice. No part of this manual may be
reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying or
electronic transmission or other means of reproduction or distribution without prior written consent of MKS,
ENI Products. The drawings, specifications and other technical information contained in this manual are the
property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as
the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.
Manual Order Number: 1050-001
Revision Level: B 10/07/04
OPERATION MANUAL
GMW-25
RF Plasma Generator
Copyright © 1996 MKS Instruments, Inc. All rights reserved.
MATCHWORK
Notice
®
is a registered trademark of MKS Instruments, Inc.

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Summary of Contents for MKS GMW-25

  • Page 1 ENI Products. The drawings, specifications and other technical information contained in this manual are the property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.
  • Page 2 Warranty MKS, ENI Products warrants to the original purchaser for a period of one year from the date of delivery, each instrument to be free from defects in materials and workmanship. For a period of one year, MKS, ENI Products will, at its option, adjust, repair, or replace defective parts, without charge to the original purchaser, so that the instrument performs according to its specifications.
  • Page 3 Sales & Service Locations MKS Instruments, Inc. Tel: (585) 427-8300 ROCHESTER, NY 100 Highpower Road Fax: (585) 427-7839 Rochester, NY 14623 Toll Free USA Sales Hotline: 1-800-267-5362 Toll Free USA Service Hotline: 1-800-724-ENI1 (3641) MKS Instruments, Inc. Tel: (408) 750-0300...
  • Page 4 This page intentionally left blank.

  • Page 5: Table Of Contents

    2.1.1 Mechanical Inspection ..............2-1 2.1.2 Claim for Damage ................2-1 2.1.3 Packaging for Reshipment............. 2-1 2.2 Installation Requirements ................2-2 2.2.1 Dimension Requirements............... 2-2 2.3 Rack Installation ..................2-3 2.3.1 Installing into a Cabinet Assembly ..........2-3 19-inch Cabinet............2-3 GMW-25...
  • Page 6 2.9 Power Requirements................. 2-31 2.9.1 AC Mains Connection ..............2-31 2.10 Cooling Water Requirements ..............2-32 2.10.1 Water Fittings Connection ............2-33 2.11 Maintenance & Cleaning ................. 2-34 2.12 System Check ..................2-35 2.13 Initial Power Up ..................2-36 GMW-25...
  • Page 7 Contents Chapter 3 - GMW-25 Operation.............3-1 3.1 Basic Operation ..................3-1 3.1.1 Generator Operation through the Front Panel ....... 3-1 Turning on AC Mains Power ........3-1 Ensuring that the Front Panel/Remote Front Panel is unLOCKed .............. 3-2 Setting the RF power ..........3-3 Entering the frequency menu........
  • Page 8 4.3 Analog Remote Interface Faults ..............4-4 4.3.1 RF OVERHEAT (Hard Fault) ............4-4 4.3.2 MAX POWER (Soft Fault).............. 4-4 Appendix A - GMW-25 Specifications ......... A-1 Appendix B - Glossary of Symbols ..........B-1 Appendix C - Glossary of Terms ..........C-1...

  • Page 9: Chapter 1 - Introduction

    Operating at a customer-specified frequency in the range of 1.8 MHz to 2.17 MHz, the GMW-25 generator produces 2500 W of power into a 50Ω load. The DSP-based control module automatically measures forward RF power and reflected RF power, maintaining constant power output within ±1% of set point over a Dynamic Power Range of 25 to...

  • Page 10: About This Manual

    It is essential that you become thoroughly familiar with the contents of this manual prior to using your generator. If used properly, the information contained in this manual will not only promote reliable generator performance but will also encourage a safe operating or service environment for all individuals. GMW-25...

  • Page 11: Finding Your Way Around

    Getting Started Quickly section. Chapter 2 This chapter acquaints the user with the GMW-25 Plasma Generator. It covers major features and front and rear panel descriptions. Chapter 3 This chapter covers everything needed to install and set up your generator from Unpacking and Inspection to Initial Power up.

  • Page 12: Documentation Conventions

    (0Ah) [CR] Carriage Return (0Dh) [ESC] Escape (1Bh) Definitions This icon is used to set off a definition of a new term used in this manual. Appendix C provides a complete list of all the new terms used here. GMW-25...

