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Summary of Contents for Varian Turbo-V 969-9831
- Page 1 vacuum technologies INSTRUCTION MANUAL Turbo-V Vent Device Model 969-9831 87-900-806-01 (F) MAY 2005...
- Page 2 Turbo-V Vent Device...
- Page 5 INSTRUCTION FOR USE ....................1 TECHNICAL INFORMATION ....................2 GENERAL..............................2 Vent Control Unit ........................... 2 Vent Valve ............................. 2 VENT DEVICE SPECIFICATIONS......................3 Control Unit............................ 3 Vent Valve ............................. 3 TURBO-V VENT DEVICE OUTLINE ....................... 3 CONTROL UNIT INSTALLATION ......................4 VENT VALVE INSTALLATION ........................
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Page 6: Instruction For Use
All warnings and cautions should be read carefully and venting time to atmosphere. strictly observed. Address any safety, operation, and/or maintenance questions to your nearest Varian office. The Turbo-V pump must be vented when it is shut down to prevent the forepump oil from contaminating The following format is used in this manual to call the Turbo-V and the connected chamber. -
Page 7: Technical Information
TECHNICAL INFORMATION GENERAL The 969-9831 Turbo-V vent device, consisting of a vent The Vent device is powered by the Turbo-V controller control unit and a vent valve, is a complete unit suitable and a battery back-up capability is built in. for automatic venting of the Turbo-V pump when it is switched off or during a power failure switch (refer to the following figure). -
Page 8: Vent Device Specifications
TECHNICAL INFORMATION VENT DEVICE SPECIFICATIONS Vent Valve Control Unit High vacuum flange NW 10 KF Gas entrance Riffled nozzle 4.8 mm 120 V ±10% Input: voltage (0,19") O.D./Tube 1/4” frequency 50 to 60 Hz Orifice size 1.2 mm (0.05") power 8 VA fuse Pressure range... -
Page 9: Control Unit Installation
TECHNICAL INFORMATION CONTROL UNIT INSTALLATION Place the control unit free standing near the Turbo-V CAUTION controller and connect the 1.5 metres long supply cable It is strongly recommended to power the vent unit using to the power interconnecting connector (120 Vac vent the 120 Vac terminal available on the Turbo-V controller valve out, see the relevant Turbo-V controller instruction rear panel. -
Page 10: Time Setting
TECHNICAL INFORMATION TIME SETTING CAUTION Use the appropriate tool to adjust the time settings to WARNING! avoid damages to the rotary switches. High voltage present in the control unit can cause severe injury or death. Service must be carried out only The minimum venting times for each Turbo-V pump by qualified and authorized personnel. -
Page 11: Vent Control Unit Description
TECHNICAL INFORMATION Timer Circuit VENT CONTROL UNIT DESCRIPTION Two similar timer circuits are provided, where U5, U4 The control unit has three main sections: power circuit, are the clocks and U3, U2 are the step-down counters protection circuit, and time circuit (refer to following presettable by jumpers and rotary switches. -
Page 12: Turbo-V Vent Device Replacement Parts
Relay 6V 72-114110-01 Transformer T1 (120/12V, 8VA) 03-660295 L.E.D. (yellow) LT4223 67-560005 L.E.D. (red) LT4253 67-560004 For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Catalogue. Turbo-V Vent Control Unit Schematic Diagram 87-900-806-01 (F) - Page 13 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 14 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 15 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...
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