Silane - Honeywell Vertex M Technical Handbook

Vertex M 24-Point Continuous Monitor
TM
Gas Name 1
TLV
Phosphine XP4
300 ppb
(PH )
3

Silane

5 ppm
(SiH )
4
Silane XP
5 ppm
(SiH )
4
Silane XP
(SiH ) 5 ppm
4
Low Level
Silane XP4
5 ppm
(SiH )
4
Silane XP4
(SiH ) 5 ppm
4
Low Level
Silane-M XP
5 ppm
(SiH -M)
4
TLV - Threshold Limit Value
1. "-1" calibrations allow more stain development but will extend response times
2. Minimum Sample Time
Appendix A - Detectable Gases
Default
LAL LDL Alarm
Level 1
5 ppb 5 ppb 300 ppb
1 ppm 0.5 ppm 5 ppm
0.5 ppm 0.3 ppm 5 ppm
50 ppb 50 ppb 250 ppb
0.5ppm 0.3 ppm 5 ppm
50 ppb 50 ppb 250 ppb
0.06 0.05
2.5 ppm
ppm ppm
LAL - Lowest Alarm Level LDL - Lower Detectable Limit
Default
Alarm Range Alarm Setting
Level 2
5-3000 ppb
600 ppb 0-3000 ppb
1-4.9 ppm
5-9.9 ppm
10 ppm 0-50 ppm 10-19.9 ppm
20-50 ppm
0.5-4.9 ppm
5-9.9 ppm
10 ppm 0-50 ppm 10-19.9 ppm
20-50 ppm
50-249 ppb
250-499 ppb
500 ppb 0-5000 ppb 500-999 ppb
1000-5000 ppb
0.5-4.9 ppm
5-9.9 ppm
10 ppm 0-50 ppm 10-19.9 ppm
20-50 ppm
50-249 ppb
250-499 ppb
500-999 ppb
500 ppb 0-5000 ppb
1000-5000 ppb
0.05-2.49 ppm
2.5-4.99 ppm
0.05-15
5.0 ppm 5-9.99 ppm
ppm
10-15 ppm
C-10
Time to 1 TLV
Initial
(Alarm @ 2 TLV Chemcassette
Analysis
Concentration
Period
10-ft. Sample
(second)
Line)
15 <20 sec
60
45
<35 sec
30
15
60
45
<30 sec
30
15
360 <100 sec
240 (Alarm @ 500
120 ppb with 1 ppm
60 SiH gas)
4
60
45
<30 sec
30
15
360 <100 sec
240 (Alarm @500
120 ppb with 1000
60 ppb SiH gas)
4
180
60
<20 sec
45
30
Part
Number
1257-9300
1295-0300
1295-0226
1295-0226
1257-9300
1257-9300
1295-0226