  • Page 13: Safety Considerations

    Only authorized service personnel with a schematic diagram and knowledge of the voltages existing within the equipment shall remove covers or panels bearing this symbol. GMW-25...

  • Page 14: Service

    CONSULT ER LA NOTICE D'INSTALLATION ET D'UTILISAT ION COUPER L'ALIMENTATION AVANT TOUT E MAINT ENANCE Service Warning Marking Figure 1.2.3 MKS, ENI Products is responsible for safety, reliability, and performance of the equipment only if: • Assembly operations, extensions, readjustments, modifications, or repairs are carried out by authorized personnel.

  • Page 15: Safety Labels

    (16 kg) and should be moved by two people. 1.2.5 Technical Support On the back of the generator is a label with an "800" number for MKS, ENI Products’ Technical Support. Should you have any difficulties with your generator and have exhausted all possibilities in the Troubleshooting Chapter, please feel free to call us.

  • Page 16: Nameplate

    Introduction Nameplate The GMW-25 Plasma Generator can be identified by a nameplate on the back of the unit that contains the following information: GMW-25 Serial Tag Label Figure 1.3 A. ENI MODEL NUMBER: RF OUTPUT: The model number that uniquely The output of the unit in watts and its identifies the unit.

  • Page 17: Generator Options At A Glance

    This matrix should be used to compare the configuration of the unit that was initially ordered to the configuration of the unit received. If they are different, contact the nearest MKS, ENI Products’ Sales or Service location for assistance. GMW-25...
  • Page 18 1 9 Pin PL2-HF Emulation 2 15 Pin Analog 3 25 Pin Analog Emulation 4 37 Pin Analog Emulation N, H, C, L Reserved for Future Use For ENI Internal Use Only Genesis Part Number Interpreter Figure 1.4 1-10 GMW-25...
  • Page 19 Check the serial tag on the back of the generator. If it doesn’t have “25” in the part number, contact the nearest MKS, ENI Products’ Sales or Service location for assistance. GMW-25...

  • Page 20: Getting Started Quickly

    References to more detailed information are provided at the end of each step. To quickly set up your GMW-25 generator, follow the procedure below: Connect the solenoid valve plug. (See section 2.10 for a description of the solenoid valve.) Connect the water inlet and outlet hoses securely to the water inlet and outlet connections on the rear panel of the generator.
  • Page 21 (See section 2.7 for more information about the safety interlocks.) 11. Flip the AC mains switch up to the ON position (The symbol should be showing). You should hear the contactor engage. The front panel display should appear like the following: GMW-25 1-13...
  • Page 22 (This display is only shown on auto-tune generators) 12. From the terminal, you should see the following message: Power up delay in effect-please wait Then the terminal will show the following: ENI monitor on 13. The generator is now ready to run RF. 1-14 GMW-25...

  • Page 23: Chapter 2 - System Installation

    2.1.2 Claim for Damage Please notify MKS, ENI Products directly or your authorized MKS, ENI Products’ representative if the product is mechanically damaged or fails to meet specifications upon receipt. Retain our shipping carton and packing material for the carrier's inspection, as well as for subsequent use to return the unit should this become necessary.

  • Page 24: Installation Requirements

    System Installation Installation Requirements 2.2.1 Dimension Requirements The following figure shows the dimension requirements for standard 19-inch rack mountings. Front & Side Dimension Requirements w/ Fully Functional Front Panel Figure 2.2.1 GMW-25...

  • Page 25: Rack Installation

    System Installation Rack Installation To ensure proper operation of the GMW-25, it is important to provide correct mechanical support within a rack installation. 2.3.1 Installing into a Cabinet Assembly The GMW-25 generator can be installed in a cabinet assembly. The procedures for this depend upon the type of cabinet used.

