Compliance With Semi-F47 Standard - Mitsubishi Electric MELSERVO-J4 series Instruction Manual

7. SPECIAL ADJUSTMENT FUNCTIONS

7.4 Compliance with SEMI-F47 standard

The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of MR-J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the
capacitor in case that an instantaneous power failure occurs during operation.
(1) Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47 function.
Parameter
PA20
PF25
Enabling SEMI-F47 function will change operation as follows.
(a) The voltage will drop in the control circuit power with "Rated voltage × 50% or less". 200 ms later,
[AL. 10.1 Voltage drop in the control circuit power] will occur.
(b) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 7.1 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
(c) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control circuit
power] occurs.
POINT
The control circuit power supply of the servo amplifier can be possible to comply
with SEMI-F47 standard. However, a back-up capacitor may be necessary for
instantaneous power failure in the main circuit power supply depending on the
power supply impedance and operating situation. Be sure to check them by
testing the entire equipment using actual machines.
Use a 3-phase for the input power supply of the servo amplifier. Using a 1-phase
100 V AC/200 V AC for the input power supply will not comply with SEMI-F47
standard.
Setting
value
_ 1 _ _ SEMI-F47 function selection
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
200
occurrence.
Servo amplifier
MR-J4-10B(-RJ)
to
MR-J4-700B(-RJ)
MR-J4-11KB(-RJ)
to
MR-J4-22KB(-RJ)
MR-J4-60B4(-RJ)
to
MR-J4-22KB4(-RJ)
Description
Bus voltage which triggers alarm
158 V DC
200 V DC
380 V DC
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