Omega MASS FLOW FMA-1900 User Manual page 30

Mass flow meter
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5.856
,037s
,993
1.44
KR
,120s
2.766
.46
KR
.I241
4.772
.46
.0668
15.70
KR
.20
KR
Teflon
13.26
0610
.25
.3710
2.639
KR
.26
KFI
,163
5.95
.32
KR
.120
6.465
.27
,506
6.648
KR
.061
KR
,161
6.360
.20
X0
A '
N,
Xenon
CH&HCl
N,
Vinyl Chloride
CH,CHBr
N,
Vinyl Bromide
"Fe
N1
Uranium Hexafluoride
WF,
Hexasfuoride
N,
Tungsten
(CH,),N
Trimethylamine
N,
C,HCI,
Trichloro Ethylene
N,
T 'ZI,
Tetrachloride
N,
Titanium
(C,H#
Trisobutyl Aluminum
13)
Ttifluorethane
(Freon-l
N,
CCl,FCClF,
1,1.2-Ttichloro-lv2.2
.1360
6.043
KR
.33
N*
SiHCI,
Trichlorisilane
(Freon-ll)
.1357
6.129
KR
.33
N,
KFI
.,a2
4.64
.32
N,
KR
KR
,090
NZ
.1543
4.562
KR
.39
N,
.(592
6.516
KR
.26
N,
.1466
2.656
KR
.69
N,
.1691
4.643
KR
.35
N,
.1270
7.560
KR
.26
N,
3169
1.433
KR
.60
N*
.a77
KR
1
.3541
41
NZ
1.967
KR
3665
.36
NZ
.1250
6.127
KR
.30
N,
.1810
5.620
KR
.30
N,
,132 '
6.643
KR
.36
Y
,237 '
1.517
KR
N,
1.070
KR
.1394
4.416
.44
N,
KR
,197
6.366
,174
N,
,151 '
4.571
KR
.39
N,
,396
3.219
KR
21
N,
KR
.36
2.616
.26
N1
.3
2.144
,446
N,
.2193
1.427
Y
1.000
.1917
2.406
.63
N,
,165
6.397
KR
.17
Y
CCI,F
Ttichlo 'ofluormelhans
NSF,
Tetrafluorahydrazine
TeoS
SO,F,
Sulfuryi Fluoride
SiF
so:
Sulfur Dioxide
Sulfur Hexafluoride
SF,
Telrafluoride
Silica
Tetrachlofids
SiCL
Silicon
SiH
Silane
C,",
Propylene
C,H,
PCI,
Propane
Trichloride
F'hosphomus
Pentalluoride
PH,
POCI,
Phosphorous
Oxychloride
PH,
Phosphorous
COCI,
Phosphine
Phosgene
C,F,
Pe 'fl"o 'op 'opane
CIOaF
Perchloryi Fluoride
4H ' z
Pentane
B,H,
Pentaborane
0,
0,
Ozone
Difluodde
OF,
Oxygen
(Freon-Csr 6)
Oxygen
C,F,
Octafluorqclobutane
O-ring ' Valv
e
Seat
A(&
N,
Gas
(Calfg)
Ref.
Ral. to
Rel. to
Efaatornu
Symbol Gas
DenSity
K-fsc. Cp
K-faC.
Raf.
Gas
Chemical
Actual

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