  • Page 26: System Interconnect

    System Installation System Interconnect The GMW-25 generator is available with four options for the analog interface: • No interface card • 25-pin analog • 37-pin analog emulation • 9-pin emulation for ENI’s PL-2HF generator In order to maintain EMC compliance, I/O cables should be constructed using shielded cable (Alpha Supra-Shield or equivalent) and metallized backshells providing 360°...
  • Page 27 External circuit should be capable of switching 100 mA at 24 VAC. DI = Digital Input DO = Digital Output AI = Analog Input AO = Analog Output 25-pin Analog I/O Interface Pin Outs (Cont’d) Table 2.4.1 GMW-25...
  • Page 28 Power set point Signal return for Pin 5. return (-) Signal / Chassis ground. RF ON (C) Collector side of isolated transistor switch for Pin 7. Signal / Chassis ground. 25-pin Analog I/O Interface Pin Outs (continued) Table 2.4.1 GMW-25...
  • Page 29 Transistor ON (switch closed) - ICmax = 10 mA (VCE < 1 V) Note 2: For all ground referenced logic level inputs. HIGH = 2 VDC min. to 30 VDC max. LOW = -0.2 VDC min. to 1 VDC max. 25-pin Analog I/O Interface Pin Outs (continued) Table 2.4.1 GMW-25...

  • Page 30: 37-Pin Analog I/O Interface (Eni P/N: 1050-295)

    Generator Ready = interlock chain complete (see Pins 10 & 35) as well as no present generator overheat condition. DI = Digital Input DO = Digital Output AI = Analog Input AO = Analog Output 37-pin Analog I/O Interface Table 2.4.2 GMW-25...
  • Page 31 Signal return for Pin 5. SETPOINT RTN (-) REMOTE Signal return for Pin 8. CONTROL SELECT DI = Digital Input DO = Digital AI = Analog AO = Analog Output Output Input 37-pin Analog I/O Interface (Cont’d) Table 2.4.2 GMW-25...
  • Page 32 Transistor ON (switch closed) - ICmax = 10 mA (VCE < 1 V) Note 2: For all ground referenced logic level inputs. HIGH = 2 VDC min. to 30 VDC max. LOW = -0.2 VDC min. to 1 VDC max. 2-10 GMW-25...

  • Page 33: 9-Pin Pl-2Hf Analog I/O Interface (Eni P/N: 1050-290)

    DO = Digital Output AI = Analog Input AO = Analog Output Note: PL-2HF emulation requires the interface board to be configured for Load Leveling mode only. This is now a jumper, J4, which will allow for forward-leveling mode upon installation. GMW-25 2-11...

  • Page 34: 15-Pin Analog I/O Interface

    Input: Safety interlock; enables the AC input power contactor with an external contact closure to Pin 12. Safety interlock common. Network Status LED output (Green). Module Status LED output (Amber). Network Status LED output (Amber). 15-pin Analog I/O Interface Table 2.4.4 2-12 GMW-25...

  • Page 35: Devicenet Pin Out

    The device will use a 12 mm “Micro” connector (or an equivalent) for its DeviceNet interface: The connector will have the following pin out: Male (pins) 1 - Drain bare 2 - V+ 3 - V- black 4 - CAN_H white 5 - CAN_L blue GMW-25 2-13...

  • Page 36: Remote Digital Interface

    Since it is necessary to open the unit up for installation of the default communication jumper, it is only there as a last resort. The default communication parameters are 9600 baud, no parity, 8 data bits and 2 stop bits. 2-14 GMW-25...

  • Page 37: Communication Configuration

    System Installation 2.5.1 Communication Configuration The GMW-25 generator is normally shipped with RS-232 communications selected. RS-422 operation is selected by the insertion of one two-pin jumper, JP3, on the control board. The jumper is labeled with RS422 on the silk-screening. The control board contains the circuitry necessary to communicate using the RS-232/RS-422 protocols via the rear panel of the generator.

  • Page 38: Rs-422 Bussing

    This command is only active until the next IDE n <cr> command, which will enable one of the still listening devices to activate its transmitter. RS-422 System Diagram Figure 2.5.2 2-16 GMW-25...

  • Page 39: Matchwork

    ® MATCHWORK Interconnection The following diagram shows the typical interconnection of a GMW-25 generator using ENI’s DSP-based matching networks with an optional MW local control and a generator front panel MW control. The interconnect consists of three types of cabling: AC power, RF power, and control.

  • Page 40: Matchwork Power Requirements

    Pin 1 AC Input (L) 100-240 VAC RMS LINE Pin 2 AC Input (N) 100-240 VAC RMS NEUTRAL Pin 3 Earth Ground (G) Connects to chassis internally. Incorrect connection of these wires can cause damage to the MATCHWORK. 2-18 GMW-25...

  • Page 41: Rf Power Connections

    Connection to the chamber is made via a stud on the tuner unit output panel. Connection is made from the GMW-25 generator to the RF input connector on the tuner unit input panel. An RG-393/U 50-ohm coaxial cable (or equivalent) should be used.

  • Page 42: Safety Interlocks

    System Installation Safety Interlocks For user safety, the GMW-25 generator is equipped with a complete interlock system consisting of three switches, an RF output enclosure, an external interlock plug, and a circuit closure. The first switch is on the top cover to the rear, and the second switch is on the bottom cover to the rear.
  • Page 43 System Installation Safety Interlock Locations - Rear View Figure 2.7 GMW-25 2-21...

  • Page 44: Panels And Controls

    This section describes in detail all the front and rear panel controls and connections that are used on your generator. Figure 2.8 shows the front panel for the generator with a fully functional front panel. GMW-25 with a Fully Functional Front Panel Figure 2.8 2-22 GMW-25...

  • Page 45: Front Panel

    Items that are shown on the display are grouped into two main categories. The top line of the display is used to show the output of the GMW-25 RF Generator regardless of the controlling source (i.e. front panel or ENI monitor). The AUX LEV, FWD, and REV fields cannot be changed by the user.

  • Page 46: Leds

    (AC ON, RF ON, and in the LOCK button) and the other three are located in three of the buttons on the front panel (Fault Reset, Gen/MW and Remote Enable) that are between the LCD display and the digitizer knob. 2-24 GMW-25...

  • Page 47: Controls

    System Installation Controls Buttons for Normal Operation Eight buttons are used for normal control of the GMW-25 RF Generator. These buttons allow control of the following functions: • Display the status of the generator or the attached matching network. •...

  • Page 48: Front Panel Options

    The front panel for your generator comes in two variations: fully functional or remote. The type of front panel is specified when the unit is ordered from MKS, ENI Products. Pictures of the two types of front panels are shown on the following pages.

  • Page 49: Fully Functional Front Panel

    System Installation Fully Functional Front Panel The user can control and operate the GMW-25 generator directly if the unit has a fully functional front panel. Fully Functional Front Panel Figure 2.8.2a GMW-25 2-27...

  • Page 50: Remote Front Panel

    A remote front panel allows the user to place the generator in a rack system and control the generator remotely. It has the same controls and operates in the same way as a generator with a fully functional front panel. Remote Front Panel Figure 2.8.2b 2-28 GMW-25...

  • Page 51: Rear Panel

    System Installation 2.8.3 Rear Panel Connections The following table briefly describes all of the rear panel connections for the GMW-25 Generator. Connector Description Water In This connection provides for water to flow into the generator for cooling purposes. It is designed for ¼”...

  • Page 52: Rear Panel Drawing

    System Installation Rear Panel Drawing Figure 2.8.3 shows the rear panel for the GMW-25 Generator and calls out each of the connectors as described in the table to the left. In order to maintain EMC compliance, wires to external interlock plugs (Ext.

  • Page 53: Power Requirements

    System Installation Power Requirements The AC Input Ratings for the GMW-25 Generator are indicated on a label attached to the back panel of the generator. 2.9.1 AC Mains Connection The GMW-25 Generator has an AC Input Line Cord Assembly that comes equipped with a NEMA Type L15-30P plug.

  • Page 54: Cooling Water Requirements

    System Installation 2.10 Cooling Water Requirements The safe operating ambient temperature range for the GMW-25 generator is a minimum of 5 ° C and maximum of 40 ° C. The generator requires water to cool the unit during operation. The recommended flow of water into and out of the generator is a minimum of 2.0 gallons...

  • Page 55: Water Fittings Connection

    5. Use a torque wrench to tighten fittings to 150 to 170 lb-in or 12.5 to 14.2 lb-ft range. (Metric equivalents: 1.73 kg-m to 1.96 kg-m and 16.9 N-m to 19.2 N-m.) MKS, ENI Products Factory and Service Center personnel use calibrated 150 lb-in torque wrenches.

  • Page 56: Maintenance & Cleaning

    System Installation 2.11 Maintenance & Cleaning The GMW-25 generator is designed and built to require only a minimum of cleaning and maintenance. Occasionally, however, it is recommended that the unit be wiped down on the outside with a damp cloth to remove any build-up of dust and dirt.

  • Page 57: System Check

    System Installation 2.12 System Check Before the GMW-25 generator can be used, it is imperative that the following procedure be followed to ensure optimal and safe operation. 1. If you've purchased your generator with the optional solenoid valve kit (as mentioned in section 2.8.3), make sure the solenoid plug is attached to the solenoid connector on the rear panel marked “SOLENOID.”...

  • Page 58: Initial Power Up

    The front panel display should appear as follows: AUX LEV MODE Genesis Generator SET POINT STATUS After the contactor is engaged, the front panel should look like the following: AUX LEV MODE NORMAL SET POINT STATUS 2-36 GMW-25...

  • Page 59: Chapter 3 - Gmw-25 Operation

    • Advanced operation allows custom configuration of various parameters for variable and sensitive frequency processes. Basic Operation The GMW-25 generator is designed to be used with minimal input from the user. 3.1.1 Generator Operation through the Front Panel Turning on AC Mains Power Before operation of the front panel begins, make sure the system check has been performed in section 2.12.

  • Page 60: Ensuring That The Front Panel/Remote Front Panel Is Unlocked

    An LED inside the button is turned on to indicate that the lock function is active. The LOCK condition, when active, locks out the entire front panel (except for the LOCK button itself). GMW-25...

  • Page 61: Setting The Rf Power

    AUX LEV MODE RE V FREQUENCY MENU Freq-> 2000000 Hz SET POI NT STATUS 3. To change the RF output frequency, press the MENU button again MENU until the "TUNE MODE>" field appears. Use the Digitizer Knob to GMW-25...
  • Page 62 If it is not, then use the Digitizer Knob to change the frequency. However, if the unit is a variable frequency unit, it will be in the auto-tune mode and will have already tuned to the best frequency. GMW-25...

  • Page 63: Generator Operation Through The Eni Monitor

    Operation 3.1.2 Generator Operation through the ENI Monitor This section details how to operate the GMW-25 Generator using the ENI Monitor. Turning on the generator Before any of the various settings can be set, the generator should be turned on.
  • Page 64 LP for the MODE. In this case, load can mean forward or reverse power. The front panel will display the following, assuming a set point of 1000 W and 200 W reflected is set. AUX LEV MODE 1000W LP 1200W 200W 1000W NORMAL SET POINT STATUS GMW-25...

  • Page 65: Changing The Requested Power

    1. Type the command TRG from the ENI Monitor keyboard and press Enter. The RF ON LED will illuminate (located to the right of the Digitizer Knob and to the left of the circuit breaker). To turn off the RF power, you would type OFF from the ENI Monitor keyboard. GMW-25...

  • Page 66: Matching Network Configuration For Generator Control

    Operation 3.1.3 Matching Network Configuration for Generator Control Operating the Matching Network through the ENI Monitor is possible with the entire line of GMW-25 generators. ® Setting the MATCHWORK up for Generator control Control of the MW is possible through the generator upon setting the MATCHWORK into generator control mode.
  • Page 67 7. Now connect the fiber optic link from the MW to the generator’s MW interface connector. ® 8. The MATCHWORK is now in generator control mode. Note: Communications with the MATCHWORK require an RS-232-to-Fiber-Optic converter (ENI P/N: MWI-232-01). GMW-25...

  • Page 68: Matching Network Operation Through The Generator

    Operation 3.1.4 Matching Network Operation through the Generator The GMW-25 Generator can control and view the status of the matching network on the generator’s front panel once the ® MATCHWORK is set up in generator control mode. Activating the front panel to display MW status/Readbacks...

  • Page 69: Changing The Matching Network Parameters

    • View DC Bias or Vpp fields while RF is on. Note: The DC Bias and Vpp fields are simply reporting fields and the values cannot be changed. The specifics for these fields will depend upon the application you are using. GMW-25 3-11...

  • Page 70: Eni Monitor Software Commands

    Operation ENI Monitor Software Commands ENI Monitor is the name for MKS, ENI Products' proprietary serial protocol that can operate over RS-232 or on a multi-dropped RS-422 network (RS-485 is not supported). The ENI Monitor allows total access to all of the generator's features.

  • Page 71: Basic Monitor

    *NOTE: When echo mode is off, though characters are not seen on a terminal as they are typed, they are indeed being sent to the generator. Basic Monitor Commands Table 3.2.1 These commands are available in version 1.1 of the software and any versions that follow it. GMW-25 3-13...

  • Page 72: Generator Control

    This command will change the baud rate at which the generator is currently communicating. BAUDRATE 1200 2400 4800 9600 19200 38400 76800 115200 Generator Control Commands Table 3.2.2 Note: These commands are available in Version 1.1 software and any versions that follow 3-14 GMW-25...

  • Page 73: Generator Readback

    Undefined Undefined < - > The result of this command is the display of the dissipated power. When a dash is present in the command (ROD-), this result will be updated continuously until the escape key is sent. GMW-25 3-15...
  • Page 74 The result of this command is to display the total amount of time that the generator has been powered up since its factory calibration. The format is hhhhh:mmmmm:sssss. When a dash is present in the command (RUT-), this result will be updated continuously until the escape key is sent. 3-16 GMW-25...
  • Page 75 Returns the sampling rate in Samples / Second that the generator is getting from the VIProbe. This command is only valid when communication to the VIProbe is enabled via CAL 80. Performs a test on non-volatile memory and reports the results. Generator Readback Commands Table 3.2.3 GMW-25 3-17...

  • Page 76: Matchwork Control

    < A - F > only be used in Manual Tune mode. MATCHWORK Control Commands Table 3.2.4 Note: The Matching Network needs to be connected to the generator per Figure 2.6 and set up according to section 3.1.3. 3-18 GMW-25...

  • Page 77: Matchwork

    If the <=> option is used, the value returned will be in the HH.MM.SS format. MATCHWORK Readback Commands Table 3.2.5 Note: The Matching Network needs to be connected to the generator per Figure 2.6 and set up according to section 3.1.3. GMW-25 3-19...

  • Page 78: Advanced Operation

    Operation Advanced Operation Advanced operation of the GMW-25 generator allows a tighter control over the individual parameters in the operation. For sensitive processes, advanced operation is an ideal way to maximize the operation of the generator. 3.3.1 Generator Front Panel Operation Before any of the various settings can be set, make sure the system check has been performed in section 2.12.

  • Page 79: Changing Between Auto-Tune And Manual Tune Mode

    3. Use the digitizer knob to select between manual (MAN) or automatic (Auto). Manual Tune Mode allows the operator to control the tuning of the generator. This option may not be available depending on whether the unit is fixed-frequency or not. GMW-25 3-21...

  • Page 80: Setting The Minimum Search Threshold

    The delay should be chosen to ensure that ignition is achieved reliably and the plasma is stable before the frequency starts to move. Use the Digitizer Knob to select a delay time from 100 ms to 8000 ms. 3-22 GMW-25...

  • Page 81: Setting The Start Frequency

    This feature has not been defined at this time. ® 3.3.3 MATCHWORK Network Operation using the Generator Front Panel This option has not been defined at this time. 3.3.4 MATCHWORK Operation using the ENI Monitor This option has not been defined at this time. GMW-25 3-23...

  • Page 82: Remote Control Interface Communication Protocol

    All three command characters must be correct for a command to be accepted. All characters sent to the GMW-25 Generator over the ENI Monitor port are echoed by the generator. Thus, if the serial port is being driven by a computer, the computer can verify that the generator received the characters that were sent to it.

  • Page 83: Illegal Commands

    ∧S (XOFF, 0x13) is used to suspend serial output from the control-S generator. The exclamation mark (0x21) is used to cause an immediate release of the RS-422 buffer if two consecutive exclamation marks are received in a row. GMW-25 3-25...

  • Page 84: Power-Up Message

    Escape from Indefinite Loops Some commands continue indefinitely. The escape character is used to exit from this condition. Upon receipt of the escape character, the controller will terminate the loop and respond with the standard command completion string, CR LF *. 3-26 GMW-25...

  • Page 85: Link Release Character

    GMW-25 Generator. Level B commands do not appear in the Operation Manual for this generator. Level B access is not granted to customers, but is only for MKS, ENI Products personnel. This is because level B commands have the potential for damaging the GMW-25 Generator (not to mention the user's equipment or process).

  • Page 86: Link Integrity Checking

    RF power stays on while you are sending the [^W]s. Once you stop sending the [^W]s, the RF should go off as it did before. Reset the generator with the LIT command again. 3-28 GMW-25...

  • Page 87: Chapter 4 - Troubleshooting

    Troubleshooting This chapter lists solutions for the common problems a user may encounter when using the GMW-25 generator. If the problem doesn’t match any of those on the following pages, please contact the nearest MKS, ENI Products’ Service location for assistance.

  • Page 88: Hardware Faults

    Troubleshooting Hardware Faults Symptoms Probable Cause Recommendations AC ON does not light No AC line voltage Contact an authorized MKS, ENI Products’ Service location for assistance. No RF Output Defective Control Board Contact an authorized MKS, ENI Products’ Service location for assistance.

  • Page 89: System Faults

    ENI Monitor. Otherwise, if and when a system fault occurs, only the SYSTEM FAULT LED will illuminate. Interlock status is shown on the front panel if the unit is open. “INLK OPEN” will be displayed on the STATUS line. GMW-25...

  • Page 90: Analog Remote Interface Faults

    OVERHEAT lamp will light up on the front panel of the test fixture. 4.3.2 MAX POWER (Soft Fault) This fault occurs when the maximum power limit has been reached. The message will appear on the digital readout of the test fixture. GMW-25...

  • Page 91: Appendix A - Gmw-25 Specifications

    Appendix A Appendix A GMW-25 Specifications This appendix lists the complete physical and electrical characteristics for the GMW-25 Plasma Generator. GMW-25...
  • Page 92 Appendix A GMW-25 Specifications 1.80 - 2.17 MHz RF Output Frequency (auto-tunes within this range to optimize match with load impedance) 2500 W into a 50 Ω load RF Output Power Rating into Matched Load RF Output Power Load VSWR...
  • Page 93 EN 50082-2 : 1995 NRTL Listed to standards Product Safety CAN/CSA C22.2 No. 1010.1-92 Category 290 EN 61010-1 : 1993 Category 387 EN 61010-1 : 1993 / A2 : 1995 UL 3111-1 : 1994 Category 435 CE marked CE Compliance GMW-25...
  • Page 94 Remote Interface Connector 9-pin digital; optional custom analog interface cards available. RF Output Connector Type N or custom Rack Mounting 19-inch adapters supplied Equipment Internal Fuse Ratings Fuses F4 - F6 on Housekeeping Power Supply PCB Assy (1050-230) 3AT, 250 V GMW-25...

  • Page 95: Appendix B - Glossary Of Symbols

    Glossary of Symbols This appendix provides a definition of the symbols that have been used throughout this manual. Caution Triangle Figure B.1 Shock Hazard Triangle Figure B.2 RF Radiation Warning Triangle Figure B.3 Heavy Object Warning Triangle Figure B.4 GMW-25...
  • Page 96 Appendix B This page intentionally left blank. GMW-25...

  • Page 97: Appendix C - Glossary Of Terms

    Minimum Search This software parameter refers to a pre-defined value Threshold that prevents the Auto-Tune algorithm from searching for a frequency when the reflected power is below the pre-defined limit. NIST National Institute of Standards and Technology GMW-25...
  • Page 98 Appendix C This page intentionally left blank. GMW-25...

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